CN109990772B - 物理量传感器、复合传感器、电子设备和移动物体 - Google Patents

物理量传感器、复合传感器、电子设备和移动物体 Download PDF

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Publication number
CN109990772B
CN109990772B CN201811547213.0A CN201811547213A CN109990772B CN 109990772 B CN109990772 B CN 109990772B CN 201811547213 A CN201811547213 A CN 201811547213A CN 109990772 B CN109990772 B CN 109990772B
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China
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physical quantity
quantity sensor
axis
sensor
interval
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CN201811547213.0A
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Chinese (zh)
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CN109990772A (zh
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泷泽照夫
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Seiko Epson Corp
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Seiko Epson Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/14—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of gyroscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0268—Control of position or course in two dimensions specially adapted to land vehicles using internal positioning means
    • G05D1/027—Control of position or course in two dimensions specially adapted to land vehicles using internal positioning means comprising intertial navigation means, e.g. azimuth detector
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/20—Control system inputs
    • G05D1/24—Arrangements for determining position or orientation
    • G05D1/245—Arrangements for determining position or orientation using dead reckoning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
CN201811547213.0A 2017-12-19 2018-12-18 物理量传感器、复合传感器、电子设备和移动物体 Active CN109990772B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202410820792.0A CN118482704A (zh) 2017-12-19 2018-12-18 物理量传感器、复合传感器、惯性测量单元、电子设备和移动物体

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-242453 2017-12-19
JP2017242453A JP6787304B2 (ja) 2017-12-19 2017-12-19 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体

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CN109990772A CN109990772A (zh) 2019-07-09
CN109990772B true CN109990772B (zh) 2024-12-17

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CN202410820792.0A Pending CN118482704A (zh) 2017-12-19 2018-12-18 物理量传感器、复合传感器、惯性测量单元、电子设备和移动物体

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JP6787304B2 (ja) 2017-12-19 2020-11-18 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体
JP6870635B2 (ja) * 2018-03-08 2021-05-12 セイコーエプソン株式会社 慣性計測装置、移動体、携帯型電子機器、及び電子機器
JP7192437B2 (ja) * 2018-11-28 2022-12-20 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP7188311B2 (ja) * 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
JP6879424B2 (ja) * 2020-10-20 2021-06-02 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体
JP7518803B2 (ja) 2021-09-02 2024-07-18 株式会社東芝 センサ及び電子装置
JP7786164B2 (ja) * 2021-11-30 2025-12-16 セイコーエプソン株式会社 物理量センサー及び慣性計測装置
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JP2024004613A (ja) * 2022-06-29 2024-01-17 セイコーエプソン株式会社 物理量センサー及び慣性計測装置
JP2024024821A (ja) * 2022-08-10 2024-02-26 セイコーエプソン株式会社 物理量センサー、および慣性計測装置
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JP7712904B2 (ja) * 2022-09-14 2025-07-24 株式会社東芝 センサ及び電子装置

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Also Published As

Publication number Publication date
CN118482704A (zh) 2024-08-13
CN109990772A (zh) 2019-07-09
US12099075B2 (en) 2024-09-24
US20210341511A1 (en) 2021-11-04
US20190187171A1 (en) 2019-06-20
US20240402214A1 (en) 2024-12-05
US20230243864A1 (en) 2023-08-03
US11092617B2 (en) 2021-08-17
US11754594B2 (en) 2023-09-12
JP2019109140A (ja) 2019-07-04
JP6787304B2 (ja) 2020-11-18

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