JP6787304B2 - 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 - Google Patents

物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 Download PDF

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JP6787304B2
JP6787304B2 JP2017242453A JP2017242453A JP6787304B2 JP 6787304 B2 JP6787304 B2 JP 6787304B2 JP 2017242453 A JP2017242453 A JP 2017242453A JP 2017242453 A JP2017242453 A JP 2017242453A JP 6787304 B2 JP6787304 B2 JP 6787304B2
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Prior art keywords
physical quantity
quantity sensor
sensor
beam portion
axis direction
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JP2017242453A
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Japanese (ja)
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JP2019109140A5 (enExample
JP2019109140A (ja
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照夫 瀧澤
照夫 瀧澤
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2017242453A priority Critical patent/JP6787304B2/ja
Priority to US16/224,033 priority patent/US11092617B2/en
Priority to CN201811547213.0A priority patent/CN109990772B/zh
Priority to CN202410820792.0A priority patent/CN118482704A/zh
Publication of JP2019109140A publication Critical patent/JP2019109140A/ja
Publication of JP2019109140A5 publication Critical patent/JP2019109140A5/ja
Application granted granted Critical
Publication of JP6787304B2 publication Critical patent/JP6787304B2/ja
Priority to US17/377,525 priority patent/US11754594B2/en
Priority to US18/296,184 priority patent/US12099075B2/en
Priority to US18/802,209 priority patent/US20240402214A1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/14—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of gyroscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0268—Control of position or course in two dimensions specially adapted to land vehicles using internal positioning means
    • G05D1/027—Control of position or course in two dimensions specially adapted to land vehicles using internal positioning means comprising intertial navigation means, e.g. azimuth detector
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/20—Control system inputs
    • G05D1/24—Arrangements for determining position or orientation
    • G05D1/245—Arrangements for determining position or orientation using dead reckoning

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
JP2017242453A 2017-12-19 2017-12-19 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 Active JP6787304B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2017242453A JP6787304B2 (ja) 2017-12-19 2017-12-19 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体
CN201811547213.0A CN109990772B (zh) 2017-12-19 2018-12-18 物理量传感器、复合传感器、电子设备和移动物体
CN202410820792.0A CN118482704A (zh) 2017-12-19 2018-12-18 物理量传感器、复合传感器、惯性测量单元、电子设备和移动物体
US16/224,033 US11092617B2 (en) 2017-12-19 2018-12-18 Physical quantity sensor, composite sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
US17/377,525 US11754594B2 (en) 2017-12-19 2021-07-16 Physical quantity sensor, composite sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
US18/296,184 US12099075B2 (en) 2017-12-19 2023-04-05 Physical quantity sensor, composite sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
US18/802,209 US20240402214A1 (en) 2017-12-19 2024-08-13 Physical quantity sensor, composite sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017242453A JP6787304B2 (ja) 2017-12-19 2017-12-19 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体

Related Child Applications (1)

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JP2020175886A Division JP6879424B2 (ja) 2020-10-20 2020-10-20 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体

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JP2019109140A JP2019109140A (ja) 2019-07-04
JP2019109140A5 JP2019109140A5 (enExample) 2020-09-24
JP6787304B2 true JP6787304B2 (ja) 2020-11-18

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Country Status (3)

Country Link
US (4) US11092617B2 (enExample)
JP (1) JP6787304B2 (enExample)
CN (2) CN118482704A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021006827A (ja) * 2020-10-20 2021-01-21 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体
US11092617B2 (en) 2017-12-19 2021-08-17 Seiko Epson Corporation Physical quantity sensor, composite sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle

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JP7192437B2 (ja) * 2018-11-28 2022-12-20 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP7188311B2 (ja) 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
JP7518803B2 (ja) 2021-09-02 2024-07-18 株式会社東芝 センサ及び電子装置
CN116203281A (zh) * 2021-11-30 2023-06-02 精工爱普生株式会社 物理量传感器及惯性测量装置
WO2023181874A1 (ja) * 2022-03-24 2023-09-28 ソニーグループ株式会社 慣性計測装置
JP2024004613A (ja) * 2022-06-29 2024-01-17 セイコーエプソン株式会社 物理量センサー及び慣性計測装置
JP2024024821A (ja) * 2022-08-10 2024-02-26 セイコーエプソン株式会社 物理量センサー、および慣性計測装置
US12060148B2 (en) 2022-08-16 2024-08-13 Honeywell International Inc. Ground resonance detection and warning system and method
JP7712904B2 (ja) * 2022-09-14 2025-07-24 株式会社東芝 センサ及び電子装置

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11092617B2 (en) 2017-12-19 2021-08-17 Seiko Epson Corporation Physical quantity sensor, composite sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
US11754594B2 (en) 2017-12-19 2023-09-12 Seiko Epson Corporation Physical quantity sensor, composite sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
US12099075B2 (en) 2017-12-19 2024-09-24 Seiko Epson Corporation Physical quantity sensor, composite sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
JP2021006827A (ja) * 2020-10-20 2021-01-21 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体

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Publication number Publication date
US11754594B2 (en) 2023-09-12
US11092617B2 (en) 2021-08-17
US12099075B2 (en) 2024-09-24
CN109990772B (zh) 2024-12-17
US20230243864A1 (en) 2023-08-03
CN118482704A (zh) 2024-08-13
JP2019109140A (ja) 2019-07-04
US20210341511A1 (en) 2021-11-04
US20190187171A1 (en) 2019-06-20
US20240402214A1 (en) 2024-12-05
CN109990772A (zh) 2019-07-09

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