JP7292671B2 - 磁気記録媒体の製造方法 - Google Patents
磁気記録媒体の製造方法 Download PDFInfo
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- JP7292671B2 JP7292671B2 JP2019112236A JP2019112236A JP7292671B2 JP 7292671 B2 JP7292671 B2 JP 7292671B2 JP 2019112236 A JP2019112236 A JP 2019112236A JP 2019112236 A JP2019112236 A JP 2019112236A JP 7292671 B2 JP7292671 B2 JP 7292671B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 238000000034 method Methods 0.000 title description 19
- 239000010410 layer Substances 0.000 claims description 146
- 150000004812 organic fluorine compounds Chemical class 0.000 claims description 67
- 239000011241 protective layer Substances 0.000 claims description 51
- 230000001050 lubricating effect Effects 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 20
- 239000010702 perfluoropolyether Substances 0.000 claims description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- 125000000524 functional group Chemical group 0.000 claims description 7
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 3
- 239000010408 film Substances 0.000 description 22
- 239000000047 product Substances 0.000 description 22
- 229910045601 alloy Inorganic materials 0.000 description 18
- 239000000956 alloy Substances 0.000 description 18
- 239000011265 semifinished product Substances 0.000 description 17
- 239000007789 gas Substances 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 10
- 238000000354 decomposition reaction Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 238000003860 storage Methods 0.000 description 9
- 239000010409 thin film Substances 0.000 description 9
- 229910010413 TiO 2 Inorganic materials 0.000 description 7
- 239000000314 lubricant Substances 0.000 description 7
- 238000001179 sorption measurement Methods 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 238000009835 boiling Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 229910019222 CoCrPt Inorganic materials 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- RIQRGMUSBYGDBL-UHFFFAOYSA-N 1,1,1,2,2,3,4,5,5,5-decafluoropentane Chemical compound FC(F)(F)C(F)C(F)C(F)(F)C(F)(F)F RIQRGMUSBYGDBL-UHFFFAOYSA-N 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 238000002835 absorbance Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000007865 diluting Methods 0.000 description 3
- 238000007598 dipping method Methods 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
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- 229910052715 tantalum Inorganic materials 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 239000010952 cobalt-chrome Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 125000001153 fluoro group Chemical group F* 0.000 description 2
- 229910021385 hard carbon Inorganic materials 0.000 description 2
- DCAYPVUWAIABOU-UHFFFAOYSA-N hexadecane Chemical compound CCCCCCCCCCCCCCCC DCAYPVUWAIABOU-UHFFFAOYSA-N 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000006249 magnetic particle Substances 0.000 description 2
- 229920005604 random copolymer Polymers 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 229910002546 FeCo Inorganic materials 0.000 description 1
- 241000511976 Hoya Species 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920001400 block copolymer Polymers 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
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- 229910052702 rhenium Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- 238000012360 testing method Methods 0.000 description 1
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- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8408—Processes or apparatus specially adapted for manufacturing record carriers protecting the magnetic layer
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/72—Protective coatings, e.g. anti-static or antifriction
- G11B5/726—Two or more protective coatings
- G11B5/7262—Inorganic protective coating
- G11B5/7264—Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon
- G11B5/7266—Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon comprising a lubricant over the inorganic carbon coating
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- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/676—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer
- G11B5/678—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer having three or more magnetic layers
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- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/72—Protective coatings, e.g. anti-static or antifriction
- G11B5/722—Protective coatings, e.g. anti-static or antifriction containing an anticorrosive material
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/72—Protective coatings, e.g. anti-static or antifriction
- G11B5/725—Protective coatings, e.g. anti-static or antifriction containing a lubricant, e.g. organic compounds
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- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/72—Protective coatings, e.g. anti-static or antifriction
- G11B5/725—Protective coatings, e.g. anti-static or antifriction containing a lubricant, e.g. organic compounds
- G11B5/7253—Fluorocarbon lubricant
- G11B5/7257—Perfluoropolyether lubricant
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- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
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- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
- C08G65/002—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds
- C08G65/005—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds containing halogens
- C08G65/007—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds containing halogens containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D171/00—Coating compositions based on polyethers obtained by reactions forming an ether link in the main chain; Coating compositions based on derivatives of such polymers
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- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
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- G11B5/62—Record carriers characterised by the selection of the material
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- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
- G11B5/73921—Glass or ceramic substrates
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- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
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- G—PHYSICS
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- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/858—Producing a magnetic layer by electro-plating or electroless plating
Description
(2)前記第1の有機フッ素化合物は、パーフルオロポリエーテル構造を有し、カルボキシル基または水酸基を片末端に有し、重量平均分子量が1500以上であることを特徴とする(1)に記載の磁気記録媒体の製造方法。
(3)前記第2の有機フッ素化合物は、パーフルオロポリエーテル構造を有し、重量平均分子量が700以上であり、前記第2の有機フッ素化合物を分解させて、重量平均分子量が500以下である化合物を生成させることを特徴とする(1)または(2)に記載の磁気記録媒体の製造方法。
本実施形態の磁気記録媒体の製造方法は、基板上に、磁気記録層、保護層が、この順で形成されている磁気記録媒体の半製品の保護層上に、潤滑層を形成する工程(以下、潤滑層形成工程という)を有する。
潤滑層形成工程は、磁気記録媒体の半製品の保護層上に、第1の有機フッ素化合物を塗布する工程(以下、工程Aという)と、磁気記録媒体の半製品の保護層上に、第2の有機フッ素化合物を含むガスを供給し、タウンゼント放電および紫外線照射により、第2の有機フッ素化合物を分解させる工程(以下、工程Bという)を含む。
第1の有機フッ素化合物を保護層の表面に塗布する方法としては、特に限定されず、公知の方法を用いることができるが、例えば、ディップ法、スピンコート法、ベーパールブ法が挙げられる。
-(CF2CF2O)qCF2-・・・(b)
-CF2(OCF2CF2)r(OCF2)sOCF2-・・・(c)
-(CF2O)t(CF2CF2O)u(CF2O)vCF2-・・・(d)
-(CF2CF2CF2O)wCF2CF2-・・・(e)
-(CF2CF(CF3)O)xCF2-・・・(f)
-CF2CF2(OCF2CF2CF2)yOCF2CF2-・・・(g)
-CF2CF2CF2O(CF2CF2CF2CF2O)zCF2CF2CF2-・・・(h)
(一般式(a)~(h)中、p、q、r、s、t、u、v、w、x、y、zは、重合度である。なお、構成単位であるパーフルオロアルキレンオキシ基が複数種存在する場合は、構成単位を結合する順序は、任意であり、パーフルオロポリエーテル構造は、例えば、ランダム共重合体であってもよい。)
工程Bは、タウンゼント放電および紫外線照射により、第2の有機フッ素化合物を分解させ、活性状態にある第2の有機フッ素化合物の分解生成物を保護層の表面に化学結合させる工程である。
図2に、磁気記録媒体の半製品7の積層構造の一例を示す。
本実施形態の磁気記録媒体の製造方法により製造されている磁気記録媒体は、例えば、磁気記憶装置に適用することができる。
1Paのアルゴンガス雰囲気下、洗浄済みの外径2.5インチのガラス基板(HOYA製)の両面に、スパッタリング法により、厚さ10nmのCr-40Ti膜(密着層)を成膜した。
化学式
CF3CF2CF2O(CF2CF2CF2O)mCF2CF2COOH
で表される、重量平均分子量2000の片末端にカルボキシル基を有するパーフルオロポリエーテル(第1の有機フッ素化合物)SH-1(Solvay製)を、フッ素系溶媒バートレルXF(三井デュポンフロロケミカル社製)で希釈し、有機フッ素化合物の含有量が0.3質量%の塗布液を得た。
CF3(OCFCF3CF2)n(OCF2)mOCF3
で表される、重量平均分子量750、沸点165℃のパーフルオロポリエーテル(第2の有機フッ素化合物)D02TS(Solvay製)を蒸発させて、チャンバ2内に供給し、チャンバ2内の圧力を170Pa(0.00168atm)に保持した。ここで、対向電極3として、六角形状の穴が開いているメッシュ電極を用いた。また、ホルダー6に設けられているPtヒータにより、磁気記録媒体の半製品7を100℃に加熱した。次に、光源5としての、エキシマランプを用いて、磁気記録媒体の半製品7の表面に、波長172nmの紫外線を照射すると共に、磁気記録媒体の半製品7と対向電極3の間に、パルス振幅(ゼロツーピーク値)300V、パルス周波数20kHzの交流電圧(高周波パルスバイアス電圧)を印加し、ボンド層を成膜し、平均厚さは10Åの潤滑層を形成し、磁気記録媒体を得た。このとき、ボンド層の成膜時間を10分間とした。
第2の有機フッ素化合物として、化学式
CF3(OCFCF3CF2)n(OCF2)mOCF3
で表される、重量平均分子量760、沸点175℃のパーフルオロポリエーテル(第2の有機フッ素化合物)D02(Solvay製)を用いた以外は、実施例1と同様にして、平均厚さ10Åの潤滑層を形成し、磁気記録媒体を得た。
工程Aを実施しない以外は、実施例1と同様にして、平均厚さ10Åの潤滑層を形成し、磁気記録媒体を得た。
工程Bを実施しない以外は、実施例1と同様にして、平均厚さ10Åの潤滑層を形成し、磁気記録媒体を得た。
工程Aを実施しない以外は、実施例2と同様にして、平均厚さ10Åの潤滑層を形成し、磁気記録媒体を得た。
FT-IR(Fourier transform infrared spectroscopy)を用いて、バートレルXF(三井デュポンフロロケミカル社製)に磁気記録媒体を5分間浸漬する前後の波数1270cm-1付近の吸光度を測定し、式
(浸漬後の吸光度)/(浸漬前の吸光度)×100
から、潤滑層のボンデッドレシオを求めた。
厚さ50nmの硬質炭素膜がコーティングされている、曲率半径2.55mmの試験ピンを使用して、回転数6rpm、加重0.2mN、温度22℃、湿度40%RHの条件で、磁気記録媒体の表面の動摩擦係数を測定した。
磁気記録媒体の表面に、水、ヘキサデカン5μlをそれぞれ滴下して接触角を測定した後、Girifalco-Good-Fowkes-Youngの式により、表面エネルギーを求めた。
100 基板
150 磁気記録層
160 保護層
Claims (3)
- 基板上に、磁気記録層、保護層が、この順で形成されている磁気記録媒体の半製品の保護層上に、潤滑層を形成する工程を有し、
前記工程は、前記磁気記録媒体の半製品の保護層上に、第1の有機フッ素化合物を塗布する工程と、前記磁気記録媒体の半製品の保護層上に、第2の有機フッ素化合物を含むガスを供給し、タウンゼント放電および紫外線照射により、該第2の有機フッ素化合物を分解させる工程を含み、
前記保護層は、炭素を含み、
前記第1の有機フッ素化合物は、末端に官能基を有することを特徴とする磁気記録媒体の製造方法。 - 前記第1の有機フッ素化合物は、パーフルオロポリエーテル構造を有し、カルボキシル基または水酸基を片末端に有し、重量平均分子量が1500以上であることを特徴とする請求項1に記載の磁気記録媒体の製造方法。
- 前記第2の有機フッ素化合物は、パーフルオロポリエーテル構造を有し、重量平均分子量が700以上であり、
前記第2の有機フッ素化合物を分解させて、重量平均分子量が500以下である化合物を生成させることを特徴とする請求項1または2に記載の磁気記録媒体の製造方法。
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002080874A (ja) | 2000-09-07 | 2002-03-22 | Matsushita Electric Ind Co Ltd | 潤滑剤組成物ならびに磁気記録媒体および磁気記録媒体の製造方法 |
JP2004307349A (ja) | 2003-04-02 | 2004-11-04 | Matsushita Electric Ind Co Ltd | 含フッ素化合物、潤滑剤、ならびに磁気記録媒体および磁気記録媒体の製造方法 |
JP2010218676A (ja) | 2009-02-19 | 2010-09-30 | Hoya Corp | 磁気ディスクの製造方法 |
JP2012009090A (ja) | 2010-06-22 | 2012-01-12 | Wd Media (Singapore) Pte. Ltd | 磁気ディスクの製造方法 |
JP2014191847A (ja) | 2013-03-27 | 2014-10-06 | Showa Denko Kk | 磁気記録媒体の製造方法 |
WO2018159378A1 (ja) | 2017-03-02 | 2018-09-07 | 昭和電工株式会社 | 磁気記録媒体用潤滑剤および磁気記録媒体の製造方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02282919A (ja) * | 1989-04-25 | 1990-11-20 | Matsushita Electric Ind Co Ltd | 磁気記録媒体 |
JP3378618B2 (ja) * | 1993-08-06 | 2003-02-17 | 株式会社日立製作所 | 磁気記録媒体 |
JPH09259431A (ja) * | 1996-03-25 | 1997-10-03 | Ulvac Japan Ltd | 磁気記録媒体保護膜の製造方法およびその製造装置 |
JPH10320735A (ja) * | 1997-05-21 | 1998-12-04 | Hitachi Ltd | 磁気ディスク装置 |
JP2000017281A (ja) | 1998-06-30 | 2000-01-18 | Matsushita Electric Ind Co Ltd | 潤滑剤組成物ならびに磁気記録媒体およびその製造方法 |
CN1191568C (zh) * | 1999-12-03 | 2005-03-02 | 深圳开发科技股份有限公司 | 无线弹性臂磁头弹架组件装配工艺 |
JP3698138B2 (ja) * | 2001-12-26 | 2005-09-21 | セイコーエプソン株式会社 | 撥水化処理の方法、薄膜形成方法及びこの方法を用いた有機el装置の製造方法、有機el装置、電子機器 |
JP3932181B2 (ja) * | 2002-07-10 | 2007-06-20 | 雄二 高桑 | 基板の表面処理方法および装置 |
JP3651681B2 (ja) * | 2003-01-29 | 2005-05-25 | Hoya株式会社 | 磁気ディスクおよびその製造方法 |
JP2006012215A (ja) | 2004-06-22 | 2006-01-12 | Toshiba Corp | 磁気記録媒体及びこれを用いた磁気記録再生装置 |
JP2006147012A (ja) | 2004-11-17 | 2006-06-08 | Fujitsu Ltd | 磁気記録媒体および情報再生装置 |
JP5037243B2 (ja) * | 2007-07-06 | 2012-09-26 | 富士フイルム株式会社 | 界面結合剤、該界面結合剤を含有するレジスト組成物、及び該界面結合剤からなる層を有する磁気記録媒体形成用積層体、並びに該界面結合剤を用いた磁気記録媒体の製造方法、及び該製造方法により製造された磁気記録媒体 |
JP2010079978A (ja) * | 2008-09-25 | 2010-04-08 | Toshiba Storage Device Corp | 磁気ヘッドの浮上量制御装置及び磁気ディスク装置 |
JP2014146401A (ja) * | 2013-01-29 | 2014-08-14 | Showa Denko Kk | 磁気記録媒体の製造方法及び装置 |
TWM498318U (zh) * | 2014-08-12 | 2015-04-01 | Univ Ming Chi Technology | 堆疊型薄膜光轉換裝置 |
JP6954524B2 (ja) | 2017-03-10 | 2021-10-27 | 昭和電工株式会社 | 薄膜製造方法、磁気ディスクの製造方法およびナノインプリント用モールドの製造方法 |
JP2019036370A (ja) * | 2017-08-10 | 2019-03-07 | 昭和電工株式会社 | 磁気記録媒体、磁気記録媒体の製造方法および磁気記録再生装置 |
-
2019
- 2019-06-17 JP JP2019112236A patent/JP7292671B2/ja active Active
-
2020
- 2020-06-09 US US16/896,401 patent/US11322176B2/en active Active
- 2020-06-11 CN CN202010531584.0A patent/CN112102852B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002080874A (ja) | 2000-09-07 | 2002-03-22 | Matsushita Electric Ind Co Ltd | 潤滑剤組成物ならびに磁気記録媒体および磁気記録媒体の製造方法 |
JP2004307349A (ja) | 2003-04-02 | 2004-11-04 | Matsushita Electric Ind Co Ltd | 含フッ素化合物、潤滑剤、ならびに磁気記録媒体および磁気記録媒体の製造方法 |
JP2010218676A (ja) | 2009-02-19 | 2010-09-30 | Hoya Corp | 磁気ディスクの製造方法 |
JP2012009090A (ja) | 2010-06-22 | 2012-01-12 | Wd Media (Singapore) Pte. Ltd | 磁気ディスクの製造方法 |
JP2014191847A (ja) | 2013-03-27 | 2014-10-06 | Showa Denko Kk | 磁気記録媒体の製造方法 |
WO2018159378A1 (ja) | 2017-03-02 | 2018-09-07 | 昭和電工株式会社 | 磁気記録媒体用潤滑剤および磁気記録媒体の製造方法 |
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