JP6730801B2 - 光導波路の製造方法 - Google Patents

光導波路の製造方法 Download PDF

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Publication number
JP6730801B2
JP6730801B2 JP2015236270A JP2015236270A JP6730801B2 JP 6730801 B2 JP6730801 B2 JP 6730801B2 JP 2015236270 A JP2015236270 A JP 2015236270A JP 2015236270 A JP2015236270 A JP 2015236270A JP 6730801 B2 JP6730801 B2 JP 6730801B2
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Japan
Prior art keywords
optical waveguide
layer
core layer
cladding layer
width
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JP2015236270A
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English (en)
Japanese (ja)
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JP2017102312A5 (https=
JP2017102312A (ja
Inventor
柳沢　賢司
賢司 柳沢
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Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
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Priority to JP2015236270A priority Critical patent/JP6730801B2/ja
Priority to US15/365,294 priority patent/US9958607B2/en
Publication of JP2017102312A publication Critical patent/JP2017102312A/ja
Publication of JP2017102312A5 publication Critical patent/JP2017102312A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12111—Fibre
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
JP2015236270A 2015-12-03 2015-12-03 光導波路の製造方法 Active JP6730801B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015236270A JP6730801B2 (ja) 2015-12-03 2015-12-03 光導波路の製造方法
US15/365,294 US9958607B2 (en) 2015-12-03 2016-11-30 Light waveguide, method of manufacturing light waveguide, and light waveguide device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015236270A JP6730801B2 (ja) 2015-12-03 2015-12-03 光導波路の製造方法

Publications (3)

Publication Number Publication Date
JP2017102312A JP2017102312A (ja) 2017-06-08
JP2017102312A5 JP2017102312A5 (https=) 2018-11-08
JP6730801B2 true JP6730801B2 (ja) 2020-07-29

Family

ID=58798977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015236270A Active JP6730801B2 (ja) 2015-12-03 2015-12-03 光導波路の製造方法

Country Status (2)

Country Link
US (1) US9958607B2 (https=)
JP (1) JP6730801B2 (https=)

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GB2583348A (en) * 2019-04-24 2020-10-28 Univ Southampton Photonic chip and method of manufacture
US10996408B2 (en) * 2019-07-19 2021-05-04 Intel Corporation Optical device including buried optical waveguides and output couplers
JP7358224B2 (ja) 2019-12-09 2023-10-10 新光電気工業株式会社 光モジュール及びその製造方法
GB2592058B (en) 2020-02-14 2023-05-10 Rockley Photonics Ltd Waveguide Platform
CN111427118A (zh) * 2020-03-25 2020-07-17 中山大学 一种应用于通讯波段的高效三维硫化物端面耦合器及其制备方法
US12442986B2 (en) 2021-01-19 2025-10-14 Mitsubishi Electric Corporation Optical waveguide element and optical axis adjustment method
JP2024006721A (ja) * 2022-07-04 2024-01-17 イビデン株式会社 導波路及び配線基板

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JPS63136618A (ja) * 1986-11-28 1988-06-08 Sony Corp エネルギ−照射方法
US5142596A (en) * 1990-07-24 1992-08-25 Matsushita Electric Industrial Co., Ltd. Tapered light wave guide and wavelength converting element using the same
DE19607671B4 (de) * 1996-02-29 2004-08-26 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Verfahren zur Herstellung optischer Bauelemente mit angekoppelten Lichtwellenleitern und nach diesem Verfahren hergestellte Bauelemente
EP0984304B1 (en) * 1998-09-03 2005-08-24 Nippon Telegraph and Telephone Corporation Planar lightwave circuit
JP2000298221A (ja) * 1999-04-15 2000-10-24 Sony Corp 光導波路の製造方法および光送受信装置の製造方法
WO2001038910A1 (en) * 1999-11-23 2001-05-31 Nanovation Technologies, Inc. Optical waveguide having a weakly-confining waveguide section and a strongly-confining waveguide section optically coupled by a tapered neck
US20010026670A1 (en) * 2000-03-28 2001-10-04 Matsushita Electric Industrial Co., Ltd. Optical waveguide and method for making the same
JP2001343543A (ja) * 2000-03-28 2001-12-14 Matsushita Electric Ind Co Ltd 光導波路およびその製造方法
US6317445B1 (en) * 2000-04-11 2001-11-13 The Board Of Trustees Of The University Of Illinois Flared and tapered rib waveguide semiconductor laser and method for making same
JP2002267859A (ja) 2001-03-13 2002-09-18 Toshiba Corp 光導波路およびその製造方法
US20030033975A1 (en) * 2001-08-17 2003-02-20 Michael Bazylenko Method of forming a planar waveguide core
US6760529B2 (en) * 2001-12-11 2004-07-06 Intel Corporation Three-dimensional tapered optical waveguides and methods of manufacture thereof
US6819839B2 (en) * 2002-07-23 2004-11-16 Intel Corporation Tapered waveguide photodetector apparatus and methods
WO2004088715A2 (en) * 2003-03-28 2004-10-14 Si Optical, Inc. Tapered structure for providing coupling between external optical device and planar optical waveguide and method of forming the same
US6993225B2 (en) * 2004-02-10 2006-01-31 Sioptical, Inc. Tapered structure for providing coupling between external optical device and planar optical waveguide and method of forming the same
JP2004302325A (ja) * 2003-04-01 2004-10-28 Hitachi Cable Ltd 光電気複合基板の製造方法
JP4140475B2 (ja) * 2003-07-25 2008-08-27 富士ゼロックス株式会社 高分子光導波路作製用原盤及び高分子光導波路の製造方法
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KR20070035234A (ko) 2005-09-27 2007-03-30 삼성전자주식회사 표시 기판의 제조 방법 및 이를 제조하기 위한 제조 장치
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Publication number Publication date
US20170160468A1 (en) 2017-06-08
US9958607B2 (en) 2018-05-01
JP2017102312A (ja) 2017-06-08

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