JP7209331B2 - 半導体素子 - Google Patents

半導体素子 Download PDF

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Publication number
JP7209331B2
JP7209331B2 JP2018157500A JP2018157500A JP7209331B2 JP 7209331 B2 JP7209331 B2 JP 7209331B2 JP 2018157500 A JP2018157500 A JP 2018157500A JP 2018157500 A JP2018157500 A JP 2018157500A JP 7209331 B2 JP7209331 B2 JP 7209331B2
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electrode
cover electrode
layer
insulating layer
semiconductor device
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JP2019041109A (ja
Inventor
ソン,ヨンチュン
チェ,ラクチョン
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スージョウ レキン セミコンダクター カンパニー リミテッド
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/38Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/14Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
    • H01L2224/1401Structure
    • H01L2224/1403Bump connectors having different sizes, e.g. different diameters, heights or widths
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0016Processes relating to electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26Materials of the light emitting region
    • H01L33/30Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
    • H01L33/32Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26Materials of the light emitting region
    • H01L33/30Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
    • H01L33/32Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
    • H01L33/325Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen characterised by the doping materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/40Materials therefor

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Led Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Bipolar Transistors (AREA)
  • Noodles (AREA)
JP2018157500A 2017-08-25 2018-08-24 半導体素子 Active JP7209331B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2017-0107964 2017-08-25
KR1020170107964A KR102410809B1 (ko) 2017-08-25 2017-08-25 반도체 소자

Publications (2)

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JP2019041109A JP2019041109A (ja) 2019-03-14
JP7209331B2 true JP7209331B2 (ja) 2023-01-20

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Country Status (6)

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US (1) US10734550B2 (zh)
EP (1) EP3447808B1 (zh)
JP (1) JP7209331B2 (zh)
KR (1) KR102410809B1 (zh)
CN (1) CN109427941B (zh)
TW (1) TWI814735B (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210007766A (ko) * 2019-07-12 2021-01-20 에스케이하이닉스 주식회사 전자 장치 및 전자 장치의 제조 방법
WO2022050510A1 (ko) 2020-09-04 2022-03-10 주식회사 포톤웨이브 자외선 발광소자 및 이를 포함하는 발광소자 패키지
TWI801284B (zh) * 2022-02-25 2023-05-01 友達光電股份有限公司 顯示面板

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JP2004104132A (ja) 2002-09-09 2004-04-02 Samsung Electronics Co Ltd 高効率発光ダイオード
JP2006032779A (ja) 2004-07-20 2006-02-02 Sanyo Electric Co Ltd 窒化物半導体発光素子
WO2006043422A1 (ja) 2004-10-19 2006-04-27 Nichia Corporation 半導体素子
JP2007134533A (ja) 2005-11-11 2007-05-31 Nichia Chem Ind Ltd 半導体発光素子及びその製造方法
WO2009088084A1 (ja) 2008-01-11 2009-07-16 Rohm Co., Ltd. 半導体発光装置
JP2010056322A (ja) 2008-08-28 2010-03-11 Toshiba Corp 半導体発光素子及びその製造方法
JP2010062274A (ja) 2008-09-03 2010-03-18 Toshiba Corp 半導体発光素子及びその製造方法
WO2010146808A1 (ja) 2009-06-18 2010-12-23 パナソニック株式会社 窒化ガリウム系化合物半導体発光ダイオード
WO2011027418A1 (ja) 2009-09-01 2011-03-10 株式会社 東芝 半導体発光素子及び半導体発光装置
JP2013084906A (ja) 2011-09-27 2013-05-09 Nichia Chem Ind Ltd 半導体素子
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JP2015156483A (ja) 2014-01-16 2015-08-27 株式会社トクヤマ 紫外発光ダイオード
US20150295142A1 (en) 2013-05-24 2015-10-15 Xiamen Sanan Optoelectronics Technology Co., Ltd. Surface-Mounted Light-Emitting Device and Fabrication Method Thereof
US20150372208A1 (en) 2014-06-23 2015-12-24 Seoul Viosys Co., Ltd. Light emitting device
WO2016063501A1 (ja) 2014-10-22 2016-04-28 パナソニックIpマネジメント株式会社 半導体デバイス及び紫外線発光素子
WO2016163083A1 (ja) 2015-04-09 2016-10-13 パナソニックIpマネジメント株式会社 窒化物半導体発光素子
JP2016184724A (ja) 2015-03-26 2016-10-20 エルジー イノテック カンパニー リミテッド 発光素子及びこれを含む発光素子パッケージ
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JP7178712B2 (ja) 2016-09-10 2022-11-28 スージョウ レキン セミコンダクター カンパニー リミテッド 半導体素子

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Publication number Priority date Publication date Assignee Title
JP2003110140A (ja) 2001-09-28 2003-04-11 Nichia Chem Ind Ltd 窒化物半導体発光素子
JP2004104132A (ja) 2002-09-09 2004-04-02 Samsung Electronics Co Ltd 高効率発光ダイオード
JP2006032779A (ja) 2004-07-20 2006-02-02 Sanyo Electric Co Ltd 窒化物半導体発光素子
WO2006043422A1 (ja) 2004-10-19 2006-04-27 Nichia Corporation 半導体素子
JP2007134533A (ja) 2005-11-11 2007-05-31 Nichia Chem Ind Ltd 半導体発光素子及びその製造方法
WO2009088084A1 (ja) 2008-01-11 2009-07-16 Rohm Co., Ltd. 半導体発光装置
JP2010056322A (ja) 2008-08-28 2010-03-11 Toshiba Corp 半導体発光素子及びその製造方法
JP2010062274A (ja) 2008-09-03 2010-03-18 Toshiba Corp 半導体発光素子及びその製造方法
WO2010146808A1 (ja) 2009-06-18 2010-12-23 パナソニック株式会社 窒化ガリウム系化合物半導体発光ダイオード
WO2011027418A1 (ja) 2009-09-01 2011-03-10 株式会社 東芝 半導体発光素子及び半導体発光装置
JP2013084906A (ja) 2011-09-27 2013-05-09 Nichia Chem Ind Ltd 半導体素子
US20150295142A1 (en) 2013-05-24 2015-10-15 Xiamen Sanan Optoelectronics Technology Co., Ltd. Surface-Mounted Light-Emitting Device and Fabrication Method Thereof
WO2015033557A1 (ja) 2013-09-05 2015-03-12 パナソニックIpマネジメント株式会社 発光装置
JP2015156483A (ja) 2014-01-16 2015-08-27 株式会社トクヤマ 紫外発光ダイオード
US20150372208A1 (en) 2014-06-23 2015-12-24 Seoul Viosys Co., Ltd. Light emitting device
JP2017523613A (ja) 2014-07-31 2017-08-17 ソウル バイオシス カンパニー リミテッドSeoul Viosys Co.,Ltd. 発光ダイオード
WO2016063501A1 (ja) 2014-10-22 2016-04-28 パナソニックIpマネジメント株式会社 半導体デバイス及び紫外線発光素子
JP2016184724A (ja) 2015-03-26 2016-10-20 エルジー イノテック カンパニー リミテッド 発光素子及びこれを含む発光素子パッケージ
WO2016163083A1 (ja) 2015-04-09 2016-10-13 パナソニックIpマネジメント株式会社 窒化物半導体発光素子
WO2017078368A1 (ko) 2015-11-05 2017-05-11 서울바이오시스주식회사 자외선 발광 소자 및 그것을 제조하는 방법
JP7178712B2 (ja) 2016-09-10 2022-11-28 スージョウ レキン セミコンダクター カンパニー リミテッド 半導体素子

Also Published As

Publication number Publication date
TWI814735B (zh) 2023-09-11
US20190067524A1 (en) 2019-02-28
TW201921742A (zh) 2019-06-01
US10734550B2 (en) 2020-08-04
EP3447808B1 (en) 2021-04-14
JP2019041109A (ja) 2019-03-14
KR20190022110A (ko) 2019-03-06
CN109427941B (zh) 2023-02-17
KR102410809B1 (ko) 2022-06-20
EP3447808A1 (en) 2019-02-27
CN109427941A (zh) 2019-03-05

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