JP7181020B2 - ウエーハの加工方法 - Google Patents
ウエーハの加工方法 Download PDFInfo
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- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
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Description
ウエーハ10、シート20、及びサブストレート30を用意したならば、図1(a)に示すように、ウエーハ10の表面10aを上方に、すなわち、裏面10bを下方に向け、支持テーブル40の上面40aに敷設されるサブストレート30に、シート20を介して配設する(図1(b)を参照。)。支持テーブル40は、基台50上に配設されており、支持テーブル40の上面は平坦に形成されている。
上記したウエーハ配設工程が実施されたならば、図2に示すシート熱圧着工程を実施する。シート熱圧着工程は、シート20を介してサブストレート30に配設されたウエーハ10を密閉環境内で減圧してシート20を加熱すると共にウエーハ10を押圧して、ウエーハ10とシート20とを熱圧着する工程である。なお、支持テーブル40の内部には、加熱手段として、電気ヒータ42、及び図示しない温度センサーが内蔵される。電気ヒータ42及び該温度センサーは、図示しない制御装置、及び電源に接続され、支持テーブル40を所望の温度に調整することが可能になっている。以下に具体的に説明する。
上記したシート熱圧着工程を実施したならば、一体化ユニットWとされたウエーハ10を分割予定ライン14に沿って切削加工を施す分割工程を実施する。以下に、分割工程について具体的に説明する。
上記した分割工程が完了したならば、ウエーハ10から、シート20及びサブストレート30を剥離する剥離工程を実施する。以下に、剥離工程の実施手順について説明する。
本実施形態では、個々のデバイスチップ12’に分割されたウエーハ10を所定のカセットケースに収容したり、個々に分割したデバイスチップ12’をピックアップして次工程に搬送したりすることを考慮して、上記した剥離工程を実施した後、ダイシングテープ配設工程を実施する。上記した剥離工程を経て、剥離用保持手段90に吸引保持されたウエーハ10は、図7から理解されるように、ウエーハ10の裏面10bが上方に露出している。本実施形態では、図8(a)に示すように、ウエーハ10よりも大きな寸法に設定された開口部を有する環状のフレームFを用意し、該開口部よりも大きい円形のダイシングテープTの外周をフレームFに貼着し、さらに、開口部の中央に剥離用保持手段90に保持されたウエーハ10を位置付け、ダイシングテープTにウエーハ10の裏面10bを貼着する。そして、剥離用保持手段90に接続された図示しない吸引手段を停止して、剥離用保持手段90からウエーハ10を離脱させる。そして、図8(b)に示すように、ダイシングテープTを介してフレームFに保持されたウエーハ10を反転させ、ダイシングテープ配設工程が完了する。このようにすることで、個々のデバイスチップ12’に分割した後も、ウエーハ10の形態を維持したまま、図示しないカセットケースに収容したり、図示しないピックアップ工程等を実施するピックアップ装置等に搬送したりすることができる。
12:デバイス
14:分割予定ライン
20:シート
22:盛り上がり部
30:サブストレート
40:支持テーブル
42:電気ヒータ
50:基台
52:吸引孔
60:熱圧着装置
62:密閉カバー部材
64:押圧部材
64b:押圧プレート
70:切削装置
72:回転スピンドル
74:ブレードカバー
80:保持手段
90:剥離用保持手段
200:フィルム状部材
210:ローラ
Claims (5)
- 複数のデバイスが分割予定ラインによって区画され表面に形成されたウエーハを個々のデバイスチップに分割するウエーハの加工方法であって、
ウエーハを支持するサブストレートの上面にポリオレフィン系シート、又はポリエステル系シートのいずれかのシートを敷設し、該シートの上面にウエーハの裏面を位置付けて配設するウエーハ配設工程と、
該ウエーハ配設工程により該シートを介して該サブストレートに配設されたウエーハを密閉環境内で減圧して該シートを加熱すると共にウエーハを押圧して該シートを介してウエーハを該サブストレートに熱圧着するシート熱圧着工程と、
該シート熱圧着工程が実施されたウエーハの表面に切削ブレードを位置付けて分割予定ラインを切削してウエーハを個々のデバイスチップに分割する分割工程と、
該分割工程が実施されたウエーハの裏面から該シートと該サブストレートを剥離する剥離工程と、
から少なくとも構成されるウエーハの加工方法。 - 該ポリオレフィン系のシートは、ポリエチレンシート、ポリプロピレンシート、ポリスチレンシートのいずれかで構成される請求項1に記載のウエーハの加工方法。
- 該シートとしてポリオレフィン系のシートが選択された場合の該シート熱圧着工程における該シートの加熱温度は、該シートがポリエチレンシートで構成される場合は120~140℃であり、該シートがポリプロピレンシートで構成される場合は160~180℃であり、該シートがポリスチレンシートで構成される場合は220~240℃である請求項2に記載のウエーハの加工方法。
- 該ポリエステル系のシートは、ポリエチレンテレフタレートシート、ポリエチレンナフタレートシート、のいずれかで構成される請求項1に記載のウエーハの加工方法。
- 該シートとしてポリエステル系のシートが選択された場合の該シート熱圧着工程における該シートの加熱温度は、該シートがポリエチレンテレフタレートシートで構成される場合は250~270℃であり、該シートがポリエチレンナフタレートシートで構成される場合は160~180℃である請求項4に記載のウエーハの加工方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018140247A JP7181020B2 (ja) | 2018-07-26 | 2018-07-26 | ウエーハの加工方法 |
KR1020190080956A KR20200012732A (ko) | 2018-07-26 | 2019-07-04 | 웨이퍼의 가공 방법 |
CN201910613278.9A CN110783249B (zh) | 2018-07-26 | 2019-07-09 | 晶片的加工方法 |
US16/513,988 US10879122B2 (en) | 2018-07-26 | 2019-07-17 | Wafer processing method |
TW108125994A TWI787535B (zh) | 2018-07-26 | 2019-07-23 | 晶圓加工方法 |
DE102019211057.6A DE102019211057A1 (de) | 2018-07-26 | 2019-07-25 | Waferbearbeitungsverfahren |
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JP2018140247A JP7181020B2 (ja) | 2018-07-26 | 2018-07-26 | ウエーハの加工方法 |
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Publication Number | Publication Date |
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JP2020017658A JP2020017658A (ja) | 2020-01-30 |
JP7181020B2 true JP7181020B2 (ja) | 2022-11-30 |
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JP2018140247A Active JP7181020B2 (ja) | 2018-07-26 | 2018-07-26 | ウエーハの加工方法 |
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US (1) | US10879122B2 (ja) |
JP (1) | JP7181020B2 (ja) |
KR (1) | KR20200012732A (ja) |
CN (1) | CN110783249B (ja) |
DE (1) | DE102019211057A1 (ja) |
TW (1) | TWI787535B (ja) |
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JP2019220550A (ja) * | 2018-06-19 | 2019-12-26 | 株式会社ディスコ | ウエーハの加工方法 |
JP7286245B2 (ja) * | 2019-06-07 | 2023-06-05 | 株式会社ディスコ | ウェーハの加工方法 |
JP7286247B2 (ja) * | 2019-06-07 | 2023-06-05 | 株式会社ディスコ | ウェーハの加工方法 |
JP7345973B2 (ja) * | 2019-08-07 | 2023-09-19 | 株式会社ディスコ | ウェーハの加工方法 |
JP7341606B2 (ja) * | 2019-09-11 | 2023-09-11 | 株式会社ディスコ | ウェーハの加工方法 |
JP7383338B2 (ja) * | 2019-10-10 | 2023-11-20 | 株式会社ディスコ | ウェーハの加工方法 |
JP7387228B2 (ja) * | 2019-10-17 | 2023-11-28 | 株式会社ディスコ | ウェーハの加工方法 |
JP7301480B2 (ja) * | 2019-10-17 | 2023-07-03 | 株式会社ディスコ | ウェーハの加工方法 |
JP2021077735A (ja) * | 2019-11-07 | 2021-05-20 | 株式会社ディスコ | ウェーハの加工方法 |
JP2021077720A (ja) * | 2019-11-07 | 2021-05-20 | 株式会社ディスコ | ウェーハの加工方法 |
JP2023019193A (ja) * | 2021-07-28 | 2023-02-09 | 株式会社ディスコ | 被加工物の加工方法 |
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JP2020017658A (ja) | 2020-01-30 |
US20200035559A1 (en) | 2020-01-30 |
US10879122B2 (en) | 2020-12-29 |
TWI787535B (zh) | 2022-12-21 |
KR20200012732A (ko) | 2020-02-05 |
TW202007742A (zh) | 2020-02-16 |
CN110783249A (zh) | 2020-02-11 |
CN110783249B (zh) | 2023-09-15 |
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