JP6990705B2 - ナノコーティング装置用の遊星回転棚装置 - Google Patents

ナノコーティング装置用の遊星回転棚装置 Download PDF

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JP6990705B2
JP6990705B2 JP2019527245A JP2019527245A JP6990705B2 JP 6990705 B2 JP6990705 B2 JP 6990705B2 JP 2019527245 A JP2019527245 A JP 2019527245A JP 2019527245 A JP2019527245 A JP 2019527245A JP 6990705 B2 JP6990705 B2 JP 6990705B2
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堅 宗
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Description

本発明は、真空コーティングの技術分野に属し、特にナノコーティング装置用の遊星回転棚装置に関する。
プラズマコーティングは材料の表面特性を改善するための効果的な方法として、航空宇宙、自動車製造、重機や金物製造等の分野において広く使用されている。プラズマコーティング中、コーティング装置のチャンバー内の空気を取り出して低圧力状態を維持するとともに、プロセスガスと化学モノマーガスを注入して反応させてポリマーコーティングを生成する。プラズマコーティングの全過程にわたって排気し続ける必要があり、且つ排気口、吸気口、供給口の位置が固定されるため、化学モノマーガスが排気口の方向へ拡散する傾向があり、化学モノマーガスの供給口領域と拡散方向領域での密度が比較的大きくなってしまう。その結果、これらの領域に収納された被コーティングワークの表面のポリマーコーティングの厚さが厚いが、ほかの領域のコーティングの厚さが薄い現象が生じ、量産の品質のムラを招いてしまう。
本発明は、上記欠陥を克服してナノコーティング装置用の遊星回転棚装置を提供することを目的とする。
本発明は、上記目的を実現するために、ナノコーティング装置用の遊星回転棚装置を提供し、チャンバーを備え、前記チャンバーの天井部が排気口に接続され、排気口が真空ポンプに接続され、吸気弁が吸気配管を介してチャンバーに接続され、供給弁が供給配管を介してチャンバーに接続され、ＲＦ電源がワイヤを介してチャンバーの内部電極に接続され、チャンバーの中心軸の位置に中空管が取り付けられ、中空管に貫通孔が設けられ、前記中空管の上端が排気口に接続され、前記チャンバーの底部に回転モータが取り付けられ、回転モータに遊星回転棚が取り付けられ、
前記遊星回転棚は回転軸、及び回転載置棚を備え、前記回転軸が回転モータに接続され、回転軸が中空管と同軸であり、回転軸に回転載置棚が固定して設けられ、回転載置棚に少なくとも２本の遊星回転軸が対称的に設けられ、前記遊星回転軸に少なくとも１層の載置台が設けられ、前記遊星回転軸が回転載置棚に垂直であり且つ自転可能であり、載置台に処理対象のワークが配置されることを特徴とする。
前記遊星回転軸は２－８本、前記載置台は１－１０層である。
前記チャンバーは容積が５０～３０００Ｌ、材質がアルミ合金又はステンレス鋼である。
前記真空ポンプは電力が３－５０ＫＷ、排気速度が６００－１２００ｍ３／ｈである。
前記回転モータの電力は３０－３０００Ｗ、ＲＦ電源の電力は５０－１５００Ｗである。
本発明は下記の有益な効果を有する。
（１）コーティング中、ワークが中心の回転軸の周りを公転するだけでなく、遊星回転軸の周りを自転し、このように二重回転し続けることで、各領域での化学モノマーガスの密度ムラに起因する、一定領域のワークのコーティングの厚さムラを回避することができる。また、回転載置棚の回転によって、チャンバー内に注入された化学モノマーガスの十分な均一混合を容易にすることができる。
（２）中心軸の位置に取り付けられた中空管の軸方向に沿って間隔をおきながら複数の貫通孔が設けられるため、チャンバー内に注入された化学モノマーガスは各層の載置台の半径方向に沿って各層に対応する貫通孔の位置に向かって拡散する傾向を形成し、チャンバーの壁から中空管領域までの化学モノマーガスの密度をさらに均一にすることができる。
本発明に係るナノコーティング装置用の遊星回転棚装置の構成模式図である。
以下、図面及び具体的な実施形態を参照して本発明をさらに説明する。
（実施例１）
図１に示すように、ナノコーティング装置用の遊星回転棚装置は、チャンバーを備え、前記チャンバー３の天井部が排気口２に接続され、排気口が真空ポンプ１に接続され、吸気弁４が吸気配管を介してチャンバー３に接続され、供給弁５が供給配管を介してチャンバー３に接続され、ＲＦ電源１２がワイヤを介してチャンバー３の内部電極に接続され、チャンバーの中心軸の位置に中空管１０が取り付けられ、中空管に貫通孔が設けられ、前記中空管の上端が排気口に接続され、前記チャンバーの底部に回転モータ９が取り付けられ、回転モータに遊星回転棚が取り付けられ、
前記遊星回転棚は回転軸、及び回転載置棚１１を備え、前記回転軸が回転モータに接続され、回転軸が中空管と同軸であり、回転軸に回転載置棚１１が固定して設けられ、回転載置棚に遊星回転軸６が対称的に設けられ、前記遊星回転軸に載置台８が設けられ、前記遊星回転軸が回転載置棚に垂直であり且つ自転可能であり、載置台に処理対象のワーク７が配置される。
遊星回転軸は２本、載置台は１層である。
チャンバー３は容積が５０Ｌ、材質がアルミ合金である。
真空ポンプ１は電力が３ＫＷ、排気速度が６００ｍ３／ｈである。
回転モータ６の電力は３０Ｗ、ＲＦ電源の電力は５０Ｗである。
本発明の動作過程は以下の通りである。まず、コーティング対象のワーク７をコーティング装置のチャンバー３内の載置台８に配置し、真空ポンプ１によって排気口からチャンバー３内の空気を排出してチャンバー３内の圧力を１Ｐａ未満に下げ、次に、吸気弁４によって吸気口からチャンバー内にプロセスガスを注入し、供給弁５によって供給口からチャンバー内に化学モノマーガスを供給し、回転モータ９によって回転軸を回転駆動するとともに、遊星回転軸６によって載置台を自転駆動し、ＲＦ電源１２によって放電して化学モノマーガスを重合させワーク７の表面に堆積させてポリマーコーティングを形成する。
（実施例２）
本実施例に係るナノコーティング装置用の遊星回転棚装置の各部分の構造及び接続関係はともに実施例１と同様であり、異なる技術的パラメータは以下の通りである。
遊星回転軸は４本、載置台は３層である。
チャンバー３は容積が６００Ｌ、材質がアルミ合金である。
真空ポンプ１は電力が１０ＫＷ、排気速度が７００ｍ３／ｈである。
回転モータ６の電力は４００Ｗ、ＲＦ電源の電力は６００Ｗである。
（実施例３）
本実施例に係るナノコーティング装置用の遊星回転棚装置の各部分の構造及び接続関係はともに実施例１と同様であり、異なる技術的パラメータは以下の通りである。
遊星回転軸は４本、載置台は５層である。
チャンバー３は容積が１２００Ｌ、材質がステンレス鋼である。
真空ポンプ１は電力が２０ＫＷ、排気速度が９００ｍ３／ｈである。
回転モータ６の電力は８００Ｗ、ＲＦ電源の電力は９００Ｗである。
（実施例４）
本実施例に係るナノコーティング装置用の遊星回転棚装置の各部分の構造及び接続関係はともに実施例１と同様であり、異なる技術的パラメータは以下の通りである。
遊星回転軸は６本、載置台は８層である。
チャンバー３は容積が２２００Ｌ、材質がステンレス鋼である。
真空ポンプ１は電力が４０ＫＷ、排気速度が１１００ｍ３／ｈである。
回転モータ６の電力は１８００Ｗ、ＲＦ電源の電力は１２００Ｗである。
（実施例５）
本実施例に係るナノコーティング装置用の遊星回転棚装置の各部分の構造及び接続関係はともに実施例１と同様であり、異なる技術的パラメータは以下の通りである。
遊星回転軸は８本、載置台は１０層である。
チャンバー３は容積が３０００Ｌ、材質がステンレス鋼である。
真空ポンプ１は電力が５０ＫＷ、排気速度が１２００ｍ３／ｈである。
回転モータ６の電力は３０００Ｗ、ＲＦ電源の電力は１５００Ｗである。
１ 真空ポンプ、
２ 排気口、
３ チャンバー、
４ 吸気弁、
５ 供給弁、
６ 遊星回転軸、
７ ワーク、
８ 載置台、
９ 回転モータ、
１０ 中空管、
１１ 回転載置棚、
１２ ＲＦ電源。

Claims (5)

  1. チャンバーを備え、前記チャンバー（３）の天井部が排気口（２）に接続され、排気口が真空ポンプ（１）に接続され、プロセスガスを注入するための吸気弁（４）が吸気配管を介してチャンバー（３）に接続され、化学モノマーガスを供給するための供給弁（５）が供給配管を介してチャンバー（３）に接続され、放電により前記化学モノマーガスを重合させるためのＲＦ電源（１２）がワイヤを介してチャンバー（３）の内部電極に接続され、チャンバーの中心軸の位置に中空管（１０）が取り付けられ、中空管に貫通孔が設けられ、前記中空管の上端が排気口に接続され、前記チャンバーの底部に回転モータ（９）が取り付けられ、回転モータに遊星回転棚が取り付けられ、
    前記遊星回転棚は回転軸、及び回転載置棚（１１）を備え、前記回転軸が回転モータに接続され、回転軸が中空管と同軸であり、回転軸に回転載置棚（１１）が固定して設けられ、回転載置棚に少なくとも２本の遊星回転軸（６）が対称的に設けられ、前記遊星回転軸に少なくとも１層の載置台（８）が設けられ、前記遊星回転軸が回転載置棚に垂直であり且つ自転可能であり、載置台に処理対象のワーク（７）が配置され、前記チャンバーの壁から前記中空管の領域までの前記化学モノマーガスの密度が均一となるように、前記貫通孔は前記中心軸の軸方向に沿って間隔をおきながら複数設けられ、前記チャンバー内に注入された前記化学モノマーガスは各層の前記載置台の半径方向に沿って各層に対応する前記貫通孔の位置に向かって拡散される傾向を形成することを特徴とするナノコーティング装置用の遊星回転棚装置。
  2. 前記遊星回転軸は２－８本、前記載置台は１－１０層であることを特徴とする請求項１に記載のナノコーティング装置用の遊星回転棚装置。
  3. 前記チャンバー（３）は容積が５０～３０００Ｌ、材質がアルミ合金又はステンレス鋼であることを特徴とする請求項１に記載のナノコーティング装置用の遊星回転棚装置。
  4. 前記真空ポンプ（１）は電力が３－５０ＫＷ、排気速度が６００－１２００ｍ３／ｈであることを特徴とする請求項１に記載のナノコーティング装置用の遊星回転棚装置。
  5. 前記回転モータ（６）の電力は３０－３０００Ｗ、ＲＦ電源の電力は５０－１５００Ｗであることを特徴とする請求項１に記載のナノコーティング装置用の遊星回転棚装置。
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