JP6914107B2 - ボロン膜の除去方法 - Google Patents
ボロン膜の除去方法 Download PDFInfo
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- JP6914107B2 JP6914107B2 JP2017111209A JP2017111209A JP6914107B2 JP 6914107 B2 JP6914107 B2 JP 6914107B2 JP 2017111209 A JP2017111209 A JP 2017111209A JP 2017111209 A JP2017111209 A JP 2017111209A JP 6914107 B2 JP6914107 B2 JP 6914107B2
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Description
最初に、本発明に係るボロン膜の除去方法の概要について説明する。
ボロン膜は、従来からハードマスクとして用いられていたアモルファスシリコン膜やアモルファスカーボン膜よりもドライエッチング耐性が高いため、厚い積層膜をエッチングする際のハードマスクに適している。
ボロンは化学的に安定な物質であるが、酸化ボロン(加水物)は水溶性(水溶性に近い性質)であるため、ボロンを酸化させれば容易に除去することができる。実際、酸化ボロンの薬液処理では、薬液により酸化ボロンが形成され、その後の純水洗浄により酸化ボロンが除去されていると考えられる。
次に、本発明の一実施形態に係るボロン膜除去方法について説明する。図1は本発明の一実施形態に係るボロン膜除去方法を示すフローチャートである。
上述したように、CVDにより成膜されたボロン膜は、成膜ガスとしてB2H6ガスのようなボロンと水素を含有するものを用いるので、膜中には成膜ガス由来の水素が相当量含まれる。この状態のボロン膜を従来のようにO2プラズマにより処理しても酸素はボロン膜中には入り込めずボロンと酸素との反応はほとんど生じない。
次に、上記実施形態のボロン膜除去方法をボロン膜によるパターン形成に応用した実施形態について説明する。
まず、パターン形成への応用の第1の例について説明する。
図5は、本例のパターン形成方法を示す工程断面図である。
次に、パターン形成への応用の第2の例について説明する。
図6は、本例のパターン形成方法を示す工程断面図である。
次に、ウエハ端部におけるボロン膜の局所的除去について説明する。
半導体素子の形成において微細加工を行うためにはフォトリソグラフィーを用いてパターン形成を行っているが、近年、パターンのさらなる微細化にともなって行われている短波長化(ArF、λ=193nm)や、光屈折を利用した液浸露光では、パーティクルや汚染問題の観点からウエハ端部(エッジ・ベベル)での膜の管理が強く求められている。
まず、ウエハ端部の局所的除去への応用の第1の例について説明する。
図7は、本例のウエハ端部の局所的除去を示す工程断面図である。
次に、ウエハ端部の局所的除去への応用の第2の例について説明する。
図8は、本例のウエハ端部の局所的除去を示す工程断面図である。
次に、実験結果について説明する。
[実験1]
ここでは、シリコンウエハ上に、成膜原料ガスとしてジボラン(B2H6)ガスを用い、温度:300℃、圧力:50mTorr(6.67Pa)の条件でプラズマCVDにより厚さ140nmのボロン膜を形成したサンプルを準備し、O2ガス雰囲気800℃で30minの熱処理を行った後、超音波振動させた純水中に30分浸漬するボロン膜除去処理を行った。図9にその際の処理前と処理後のSEM写真を示す。この写真に示すように、熱処理と純水処理によるボロン膜除去処理によって、ボロン膜が完全に除去されていることが確認された。
ここでは、実験1と同様、シリコンウエハ上に、成膜原料ガスとしてジボラン(B2H6)ガスを用い、温度:300℃、圧力:50mTorr(6.67Pa)の条件でプラズマCVDによりボロン膜を形成したサンプルを複数準備し、温度を400℃、500℃、600℃と変化させて、O2ガス雰囲気で30分の熱処理を行った後、超音波振動させた純水中に30分浸漬するボロン膜除去処理を行った。図11に処理前、および各温度で熱処理を行った処理後のSEM写真を示す。この図に示すように、熱処理温度が500℃および600℃のサンプルについては、熱処理と純水処理によるボロン膜除去処理によって、ボロン膜が完全に除去されていることが確認された。また、熱処理温度が400℃のサンプルについては、ボロン膜除去処理によって多少ボロン膜が除去されたが、完全に除去するには、さらに長時間の処理が必要であると考えられる。
ここでは、実験1と同様、シリコンウエハ上に、成膜原料ガスとしてジボラン(B2H6)ガスを用い、温度:300℃、圧力:50mTorr(6.67Pa)の条件でプラズマCVDによりボロン膜を形成したサンプルを複数準備し、温度を400℃、600℃、800℃、時間を1min、10min、20min、30minと変化させて、O2ガス雰囲気での熱処理を行った後、超音波振動させた純水中に30分浸漬するボロン膜除去処理を行った。図12に処理前、および熱処理を各温度および各時間で行った処理後のSEM写真を示す。この図に示すように、熱処理温度が800℃では、処理時間が1minでボロン膜がほぼ除去されていた。また、熱処理温度が600℃では、処理時間が1minでボロン膜が厚さ140nmから120nmまで減膜し、処理時間が10minでボロン膜がほぼ除去されていた。さらに、熱処理温度が400℃では、実験2と同様、処理時間が30minで多少ボロン膜が除去されたが、完全に除去するには、さらに長時間の処理が必要であると考えられる。
以上、本発明の実施の形態について説明したが、本発明は上記実施形態に限定されることなく本発明の思想の範囲内で種々変形可能である。
2;絶縁膜
3;CVDボロン膜
4;酸化ボロン
5,25;レジストまたはマスク材料の膜
11;酸素ノズル
12;レーザー光源
13;レーザー
14;ランプ光源
21;ウエハ
23;ボロン膜
Claims (15)
- CVDにより基板上に形成されたボロン膜を除去するボロン膜の除去方法であって、
前記ボロン膜を、酸化雰囲気でレーザー加熱により部分的に熱処理し、熱処理した部分を酸化させる工程と、
前記ボロン膜の酸化された部分を水または電解質イオンを含む水溶液により除去する工程と
を有し、
前記レーザー加熱により部分的に熱処理して酸化させる工程と、前記酸化された部分を除去する工程とにより、フォトリソグラフフィー工程を行うことなく、前記ボロン膜を部分的に除去することを特徴とするボロン膜の除去方法。 - 前記酸化雰囲気は酸素またはオゾンを含むことを特徴とする請求項1に記載のボロン膜の除去方法。
- 前記電解質イオンは、H+、NH4 +、F−、Cl−、NO3 −、SO4 2−、OH−のいずれかを含むことを特徴とする請求項1または2に記載のボロン膜の除去方法。
- 前記電解質イオンの水溶液は、酸化性を有する酸以外であることを特徴とする請求項3に記載のボロン膜の除去方法。
- 前記ボロン膜は、ボロンと水素を含む原料ガスを用いて成膜されたものであることを特徴とする請求項1から請求項4のいずれか1項に記載のボロン膜の除去方法。
- 前記ボロン膜は、プラズマCVDにより成膜されたものであることを特徴とする請求項1から請求項5のいずれか1項に記載のボロン膜の除去方法。
- 前記熱処理は、400〜1000℃の範囲の温度で行うことを特徴とする請求項1から請求項6のいずれか1項に記載のボロン膜の除去方法。
- 前記熱処理は、1〜60分の期間行うことを特徴とする請求項1から請求項7のいずれか1項に記載のボロン膜の除去方法。
- 前記熱処理は、酸素ガスまたはオゾンガス濃度が20〜100%の雰囲気で行われることを特徴とする請求項1から請求項8のいずれか1項に記載のボロン膜の除去方法。
- 前記除去する工程は、前記基板を純水または電解質イオンを含む水溶液に浸漬することにより行うことを特徴とする請求項1から請求項9のいずれか1項に記載のボロン膜の除去方法。
- 前記基板が浸漬された純水または電解質イオンを含む水溶液に超音波振動を与えることを特徴とする請求項10に記載のボロン膜の除去方法。
- 前記除去する工程は、前記基板に純水または電解質イオンを含む水溶液の流水を供給することにより行うことを特徴とする請求項1から請求項9のいずれか1項に記載のボロン膜の除去方法。
- 前記ボロン膜を部分的に除去することにより、パターンを形成することを特徴とする請求項1から請求項12のいずれか一項に記載のボロン膜の除去方法。
- 前記ボロン膜の基板の端部に対応する部分を部分的に除去することを特徴とする請求項1から請求項12のいずれか一項に記載のボロン膜の除去方法。
- 前記ボロンと水素を含むガスは、三塩化ホウ素(BCl 3 )ガスと水素との混合ガス、トリメチルボラン(B(CH 3 ) 3 )ガス、トリエチルボラン(B(C 2 H 5 ) 3 )ガスから選択されたものであることを特徴とする請求項5に記載のボロン膜の除去方法。
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KR1020180063972A KR102071794B1 (ko) | 2017-06-05 | 2018-06-04 | 붕소막의 제거 방법 및 붕소막에 의한 패턴 형성 방법 |
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