JP6714372B2 - 酸化膜の成膜方法 - Google Patents
酸化膜の成膜方法 Download PDFInfo
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- JP6714372B2 JP6714372B2 JP2016017621A JP2016017621A JP6714372B2 JP 6714372 B2 JP6714372 B2 JP 6714372B2 JP 2016017621 A JP2016017621 A JP 2016017621A JP 2016017621 A JP2016017621 A JP 2016017621A JP 6714372 B2 JP6714372 B2 JP 6714372B2
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Classifications
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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Description
本発明の一態様は、単結晶においてはヘキサゴナルな原子配列を有する酸化物であって、酸化物は、インジウム、元素M(アルミニウム、ガリウム、イットリウムまたはスズ)、亜鉛のホモロガス構造を有し、酸化物は、酸化物の上面における透過電子顕微鏡像の第1の領域を画像解析することで得られる格子点群を有し、格子点群をボロノイ解析することで得られる複数のボロノイ領域を有するボロノイ図において、ボロノイ領域が六角形である割合が78%以上100%以下である酸化物である。
本発明の一態様は、単結晶においてはヘキサゴナルな原子配列を有する結晶性を有する酸化物であって、酸化物は、インジウム、元素M(アルミニウム、ガリウム、イットリウムまたはスズ)、亜鉛のホモロガス構造を有し、酸化物は、酸化物の上面における透過電子顕微鏡像の第1の領域を画像解析することで得られる格子点群を有し、格子点群は、複数の格子点を有し、複数の格子点は、それぞれ第1の格子点と、第1の格子点に近接する第2の格子点乃至第7の格子点と、を有し、中心点から各頂点までの距離が、第1の格子点と、第2の格子点乃至第7の格子点それぞれとの距離の平均となる正六角形を、中心点が第1の格子点上となるよう配置し、第2の格子点乃至第7の格子点と、正六角形の各頂点と、のずれ量の平均が最小となるよう正六角形を、中心点を軸に回転させたとき、ずれ量の平均を正六角形の中心点と各頂点までの距離で除した値である変形率の平均が、第1の領域において、0.2未満である酸化物である。
本発明の一態様は、(1)または(2)において、格子点群の有する複数の格子点は、第1の領域を高速フーリエ変換した第1の像と、第1の像を2.8nm−1から5.0nm−1の範囲を残してマスク処理した第2の像と、第2の像を、逆高速フーリエ変換した第3の像と、第3の像に対してノイズを除去する処理を行った第4の像と、を用い第4の像において輝度が極大となる点である酸化物である。
本発明の一態様は、(3)において、ノイズを除去する処理は、第3の像において、半径0.05nmの範囲で輝度を平均化することにより行う酸化物である。
本発明の一態様は、(3)または(4)において、輝度が極大となる点は、第4の像において、第1の点を中心とした半径0.22nmの範囲における輝度が最大となる第2の点を抽出する第1のステップと、第2の点を中心とした半径0.22nmの範囲において輝度が最大となる第3の点を抽出する第2のステップと、を輝度が最大となる点の位置が変動しなくなるまで繰り返すことで、複数の極大となる点の一を抽出し、残存する複数の極大となる点の抽出を、抽出済みの複数の極大となる点の一から0.22nmよりも離れた点を第1の点として、複数の極大となる点の一の抽出と同様の方法により行う酸化物である。
本発明の一態様は、ホモロガス構造を有しうる結晶構造を有する酸化物であって、酸化物は、インジウム、元素M(アルミニウム、ガリウム、イットリウムまたはスズ)、亜鉛を有し、酸化物は、複数の平板状の結晶領域を有し、結晶領域は、c軸が酸化物の上面の法線ベクトルに略平行に配向し、結晶領域は、酸化物を上面に垂直な面で切断した断面における透過電子顕微鏡像において、酸化物の上面に平行な方向の大きさの平均が3nmより大きく、結晶領域の間には、明確な結晶粒界が確認されない酸化物である。
本発明の一態様は、成膜室と、成膜室内に配置されたターゲットと、基板と、を用いるスパッタリング法による酸化物の成膜方法であって、ターゲットは、インジウムと、亜鉛と、元素M(元素Mはアルミニウム、ガリウム、イットリウムまたはスズ)と、酸素と、を有し、ターゲットは、多結晶構造を有する領域を有し、ターゲットは、劈開面を有し、成膜室に酸素または/および希ガスを有するスパッタガスを供給した後、ターゲットと基板との間に電位差を与えることで、ターゲットの近傍にスパッタガスのイオンを有するプラズマを生成し、スパッタガスのイオンが電位差によって、ターゲットに向けて加速され、加速されたスパッタガスのイオンをターゲットに衝突させることで、劈開面の端部において結合の切断が始まり、プラズマから電荷を受け取ることで結合の切断が助長され、ターゲットから複数の元素を有する化合物よりなり、結晶性を有する複数の平板状の粒子、ターゲットを構成する原子、およびターゲットを構成する原子の集合体を剥離させ、複数の平板状の粒子は、プラズマ中を飛翔する際、酸素イオンから負の電荷を受け取ることで、表面が負に帯電し、負に帯電した平板状の粒子の一つは、基板上に平面側を向けて堆積し、負に帯電した平板状の粒子の別の一つは、基板上で、負に帯電した平板状の粒子の一つと互いに反発し合いながら、基板上の負に帯電した平板状の粒子の一つと離れた領域に堆積し、負に帯電した平板状の粒子の一つと、負に帯電した平板状の粒子の別の一つと、の隙間に、原子、および原子の集合体が入り込み、原子、および原子の集合体が、平板状の粒子の隙間を横方向に成長することで、負に帯電した平板状の粒子の一つと、負に帯電した平板状の粒子の別の一つと、の隙間を埋める酸化物の作製方法である。
本発明の一態様は、(7)において、基板上の負に帯電した平板状の粒子の一つと、負に帯電した平板状の粒子の別の一つと、はa軸の向きが異なる酸化物の作製方法である。
本発明の一態様は、(7)または(8)において、酸化物は、非晶質構造を有する表面上に形成される酸化物の作製方法である。
以下では、スパッタリング法によるCAAC−OSの成膜モデルの一例について説明する。
以下では、ペレット200の横方向に粒子203が付着(結合または吸着ともいう。)し、ラテラル成長することを説明する。
以下では、In−M−Zn酸化物の組成について説明する。なお、元素Mは、アルミニウム、ガリウム、イットリウムまたはスズなどとする。そのほかの元素Mに適用可能な元素としては、ホウ素、シリコン、チタン、鉄、ニッケル、ゲルマニウム、ジルコニウム、モリブデン、ランタン、セリウム、ネオジム、ハフニウム、タンタル、タングステンなどがある。
以下では、本発明の一態様に係る平行平板型のスパッタリング装置および対向ターゲット式のスパッタリング装置について説明する。後述するが、対向ターゲット式のスパッタリング装置を用いた成膜では、被形成面へのダメージが小さくできるため、結晶性の高い膜を得やすい。即ち、CAAC−OSの成膜には、対向ターゲット式のスパッタリング装置を用いることが好ましい場合がある。なお、以下に示すスパッタリング装置では、理解を容易にするため、または成膜時における動作を説明するため、基板およびターゲットなどを配置した状態で示す。ただし、基板およびターゲットなどは、使用者が設置する物であるため、本発明の一態様に係るスパッタリング装置が基板およびターゲットを有さない場合もある。
以下では、本発明の一態様に係るスパッタリング用ターゲットを設置することが可能な成膜室を有する成膜装置について説明する。
酸化物半導体は、単結晶酸化物半導体と、それ以外の非単結晶酸化物半導体とに分けられる。非単結晶酸化物半導体としては、CAAC−OS、多結晶酸化物半導体、nc−OS、擬似非晶質酸化物半導体(a−like OS:amorphous like Oxide Semiconductor)、および非晶質酸化物半導体などがある。
以下では、CAAC−OSおよびnc−OSを、透過電子顕微鏡(TEM:Transmission Electron Microscope)によって解析する。
以下では、断面TEM像で現れるCAAC−OSおよびnc−OSの特徴について説明する。
断面TEMに限らず、複数の手法を用いることで、より厳密な構造の特定が可能となる。以下では、TEMにおける平面像(平面TEM像ともいう。)の画像解析を行う。なお、平面TEM像は、球面収差補正機能を用いて観察した。また、平面TEM像の取得には、日本電子株式会社製原子分解能分析電子顕微鏡JEM−ARM200Fを用いた。
さらに、試料X4にプローブ径が1nmの電子線(ナノビーム電子線ともいう。)を照射することで、電子回折パターンを取得する。
図38(A)、図38(B)および図38(C)は、本発明の一態様に係るトランジスタの上面図および断面図である。図38(A)は上面図であり、図38(B)および図38(C)は、それぞれ図38(A)に示す一点鎖線A1−A2、および一点鎖線A3−A4に対応する断面図である。なお、図38(A)の上面図では、図の明瞭化のために一部の要素を省いて図示している。
以下では、半導体406a、半導体406bおよび半導体406cについて説明する。
図42(A)、図42(B)および図42(C)は、本発明の一態様に係るトランジスタの上面図および断面図である。図42(A)は上面図であり、図42(B)および図42(C)は、それぞれ図42(A)に示す一点鎖線F1−F2、および一点鎖線F3−F4に対応する断面図である。なお、図42(A)の上面図では、図の明瞭化のために一部の要素を省いて図示している。
以下では、本発明の一態様に係る半導体装置の回路の一例について説明する。
図45(A)に示す回路図は、pチャネル型のトランジスタ2200とnチャネル型のトランジスタ2100を直列に接続し、かつそれぞれのゲートを接続した、いわゆるCMOSインバータの構成を示している。
図46は、図45(A)に対応する半導体装置の断面図である。図46に示す半導体装置は、トランジスタ2200と、トランジスタ2100と、を有する。また、トランジスタ2100は、トランジスタ2200の上方に配置する。なお、トランジスタ2100として、図42に示したトランジスタを用いた例を示しているが、本発明の一態様に係る半導体装置は、これに限定されるものではない。例えば、図38、図39、図40、図43または図44などに示したトランジスタなどを、トランジスタ2100として用いても構わない。よって、トランジスタ2100については、適宜上述したトランジスタについての記載を参酌する。なお、図46(A)、図46(B)および図46(C)は、それぞれ異なる場所の断面図である。
また図45(B)に示す回路図は、トランジスタ2100とトランジスタ2200のそれぞれのソースとドレインを接続した構成を示している。このような構成とすることで、いわゆるCMOSアナログスイッチとして機能させることができる。
本発明の一態様に係るトランジスタを用いた、電力が供給されない状況でも記憶内容の保持が可能で、かつ、書き込み回数にも制限が無い半導体装置(記憶装置)の一例を図49に示す。
図50は、図49(A)に対応する半導体装置の断面図である。図50に示す半導体装置は、トランジスタ3200と、トランジスタ3300と、容量素子3400と、を有する。また、トランジスタ3300および容量素子3400は、トランジスタ3200の上方に配置する。なお、トランジスタ3300としては、上述したトランジスタ2100についての記載を参照する。また、トランジスタ3200としては、図46に示したトランジスタ2200についての記載を参照する。なお、図46では、トランジスタ2200がpチャネル型トランジスタである場合について説明したが、トランジスタ3200がnチャネル型トランジスタであっても構わない。なお、図50(A)、図50(B)および図50(C)は、それぞれ異なる場所の断面図である。
図49(B)に示す半導体装置は、トランジスタ3200を有さない点で図49(A)に示した半導体装置と異なる。この場合も図49(A)に示した半導体装置と同様の動作により情報の書き込みおよび保持動作が可能である。
以下では、本発明の一態様に係る撮像装置について説明する。
撮像装置2000が有する1つの画素2011を複数の副画素2012で構成し、それぞれの副画素2012に特定の波長帯域の光を透過するフィルタ(カラーフィルタ)を組み合わせることで、カラー画像表示を実現するための情報を取得することができる。
以下では、シリコンを用いたトランジスタと、酸化物半導体を用いたトランジスタと、を用いて画素を構成する一例について説明する。
以下では、上述したトランジスタや上述した記憶装置などの半導体装置を含むCPUについて説明する。
以下では、本発明の一態様に係る表示装置について、図61および図63を用いて説明する。
本発明の一態様に係る半導体装置は、表示機器、パーソナルコンピュータ、記録媒体を備えた画像再生装置(代表的にはDVD:Digital Versatile Disc等の記録媒体を再生し、その画像を表示しうるディスプレイを有する装置)に用いることができる。その他に、本発明の一態様に係る半導体装置を用いることができる電子機器として、携帯電話、携帯型を含むゲーム機、携帯データ端末、電子書籍端末、ビデオカメラ、デジタルスチルカメラ等のカメラ、ゴーグル型ディスプレイ(ヘッドマウントディスプレイ)、ナビゲーションシステム、音響再生装置(カーオーディオ、デジタルオーディオプレイヤー等)、複写機、ファクシミリ、プリンタ、プリンタ複合機、現金自動預け入れ払い機(ATM)、自動販売機などが挙げられる。これら電子機器の具体例を図64に示す。
100a ターゲット
100b ターゲット
101 成膜室
103b マグネットユニット
110 バッキングプレート
110a バッキングプレート
110b バッキングプレート
120 ターゲットホルダ
120a ターゲットホルダ
120b ターゲットホルダ
122 ターゲットシールド
123 ターゲットシールド
130 マグネットユニット
130a マグネットユニット
130b マグネットユニット
130N マグネット
130N1 マグネット
130N2 マグネット
130S マグネット
132 マグネットホルダ
140 プラズマ
142 部材
160 基板
170 基板ホルダ
180a 磁力線
180b 磁力線
190 電源
191 電源
200 ペレット
201 イオン
202 横成長部
203 粒子
210 バッキングプレート
220 基板
230 ターゲット
250 マグネット
400 基板
401 絶縁体
402 絶縁体
404 導電体
406a 半導体
406b 半導体
406c 半導体
408 絶縁体
409 絶縁体
410a 絶縁体
410b 絶縁体
412 絶縁体
413 導電体
416a 導電体
416b 導電体
422 絶縁体
428 絶縁体
450 半導体基板
452 絶縁体
454 導電体
456 領域
460 領域
462 絶縁体
464 絶縁体
466 絶縁体
468 絶縁体
472a 領域
472b 領域
474a 導電体
474b 導電体
474c 導電体
476a 導電体
476b 導電体
478a 導電体
478b 導電体
478c 導電体
480a 導電体
480b 導電体
480c 導電体
490 絶縁体
492 絶縁体
494 絶縁体
496a 導電体
496b 導電体
496c 導電体
496d 導電体
498 導電体
498a 導電体
498b 導電体
498c 導電体
498d 導電体
500 基板
502 絶縁体
503 絶縁体
504 導電体
506a 半導体
506b 半導体
506c 半導体
508 絶縁体
512 絶縁体
513 導電体
514 導電体
516a 導電体
516b 導電体
700 基板
704a 導電体
704b 導電体
706 半導体
706a 半導体
706b 半導体
712a 絶縁体
712b 絶縁体
714a 導電体
714b 導電体
716a 導電体
716b 導電体
718a 絶縁体
718b 絶縁体
718c 絶縁体
719 発光素子
720 絶縁体
721 絶縁体
731 端子
732 FPC
733a 配線
734 シール材
735 駆動回路
736 駆動回路
737 画素
741 トランジスタ
742 容量素子
743 スイッチ素子
744 信号線
751 トランジスタ
752 容量素子
753 液晶素子
754 走査線
755 信号線
781 導電体
782 発光層
783 導電体
784 隔壁
791 導電体
792 絶縁体
793 液晶層
794 絶縁体
795 スペーサ
796 導電体
801 半導体基板
802 基板
803 絶縁体
804 絶縁体
805 絶縁体
806 接着層
807 フィルタ
808 フィルタ
809 フィルタ
811 絶縁体
812 絶縁体
813 絶縁体
814 絶縁体
815 絶縁体
816 絶縁体
817 絶縁体
818 絶縁体
819 絶縁体
820 絶縁体
821 絶縁体
831 導電体
832 導電体
833 導電体
834 導電体
835 導電体
836 導電体
837 導電体
838 導電体
839 導電体
840 導電体
841 導電体
842 導電体
843 導電体
844 導電体
845 導電体
846 導電体
847 導電体
848 導電体
849 導電体
850 導電体
851 導電体
852 導電体
853 導電体
854 導電体
855 導電体
856 導電体
857 導電体
858 導電体
859 導電体
860 導電体
861 導電体
862 導電体
871 絶縁体
872 導電体
873 絶縁体
874 絶縁体
875 領域
876 領域
877 絶縁体
878 絶縁体
881 絶縁体
882 導電体
883 絶縁体
884 絶縁体
885 領域
886 領域
887 層
888 層
891 トランジスタ
892 トランジスタ
893 発光層
901 筐体
902 筐体
903 表示部
904 表示部
905 マイクロフォン
906 スピーカー
907 操作キー
908 スタイラス
911 筐体
912 筐体
913 表示部
914 表示部
915 接続部
916 操作キー
921 筐体
922 表示部
923 キーボード
924 ポインティングデバイス
931 筐体
932 冷蔵室用扉
933 冷凍室用扉
941 筐体
942 筐体
943 表示部
944 操作キー
945 レンズ
946 接続部
951 車体
952 車輪
953 ダッシュボード
954 ライト
1189 ROMインターフェース
1190 基板
1191 ALU
1192 ALUコントローラ
1193 インストラクションデコーダ
1194 インタラプトコントローラ
1195 タイミングコントローラ
1196 レジスタ
1197 レジスタコントローラ
1198 バスインターフェース
1199 ROM
1200 記憶素子
1201 回路
1202 回路
1203 スイッチ
1204 スイッチ
1206 論理素子
1207 容量素子
1208 容量素子
1209 トランジスタ
1210 トランジスタ
1213 トランジスタ
1214 トランジスタ
1220 回路
2000 撮像装置
2001 スイッチ
2002 スイッチ
2003 スイッチ
2010 画素部
2011 画素
2012 副画素
2012B 副画素
2012G 副画素
2012R 副画素
2020 光電変換素子
2030 画素回路
2031 配線
2047 配線
2048 配線
2049 配線
2050 配線
2053 配線
2054 フィルタ
2054B フィルタ
2054G フィルタ
2054R フィルタ
2055 レンズ
2056 光
2057 配線
2060 周辺回路
2070 周辺回路
2080 周辺回路
2090 周辺回路
2091 光源
2100 トランジスタ
2200 トランジスタ
2300 シリコン基板
2310 層
2320 層
2330 層
2340 層
2351 トランジスタ
2352 トランジスタ
2353 トランジスタ
2354 フィルタ
2355 レンズ
2360 フォトダイオード
2361 アノード
2363 低抵抗領域
2370 プラグ
2371 配線
2372 配線
2373 配線
2409 絶縁体
2418 絶縁体
2422 絶縁体
2700 成膜装置
2701 大気側基板供給室
2702 大気側基板搬送室
2703a ロードロック室
2703b アンロードロック室
2704 搬送室
2705 基板加熱室
2706a 成膜室
2706b 成膜室
2706c 成膜室
2751 クライオトラップ
2752 ステージ
2761 カセットポート
2762 アライメントポート
2763 搬送ロボット
2764 ゲートバルブ
2765 加熱ステージ
2766 ターゲット
2766a ターゲット
2766b ターゲット
2767 ターゲットシールド
2767a ターゲットシールド
2767b ターゲットシールド
2768 基板ホルダ
2769 基板
2770 真空ポンプ
2771 クライオポンプ
2772 ターボ分子ポンプ
2780 マスフローコントローラ
2781 精製機
2782 ガス加熱機構
2784 可変部材
2790a マグネットユニット
2790b マグネットユニット
2791 電源
3001 配線
3002 配線
3003 配線
3004 配線
3005 配線
3200 トランジスタ
3300 トランジスタ
3400 容量素子
Claims (2)
- 対向ターゲット式スパッタリング装置を用いて、基板を加熱しない状態で、単結晶においてはヘキサゴナルな原子配列を有する酸化物を成膜し、
前記酸化物は、インジウム、元素M(アルミニウム、ガリウム、イットリウムまたはスズ)、亜鉛のホモロガス構造を有し、
前記酸化物は、前記酸化物の上面における透過電子顕微鏡像の第1の領域を画像解析することで得られる格子点群を有し、
前記格子点群をボロノイ解析することで得られる複数のボロノイ領域を有するボロノイ図において、前記ボロノイ領域が六角形である割合が78%以上100%以下であることを特徴とする酸化物の成膜方法。 - 対向ターゲット式スパッタリング装置を用いて、基板を加熱しない状態で、アルゴンガス及び酸素ガスを含む成膜ガスにより、単結晶においてはヘキサゴナルな原子配列を有する酸化物を成膜し、
前記酸化物は、インジウム、元素M(アルミニウム、ガリウム、イットリウムまたはスズ)、亜鉛のホモロガス構造を有し、
前記酸化物は、前記酸化物の上面における透過電子顕微鏡像の第1の領域を画像解析することで得られる格子点群を有し、
前記格子点群をボロノイ解析することで得られる複数のボロノイ領域を有するボロノイ図において、前記ボロノイ領域が六角形である割合が78%以上100%以下であることを特徴とする酸化物の成膜方法。
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017149413A1 (en) | 2016-03-04 | 2017-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9581506B1 (en) * | 2016-03-30 | 2017-02-28 | Globalfoundries Singapore Pte. Ltd. | Methods for evaluating strain of crystalline devices |
JP6668455B2 (ja) | 2016-04-01 | 2020-03-18 | 株式会社半導体エネルギー研究所 | 酸化物半導体膜の作製方法 |
KR102358829B1 (ko) | 2016-05-19 | 2022-02-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 복합 산화물 반도체 및 트랜지스터 |
CN114864381A (zh) | 2016-05-20 | 2022-08-05 | 株式会社半导体能源研究所 | 半导体装置或包括该半导体装置的显示装置 |
RU2676719C1 (ru) * | 2018-02-14 | 2019-01-10 | Федеральное государственное бюджетное учреждение науки Институт электрофизики Уральского отделения Российской академии наук | Способ низкотемпературного нанесения нанокристаллического покрытия из альфа-оксида алюминия |
KR102082602B1 (ko) * | 2018-03-08 | 2020-04-23 | 토토 가부시키가이샤 | 복합 구조물 및 복합 구조물을 구비한 반도체 제조 장치 그리고 디스플레이 제조 장치 |
KR102085420B1 (ko) * | 2018-03-28 | 2020-03-05 | (주)세원하드페이싱 | 유동성 향상을 위한 마이크로파 플라즈마를 이용한 세라믹 분말의 표면 처리 방법 |
US11289475B2 (en) * | 2019-01-25 | 2022-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of semiconductor device |
Family Cites Families (119)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60198861A (ja) | 1984-03-23 | 1985-10-08 | Fujitsu Ltd | 薄膜トランジスタ |
JPH0244256B2 (ja) | 1987-01-28 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn2o5deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
JPS63210023A (ja) | 1987-02-24 | 1988-08-31 | Natl Inst For Res In Inorg Mater | InGaZn↓4O↓7で示される六方晶系の層状構造を有する化合物およびその製造法 |
JPH0244260B2 (ja) | 1987-02-24 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn5o8deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
JPH0244258B2 (ja) | 1987-02-24 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn3o6deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
JPH0244262B2 (ja) | 1987-02-27 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn6o9deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
JPH0244263B2 (ja) | 1987-04-22 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn7o10deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
JPH05251705A (ja) | 1992-03-04 | 1993-09-28 | Fuji Xerox Co Ltd | 薄膜トランジスタ |
JP3298974B2 (ja) | 1993-03-23 | 2002-07-08 | 電子科学株式会社 | 昇温脱離ガス分析装置 |
JP3733599B2 (ja) * | 1993-08-11 | 2006-01-11 | 住友化学株式会社 | 金属酸化物粉末およびその製造方法 |
JP3479375B2 (ja) | 1995-03-27 | 2003-12-15 | 科学技術振興事業団 | 亜酸化銅等の金属酸化物半導体による薄膜トランジスタとpn接合を形成した金属酸化物半導体装置およびそれらの製造方法 |
WO1997006554A2 (en) | 1995-08-03 | 1997-02-20 | Philips Electronics N.V. | Semiconductor device provided with transparent switching element |
JP3625598B2 (ja) | 1995-12-30 | 2005-03-02 | 三星電子株式会社 | 液晶表示装置の製造方法 |
JP4170454B2 (ja) | 1998-07-24 | 2008-10-22 | Hoya株式会社 | 透明導電性酸化物薄膜を有する物品及びその製造方法 |
JP2000150861A (ja) | 1998-11-16 | 2000-05-30 | Tdk Corp | 酸化物薄膜 |
JP3276930B2 (ja) | 1998-11-17 | 2002-04-22 | 科学技術振興事業団 | トランジスタ及び半導体装置 |
TW460731B (en) | 1999-09-03 | 2001-10-21 | Ind Tech Res Inst | Electrode structure and production method of wide viewing angle LCD |
JP4089858B2 (ja) | 2000-09-01 | 2008-05-28 | 国立大学法人東北大学 | 半導体デバイス |
KR20020038482A (ko) | 2000-11-15 | 2002-05-23 | 모리시타 요이찌 | 박막 트랜지스터 어레이, 그 제조방법 및 그것을 이용한표시패널 |
JP3997731B2 (ja) | 2001-03-19 | 2007-10-24 | 富士ゼロックス株式会社 | 基材上に結晶性半導体薄膜を形成する方法 |
JP2002289859A (ja) | 2001-03-23 | 2002-10-04 | Minolta Co Ltd | 薄膜トランジスタ |
JP3694737B2 (ja) * | 2001-07-27 | 2005-09-14 | 独立行政法人物質・材料研究機構 | 酸化亜鉛基ホモロガス化合物薄膜の製造法 |
KR100589509B1 (ko) | 2001-08-09 | 2006-06-14 | 다이켄카가쿠 코교 가부시키가이샤 | 마이크로파 유전체 복합조성물 |
JP4090716B2 (ja) | 2001-09-10 | 2008-05-28 | 雅司 川崎 | 薄膜トランジスタおよびマトリクス表示装置 |
JP3925839B2 (ja) | 2001-09-10 | 2007-06-06 | シャープ株式会社 | 半導体記憶装置およびその試験方法 |
JP4164562B2 (ja) | 2002-09-11 | 2008-10-15 | 独立行政法人科学技術振興機構 | ホモロガス薄膜を活性層として用いる透明薄膜電界効果型トランジスタ |
WO2003040441A1 (en) | 2001-11-05 | 2003-05-15 | Japan Science And Technology Agency | Natural superlattice homologous single crystal thin film, method for preparation thereof, and device using said single crystal thin film |
JP4083486B2 (ja) | 2002-02-21 | 2008-04-30 | 独立行政法人科学技術振興機構 | LnCuO(S,Se,Te)単結晶薄膜の製造方法 |
US7049190B2 (en) | 2002-03-15 | 2006-05-23 | Sanyo Electric Co., Ltd. | Method for forming ZnO film, method for forming ZnO semiconductor layer, method for fabricating semiconductor device, and semiconductor device |
JP3933591B2 (ja) | 2002-03-26 | 2007-06-20 | 淳二 城戸 | 有機エレクトロルミネッセント素子 |
US7339187B2 (en) | 2002-05-21 | 2008-03-04 | State Of Oregon Acting By And Through The Oregon State Board Of Higher Education On Behalf Of Oregon State University | Transistor structures |
JP2004022625A (ja) | 2002-06-13 | 2004-01-22 | Murata Mfg Co Ltd | 半導体デバイス及び該半導体デバイスの製造方法 |
US7105868B2 (en) | 2002-06-24 | 2006-09-12 | Cermet, Inc. | High-electron mobility transistor with zinc oxide |
US7115219B2 (en) * | 2002-09-11 | 2006-10-03 | Sumitomo Chemical Company, Limited | Method of producing Indium Tin Oxide powder |
US7067843B2 (en) | 2002-10-11 | 2006-06-27 | E. I. Du Pont De Nemours And Company | Transparent oxide semiconductor thin film transistors |
JP4166105B2 (ja) | 2003-03-06 | 2008-10-15 | シャープ株式会社 | 半導体装置およびその製造方法 |
JP2004273732A (ja) | 2003-03-07 | 2004-09-30 | Sharp Corp | アクティブマトリクス基板およびその製造方法 |
JP4108633B2 (ja) | 2003-06-20 | 2008-06-25 | シャープ株式会社 | 薄膜トランジスタおよびその製造方法ならびに電子デバイス |
US7262463B2 (en) | 2003-07-25 | 2007-08-28 | Hewlett-Packard Development Company, L.P. | Transistor including a deposited channel region having a doped portion |
KR101078509B1 (ko) | 2004-03-12 | 2011-10-31 | 도꾸리쯔교세이호징 가가꾸 기쥬쯔 신꼬 기꼬 | 박막 트랜지스터의 제조 방법 |
US7282782B2 (en) | 2004-03-12 | 2007-10-16 | Hewlett-Packard Development Company, L.P. | Combined binary oxide semiconductor device |
US7297977B2 (en) | 2004-03-12 | 2007-11-20 | Hewlett-Packard Development Company, L.P. | Semiconductor device |
US7145174B2 (en) | 2004-03-12 | 2006-12-05 | Hewlett-Packard Development Company, Lp. | Semiconductor device |
US7211825B2 (en) | 2004-06-14 | 2007-05-01 | Yi-Chi Shih | Indium oxide-based thin film transistors and circuits |
JP2006100760A (ja) | 2004-09-02 | 2006-04-13 | Casio Comput Co Ltd | 薄膜トランジスタおよびその製造方法 |
US7285501B2 (en) | 2004-09-17 | 2007-10-23 | Hewlett-Packard Development Company, L.P. | Method of forming a solution processed device |
US7298084B2 (en) | 2004-11-02 | 2007-11-20 | 3M Innovative Properties Company | Methods and displays utilizing integrated zinc oxide row and column drivers in conjunction with organic light emitting diodes |
US7791072B2 (en) | 2004-11-10 | 2010-09-07 | Canon Kabushiki Kaisha | Display |
US7453065B2 (en) | 2004-11-10 | 2008-11-18 | Canon Kabushiki Kaisha | Sensor and image pickup device |
CA2585071A1 (en) | 2004-11-10 | 2006-05-18 | Canon Kabushiki Kaisha | Field effect transistor employing an amorphous oxide |
US7829444B2 (en) | 2004-11-10 | 2010-11-09 | Canon Kabushiki Kaisha | Field effect transistor manufacturing method |
CN102938420B (zh) | 2004-11-10 | 2015-12-02 | 佳能株式会社 | 无定形氧化物和场效应晶体管 |
US7863611B2 (en) | 2004-11-10 | 2011-01-04 | Canon Kabushiki Kaisha | Integrated circuits utilizing amorphous oxides |
WO2006051994A2 (en) | 2004-11-10 | 2006-05-18 | Canon Kabushiki Kaisha | Light-emitting device |
US7579224B2 (en) | 2005-01-21 | 2009-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a thin film semiconductor device |
TWI569441B (zh) | 2005-01-28 | 2017-02-01 | 半導體能源研究所股份有限公司 | 半導體裝置,電子裝置,和半導體裝置的製造方法 |
TWI472037B (zh) | 2005-01-28 | 2015-02-01 | Semiconductor Energy Lab | 半導體裝置,電子裝置,和半導體裝置的製造方法 |
US7858451B2 (en) | 2005-02-03 | 2010-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device, semiconductor device and manufacturing method thereof |
US7948171B2 (en) | 2005-02-18 | 2011-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
US20060197092A1 (en) | 2005-03-03 | 2006-09-07 | Randy Hoffman | System and method for forming conductive material on a substrate |
US8681077B2 (en) | 2005-03-18 | 2014-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, and display device, driving method and electronic apparatus thereof |
WO2006105077A2 (en) | 2005-03-28 | 2006-10-05 | Massachusetts Institute Of Technology | Low voltage thin film transistor with high-k dielectric material |
US7645478B2 (en) | 2005-03-31 | 2010-01-12 | 3M Innovative Properties Company | Methods of making displays |
US8300031B2 (en) | 2005-04-20 | 2012-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising transistor having gate and drain connected through a current-voltage conversion element |
JP2006344849A (ja) | 2005-06-10 | 2006-12-21 | Casio Comput Co Ltd | 薄膜トランジスタ |
US7402506B2 (en) | 2005-06-16 | 2008-07-22 | Eastman Kodak Company | Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby |
US7691666B2 (en) | 2005-06-16 | 2010-04-06 | Eastman Kodak Company | Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby |
US7507618B2 (en) | 2005-06-27 | 2009-03-24 | 3M Innovative Properties Company | Method for making electronic devices using metal oxide nanoparticles |
KR100711890B1 (ko) | 2005-07-28 | 2007-04-25 | 삼성에스디아이 주식회사 | 유기 발광표시장치 및 그의 제조방법 |
JP2007059128A (ja) | 2005-08-23 | 2007-03-08 | Canon Inc | 有機el表示装置およびその製造方法 |
JP2007073705A (ja) | 2005-09-06 | 2007-03-22 | Canon Inc | 酸化物半導体チャネル薄膜トランジスタおよびその製造方法 |
JP4280736B2 (ja) | 2005-09-06 | 2009-06-17 | キヤノン株式会社 | 半導体素子 |
JP4850457B2 (ja) | 2005-09-06 | 2012-01-11 | キヤノン株式会社 | 薄膜トランジスタ及び薄膜ダイオード |
JP5116225B2 (ja) | 2005-09-06 | 2013-01-09 | キヤノン株式会社 | 酸化物半導体デバイスの製造方法 |
EP1995787A3 (en) | 2005-09-29 | 2012-01-18 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device having oxide semiconductor layer and manufacturing method therof |
JP5037808B2 (ja) | 2005-10-20 | 2012-10-03 | キヤノン株式会社 | アモルファス酸化物を用いた電界効果型トランジスタ、及び該トランジスタを用いた表示装置 |
CN101707212B (zh) | 2005-11-15 | 2012-07-11 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
TWI292281B (en) | 2005-12-29 | 2008-01-01 | Ind Tech Res Inst | Pixel structure of active organic light emitting diode and method of fabricating the same |
US7867636B2 (en) | 2006-01-11 | 2011-01-11 | Murata Manufacturing Co., Ltd. | Transparent conductive film and method for manufacturing the same |
JP4977478B2 (ja) | 2006-01-21 | 2012-07-18 | 三星電子株式会社 | ZnOフィルム及びこれを用いたTFTの製造方法 |
US7576394B2 (en) | 2006-02-02 | 2009-08-18 | Kochi Industrial Promotion Center | Thin film transistor including low resistance conductive thin films and manufacturing method thereof |
US7977169B2 (en) | 2006-02-15 | 2011-07-12 | Kochi Industrial Promotion Center | Semiconductor device including active layer made of zinc oxide with controlled orientations and manufacturing method thereof |
KR20070101595A (ko) | 2006-04-11 | 2007-10-17 | 삼성전자주식회사 | ZnO TFT |
US20070252928A1 (en) | 2006-04-28 | 2007-11-01 | Toppan Printing Co., Ltd. | Structure, transmission type liquid crystal display, reflection type display and manufacturing method thereof |
JP5028033B2 (ja) | 2006-06-13 | 2012-09-19 | キヤノン株式会社 | 酸化物半導体膜のドライエッチング方法 |
JP4999400B2 (ja) | 2006-08-09 | 2012-08-15 | キヤノン株式会社 | 酸化物半導体膜のドライエッチング方法 |
JP4609797B2 (ja) | 2006-08-09 | 2011-01-12 | Nec液晶テクノロジー株式会社 | 薄膜デバイス及びその製造方法 |
JP4332545B2 (ja) | 2006-09-15 | 2009-09-16 | キヤノン株式会社 | 電界効果型トランジスタ及びその製造方法 |
JP5164357B2 (ja) | 2006-09-27 | 2013-03-21 | キヤノン株式会社 | 半導体装置及び半導体装置の製造方法 |
JP4274219B2 (ja) | 2006-09-27 | 2009-06-03 | セイコーエプソン株式会社 | 電子デバイス、有機エレクトロルミネッセンス装置、有機薄膜半導体装置 |
US7622371B2 (en) | 2006-10-10 | 2009-11-24 | Hewlett-Packard Development Company, L.P. | Fused nanocrystal thin film semiconductor and method |
US7772021B2 (en) | 2006-11-29 | 2010-08-10 | Samsung Electronics Co., Ltd. | Flat panel displays comprising a thin-film transistor having a semiconductive oxide in its channel and methods of fabricating the same for use in flat panel displays |
JP2008140684A (ja) | 2006-12-04 | 2008-06-19 | Toppan Printing Co Ltd | カラーelディスプレイおよびその製造方法 |
KR101303578B1 (ko) | 2007-01-05 | 2013-09-09 | 삼성전자주식회사 | 박막 식각 방법 |
US8207063B2 (en) | 2007-01-26 | 2012-06-26 | Eastman Kodak Company | Process for atomic layer deposition |
KR100851215B1 (ko) | 2007-03-14 | 2008-08-07 | 삼성에스디아이 주식회사 | 박막 트랜지스터 및 이를 이용한 유기 전계 발광표시장치 |
US7795613B2 (en) | 2007-04-17 | 2010-09-14 | Toppan Printing Co., Ltd. | Structure with transistor |
KR101325053B1 (ko) | 2007-04-18 | 2013-11-05 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 이의 제조 방법 |
KR20080094300A (ko) | 2007-04-19 | 2008-10-23 | 삼성전자주식회사 | 박막 트랜지스터 및 그 제조 방법과 박막 트랜지스터를포함하는 평판 디스플레이 |
KR101334181B1 (ko) | 2007-04-20 | 2013-11-28 | 삼성전자주식회사 | 선택적으로 결정화된 채널층을 갖는 박막 트랜지스터 및 그제조 방법 |
CN101663762B (zh) | 2007-04-25 | 2011-09-21 | 佳能株式会社 | 氧氮化物半导体 |
US9249032B2 (en) * | 2007-05-07 | 2016-02-02 | Idemitsu Kosan Co., Ltd. | Semiconductor thin film, semiconductor thin film manufacturing method and semiconductor element |
KR101345376B1 (ko) | 2007-05-29 | 2013-12-24 | 삼성전자주식회사 | ZnO 계 박막 트랜지스터 및 그 제조방법 |
US8202365B2 (en) | 2007-12-17 | 2012-06-19 | Fujifilm Corporation | Process for producing oriented inorganic crystalline film, and semiconductor device using the oriented inorganic crystalline film |
JP4623179B2 (ja) | 2008-09-18 | 2011-02-02 | ソニー株式会社 | 薄膜トランジスタおよびその製造方法 |
JP5451280B2 (ja) | 2008-10-09 | 2014-03-26 | キヤノン株式会社 | ウルツ鉱型結晶成長用基板およびその製造方法ならびに半導体装置 |
US8894825B2 (en) * | 2010-12-17 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target, method for manufacturing the same, manufacturing semiconductor device |
US9478668B2 (en) * | 2011-04-13 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
JP5946624B2 (ja) * | 2011-10-07 | 2016-07-06 | 株式会社半導体エネルギー研究所 | 酸化物半導体膜及び半導体装置 |
KR102108248B1 (ko) * | 2012-03-14 | 2020-05-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막, 트랜지스터, 및 반도체 장치 |
EP2867387A4 (en) | 2012-06-29 | 2016-03-09 | Semiconductor Energy Lab | METHOD OF USING CATHODIC SPUTTER TARGET AND METHOD OF MANUFACTURING OXIDE FILM |
JP5904056B2 (ja) * | 2012-08-22 | 2016-04-13 | 東ソー株式会社 | Igzo焼結体、その製造方法及びスパッタリングターゲット |
JP2014062316A (ja) * | 2012-09-03 | 2014-04-10 | Idemitsu Kosan Co Ltd | スパッタリングターゲット |
WO2014188983A1 (en) | 2013-05-21 | 2014-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and formation method thereof |
TWI643969B (zh) * | 2013-12-27 | 2018-12-11 | 日商半導體能源研究所股份有限公司 | 氧化物半導體的製造方法 |
US20150318171A1 (en) | 2014-05-02 | 2015-11-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide |
TWI652362B (zh) | 2014-10-28 | 2019-03-01 | 日商半導體能源研究所股份有限公司 | 氧化物及其製造方法 |
TWI686874B (zh) | 2014-12-26 | 2020-03-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置、顯示裝置、顯示模組、電子裝置、氧化物及氧化物的製造方法 |
WO2016132240A1 (en) | 2015-02-20 | 2016-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of oxide film and sputtering apparatus |
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