JP6714616B2 - カーボンナノチューブ接合シートおよびカーボンナノチューブ接合シートの製造方法 - Google Patents
カーボンナノチューブ接合シートおよびカーボンナノチューブ接合シートの製造方法 Download PDFInfo
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Description
1.第1実施形態
(1)熱伝導性シートの構成
熱伝導性シート1(CNT接合シートの一例)は、図1Aに示すように、固定シート2と、2つのカーボンナノチューブアレイシート3(以下、CNTアレイシート3とする。)とを備えている。
次に、熱伝導性シート1(CNT接合シートの一例)の製造方法の一実施形態について説明する。
このような熱伝導性シート1は、TIMとして、図1Bに示すように、例えば、電子部品11(対象物)と、放熱部材10(対象物)との間に、厚み方向に挟まれるように配置されて使用される。
熱伝導性シート1は、図1Bに示すように、CNTアレイシート3を備えている。そのため、熱伝導性シート1を対象物(例えば、放熱部材10および電子部品11)に接触させたときに、CNTアレイシート3の複数のCNT6を対象物表面の微細な凹凸に追従させることができる。
第1実施形態では、図4Cに示すように、無機物の焼結体4から形成される固定シート2を準備し、その固定シート2にCNTアレイシート3を配置した後、焼成して熱伝導性シート1を製造するが、本発明は、そのような熱伝導性シートの製造方法に限定されない。
次に、図5Bおよび図5Cを参照して、第3実施形態について説明する。なお、上記した第1実施形態および第2実施形態と同様の部材には同様の符号を付し、その説明を省略する。
第1実施形態および第2実施形態では、熱伝導性シート1は、固定シート2の表面2Aおよび裏面2Bの両面に接合されるCNTアレイシート3を備えているが、これに限定されない。図6に示すように、熱伝導性シート1は、固定シート2の表面2Aおよび裏面2Bの少なくともいずれか一方において、固定シート2の焼結体4と接合するCNTアレイシート3を備えていればよい。
ステンレス製の成長基板(ステンレス基板)の表面に二酸化ケイ素膜を積層した後、二酸化ケイ素膜上に、触媒層として鉄を蒸着した。
PVAから形成され、ケイ素粒子(無機粒子)が分散されている樹脂シートを準備した。なお、ケイ素粒子の平均一次粒子径は、2μmであり、ケイ素粒子の含有割合は、樹脂シート全量に対して、20質量%であった。また、PVAの含有割合は、樹脂シート全量に対して、80質量%であった。
PVAが水(溶媒)に溶解されたPVA溶液(樹脂溶液、PVA濃度:10質量%)に、ケイ素粒子(無機粒子)を分散させて、ペーストを準備した。
PVAから形成され、窒化ケイ素粒子(無機粒子)が分散されている樹脂シートを準備したこと以外は、実施例2と同様にして、熱伝導性シートを得た。なお、熱伝導性シートの固定シートの厚みは、100μmであった。
ステンレス製の成長基板の表面および裏面の両面に、二酸化ケイ素膜を積層した後、二酸化ケイ素膜上に、触媒層として鉄を蒸着した。
(1)熱伝導率
各実施例および比較例で得られた熱伝導性シートについて、熱抵抗を熱抵抗測定装置(商品名:T3Ster DynTIM Tester、メンターグラフィックス社製)により測定した。そして、熱伝導性シートの厚みを変更して、熱抵抗を複数点(例えば、3点)測定し、熱伝導性シートの厚みおよび測定された熱抵抗をプロットした。そのプロット結果から、熱伝導性シートの熱伝導率を算出した。その結果を表1に示す。
(2)電気抵抗
各実施例および比較例で得られた熱伝導性シートについて、厚み方向の電気抵抗を電気抵抗測定装置(商品名:レジスティビティ・チェンバ、エーディーシー社製)により測定した。その結果を、表1に示す。
(3)接着強度試験
各実施例で得られた熱伝導性シートについて、粘着テープを、CNTアレイシートに対して、固定シートと反対側から貼着した後、粘着テープを剥離した。
×:CNTアレイシート(VACNTs)の固定シート(成長基板)からの顕著な剥離がみられた。
2 固定シート
3 CNTアレイシート
4 焼結体
6 CNT
7 樹脂シート
8 無機粒子
15 成長基板
19 VACNTs
Claims (7)
- 無機物の焼結体から形成される固定シートと、
前記固定シートの前記焼結体と接合しているカーボンナノチューブアレイシートと、を備えていることを特徴とする、カーボンナノチューブ接合シート。 - 前記無機物は、ケイ素および/またはチタンを含み、
前記焼結体は、前記カーボンナノチューブアレイシートが有する炭素と、前記固定シートに含まれるケイ素および/またはチタンとの焼結体を含んでいることを特徴とする、請求項1に記載のカーボンナノチューブ接合シート。 - 前記カーボンナノチューブアレイシートの前記焼結体と接合する端部は、前記焼結体に埋め込まれていることを特徴とする、請求項1に記載のカーボンナノチューブ接合シート。
- 前記カーボンナノチューブアレイシートの平均嵩密度は、50mg/cm3以上であることを特徴とする、請求項1に記載のカーボンナノチューブ接合シート。
- 無機物の焼結体から形成される固定シートを準備する工程と、
成長基板上に垂直配向カーボンナノチューブを成長させる工程と、
前記成長基板から前記垂直配向カーボンナノチューブを剥離し、カーボンナノチューブアレイシートとする工程と、
前記カーボンナノチューブアレイシートと前記固定シートとの間に金属薄膜を配置する工程と、
前記金属薄膜が配置された前記カーボンナノチューブアレイシートおよび前記固定シートを、真空下または不活性雰囲気下で焼成する工程と、を含むことを特徴とする、カーボンナノチューブ接合シートの製造方法。 - 無機粒子を含有する樹脂シートを準備する工程と、
成長基板上に垂直配向カーボンナノチューブを成長させる工程と、
前記成長基板から前記垂直配向カーボンナノチューブを剥離し、カーボンナノチューブアレイシートとする工程と、
前記カーボンナノチューブアレイシートを前記樹脂シート上に配置する工程と、
前記カーボンナノチューブアレイシートが配置された前記樹脂シートを、真空下または不活性雰囲気下で焼成する工程と、を含むことを特徴とする、カーボンナノチューブ接合シートの製造方法。 - 成長基板上に垂直配向カーボンナノチューブを成長させる工程と、
前記成長基板から前記垂直配向カーボンナノチューブを剥離し、カーボンナノチューブアレイシートとする工程と、
前記カーボンナノチューブアレイシートに、無機粒子を含有するペーストを塗布する工程と、
前記ペーストが塗布されたカーボンナノチューブアレイシートを、真空下または不活性雰囲気下で焼成する工程と、を含むことを特徴とする、カーボンナノチューブ接合シートの製造方法。
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US11581236B2 (en) * | 2020-02-14 | 2023-02-14 | Micron Technology, Inc. | Self-cleaning heatsink for electronic components |
CN214176013U (zh) | 2020-12-23 | 2021-09-10 | 迪科特测试科技(苏州)有限公司 | 半导体结构 |
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