JP6726610B2 - エッチング方法及び基板処理システム - Google Patents
エッチング方法及び基板処理システム Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 181
- 238000005530 etching Methods 0.000 title claims description 164
- 239000000758 substrate Substances 0.000 title claims description 29
- 239000007789 gas Substances 0.000 claims description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 94
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 73
- 229920005591 polysilicon Polymers 0.000 description 73
- 235000012431 wafers Nutrition 0.000 description 61
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 28
- 229910052814 silicon oxide Inorganic materials 0.000 description 28
- 238000003860 storage Methods 0.000 description 15
- 230000006870 function Effects 0.000 description 14
- 239000002344 surface layer Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- -1 ammonium fluorosilicate Chemical compound 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
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Description
10 基板処理システム
13 プロセスモジュール
28 トレンチ
29 残渣
31 ポリシリコン層
32 シリコン酸化膜
Claims (8)
- 電子デバイスを製造するための基板に形成された被処理層を除去するエッチング方法であって、
前記被処理層の表面に形成された酸化膜を除去する第1のブレークスルー処理と、
前記第1のブレークスルー処理の後に前記被処理層をエッチングする第1のメインエッチング処理と、
前記第1のメインエッチング処理の後に露出した酸化膜を除去する第2のブレークスルー処理と、
前記第2のブレークスルー処理の後に前記被処理層をエッチングする第2のメインエッチング処理と、を有し、
前記第1のメインエッチング処理後の前記第2のブレークスルー処理で除去される前記露出した酸化膜は、前記被処理層の表面近傍の各グレインの境界に入り込んだ酸化膜であって、前記第1のメインエッチング処理において前記被処理層がエッチングされることによって露出した酸化膜であることを特徴とするエッチング方法。 - 電子デバイスを製造するための基板に形成された被処理層を除去するエッチング方法であって、
前記被処理層の表面に形成された酸化膜を除去する第1のブレークスルー処理と、
前記第1のブレークスルー処理の後に前記被処理層をエッチングする第1のメインエッチング処理と、
前記第1のメインエッチング処理の後に露出した酸化膜を除去する第2のブレークスルー処理と、
前記第2のブレークスルー処理の後に前記被処理層をエッチングする第2のメインエッチング処理と、を有し、
前記第1のブレークスルー処理及び前記第2のブレークスルー処理では、処理ガスとしてHFガス及びNH 3 ガスを用い、
前記第1のメインエッチング処理及び前記第2のメインエッチング処理では、処理ガスとして少なくともF 2 ガスを用いることを特徴とするエッチング方法。 - 前記第1のメインエッチング処理における前記被処理層のエッチング量は、前記第2のメインエッチング処理における前記被処理層のエッチング量よりも少ないことを特徴とする請求項1又は2記載のエッチング方法。
- 前記第1のメインエッチング処理では、前記被処理層のエッチング量が2000Å以上に設定されることを特徴とする請求項1乃至3のいずれか1項に記載のエッチング方法。
- 前記第2のメインエッチング処理の後に露出した酸化膜を除去する第3のブレークスルー処理と、
前記第3のブレークスルー処理の後に前記被処理層をエッチングする第3のメインエッチング処理とをさらに有することを特徴とする請求項1乃至4のいずれか1項に記載のエッチング方法。 - 前記被処理層は、シリコン層、シリコン窒化層及び金属層のいずれかであることを特徴とする請求項1乃至5のいずれか1項に記載のエッチング方法。
- 電子デバイスを製造するための基板にエッチング処理を施す基板処理システムであって、
前記基板の被処理層の表面に形成された酸化膜を除去する第1のブレークスルーユニットと、
前記第1のブレークスルーユニットにおける除去後に前記被処理層をエッチングする第1のメインエッチングユニットと、
前記第1のメインエッチングユニットにおけるエッチング後に露出した酸化膜を除去する第2のブレークスルーユニットと、
前記第2のブレークスルーユニットにおける除去後に前記被処理層をエッチングする第2のメインエッチングユニットと、を備え、
前記第1のメインエッチングユニットによるエッチング後に前記第2のブレークスルーユニットが除去する前記露出した酸化膜は、前記被処理層の表面近傍の各グレインの境界に入り込んだ酸化膜であって、前記第1のメインエッチングユニットが前記被処理層をエッチングすることによって露出した酸化膜であることを特徴とする基板処理システム。 - 電子デバイスを製造するための基板にエッチング処理を施す基板処理システムであって、
前記基板の被処理層の表面に形成された酸化膜を除去する第1のブレークスルーユニットと、
前記第1のブレークスルーユニットにおける除去後に前記被処理層をエッチングする第1のメインエッチングユニットと、
前記第1のメインエッチングユニットにおけるエッチング後に露出した酸化膜を除去する第2のブレークスルーユニットと、
前記第2のブレークスルーユニットにおける除去後に前記被処理層をエッチングする第2のメインエッチングユニットと、を備え、
前記第1のブレークスルーユニット及び前記第2のブレークスルーユニットは、処理ガスとしてHFガス及びNH 3 ガスを用い、
前記第1のメインエッチングユニット及び前記第2のメインエッチングユニットは、処理ガスとして少なくともF 2 ガスを用いることを特徴とする基板処理システム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2016241516A JP6726610B2 (ja) | 2016-12-13 | 2016-12-13 | エッチング方法及び基板処理システム |
CN201711287216.0A CN108231555B (zh) | 2016-12-13 | 2017-12-07 | 蚀刻方法和基板处理系统 |
TW106143304A TWI745504B (zh) | 2016-12-13 | 2017-12-11 | 蝕刻方法及基板處理系統 |
KR1020170170241A KR102118779B1 (ko) | 2016-12-13 | 2017-12-12 | 에칭 방법 및 기판 처리 시스템 |
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US11482434B2 (en) | 2016-10-18 | 2022-10-25 | Belting E-Town Semiconductor Technology Co., Ltd | Systems and methods for workpiece processing |
US11515127B2 (en) | 2019-05-14 | 2022-11-29 | Beijing E-Town Semiconductor Technology Co., Ltd | End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum |
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