JP6669810B2 - ウェーハ研磨装置 - Google Patents
ウェーハ研磨装置 Download PDFInfo
- Publication number
- JP6669810B2 JP6669810B2 JP2018114348A JP2018114348A JP6669810B2 JP 6669810 B2 JP6669810 B2 JP 6669810B2 JP 2018114348 A JP2018114348 A JP 2018114348A JP 2018114348 A JP2018114348 A JP 2018114348A JP 6669810 B2 JP6669810 B2 JP 6669810B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- wafer
- guide
- particles
- polishing head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005498 polishing Methods 0.000 title claims description 116
- 239000002245 particle Substances 0.000 claims description 63
- 239000002002 slurry Substances 0.000 claims description 22
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 239000007921 spray Substances 0.000 claims description 7
- 238000005507 spraying Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 59
- 238000007517 polishing process Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 13
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 235000004869 Tussilago farfara Nutrition 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
- B24C9/003—Removing abrasive powder out of the blasting machine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
- B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
- B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/04—Protective covers for the grinding wheel
- B24B55/045—Protective covers for the grinding wheel with cooling means incorporated
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Description
120:定盤回転軸 130:研磨パッド
200:研磨ヘッドユニット 210:研磨ヘッド
220:ヘッド回転軸 300:スラリー噴射ノズル
400:排出部(Exhaust) 500、500a:パーティクル吸入部
510:本体 520:ガイド
521:吸入孔 530:エアポンプ
600:インデックス P:パーティクル
W:ウェーハ S:スラリー
Claims (9)
- 上面に研磨パッドが付着する定盤;
前記研磨パッドに向かってスラリーを噴射するスラリー噴射ノズル;
ウェーハを収容し、前記定盤の上部で回転する少なくともーつの研磨ヘッド;
上部で前記少なくともーつの研磨ヘッドを連結するように支持するインデックス;および
前記インデックスに結合され、前記ウェーハの研磨時に発生するパーティクルを吸引するパーティクル吸引部;
を含み、
前記パーティクル吸引部は、前記少なくともーつの研磨ヘッドの外周面を囲むように配置される、ウェーハ研磨装置。 - 前記パーティクル吸引部の両端部は、前記スラリー噴射ノズルを挟むように互いに離隔して配置される、請求項1に記載のウェーハ研磨装置。
- 前記パーティクル吸引部は、
前記研磨ヘッドの外周面を囲むように前記インデックスに結合される本体;
吸引孔を有して前記本体の下部に配置されるガイド;および
前記インデックスに設置され、前記ガイドを通じてパーティクルを吸引させるようにするエアポンプを含む、請求項2に記載のウェーハ研磨装置。 - 前記本体と前記ガイド内側には、前記吸引孔と連通すると共に、吸引されるパーティクルが移動する移動流路が形成された、請求項3に記載のウェーハ研磨装置。
- 前記ガイドは、下部に行くほど尖った形状を有する、請求項3に記載のウェーハ研磨装置。
- 前記吸引孔は、前記研磨ヘッドに隣接するように前記ガイドの内周面に沿って長く配置される長孔(Slot)形状を有する、請求項5に記載のウェーハ研磨装置。
- 前記吸引孔は、前記ガイドに複数個が離隔して配置される、請求項5に記載のウェーハ研磨装置。
- 前記本体および前記ガイドは、複数個からなり、互いに一定の間隔で離隔して前記研磨ヘッドの外周面を囲むように配置される、請求項3ないし請求項7のいずれか一項に記載のウェーハ研磨装置。
- 前記定盤の下部に配置され、パーティクルを吸引して排出させる排出部をさらに含む、請求項8に記載のウェーハ研磨装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2018-0002075 | 2018-01-08 | ||
KR1020180002075A KR102037747B1 (ko) | 2018-01-08 | 2018-01-08 | 웨이퍼 연마 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019119039A JP2019119039A (ja) | 2019-07-22 |
JP6669810B2 true JP6669810B2 (ja) | 2020-03-18 |
Family
ID=67139312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018114348A Active JP6669810B2 (ja) | 2018-01-08 | 2018-06-15 | ウェーハ研磨装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11198207B2 (ja) |
JP (1) | JP6669810B2 (ja) |
KR (1) | KR102037747B1 (ja) |
CN (1) | CN110014362A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110625519B (zh) * | 2019-08-26 | 2021-08-03 | 苏州冠博控制科技有限公司 | 一种高精度晶圆研磨机 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB848841A (en) | 1957-05-24 | 1960-09-21 | Holman Brothers Ltd | Improvements relating to dust extractors for rotary abrasive tools and other dust-producing tools |
JPS58114346A (ja) * | 1981-12-25 | 1983-07-07 | Toshiba Corp | テ−プレコ−ダのテ−プ終端検出回路 |
JPH11254298A (ja) * | 1998-03-06 | 1999-09-21 | Speedfam Co Ltd | スラリー循環供給式平面研磨装置 |
EP1080840A3 (en) * | 1999-08-30 | 2004-01-02 | Mitsubishi Materials Corporation | Polishing apparatus, polishing method and method of conditioning polishing pad |
JP2001129760A (ja) * | 1999-11-02 | 2001-05-15 | Okamoto Machine Tool Works Ltd | ウエハの研磨終点検出方法 |
US6419567B1 (en) * | 2000-08-14 | 2002-07-16 | Semiconductor 300 Gmbh & Co. Kg | Retaining ring for chemical-mechanical polishing (CMP) head, polishing apparatus, slurry cycle system, and method |
JP4583580B2 (ja) | 2000-10-30 | 2010-11-17 | アプライド マテリアルズ インコーポレイテッド | パッドコンディショナおよびコンディショニング方法 |
JP2003340718A (ja) | 2002-05-20 | 2003-12-02 | Tokyo Seimitsu Co Ltd | 研削装置 |
JP4448297B2 (ja) * | 2002-12-27 | 2010-04-07 | 株式会社荏原製作所 | 基板研磨装置及び基板研磨方法 |
JP4455833B2 (ja) | 2003-05-15 | 2010-04-21 | 信越半導体株式会社 | ウエーハの研磨方法 |
US7052371B2 (en) * | 2003-05-29 | 2006-05-30 | Tbw Industries Inc. | Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk |
JP2005271151A (ja) * | 2004-03-25 | 2005-10-06 | Toshiba Corp | 研磨装置及び研磨方法 |
JP2006088292A (ja) * | 2004-09-27 | 2006-04-06 | Toshiba Corp | 研磨装置、研磨方法および半導体装置の製造方法 |
US7988535B2 (en) * | 2008-04-18 | 2011-08-02 | Applied Materials, Inc. | Platen exhaust for chemical mechanical polishing system |
JP5795977B2 (ja) * | 2012-03-14 | 2015-10-14 | 株式会社荏原製作所 | 研磨装置 |
US9321143B2 (en) * | 2013-10-08 | 2016-04-26 | Seagate Technology Llc | Lapping device with lapping control feature and method |
JP6328977B2 (ja) | 2014-03-31 | 2018-05-23 | 株式会社荏原製作所 | 基板研磨装置 |
JP6345474B2 (ja) | 2014-04-30 | 2018-06-20 | 株式会社荏原製作所 | 基板研磨装置 |
US10576604B2 (en) * | 2014-04-30 | 2020-03-03 | Ebara Corporation | Substrate polishing apparatus |
JP6357861B2 (ja) * | 2014-05-14 | 2018-07-18 | 富士通セミコンダクター株式会社 | 研磨装置及び研磨方法 |
KR101841549B1 (ko) | 2015-10-29 | 2018-03-23 | 에스케이실트론 주식회사 | 드레싱 장치 및 이를 포함하는 웨이퍼 연마 장치 |
JP6622610B2 (ja) | 2016-02-09 | 2019-12-18 | 株式会社ディスコ | 研削装置 |
JP6726591B2 (ja) * | 2016-09-30 | 2020-07-22 | 株式会社ディスコ | 加工装置 |
-
2018
- 2018-01-08 KR KR1020180002075A patent/KR102037747B1/ko active IP Right Grant
- 2018-06-11 US US16/004,722 patent/US11198207B2/en active Active
- 2018-06-15 JP JP2018114348A patent/JP6669810B2/ja active Active
- 2018-07-19 CN CN201810796570.4A patent/CN110014362A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
US11198207B2 (en) | 2021-12-14 |
US20190210182A1 (en) | 2019-07-11 |
KR102037747B1 (ko) | 2019-10-29 |
CN110014362A (zh) | 2019-07-16 |
JP2019119039A (ja) | 2019-07-22 |
KR20190084387A (ko) | 2019-07-17 |
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