JP6909854B2 - 塗布処理装置、塗布処理方法及びコンピュータ記憶媒体 - Google Patents

塗布処理装置、塗布処理方法及びコンピュータ記憶媒体 Download PDF

Info

Publication number
JP6909854B2
JP6909854B2 JP2019532511A JP2019532511A JP6909854B2 JP 6909854 B2 JP6909854 B2 JP 6909854B2 JP 2019532511 A JP2019532511 A JP 2019532511A JP 2019532511 A JP2019532511 A JP 2019532511A JP 6909854 B2 JP6909854 B2 JP 6909854B2
Authority
JP
Japan
Prior art keywords
coating
substrate
liquid
coating liquid
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019532511A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2019021859A1 (ja
Inventor
徳彦 西村
徳彦 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of JPWO2019021859A1 publication Critical patent/JPWO2019021859A1/ja
Application granted granted Critical
Publication of JP6909854B2 publication Critical patent/JP6909854B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B05C13/025—Means for manipulating or holding work, e.g. for separate articles for particular articles relatively small cylindrical objects, e.g. cans, bottles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/06—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements

Landscapes

  • Coating Apparatus (AREA)
  • Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP2019532511A 2017-07-27 2018-07-13 塗布処理装置、塗布処理方法及びコンピュータ記憶媒体 Active JP6909854B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017145753 2017-07-27
JP2017145753 2017-07-27
PCT/JP2018/026496 WO2019021859A1 (ja) 2017-07-27 2018-07-13 塗布処理装置、塗布処理方法及びコンピュータ記憶媒体

Publications (2)

Publication Number Publication Date
JPWO2019021859A1 JPWO2019021859A1 (ja) 2020-07-02
JP6909854B2 true JP6909854B2 (ja) 2021-07-28

Family

ID=65040597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019532511A Active JP6909854B2 (ja) 2017-07-27 2018-07-13 塗布処理装置、塗布処理方法及びコンピュータ記憶媒体

Country Status (5)

Country Link
JP (1) JP6909854B2 (ko)
KR (1) KR102492389B1 (ko)
CN (1) CN110891697B (ko)
TW (1) TWI790255B (ko)
WO (1) WO2019021859A1 (ko)

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5360516A (en) * 1992-11-12 1994-11-01 Philip Morris Incorporated Application of fluidized material to a substrate using intermittent charges of compressed air
JPH07232120A (ja) * 1994-02-24 1995-09-05 Konica Corp 塗布方法及び塗布装置
JP4040144B2 (ja) * 1996-08-07 2008-01-30 松下電器産業株式会社 塗布装置
CN2279961Y (zh) * 1996-12-31 1998-04-29 中国科学院感光化学研究所 去除涂布厚边的装置
JP3940054B2 (ja) * 2002-10-07 2007-07-04 大日本スクリーン製造株式会社 ノズル清掃装置およびこのノズル清掃装置を備えた基板処理装置
JP2005062502A (ja) 2003-08-13 2005-03-10 Nakan Corp 偏光膜印刷装置
US8459201B2 (en) * 2007-11-08 2013-06-11 Shibaura Mechatronics Corporation Droplet applying device, droplet applying method, liquid crystal display panel manufacturing apparatus, and liquid crystal display panel manufacturing method
JP5757777B2 (ja) * 2011-04-15 2015-07-29 パナソニック株式会社 基板塗布方法及び基板塗布装置並びに同方法を用いた有機エレクトロルミネッセント素子の製造方法
JP2013184126A (ja) * 2012-03-08 2013-09-19 Dainippon Printing Co Ltd 塗工装置
JP2013202489A (ja) * 2012-03-28 2013-10-07 Dainippon Screen Mfg Co Ltd 塗布装置
JP5919113B2 (ja) * 2012-07-04 2016-05-18 東京エレクトロン株式会社 塗布処理装置、塗布処理方法、プログラム及びコンピュータ記憶媒体
JP2014147857A (ja) * 2013-01-31 2014-08-21 Hitachi Vehicle Energy Ltd ダイコータ装置
AT515608B1 (de) * 2014-04-03 2016-06-15 Worff Herwig Dipl Ing Vorrichtung zum Verschließen von Säcken aus Gewebe

Also Published As

Publication number Publication date
CN110891697B (zh) 2022-02-25
JPWO2019021859A1 (ja) 2020-07-02
TWI790255B (zh) 2023-01-21
WO2019021859A1 (ja) 2019-01-31
KR102492389B1 (ko) 2023-01-26
TW201919768A (zh) 2019-06-01
KR20200035974A (ko) 2020-04-06
CN110891697A (zh) 2020-03-17

Similar Documents

Publication Publication Date Title
JP6761860B2 (ja) 塗布処理装置、塗布処理方法及びコンピュータ記憶媒体
US8354142B2 (en) Method for coating polyimide layer using inkjet device
JP2002090547A (ja) 偏光子製造装置
KR100965573B1 (ko) 잉크젯 헤드의 세정장비
JP6909854B2 (ja) 塗布処理装置、塗布処理方法及びコンピュータ記憶媒体
US8857334B2 (en) Cleaning apparatuses for printing plates and printing apparatuses including the same
CN102207682A (zh) 抗蚀剂涂布方法和抗蚀剂涂布装置、以及使用该抗蚀剂涂布方法的光掩模底版和光掩模的制造方法
US7108749B2 (en) Technological machinery for production of polarizers
KR20070113524A (ko) 슬릿 다이 노즐부 세정 장치
KR101779727B1 (ko) 편광 필름의 제조 방법, 편광 필름 제조 장치 및 이를 이용하여 제조되는 편광필름
JP5168029B2 (ja) 印刷装置及び印刷物の製造方法
TWI766981B (zh) 塗佈處理裝置、塗佈處理方法，及光學膜形成裝置
KR20080082077A (ko) 배향막 인쇄장치
JPWO2011033863A1 (ja) 塗布装置および塗布方法
US20200026130A1 (en) Method of producing glass substrate for liquid crystal display device
JP2007260647A (ja) スリットコータ
WO2018003425A1 (ja) 光学膜形成方法、コンピュータ記憶媒体及び光学膜形成装置
JP2011016088A (ja) 塗布装置および塗布方法
JP2011016089A (ja) 塗布装置および塗布方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200114

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20201027

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201217

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210608

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210705

R150 Certificate of patent or registration of utility model

Ref document number: 6909854

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150