JPS5411115B2 - - Google Patents
Info
- Publication number
- JPS5411115B2 JPS5411115B2 JP2719072A JP2719072A JPS5411115B2 JP S5411115 B2 JPS5411115 B2 JP S5411115B2 JP 2719072 A JP2719072 A JP 2719072A JP 2719072 A JP2719072 A JP 2719072A JP S5411115 B2 JPS5411115 B2 JP S5411115B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2719072A JPS5411115B2 (ja) | 1972-03-16 | 1972-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2719072A JPS5411115B2 (ja) | 1972-03-16 | 1972-03-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4895179A JPS4895179A (ja) | 1973-12-06 |
| JPS5411115B2 true JPS5411115B2 (ja) | 1979-05-11 |
Family
ID=12214146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2719072A Expired JPS5411115B2 (ja) | 1972-03-16 | 1972-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5411115B2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6133636Y2 (ja) * | 1981-01-29 | 1986-10-01 | ||
| JPS6015919A (ja) * | 1983-07-07 | 1985-01-26 | Rohm Co Ltd | 半導体素子の製造方法 |
| JP6914107B2 (ja) * | 2017-06-05 | 2021-08-04 | 東京エレクトロン株式会社 | ボロン膜の除去方法 |
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1972
- 1972-03-16 JP JP2719072A patent/JPS5411115B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4895179A (ja) | 1973-12-06 |