JP6916622B2 - 多孔質石英ガラス母材の製造方法 - Google Patents

多孔質石英ガラス母材の製造方法 Download PDF

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Publication number
JP6916622B2
JP6916622B2 JP2017012788A JP2017012788A JP6916622B2 JP 6916622 B2 JP6916622 B2 JP 6916622B2 JP 2017012788 A JP2017012788 A JP 2017012788A JP 2017012788 A JP2017012788 A JP 2017012788A JP 6916622 B2 JP6916622 B2 JP 6916622B2
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JP
Japan
Prior art keywords
seed rod
quartz glass
base material
glass base
semi
Prior art date
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Active
Application number
JP2017012788A
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English (en)
Japanese (ja)
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JP2018118887A (ja
JP2018118887A5 (enExample
Inventor
児太郎 角
児太郎 角
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP2017012788A priority Critical patent/JP6916622B2/ja
Priority to CN201810047374.7A priority patent/CN108358437B/zh
Priority to EP18153555.0A priority patent/EP3354627B1/en
Publication of JP2018118887A publication Critical patent/JP2018118887A/ja
Publication of JP2018118887A5 publication Critical patent/JP2018118887A5/ja
Application granted granted Critical
Publication of JP6916622B2 publication Critical patent/JP6916622B2/ja
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01486—Means for supporting, rotating or translating the preforms being formed, e.g. lathes
    • C03B37/01493—Deposition substrates, e.g. targets, mandrels, start rods or tubes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1484—Means for supporting, rotating or translating the article being formed
    • C03B19/1492—Deposition substrates, e.g. targets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Melting And Manufacturing (AREA)
JP2017012788A 2017-01-27 2017-01-27 多孔質石英ガラス母材の製造方法 Active JP6916622B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017012788A JP6916622B2 (ja) 2017-01-27 2017-01-27 多孔質石英ガラス母材の製造方法
CN201810047374.7A CN108358437B (zh) 2017-01-27 2018-01-17 多孔石英玻璃母材的制造方法
EP18153555.0A EP3354627B1 (en) 2017-01-27 2018-01-26 Method of producing porous quartz glass preform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017012788A JP6916622B2 (ja) 2017-01-27 2017-01-27 多孔質石英ガラス母材の製造方法

Publications (3)

Publication Number Publication Date
JP2018118887A JP2018118887A (ja) 2018-08-02
JP2018118887A5 JP2018118887A5 (enExample) 2019-11-21
JP6916622B2 true JP6916622B2 (ja) 2021-08-11

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JP2017012788A Active JP6916622B2 (ja) 2017-01-27 2017-01-27 多孔質石英ガラス母材の製造方法

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EP (1) EP3354627B1 (enExample)
JP (1) JP6916622B2 (enExample)
CN (1) CN108358437B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115072985A (zh) * 2022-06-13 2022-09-20 山东富通光导科技有限公司 一种解决大尺寸vad芯棒断裂的方法
CN120794327B (zh) * 2025-09-05 2025-12-09 南通晶体有限公司 石英粉末体制备系统及制备方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA712238A (en) * 1965-06-22 E. Tragert William Electrical conductor
JPS57200236A (en) 1981-06-03 1982-12-08 Nippon Telegr & Teleph Corp <Ntt> Method for deposition of oxide soot for forming glass rod
JPS58135147A (ja) * 1982-02-08 1983-08-11 Hitachi Ltd 光フアイバ母材の製造方法
JPH06183770A (ja) 1992-12-16 1994-07-05 Furukawa Electric Co Ltd:The 光ファイバ用母材の製造方法
JP3202863B2 (ja) * 1994-03-18 2001-08-27 日本板硝子株式会社 光触媒担持線状物品
CN101652331B (zh) * 2007-02-28 2013-05-08 信越化学工业株式会社 多孔质玻璃母材的制造装置
JP2011256069A (ja) 2010-06-09 2011-12-22 Nikon Corp ターゲット棒、多孔質ガラス母材の製造装置、多孔質ガラス母材の製造方法及びガラス部材の製造方法
JP6049056B2 (ja) * 2012-08-23 2016-12-21 神島化学工業株式会社 光学用セラミックスとその製造方法
JP2015000169A (ja) * 2013-06-14 2015-01-05 ユーヴィックス株式会社 光浄化処理プローブ

Also Published As

Publication number Publication date
EP3354627B1 (en) 2021-05-05
JP2018118887A (ja) 2018-08-02
CN108358437B (zh) 2021-10-08
CN108358437A (zh) 2018-08-03
EP3354627A1 (en) 2018-08-01

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