JP6730801B2 - 光導波路の製造方法 - Google Patents
光導波路の製造方法 Download PDFInfo
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- JP6730801B2 JP6730801B2 JP2015236270A JP2015236270A JP6730801B2 JP 6730801 B2 JP6730801 B2 JP 6730801B2 JP 2015236270 A JP2015236270 A JP 2015236270A JP 2015236270 A JP2015236270 A JP 2015236270A JP 6730801 B2 JP6730801 B2 JP 6730801B2
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- optical waveguide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12104—Mirror; Reflectors or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12111—Fibre
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12173—Masking
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Semiconductor Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
Description
図1〜図7は第1実施形態の光導波路の製造方法を説明するための図、図8は第1実施形態の光導波路を示す図、図9は第1実施形態の光導波路を使用する光導波路装置を示す図である。
図10〜図14は第2実施形態の光導波路を使用する光導波路装置を説明するための図である。前述した第1実施形態では基板10上に光導波路を形成し、光導波路から基板を除去している。第2実施形態では配線基板の上に光導波路が形成される。
Claims (3)
- 基板の上に第1クラッド層を形成する工程と、
前記第1クラッド層に、一端の幅及び深さが他端の幅及び深さよりも大きい溝部を形成する工程と、
前記溝部にコア層を埋め込んで形成する工程と、
前記第1クラッド層及び前記コア層の上に第2クラッド層を形成する工程と
を有し、
前記溝部を形成する工程は、
一端の幅が他端の幅よりも大きい長手形状の光通過部を備えたマスクと、遮蔽板とを用意し、
前記第1クラッド層の上に前記マスクを配置し、前記マスクの光通過部を前記遮蔽板で遮蔽し、
前記マスクの光通過部の一端から他端に向けて前記遮蔽板を一定の速度で移動させながら、前記遮蔽板から露出する前記光通過部を通して、レーザ光を前記第1クラッド層に照射することを含み、
前記コア層の上面が水平面となって形成され、前記第2クラッド層の厚みが全体にわたって均一に形成され、前記コア層の一端の幅及び厚みが前記コア層の他端の幅及び厚みよりも大きく形成されることを特徴とする光導波路の製造方法。 - 前記第2クラッド層を形成する工程の後に、
前記基板を除去する工程を有することを特徴とする請求項1に記載の光導波路の製造方法。 - 前記基板は、配線基板であることを特徴とする請求項1又は2に記載の光導波路の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015236270A JP6730801B2 (ja) | 2015-12-03 | 2015-12-03 | 光導波路の製造方法 |
US15/365,294 US9958607B2 (en) | 2015-12-03 | 2016-11-30 | Light waveguide, method of manufacturing light waveguide, and light waveguide device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015236270A JP6730801B2 (ja) | 2015-12-03 | 2015-12-03 | 光導波路の製造方法 |
Publications (3)
Publication Number | Publication Date |
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JP2017102312A JP2017102312A (ja) | 2017-06-08 |
JP2017102312A5 JP2017102312A5 (ja) | 2018-11-08 |
JP6730801B2 true JP6730801B2 (ja) | 2020-07-29 |
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JP2015236270A Active JP6730801B2 (ja) | 2015-12-03 | 2015-12-03 | 光導波路の製造方法 |
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US (1) | US9958607B2 (ja) |
JP (1) | JP6730801B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2583348A (en) * | 2019-04-24 | 2020-10-28 | Univ Southampton | Photonic chip and method of manufacture |
US10996408B2 (en) * | 2019-07-19 | 2021-05-04 | Intel Corporation | Optical device including buried optical waveguides and output couplers |
JP7358224B2 (ja) | 2019-12-09 | 2023-10-10 | 新光電気工業株式会社 | 光モジュール及びその製造方法 |
GB2592058B (en) * | 2020-02-14 | 2023-05-10 | Rockley Photonics Ltd | Waveguide Platform |
CN111427118A (zh) * | 2020-03-25 | 2020-07-17 | 中山大学 | 一种应用于通讯波段的高效三维硫化物端面耦合器及其制备方法 |
US20230408770A1 (en) * | 2021-01-19 | 2023-12-21 | Mitsubishi Electric Corporation | Optical waveguide element and optical axis adjustment method |
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2015
- 2015-12-03 JP JP2015236270A patent/JP6730801B2/ja active Active
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- 2016-11-30 US US15/365,294 patent/US9958607B2/en active Active
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US9958607B2 (en) | 2018-05-01 |
US20170160468A1 (en) | 2017-06-08 |
JP2017102312A (ja) | 2017-06-08 |
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