JP7190888B2 - 配管加熱装置及び基板処理装置 - Google Patents
配管加熱装置及び基板処理装置 Download PDFInfo
- Publication number
- JP7190888B2 JP7190888B2 JP2018229302A JP2018229302A JP7190888B2 JP 7190888 B2 JP7190888 B2 JP 7190888B2 JP 2018229302 A JP2018229302 A JP 2018229302A JP 2018229302 A JP2018229302 A JP 2018229302A JP 7190888 B2 JP7190888 B2 JP 7190888B2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- gas supply
- gas
- supply pipe
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/54—Heating elements having the shape of rods or tubes flexible
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
- F16L53/30—Heating of pipes or pipe systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
- F16L53/30—Heating of pipes or pipe systems
- F16L53/35—Ohmic-resistance heating
- F16L53/38—Ohmic-resistance heating using elongate electric heating elements, e.g. wires or ribbons
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
- G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H37/00—Thermally-actuated switches
- H01H37/02—Details
- H01H37/12—Means for adjustment of "on" or "off" operating temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
- G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
- G01K13/024—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow of moving gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H37/00—Thermally-actuated switches
- H01H37/02—Details
- H01H37/04—Bases; Housings; Mountings
- H01H37/043—Mountings on controlled apparatus
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/022—Heaters specially adapted for heating gaseous material
Description
一実施形態の配管加熱装置を基板処理装置に適用した構成例について説明する。図1は、一実施形態の基板処理装置の構成例を示す概略図である。
次に、配管加熱装置120について、原料ガス供給管30を加熱する部分を例に挙げて説明する。ただし、別のガス配管、例えばキャリアガス供給管20、希釈ガス供給管40、バイパス管60、エバック配管110を加熱する部分についても、以下に説明する原料ガス供給管30を加熱する部分と同様であってよい。
次に、一実施形態の配管加熱装置120の効果を確認するために実施した評価について説明する。
20 キャリアガス供給管
30 原料ガス供給管
40 希釈ガス供給管
60 バイパス管
72 処理容器
80 排気管
82 排気機構
110 エバック配管
120 配管加熱装置
121 リボンヒータ
121a 発熱部
123 熱伝導部材
124 サーマルスイッチ
150 制御部
Claims (8)
- ガス配管に設置されるセンサと、
前記ガス配管における前記センサが設置される領域を除いて前記ガス配管を覆うように螺旋状に配置される発熱部を有する加熱手段と、
前記ガス配管の外周面を覆い、前記ガス配管の外周面と前記センサとの間に取り付けられ、前記ガス配管よりも熱伝導率が高い材料により形成された熱伝導部材と、
を有する、
配管加熱装置。 - 前記熱伝導部材は、前記ガス配管をクランプするクランプ部材である、
請求項1に記載の配管加熱装置。 - 前記ガス配管は、その内部に固体又は液体の原料を気化させた原料ガスを通流させる配管である、
請求項1又は2に記載の配管加熱装置。 - 前記センサは、所定の温度以上になると前記発熱部への電力の供給を遮断するサーマルスイッチである、
請求項1乃至3のいずれか一項に記載の配管加熱装置。 - 前記加熱手段は、リボンヒータであり、
前記発熱部は、抵抗発熱体を含む、
請求項1乃至4のいずれか一項に記載の配管加熱装置。 - 前記ガス配管の材料はステンレスであり、前記熱伝導部材の材料はアルミニウムである、
請求項1乃至5のいずれか一項に記載の配管加熱装置。 - 基板を処理する処理容器と、
前記処理容器内に原料ガスを供給する原料ガス供給管を有する原料ガス供給手段と、
前記原料ガス供給管を加熱する配管加熱装置と、
を備え、
前記配管加熱装置は、
前記原料ガス供給管に設置されるセンサと、
前記原料ガス供給管における前記センサが設置される領域を除いて前記原料ガス供給管を覆うように螺旋状に配置される発熱部を有する加熱手段と、
前記原料ガス供給管の外周面を覆い、前記原料ガス供給管の外周面と前記センサとの間に取り付けられ、前記原料ガス供給管よりも熱伝導率が高い材料により形成された熱伝導部材と、
を有する、
基板処理装置。 - 基板を処理する処理容器と、
前記処理容器内に原料ガスを供給する原料ガス供給管を有する原料ガス供給手段と、
前記処理容器内を排気する排気管を有する排気手段と、
一端が前記原料ガス供給管に接続され、他端が排気管に接続されたエバック配管と、
前記原料ガス供給管及び前記エバック配管の少なくともいずれかのガス配管を加熱する配管加熱装置と、
を備え、
前記配管加熱装置は、
前記ガス配管に設置されるセンサと、
前記ガス配管における前記センサが設置される領域を除いて前記ガス配管を覆うように螺旋状に配置される発熱部を有する加熱手段と、
前記ガス配管の外周面を覆い、前記ガス配管の外周面と前記センサとの間に取り付けられ、前記ガス配管よりも熱伝導率が高い材料により形成された熱伝導部材と、
を有する、
基板処理装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018229302A JP7190888B2 (ja) | 2018-12-06 | 2018-12-06 | 配管加熱装置及び基板処理装置 |
KR1020190156212A KR102312158B1 (ko) | 2018-12-06 | 2019-11-29 | 배관 가열 장치 및 기판 처리 장치 |
US16/701,870 US11506321B2 (en) | 2018-12-06 | 2019-12-03 | Pipe heating device and substrate processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018229302A JP7190888B2 (ja) | 2018-12-06 | 2018-12-06 | 配管加熱装置及び基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020090716A JP2020090716A (ja) | 2020-06-11 |
JP7190888B2 true JP7190888B2 (ja) | 2022-12-16 |
Family
ID=70972445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018229302A Active JP7190888B2 (ja) | 2018-12-06 | 2018-12-06 | 配管加熱装置及び基板処理装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US11506321B2 (ja) |
JP (1) | JP7190888B2 (ja) |
KR (1) | KR102312158B1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7322087B2 (ja) * | 2021-03-31 | 2023-08-07 | エドワーズ株式会社 | ガス配管温調システム及び温度動作装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000248363A (ja) | 1999-02-26 | 2000-09-12 | Tokyo Electron Ltd | 成膜装置およびそのクリーニング方法 |
JP2000252223A (ja) | 1999-03-03 | 2000-09-14 | Kokusai Electric Co Ltd | 半導体製造装置 |
JP2010153164A (ja) | 2008-12-25 | 2010-07-08 | Kawaso Electric Industrial Co Ltd | 測温機能付きスパイラル管状ヒータ |
JP2017076781A (ja) | 2015-10-16 | 2017-04-20 | 株式会社日立国際電気 | 加熱部、基板処理装置、及び半導体装置の製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3949189A (en) * | 1973-06-15 | 1976-04-06 | Thermon Manufacturing Company | Pipe heat transfer assembly |
US5862303A (en) * | 1996-05-17 | 1999-01-19 | Advanced Metal Technologies, Ltd. | Electrically heated pipe with helically wound amorphous alloy heater |
JPH1047581A (ja) * | 1996-07-31 | 1998-02-20 | Makoto Morioka | 配管用加熱装置 |
JP2000235886A (ja) * | 1998-12-14 | 2000-08-29 | Tokyo Electron Ltd | 加熱手段の温度制御装置および温度制御方法 |
JP4757403B2 (ja) | 2001-06-01 | 2011-08-24 | 東京エレクトロン株式会社 | 固体原料気化装置 |
JP4764574B2 (ja) * | 2001-08-31 | 2011-09-07 | 東京エレクトロン株式会社 | 処理装置の運転方法 |
JP4743495B2 (ja) * | 2005-07-08 | 2011-08-10 | 東京エレクトロン株式会社 | 流体加熱装置 |
KR101530205B1 (ko) * | 2008-12-18 | 2015-06-19 | 주성엔지니어링(주) | 반도체 소자의 제조장치 |
US9064912B2 (en) * | 2009-07-21 | 2015-06-23 | Hitachi Kokusai Electric, Inc. | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
WO2015123376A1 (en) * | 2014-02-14 | 2015-08-20 | Parker-Hannifin Corporation | Heated hose and method |
JP2015185824A (ja) * | 2014-03-26 | 2015-10-22 | 株式会社日立国際電気 | 状態検出装置、基板処理装置、状態検出方法及び半導体装置の製造方法 |
-
2018
- 2018-12-06 JP JP2018229302A patent/JP7190888B2/ja active Active
-
2019
- 2019-11-29 KR KR1020190156212A patent/KR102312158B1/ko active IP Right Grant
- 2019-12-03 US US16/701,870 patent/US11506321B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000248363A (ja) | 1999-02-26 | 2000-09-12 | Tokyo Electron Ltd | 成膜装置およびそのクリーニング方法 |
JP2000252223A (ja) | 1999-03-03 | 2000-09-14 | Kokusai Electric Co Ltd | 半導体製造装置 |
JP2010153164A (ja) | 2008-12-25 | 2010-07-08 | Kawaso Electric Industrial Co Ltd | 測温機能付きスパイラル管状ヒータ |
JP2017076781A (ja) | 2015-10-16 | 2017-04-20 | 株式会社日立国際電気 | 加熱部、基板処理装置、及び半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US11506321B2 (en) | 2022-11-22 |
KR102312158B1 (ko) | 2021-10-14 |
KR20200069230A (ko) | 2020-06-16 |
US20200182390A1 (en) | 2020-06-11 |
JP2020090716A (ja) | 2020-06-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6947914B2 (ja) | 高圧高温下のアニールチャンバ | |
TW200932943A (en) | Raw material gas supply system and film deposition apparatus | |
TWI355470B (ja) | ||
JP5157147B2 (ja) | カーボンナノチューブ製造装置及びその製造方法 | |
JP4433451B2 (ja) | 化学反応装置におけるアクティブ・パルスのモニターリング | |
CN108699688B (zh) | 前体供应系统和前体供应方法 | |
JP7190888B2 (ja) | 配管加熱装置及び基板処理装置 | |
US9777377B2 (en) | Film forming method and film forming device | |
TW200823439A (en) | Temperature measuring device | |
TWI394860B (zh) | 源氣體供給裝置 | |
JP6409021B2 (ja) | 昇華ガス供給システムおよび昇華ガス供給方法 | |
TWI671426B (zh) | 流體控制裝置 | |
JP3828821B2 (ja) | 液体材料気化供給装置 | |
JP3200464B2 (ja) | 液体材料気化供給装置 | |
WO2021054135A1 (ja) | 気化供給装置 | |
JP6164775B2 (ja) | 半導体デバイスの製造方法、基板処理装置およびプログラム | |
KR101064306B1 (ko) | 소스가스 공급장치 | |
JP2023506372A (ja) | 2次元の層のためのcvdリアクタの使用 | |
JP2934883B2 (ja) | 気化方式によるガス発生装置 | |
WO2021060116A1 (ja) | ガス供給装置及びガス供給方法 | |
KR101849861B1 (ko) | 반도체 장치의 제조 방법, 기판 처리 장치 및 기록 매체 | |
US20240093371A1 (en) | Liquid raw material supplying method and gas supply apparatus | |
JP4052506B2 (ja) | 基板処理装置 | |
JP4282220B2 (ja) | 廃プラスチック処理装置 | |
JP2014178070A (ja) | 電気式給湯装置の加熱制御方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210819 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220609 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220621 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220810 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20221108 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20221206 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7190888 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |