JP6911446B2 - センサー素子、センサー、電子機器および移動体 - Google Patents

センサー素子、センサー、電子機器および移動体 Download PDF

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JP6911446B2
JP6911446B2 JP2017062253A JP2017062253A JP6911446B2 JP 6911446 B2 JP6911446 B2 JP 6911446B2 JP 2017062253 A JP2017062253 A JP 2017062253A JP 2017062253 A JP2017062253 A JP 2017062253A JP 6911446 B2 JP6911446 B2 JP 6911446B2
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arm
detection
base
drive
extending
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JP2018165633A5 (enrdf_load_stackoverflow
JP2018165633A (ja
Inventor
竜太 西澤
竜太 西澤
啓一 山口
啓一 山口
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2017062253A priority Critical patent/JP6911446B2/ja
Priority to US15/928,623 priority patent/US10690500B2/en
Priority to CN201810241095.4A priority patent/CN108663038B/zh
Publication of JP2018165633A publication Critical patent/JP2018165633A/ja
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JP2017062253A 2017-03-28 2017-03-28 センサー素子、センサー、電子機器および移動体 Active JP6911446B2 (ja)

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Application Number Priority Date Filing Date Title
JP2017062253A JP6911446B2 (ja) 2017-03-28 2017-03-28 センサー素子、センサー、電子機器および移動体
US15/928,623 US10690500B2 (en) 2017-03-28 2018-03-22 Sensor element, sensor, electronic apparatus, and vehicle
CN201810241095.4A CN108663038B (zh) 2017-03-28 2018-03-22 传感器元件、传感器、电子设备以及移动体

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JP2017062253A JP6911446B2 (ja) 2017-03-28 2017-03-28 センサー素子、センサー、電子機器および移動体

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JP2018165633A JP2018165633A (ja) 2018-10-25
JP2018165633A5 JP2018165633A5 (enrdf_load_stackoverflow) 2020-04-30
JP6911446B2 true JP6911446B2 (ja) 2021-07-28

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Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4893335B2 (ja) * 2007-01-26 2012-03-07 セイコーエプソン株式会社 ジャイロモジュール
US20140028158A1 (en) * 2012-07-26 2014-01-30 Seiko Instruments Inc. Piezoelectric vibrating strip, piezoelectric vibrator, oscillator, electronic device, and radio timepiece
JP6255903B2 (ja) * 2013-10-31 2018-01-10 セイコーエプソン株式会社 角速度センサー、電子機器および移動体
JP2015097368A (ja) * 2013-11-16 2015-05-21 セイコーエプソン株式会社 振動子、発振器、電子機器および移動体

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