JP7001448B2 - Pvd処理方法およびpvd処理装置 - Google Patents
Pvd処理方法およびpvd処理装置 Download PDFInfo
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- 238000003672 processing method Methods 0.000 title claims description 7
- 229910044991 metal oxide Inorganic materials 0.000 claims description 57
- 150000004706 metal oxides Chemical class 0.000 claims description 57
- 230000007246 mechanism Effects 0.000 claims description 40
- 238000005240 physical vapour deposition Methods 0.000 claims description 34
- 238000004544 sputter deposition Methods 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 239000011777 magnesium Substances 0.000 claims description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 3
- 239000000395 magnesium oxide Substances 0.000 claims description 3
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical group [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical group [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 37
- 239000010408 film Substances 0.000 description 31
- 239000002245 particle Substances 0.000 description 28
- 239000007789 gas Substances 0.000 description 24
- 230000008569 process Effects 0.000 description 16
- 239000002923 metal particle Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000003750 conditioning effect Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
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Description
図1は、PVD処理装置10の構成を概略的に示す断面図である。PVD処理装置10は、例えば図1に示されるように、例えばアルミニウム等により略円筒状に形成されたチャンバ23と、該チャンバ23の内部の処理空間Sの下方に配置され、ウエハWを載置するステージ17と、チャンバ23内の処理空間Sを減圧環境に維持する、例えばクライオポンプやドライポンプ等を含む排気装置24とを有する。チャンバ23は、接地されている。ウエハWは、成膜対象の基板の一例である。
図5は、PVD処理の一例を示すフローチャートである。なお、図5のフローチャートに示されるそれぞれの処理は、制御装置100内のメモリから読み出されたプログラムに基づいて制御装置100内のプロセッサがPVD処理装置10内の各部を制御することにより実現される。また、図5のフローチャートに示されるそれぞれの処理が実行されている間、制御装置100内のプロセッサは、シールド33が所定の温度に加熱されるようにシールド33内のヒータ332に供給される電力を調整する。
なお、本発明は、上記した実施形態に限定されるものではなく、その要旨の範囲内で数々の変形が可能である。
W ウエハ
10 PVD処理装置
100 制御装置
12 ゲートバルブ
17 ステージ
17a ベース部
17b 静電チャック
17c 電極膜
22 接地部材
23 チャンバ
23a 天井部
23b 側壁
230 開口部
231 絶縁部材
24 排気装置
25 開口部
26 直流電源
27 ステージ駆動機構
27a 支持軸
27b 駆動装置
28 封止部材
29 ターゲット
29a 第1のターゲット
29b 第2のターゲット
290 カバー部材
291 クランプ
292 ベースプレート
32 磁石
33 シールド
330 開口部
331 ガス供給口
332 ヒータ
34 支持軸
35 移動機構
36 回転機構
37 ガス供給機構
37a ガス供給源
37b 流量制御器
37c ガス供給路
48 電源
Claims (11)
- 金属酸化物を主成分として含む第1のターゲットおよび前記金属酸化物を構成する金属を主成分として含む第2のターゲットと、成膜対象の基板が載置されるステージとの間に設けられ開口部を有するシールドの前記開口部を前記第1のターゲットに一致させることにより前記第1のターゲットを前記ステージに対して露出させ、前記開口部を前記第1のターゲットに近接させる第1の工程と、
前記第1のターゲットを用いてスパッタリングを実行する第2の工程と、
前記シールドの前記開口部を前記第2のターゲットに一致させることにより前記第2のターゲットを前記ステージに対して露出させ、前記開口部を前記第2のターゲットに近接させる第3の工程と、
前記第2のターゲットを用いてスパッタリングを実行する第4の工程と、
前記シールドを前記第1のターゲットおよび前記第2のターゲットから離れた位置に移動させる第5の工程と、
前記第5の工程の後に、前記第2のターゲットを用いてスパッタリングを実行する第6の工程と
を含むことを特徴とするPVD処理方法。 - 前記第6の工程では、少なくとも、前記第2のターゲットが前記開口部を介して前記ステージに対して露出している状態、および、前記第2のターゲットが前記シールドによって遮蔽されている状態のそれぞれにおいて、前記第2のターゲットを用いてスパッタリングが行われることを特徴とする請求項1に記載のPVD処理方法。
- 前記第4の工程または前記第6の工程の後に、前記シールドが前記第1のターゲットおよび前記第2のターゲットから離れた位置にある状態で、前記第1のターゲットを用いてスパッタリングを実行する第7の工程と
をさらに含むことを特徴とする請求項1または2に記載のPVD処理方法。 - 前記第7の工程では、少なくとも、前記第1のターゲットが前記開口部を介して前記ステージに対して露出している状態、および、前記第1のターゲットが前記シールドによって遮蔽されている状態のそれぞれにおいて、前記第1のターゲットを用いてスパッタリングが行われることを特徴とする請求項3に記載のPVD処理方法。
- 前記第6の工程または前記第7の工程の後に、前記シールドの前記開口部を前記第1のターゲットに一致させることにより前記第1のターゲットを前記ステージに対して露出させ、前記開口部を前記第1のターゲットに近接させる第8の工程と、
前記第1のターゲットを用いてスパッタリングを実行する第9の工程と
をさらに含むことを特徴とする請求項3または4に記載のPVD処理方法。 - 前記第1の工程の前に、前記第3の工程から前記第7の工程がさらに実行されることを特徴とする請求項3から5のいずれか一項に記載のPVD処理方法。
- 前記金属酸化物は、酸化マグネシウムであり、
前記金属酸化物を構成する金属は、マグネシウムであることを特徴とする請求項1から6のいずれか一項に記載のPVD処理方法。 - 金属酸化物を主成分として含む第1のターゲットを有する第1のカソードと、
前記金属酸化物を構成する金属を主成分として含む第2のターゲットを有する第2のカソードと、
前記第1のカソードおよび前記第2のカソードが配置された保持部と、
成膜対象の基板が載置されるステージと、
前記保持部と前記ステージとの間に設けられ、開口部を有するシールドと、
前記シールドを前記第1のターゲットおよび前記第2のターゲットに対して近づける方向および遠ざける方向に移動させる移動機構と、
回転軸を中心として前記シールドを回転させることにより、前記第1のカソードおよび前記第2のカソードのうち、いずれか一方を前記ステージに対して露出し、いずれか他方を前記ステージに対して遮蔽する回転機構と、
前記移動機構および前記回転機構を制御して、前記シールドを前記第1のターゲットおよび前記第2のターゲットから離れた位置に移動させた後に、前記第2のターゲットを用いてスパッタリングを実行する制御装置と
を備えることを特徴とするPVD処理装置。 - 前記第1のカソードおよび前記第2のカソードは、前記保持部にそれぞれ2つずつ保持され、
前記第1のカソードおよび前記第2のカソードは、前記保持部上に、前記回転軸を中心とする円周方向に交互に配置されていることを特徴とする請求項8に記載のPVD処理装置。 - 前記シールドは、2つの前記開口部を有し、
それぞれの前記開口部は、前記回転機構による回転により、前記第1のターゲットおよび前記第2のターゲットのうち、一方の2つのターゲットを前記ステージに対して露出させ、他方の2つのターゲットを前記ステージに対して遮蔽することを特徴とする請求項9に記載のPVD処理装置。 - 前記シールドには、前記シールドを所定温度に加熱するヒータが埋め込まれていることを特徴とする請求項8から10のいずれか一項に記載のPVD処理装置。
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