JP7176532B2 - 半導体装置、半導体装置の製造方法及び接着剤 - Google Patents

半導体装置、半導体装置の製造方法及び接着剤 Download PDF

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Publication number
JP7176532B2
JP7176532B2 JP2019559883A JP2019559883A JP7176532B2 JP 7176532 B2 JP7176532 B2 JP 7176532B2 JP 2019559883 A JP2019559883 A JP 2019559883A JP 2019559883 A JP2019559883 A JP 2019559883A JP 7176532 B2 JP7176532 B2 JP 7176532B2
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Prior art keywords
pressure
adhesive
heating
semiconductor chip
less
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JP2019559883A
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English (en)
Japanese (ja)
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JPWO2019123518A1 (ja
Inventor
一尊 本田
裕貴 柳田
恵子 上野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
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Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/89—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using at least one connector not provided for in any of the groups H01L24/81 - H01L24/86
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00—Adhesives based on unspecified macromolecular compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • C09J5/06—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving heating of the applied adhesive
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75—Apparatus for connecting with bump connectors or layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73203—Bump and layer connectors
    • H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
JP2019559883A 2017-12-18 2017-12-18 半導体装置、半導体装置の製造方法及び接着剤 Active JP7176532B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2017/045333 WO2019123518A1 (ja) 2017-12-18 2017-12-18 半導体装置、半導体装置の製造方法及び接着剤

Publications (2)

Publication Number Publication Date
JPWO2019123518A1 JPWO2019123518A1 (ja) 2020-12-17
JP7176532B2 true JP7176532B2 (ja) 2022-11-22

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JP2019559883A Active JP7176532B2 (ja) 2017-12-18 2017-12-18 半導体装置、半導体装置の製造方法及び接着剤

Country Status (4)

Country Link
JP (1) JP7176532B2 (ko)
KR (1) KR102455212B1 (ko)
CN (1) CN111480218B (ko)
WO (1) WO2019123518A1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102516288B1 (ko) * 2020-07-31 2023-03-31 주식회사 엘지화학 반도체 패키지 제조 방법, 이에 의해 제조된 반도체 패키지 및 반도체 패키지 제조 장치
JP2022078574A (ja) 2020-11-13 2022-05-25 昭和電工マテリアルズ株式会社 半導体装置の製造方法及びこれに用いられる接着剤

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011007531A1 (ja) 2009-07-17 2011-01-20 住友ベークライト株式会社 電子部品の製造方法および電子部品
JP2013168536A (ja) 2012-02-16 2013-08-29 Sumitomo Bakelite Co Ltd 半導体装置の製造方法
JP2014107355A (ja) 2012-11-26 2014-06-09 Sekisui Chem Co Ltd 半導体装置の製造方法
JP2014158046A (ja) 2008-12-24 2014-08-28 Nitto Denko Corp 熱硬化型ダイボンドフィルム
JP2015216317A (ja) 2014-05-13 2015-12-03 日東電工株式会社 半導体装置の製造方法
WO2016148121A1 (ja) 2015-03-19 2016-09-22 ナミックス株式会社 フリップチップ実装体の製造方法、フリップチップ実装体、および先供給型アンダーフィル用樹脂組成物
JP2016201418A (ja) 2015-04-08 2016-12-01 積水化学工業株式会社 半導体接合用接着フィルム及び半導体装置の製造方法
JP2017162927A (ja) 2016-03-08 2017-09-14 日立化成株式会社 半導体装置を製造する方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5912611B2 (ja) * 2004-03-22 2016-04-27 日立化成株式会社 フィルム状接着剤
JP5217260B2 (ja) 2007-04-27 2013-06-19 住友ベークライト株式会社 半導体ウエハーの接合方法および半導体装置の製造方法
JP5263158B2 (ja) * 2007-12-03 2013-08-14 日立化成株式会社 回路部材接続用接着剤及び半導体装置
JP5471163B2 (ja) * 2009-08-25 2014-04-16 住友ベークライト株式会社 半導体装置の製造方法
JP5564151B1 (ja) * 2012-08-06 2014-07-30 積水化学工業株式会社 半導体装置の製造方法及びフリップチップ実装用接着剤
JP6257303B2 (ja) * 2013-12-17 2018-01-10 デクセリアルズ株式会社 接続体の製造方法、接続方法、及び接続体
JP6544146B2 (ja) * 2015-08-27 2019-07-17 日立化成株式会社 半導体装置及びそれを製造する方法
CN108352333B (zh) * 2015-10-29 2021-07-20 昭和电工材料株式会社 半导体用粘接剂、半导体装置以及制造该半导体装置的方法
SG11201809734RA (en) * 2016-05-09 2018-12-28 Hitachi Chemical Co Ltd Method for manufacturing semiconductor device
JP2017220519A (ja) * 2016-06-06 2017-12-14 日立化成株式会社 半導体装置の製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014158046A (ja) 2008-12-24 2014-08-28 Nitto Denko Corp 熱硬化型ダイボンドフィルム
WO2011007531A1 (ja) 2009-07-17 2011-01-20 住友ベークライト株式会社 電子部品の製造方法および電子部品
JP2013168536A (ja) 2012-02-16 2013-08-29 Sumitomo Bakelite Co Ltd 半導体装置の製造方法
JP2014107355A (ja) 2012-11-26 2014-06-09 Sekisui Chem Co Ltd 半導体装置の製造方法
JP2015216317A (ja) 2014-05-13 2015-12-03 日東電工株式会社 半導体装置の製造方法
WO2016148121A1 (ja) 2015-03-19 2016-09-22 ナミックス株式会社 フリップチップ実装体の製造方法、フリップチップ実装体、および先供給型アンダーフィル用樹脂組成物
JP2016201418A (ja) 2015-04-08 2016-12-01 積水化学工業株式会社 半導体接合用接着フィルム及び半導体装置の製造方法
JP2017162927A (ja) 2016-03-08 2017-09-14 日立化成株式会社 半導体装置を製造する方法

Also Published As

Publication number Publication date
CN111480218B (zh) 2023-07-21
KR20200100668A (ko) 2020-08-26
JPWO2019123518A1 (ja) 2020-12-17
KR102455212B1 (ko) 2022-10-17
WO2019123518A1 (ja) 2019-06-27
CN111480218A (zh) 2020-07-31

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