JP6652245B2 - コバルトベースの複数のインターコネクトおよびそれらの複数の製造方法 - Google Patents

コバルトベースの複数のインターコネクトおよびそれらの複数の製造方法 Download PDF

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JP6652245B2
JP6652245B2 JP2016526908A JP2016526908A JP6652245B2 JP 6652245 B2 JP6652245 B2 JP 6652245B2 JP 2016526908 A JP2016526908 A JP 2016526908A JP 2016526908 A JP2016526908 A JP 2016526908A JP 6652245 B2 JP6652245 B2 JP 6652245B2
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cobalt
adhesive layer
manganese
structure according
layer
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JP2016541113A5 (enExample
JP2016541113A (ja
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ジェゼウスキ、クリストファー、ジェイ．
インドゥクリ、タジャスウィ、ケイ．
チェビアム、ラマナン、ヴィ．
カーヴァー、コリン、ティー．
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Intel Corp
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Intel Corp
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    • H10D30/797—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions being in source or drain regions, e.g. SiGe source or drain
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    • H10W20/44—Conductive materials thereof
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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2016526908A 2013-12-20 2015-02-21 コバルトベースの複数のインターコネクトおよびそれらの複数の製造方法 Active JP6652245B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/137,526 US9997457B2 (en) 2013-12-20 2013-12-20 Cobalt based interconnects and methods of fabrication thereof
US14/137,526 2013-12-20
PCT/IB2015/000198 WO2015092780A1 (en) 2013-12-20 2015-02-21 Cobalt based interconnects and methods of fabrication thereof

Publications (3)

Publication Number Publication Date
JP2016541113A JP2016541113A (ja) 2016-12-28
JP2016541113A5 JP2016541113A5 (enExample) 2018-05-24
JP6652245B2 true JP6652245B2 (ja) 2020-02-19

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JP2016526908A Active JP6652245B2 (ja) 2013-12-20 2015-02-21 コバルトベースの複数のインターコネクトおよびそれらの複数の製造方法

Country Status (7)

Country Link
US (5) US9997457B2 (enExample)
EP (2) EP3084810B1 (enExample)
JP (1) JP6652245B2 (enExample)
KR (3) KR102710883B1 (enExample)
CN (2) CN114361132B (enExample)
TW (1) TWI610398B (enExample)
WO (1) WO2015092780A1 (enExample)

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