JP7324422B2 - 天井吊下棚及び搬送システム - Google Patents
天井吊下棚及び搬送システム Download PDFInfo
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- JP7324422B2 JP7324422B2 JP2019200405A JP2019200405A JP7324422B2 JP 7324422 B2 JP7324422 B2 JP 7324422B2 JP 2019200405 A JP2019200405 A JP 2019200405A JP 2019200405 A JP2019200405 A JP 2019200405A JP 7324422 B2 JP7324422 B2 JP 7324422B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Transportation (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
3 天井搬送車
6 天井吊下棚
30 中下段棚用移載部
40 上段棚用移載部
51 チャック
52 保持台
62 上段棚
62a 上段支持面
63 上段側面ガイド
65 下段棚
65c 下段支持面
68 中段棚
68a 中段支持面
66 下段側面ガイド
80 FOUP(ウエハ搬送容器)
90 上段棚用移載部
Claims (12)
- 建屋の天井に設けられるレールに沿って吊下げ状態で走行して物品を搬送する天井搬送車が、目標位置に搬送される前記物品を一時的に置く棚であって、天井から吊り下げられた天井吊下棚において、
前記物品を支持する上段支持面を含み、当該上段支持面の高さが前記レールの高さと略同じである上段棚と、
前記上段棚よりも下方に配置されている中段棚と、
前記中段棚よりも下方に配置されており、横方向にスライド可能な下段棚と、
前記天井搬送車から供給された第1駆動力が伝達されることで、前記下段棚を横方向にスライドさせる機構を有するスライド機構と、
を備えることを特徴とする天井吊下棚。 - 請求項1に記載の天井吊下棚であって、
前記上段棚は、当該上段棚の下方から上方へ向かう前記物品が通過可能な開口状態と、前記物品を支持可能であるとともに下方から上方へ向かう前記物品が通過できない閉鎖状態と、を切り替える切替機構を備えることを特徴とする天井吊下棚。 - 請求項2に記載の天井吊下棚であって、
前記切替機構は、前記天井搬送車から供給された第2駆動力が伝達されることで、前記開口状態と前記閉鎖状態とを切り替えることを特徴とする天井吊下棚。 - 請求項1から3までの何れか一項に記載の天井吊下棚であって、
1区画の前記上段棚に前記物品を置くことができる数は、1区画の前記中段棚に前記物品を置くことができる数よりも少なく、かつ、1区画の前記下段棚に前記物品を置くことができる数よりも少ないことを特徴とする天井吊下棚。 - 請求項1から4までの何れか一項に記載の天井吊下棚であって、
前記物品は、ウエハを搬送するウエハ搬送容器であることを特徴とする天井吊下棚。 - 請求項5に記載の天井吊下棚であって、
前記目標位置は、前記ウエハを処理する処理装置に対して前記ウエハ搬送容器を置くための場所であり、
前記上段棚は、前記目標位置よりも高い位置に配置されていることを特徴とする天井吊下棚。 - 請求項1から6までの何れか一項に記載の天井吊下棚であって、
前記上段棚は、前記レールを挟むように両側に配置されることを特徴とする天井吊下棚。 - 請求項1から7までの何れか一項に記載の天井吊下棚であって、
前記上段棚に支持される前記物品の側面に対向するように配置される上段側面ガイドを備え、
前記レールの下端より高い位置に前記上段側面ガイドが配置されていることを特徴とする天井吊下棚。 - 請求項1から8までの何れか一項に記載の天井吊下棚と、
前記上段棚、前記中段棚、及び前記下段棚に前記物品を移載する前記天井搬送車と、
を備えることを特徴とする搬送システム。 - 請求項9に記載の搬送システムであって、
前記中段棚に置かれた前記物品の高さと、前記天井搬送車により搬送中の前記物品の高さと、が略同じであることを特徴とする搬送システム。 - 請求項9又は10に記載の搬送システムであって、
前記下段棚をスライドさせて前記物品を下移載する場合において、
前記天井搬送車による前記下段棚への移載の動作時間と、前記スライド機構による前記下段棚のスライド時間と、が時間的に重なっていることを特徴とする搬送システム。 - 請求項9から11までの何れか一項に記載の搬送システムであって、
平面視において、スライド後の前記下段棚と、前記目標位置と、が重なっており、
前記天井搬送車は、前記下段棚がスライド前の状態において、前記物品を前記目標位置に移載することを特徴とする搬送システム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2018208652 | 2018-11-06 | ||
JP2018208652 | 2018-11-06 |
Publications (2)
Publication Number | Publication Date |
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JP2020075819A JP2020075819A (ja) | 2020-05-21 |
JP7324422B2 true JP7324422B2 (ja) | 2023-08-10 |
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JP2020556681A Active JP7095750B2 (ja) | 2018-11-06 | 2019-09-30 | 天井吊下棚 |
JP2019200405A Active JP7324422B2 (ja) | 2018-11-06 | 2019-11-05 | 天井吊下棚及び搬送システム |
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JP2020556681A Active JP7095750B2 (ja) | 2018-11-06 | 2019-09-30 | 天井吊下棚 |
Country Status (6)
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US (1) | US11952213B2 (ja) |
EP (1) | EP3858763B1 (ja) |
JP (2) | JP7095750B2 (ja) |
KR (1) | KR102480674B1 (ja) |
CN (1) | CN112912321B (ja) |
WO (1) | WO2020095571A1 (ja) |
Families Citing this family (8)
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CN106697821B (zh) * | 2016-12-27 | 2023-08-29 | 华东交通大学 | 一种应用于山地果园的运输装置 |
KR20220063853A (ko) | 2020-11-10 | 2022-05-18 | 삼성전자주식회사 | 반송물 보관 장치 |
KR102361173B1 (ko) * | 2021-01-22 | 2022-02-14 | 주식회사 에이치씨씨 | 반도체 제조에 사용되는 풉 저장장치 |
KR102360920B1 (ko) * | 2021-02-22 | 2022-02-14 | 주식회사 에이치씨씨 | 반도체 생산라인에서 사용되는 풉 저장 장치 |
KR20230023301A (ko) * | 2021-08-10 | 2023-02-17 | 삼성전자주식회사 | 선반 이동 모듈을 갖는 스토리지 시스템 |
KR102388037B1 (ko) * | 2021-10-19 | 2022-04-20 | 크린팩토메이션 주식회사 | 웨이퍼 캐리어 보관용 다단 천장 버퍼 및 그를 포함하는 천장 버퍼 시스템 |
JP7464065B2 (ja) | 2022-02-16 | 2024-04-09 | 村田機械株式会社 | 天井搬送車システム |
CN114649250B (zh) * | 2022-05-20 | 2022-08-05 | 弥费实业(上海)有限公司 | 供存储库与oht交换晶圆盒的运输装置、天车窗口及存储库 |
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JP2017030944A (ja) | 2015-08-04 | 2017-02-09 | 村田機械株式会社 | 搬送システム |
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2019
- 2019-09-30 KR KR1020217007402A patent/KR102480674B1/ko active IP Right Grant
- 2019-09-30 EP EP19881592.0A patent/EP3858763B1/en active Active
- 2019-09-30 WO PCT/JP2019/038475 patent/WO2020095571A1/ja unknown
- 2019-09-30 JP JP2020556681A patent/JP7095750B2/ja active Active
- 2019-09-30 US US17/289,790 patent/US11952213B2/en active Active
- 2019-09-30 CN CN201980070544.6A patent/CN112912321B/zh active Active
- 2019-11-05 JP JP2019200405A patent/JP7324422B2/ja active Active
Patent Citations (3)
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JP2003171001A (ja) | 2001-12-06 | 2003-06-17 | Ishida Co Ltd | 商品仕分け指示装置、商品仕分け指示方法および商品仕分け指示プログラム |
US20080240892A1 (en) | 2007-03-28 | 2008-10-02 | International Business Machines Corporation | Storage buffer device for automated material handling systems |
JP2017030944A (ja) | 2015-08-04 | 2017-02-09 | 村田機械株式会社 | 搬送システム |
Also Published As
Publication number | Publication date |
---|---|
CN112912321A (zh) | 2021-06-04 |
JPWO2020095571A1 (ja) | 2021-09-24 |
JP7095750B2 (ja) | 2022-07-05 |
EP3858763A4 (en) | 2022-06-15 |
JP2020075819A (ja) | 2020-05-21 |
CN112912321B (zh) | 2022-11-11 |
KR102480674B1 (ko) | 2022-12-23 |
EP3858763B1 (en) | 2023-06-07 |
US20210347567A1 (en) | 2021-11-11 |
US11952213B2 (en) | 2024-04-09 |
KR20210042379A (ko) | 2021-04-19 |
EP3858763A1 (en) | 2021-08-04 |
WO2020095571A1 (ja) | 2020-05-14 |
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