JP7214867B2 - 静電チャック - Google Patents
静電チャック Download PDFInfo
- Publication number
- JP7214867B2 JP7214867B2 JP2021528134A JP2021528134A JP7214867B2 JP 7214867 B2 JP7214867 B2 JP 7214867B2 JP 2021528134 A JP2021528134 A JP 2021528134A JP 2021528134 A JP2021528134 A JP 2021528134A JP 7214867 B2 JP7214867 B2 JP 7214867B2
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- JP
- Japan
- Prior art keywords
- ceramic
- dielectric layer
- insulating layer
- electrostatic chuck
- ceramic dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
- B23K1/0016—Brazing of electronic components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/19—Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/52—Ceramics
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
セラミック基材と、
前記セラミック基材の上に配置され前記セラミック基材よりも薄いセラミック誘電体層と、
前記セラミック誘電体層と前記セラミック基材との間に埋設された静電電極と、
前記セラミック誘電体層の上に配置され前記セラミック誘電体層よりも薄いセラミック絶縁層と、
を備え、
前記セラミック絶縁層は、体積抵抗率及び耐電圧が前記セラミック誘電体層に比べて高く、
前記セラミック誘電体層は、誘電率が前記セラミック絶縁層に比べて高い、
ものである。
Claims (4)
- セラミック基材と、
前記セラミック基材の上に配置され前記セラミック基材よりも薄いセラミック誘電体層と、
前記セラミック誘電体層と前記セラミック基材との間に埋設された静電電極と、
前記セラミック誘電体層の上に配置され前記セラミック誘電体層よりも薄いセラミック絶縁層と、
を備え、
前記セラミック絶縁層は、体積抵抗率及び耐電圧が前記セラミック誘電体層に比べて高く、
前記セラミック誘電体層は、誘電率が前記セラミック絶縁層に比べて高く、
前記セラミック絶縁層は、エアロゾルデポジション膜である、
静電チャック。 - 前記セラミック誘電体層の材質は、チタン酸バリウム又はチタン酸ジルコン酸鉛であり、前記セラミック絶縁層の材質は、アルミナである、
請求項1に記載の静電チャック。 - 前記セラミック絶縁層は、前記セラミック誘電体層の表面全面を覆うように設けられ、ウエハを支持する複数の凸部を有している、
請求項1又は2に記載の静電チャック。 - 前記セラミック誘電体層は、ウエハを支持する複数の凸部を有し、前記セラミック絶縁層は、少なくとも前記凸部の頂面に設けられている、
請求項1又は2に記載の静電チャック。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019121488 | 2019-06-28 | ||
JP2019121488 | 2019-06-28 | ||
PCT/JP2020/022831 WO2020261991A1 (ja) | 2019-06-28 | 2020-06-10 | 静電チャック |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020261991A1 JPWO2020261991A1 (ja) | 2020-12-30 |
JP7214867B2 true JP7214867B2 (ja) | 2023-01-30 |
Family
ID=74059845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021528134A Active JP7214867B2 (ja) | 2019-06-28 | 2020-06-10 | 静電チャック |
Country Status (5)
Country | Link |
---|---|
US (1) | US11951583B2 (ja) |
JP (1) | JP7214867B2 (ja) |
KR (1) | KR102573002B1 (ja) |
CN (1) | CN113748500A (ja) |
WO (1) | WO2020261991A1 (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030047283A1 (en) | 2001-09-10 | 2003-03-13 | Applied Materials, Inc. | Apparatus for supporting a substrate and method of fabricating same |
JP2006287210A (ja) | 2005-03-07 | 2006-10-19 | Ngk Insulators Ltd | 静電チャック及びその製造方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6059104B2 (ja) * | 1982-02-03 | 1985-12-23 | 株式会社東芝 | 静電チヤツク板 |
JP2865472B2 (ja) * | 1992-02-20 | 1999-03-08 | 信越化学工業株式会社 | 静電チャック |
JP2938679B2 (ja) * | 1992-06-26 | 1999-08-23 | 信越化学工業株式会社 | セラミックス製静電チャック |
JPH0831917A (ja) * | 1994-07-19 | 1996-02-02 | Hitachi Chem Co Ltd | 静電チャック及びその製造法 |
JP3805134B2 (ja) * | 1999-05-25 | 2006-08-02 | 東陶機器株式会社 | 絶縁性基板吸着用静電チャック |
JP4292574B2 (ja) * | 2003-09-30 | 2009-07-08 | Toto株式会社 | 静電チャックとその製造方法 |
JP4476701B2 (ja) | 2004-06-02 | 2010-06-09 | 日本碍子株式会社 | 電極内蔵焼結体の製造方法 |
JP2007109827A (ja) * | 2005-10-12 | 2007-04-26 | Toto Ltd | 静電チャック |
TW200735254A (en) * | 2006-03-03 | 2007-09-16 | Ngk Insulators Ltd | Electrostatic chuck and producing method thereof |
JP2008160093A (ja) * | 2006-11-29 | 2008-07-10 | Toto Ltd | 静電チャック、静電チャックの製造方法および基板処理装置 |
JP2007137764A (ja) * | 2006-11-29 | 2007-06-07 | Kyocera Corp | 誘電体磁器組成物およびそれを用いた誘電体共振器、非放射性誘電体線路並びに高周波用配線基板 |
JP5709490B2 (ja) * | 2010-11-30 | 2015-04-30 | 京セラ株式会社 | セラミックヒータ |
KR101974386B1 (ko) * | 2012-03-21 | 2019-05-03 | 주식회사 미코 | 정전척 |
JPWO2015025347A1 (ja) * | 2013-08-19 | 2017-03-02 | 株式会社日立製作所 | 電子回路基板、それを用いた半導体装置及びその製造方法 |
-
2020
- 2020-06-10 JP JP2021528134A patent/JP7214867B2/ja active Active
- 2020-06-10 CN CN202080031109.5A patent/CN113748500A/zh active Pending
- 2020-06-10 KR KR1020217034011A patent/KR102573002B1/ko active IP Right Grant
- 2020-06-10 WO PCT/JP2020/022831 patent/WO2020261991A1/ja active Application Filing
-
2021
- 2021-08-31 US US17/462,048 patent/US11951583B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030047283A1 (en) | 2001-09-10 | 2003-03-13 | Applied Materials, Inc. | Apparatus for supporting a substrate and method of fabricating same |
JP2006287210A (ja) | 2005-03-07 | 2006-10-19 | Ngk Insulators Ltd | 静電チャック及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20210141646A (ko) | 2021-11-23 |
JPWO2020261991A1 (ja) | 2020-12-30 |
KR102573002B1 (ko) | 2023-08-30 |
CN113748500A (zh) | 2021-12-03 |
US11951583B2 (en) | 2024-04-09 |
WO2020261991A1 (ja) | 2020-12-30 |
US20210394320A1 (en) | 2021-12-23 |
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