JP6832130B2 - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
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- JP6832130B2 JP6832130B2 JP2016215948A JP2016215948A JP6832130B2 JP 6832130 B2 JP6832130 B2 JP 6832130B2 JP 2016215948 A JP2016215948 A JP 2016215948A JP 2016215948 A JP2016215948 A JP 2016215948A JP 6832130 B2 JP6832130 B2 JP 6832130B2
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- 230000008021 deposition Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 claims description 97
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 239000013076 target substance Substances 0.000 claims description 3
- 238000004088 simulation Methods 0.000 description 19
- 230000015572 biosynthetic process Effects 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- 239000004020 conductor Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3417—Arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3447—Collimators, shutters, apertures
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Description
<第1のシミュレーションの設定>
・第1のターゲット26の表面のY方向における幅:240mm
・第1のターゲット26の表面のY方向に直交する方向における幅:180mm
・第1のターゲット26の表面の中心と遮蔽部材18の上面におけるスリット18sの中心との間のX方向における距離:245mm
・第1のターゲット26の表面の中心と遮蔽部材18の上面におけるスリット18sの中心との間のZ方向における距離:295mm
・第1のターゲット26の表面の中心と基板Wの表面との間のZ方向における距離:300mm
・第1の法線方向ND1と水平面とがなす角度:52度
・第2のターゲット28の表面のY方向における幅:240mm
・第2のターゲット28の表面のY方向に直交する方向における幅:180mm
・第2のターゲット28の表面の中心と遮蔽部材18の上面におけるスリット18sの中心との間のX方向における距離:245mm
・第2のターゲット28の表面の中心と遮蔽部材18の上面におけるスリット18sの中心との間のZ方向における距離:295mm
・第2のターゲット28の表面の中心と基板Wの表面との間のZ方向における距離:300mm
・第2の法線方向ND2と水平面とがなす角度:52度
・基板Wの直径:300mm
<第2のシミュレーションの設定>
・第1のターゲット26の表面のサイズ:240mm×180mm
・第1のターゲット26の表面の中心と遮蔽部材18の上面におけるスリット18sの中心との間のX方向における距離:265mm
・第1のターゲット26の表面の中心と遮蔽部材18の上面におけるスリット18sの中心との間のZ方向における距離:275mm
・第1のターゲット26の表面の中心と基板Wの表面との間のZ方向における距離:280mm
・垂直面に投影された第1の法線方向ND1が水平面とがなす角度:52度
・第2のターゲット28の表面のサイズ:240mm×180mm
・第2のターゲット28の表面の中心と遮蔽部材18の上面におけるスリット18sの中心との間のX方向における距離:265mm
・第2のターゲット28の表面の中心と遮蔽部材18の上面におけるスリット18sの中心との間のZ方向における距離:275mm
・第2のターゲット28の表面の中心と基板Wの表面との間のZ方向における距離:280mm
・垂直面に投影された第2の法線方向ND2が水平面とがなす角度:52度
・第1のターゲット26の表面の中心と第2のターゲット28の表面の中心との間の距離:280mm
・基板Wの直径:300mm
Claims (2)
- スパッタリングによって基板上に膜を形成する成膜装置であって、
チャンバ本体と、
前記チャンバ本体内において基板を支持する支持体と、
前記支持体によって支持された前記基板の中心が水平面内の直線経路上で移動するように前記支持体を移動させる移動装置と、
前記移動装置によって基板が移動される領域の上方に設けられた遮蔽部材であり、前記移動装置による前記基板の移動方向に直交する方向に延在し、且つ、前記直線経路を含む垂直面に対して対称に延在するスリットが形成された、該遮蔽部材と、
第1のターゲットの表面の法線方向である第1の法線方向が下方に傾斜し、且つ、該第1のターゲットの該表面が前記移動装置によって移動される前記基板に前記スリットを介して対面するよう、前記遮蔽部材の上方において該第1のターゲットを保持する第1のホルダと、
第2のターゲットの表面の法線方向である第2の法線方向が下方に傾斜し、且つ、該第2のターゲットの該表面が前記移動装置によって移動される前記基板に前記スリットを介して対面するよう、前記遮蔽部材の上方において該第2のターゲットを保持する第2のホルダと、
を備え、
前記第1のホルダ及び前記第2のホルダは、前記第1のターゲット及び前記第2のターゲットを前記直線経路を含む垂直面に対して対称に配置するように設けられており、前記第1の法線方向の水平成分及び前記第2の法線方向の水平成分が前記移動方向に対して平行であり、且つ、前記第1のターゲットの前記表面の中心と前記第2のターゲットの前記表面の中心との間の距離が、前記移動方向に直交する方向における前記基板の幅の1倍以上、2.66倍以下であるように、前記第1のターゲット及び前記第2のターゲットを保持する、
成膜装置。 - 前記第1のターゲット及び前記第2のターゲットに電圧を印加するための一以上の電源と、
前記一以上の電源による前記第1のターゲット及び前記第2のターゲットに対する電圧の印加を制御する制御部と、
を更に備え、
前記制御部は、前記第1のターゲット及び前記第2のターゲットから同時にターゲット物質を放出させるよう、前記一以上の電源を制御する、
請求項1に記載の成膜装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016215948A JP6832130B2 (ja) | 2016-11-04 | 2016-11-04 | 成膜装置 |
US16/346,705 US11410837B2 (en) | 2016-11-04 | 2017-10-23 | Film-forming device |
PCT/JP2017/038142 WO2018084010A1 (ja) | 2016-11-04 | 2017-10-23 | 成膜装置 |
KR1020197011618A KR20190056416A (ko) | 2016-11-04 | 2017-10-23 | 성막 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016215948A JP6832130B2 (ja) | 2016-11-04 | 2016-11-04 | 成膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018070982A JP2018070982A (ja) | 2018-05-10 |
JP6832130B2 true JP6832130B2 (ja) | 2021-02-24 |
Family
ID=62075805
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016215948A Active JP6832130B2 (ja) | 2016-11-04 | 2016-11-04 | 成膜装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11410837B2 (ja) |
JP (1) | JP6832130B2 (ja) |
KR (1) | KR20190056416A (ja) |
WO (1) | WO2018084010A1 (ja) |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59222581A (ja) * | 1983-05-31 | 1984-12-14 | Fujitsu Ltd | スパツタリング装置 |
JPH0641733A (ja) | 1992-07-28 | 1994-02-15 | Matsushita Electric Ind Co Ltd | 反応性スパッタリング装置 |
JPH0693426A (ja) * | 1992-09-11 | 1994-04-05 | Hitachi Ltd | 薄膜形成装置 |
JP2000129436A (ja) * | 1998-08-19 | 2000-05-09 | Asahi Glass Co Ltd | インライン型スパッタリング装置およびスパッタリング方法 |
US6267851B1 (en) | 1999-10-28 | 2001-07-31 | Applied Komatsu Technology, Inc. | Tilted sputtering target with shield to block contaminants |
JP2002208531A (ja) | 2001-01-11 | 2002-07-26 | Hitachi Ltd | 薄膜構造体の製造方法と磁気ヘッドの製造方法およびその装置 |
US20050029091A1 (en) | 2003-07-21 | 2005-02-10 | Chan Park | Apparatus and method for reactive sputtering deposition |
US9206500B2 (en) | 2003-08-11 | 2015-12-08 | Boris Druz | Method and apparatus for surface processing of a substrate using an energetic particle beam |
JP2005256032A (ja) * | 2004-03-10 | 2005-09-22 | Cyg Gijutsu Kenkyusho Kk | スパッタ装置 |
US20060054494A1 (en) * | 2004-09-16 | 2006-03-16 | Veeco Instruments Inc. | Physical vapor deposition apparatus for depositing thin multilayer films and methods of depositing such films |
US7918940B2 (en) | 2005-02-07 | 2011-04-05 | Semes Co., Ltd. | Apparatus for processing substrate |
US8460519B2 (en) | 2005-10-28 | 2013-06-11 | Applied Materials Inc. | Protective offset sputtering |
JP5299049B2 (ja) * | 2009-04-17 | 2013-09-25 | パナソニック株式会社 | スパッタリング装置およびスパッタリング方法 |
JP5364172B2 (ja) * | 2009-11-10 | 2013-12-11 | キヤノンアネルバ株式会社 | スパッタリング装置による成膜方法およびスパッタリング装置 |
JP6224677B2 (ja) * | 2012-05-09 | 2017-11-01 | シーゲイト テクノロジー エルエルシーSeagate Technology LLC | スパッタリング装置 |
JP5882934B2 (ja) | 2012-05-09 | 2016-03-09 | シーゲイト テクノロジー エルエルシー | スパッタリング装置 |
JP5998654B2 (ja) | 2012-05-31 | 2016-09-28 | 東京エレクトロン株式会社 | 真空処理装置、真空処理方法及び記憶媒体 |
US9347127B2 (en) | 2012-07-16 | 2016-05-24 | Veeco Instruments, Inc. | Film deposition assisted by angular selective etch on a surface |
JP2014116059A (ja) | 2012-11-16 | 2014-06-26 | Iza Corp | トンネルバリア層又はゲート絶縁膜の製造方法及びトンネルバリア層又はゲート絶縁膜の製造装置 |
KR101953432B1 (ko) | 2012-12-26 | 2019-02-28 | 캐논 아네르바 가부시키가이샤 | 기판 처리 장치 |
JP2015067856A (ja) * | 2013-09-27 | 2015-04-13 | シーゲイト テクノロジー エルエルシー | マグネトロンスパッタ装置 |
JP6634275B2 (ja) | 2015-12-04 | 2020-01-22 | 東京エレクトロン株式会社 | 成膜システム |
JP6741564B2 (ja) * | 2016-12-06 | 2020-08-19 | 東京エレクトロン株式会社 | 成膜装置 |
JP7134009B2 (ja) * | 2018-07-31 | 2022-09-09 | 東京エレクトロン株式会社 | 成膜装置および成膜方法 |
JP7097777B2 (ja) * | 2018-08-10 | 2022-07-08 | 東京エレクトロン株式会社 | 成膜装置および成膜方法 |
US11664207B2 (en) * | 2018-08-10 | 2023-05-30 | Tokyo Electron Limited | Film-forming apparatus, film-forming system, and film-forming method |
-
2016
- 2016-11-04 JP JP2016215948A patent/JP6832130B2/ja active Active
-
2017
- 2017-10-23 KR KR1020197011618A patent/KR20190056416A/ko not_active Application Discontinuation
- 2017-10-23 WO PCT/JP2017/038142 patent/WO2018084010A1/ja active Application Filing
- 2017-10-23 US US16/346,705 patent/US11410837B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US11410837B2 (en) | 2022-08-09 |
WO2018084010A1 (ja) | 2018-05-11 |
US20200071815A1 (en) | 2020-03-05 |
KR20190056416A (ko) | 2019-05-24 |
JP2018070982A (ja) | 2018-05-10 |
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