JP6630031B2 - 基板搬送システム、基板処理装置、及び基板搬送方法 - Google Patents
基板搬送システム、基板処理装置、及び基板搬送方法 Download PDFInfo
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Description
Claims (11)
- 基板搬送システムであって、
基板を基板容器から移送するように構成されるフロントエンドユニットと、
前記フロントエンドユニットに接合する移送モジュールと、
前記フロントエンドユニットから基板を移送するために、前記フロントエンドユニットの搬送経路に沿って前記移送モジュールと実質的にインライン配列を有するように前記移送モジュールに結合された基板処理チャンバと、
駆動部を含む基板搬送機と、を含み、
前記駆動部は、前記基板搬送機と前記移送モジュールとを結合し、前記駆動部の位置が前記フレーム、前記2つのアームリンク及び少なくとも1つのエンドエフェクタに対して移動せず、
前記2つのアームリンク及び前記少なくとも1つのエンドエフェクタは、前記移送モジュール内に配されかつ互いに直列に結合され、
前記2つのアームリンクは、各々第1のアームリンク及び第2のアームリンクであり、
前記第1のアームリンクは、前記移送モジュールのハウジングに第1のアームリンク回転軸周りに枢動可能に接続されており、
前記第2のアームリンクは、前記第1のアームリンクに第2のアームリンク回転軸周りに枢動可能に接続され、
前記基板搬送機は、前記基板搬送機の前記2つのアームリンク及び前記少なくとも1つのエンドエフェクタの前記第1のアームリンク回転軸周りに回転するユニットとしての共同の同時の同一回転方向の回転無しに、前記2つのアームリンク及び前記少なくとも1つのエンドエフェクタを直線経路に沿った2方向に伸展して、前記基板搬送機の前記2つのアームリンク及び前記エンドエフェクタが前記移送モジュールを通り抜けて前記移送モジュールを跨いだ両側に存在し、直線でありかつ前記移送モジュールを通って互いにアラインメントされている前記直線経路に沿った連続した直線動作を行って、前記処理チャンバと前記フロントエンドユニットとの間の前記直線経路に沿って基板を搬送するように構成され、
前記直線経路は、前記移送モジュールの各々を通って伸長しかつ前記移送モジュールの各々の中心に近接した中心線軸を有し、
前記第1のアームリンクは、第1の端部において前記の移送モジュールの前記ハウジングに前記第1のアームリンク回転軸周りに枢動可能に接合され、前記第1のアームリンクは第1の長さを有し、
前記第2のアームリンクの第1の端部は、前記第1のアームリンクの第2端部に前記第2のアームリンク回転軸周りに枢動可能に結合され、前記第2のアームリンクは前記第1の長さとは異なる第2の長さを有し、前記第2のアームリンクの回転は前記第1のアームリンクの回転に従属し、
前記少なくとも1つのエンドエフェクタは、前記第2のアームリンクの第2端部に枢動可能に接合され、少なくとも1つの基板を保持するように構成され、前記第1および第2リンクと別々に回転できるように駆動されることを特徴とするシステム。 - 前記フロントエンドユニットがそれぞれ実質的に平行な複数の作業経路を備え、移送モジュールが前記の複数作業経路のそれぞれに接続されていることを特徴とする請求項1に記載の基板搬送システム。
- 前記移送モジュールが、少なくとも1つの基板をバッファするためのバッファ部と、前記基板搬送機の少なくとも一部を格納する搬送部を備えていることを特徴とする請求項1に記載の基板搬送システム。
- 前記移送モジュールが、前記バッファ部を前記搬送部から隔離可能な雰囲気を有するロードロックに転換するよう構成される着脱自在の弁インサートをさらに備えていることを特徴とする請求項3に記載の基板搬送システム。
- 前記バッファ部および搬送部が、前記処理チャンバおよびフロントエンドユニットから選択可能に隔離可能な単一のチャンバ単体を形成していることを特徴とする請求項3に記載の基板搬送システム。
- 前記移送モジュールに少なくとも1つの基板バッファと、基板冷却装置と、基板アライナとを含むことを特徴とする請求項1に記載の基板搬送システム。
- 基板処理装置であって、
基板を収納および搬送するために少なくとも1つの基板容器を保持するように構成されるフロントエンドモジュールと、
少なくとも1つの基板処理チャンバと、
中に隔離された雰囲気を保持することができ、前記雰囲気内で前記の少なくとも1つの基板処理チャンバのそれぞれと前記フロントエンドモジュールに結合するよう構成されるフレームを有する少なくとも1つの隔離可能な移送チャンバと、
前記の少なくとも1つの移送チャンバのそれぞれに結合されている基板搬送機と、を備え、
前記基板搬送機は、駆動部を含み、前記駆動部が搬送機と前記搬送チャンバの各々とを結合して、前記駆動部の位置が前記フレームに対して移動せず、
前記基板搬送機は、前記搬送チャンバの各々内に配されかつ少なくとも1つの基板を支持するように構成される長さの異なる複数のアームリンクを有するSCARAアームを有し、
前記SCARAアームは、互いに直列に接続されている第1のアームリンク、第2のアームリンク及び少なくとも1つの基板ホルダを含み、前記第2のアームリンクの回転が前記第1のアームリンクの回転に従属し、少なくとも1つの基板を前記フロントエンドモジュールと前記処理チャンバの間で搬送するように構成され、
前記フロントエンドモジュール、少なくとも1つの基板処理チャンバ、および少なくとも1つの隔離可能な移送チャンバが、互いから雰囲気の隔離が可能な独立した経路に沿って前記フロントエンドモジュールと前記の少なくとも1つの基板処理チャンバのそれぞれとの間で基板を搬送するように配置されており、
前記SCARAアームは、前記基板搬送機の前記第1のアームリンク、前記第2のアームリンク及び前記少なくとも1つの基板ホルダの前記SCARAアームの肩部回転軸回りに回転するユニットとしての同一回転方向の回転無しに、前記第1のアームリンク、前記第2のアームリンク及び前記少なくとも1つの基板ホルダを直線経路に沿って2方向に伸展して、前記第1のアームリンク、前記第2のアームリンク及び前記少なくとも1つの基板ホルダが移送チャンバの各々の両側部を通過する前記直線経路に沿った連続的な直線動作をなして前記直線経路に沿って前記少なくとも1つの基板を搬送し、前記隔離可能な移送チャンバの各々を跨いだ両側に存在する前記直線経路は、直線でありかつ前記隔離可能な移送チャンバの各々を通って互いにアラインメントされており、前記直線経路は、前記移送チャンバの各々を通って伸長しかつ前記移送チャンバの各々の中心に近接した中心線軸を有することを特徴とする基板処理装置。 - 請求項7に記載の基板処理装置であって、前記駆動部が前記第1の回転軸及び第2の回転軸を有し、前記の少なくとも1つの長さが異なるSCARAアームが、
肩関節部を中心に回転可能に第1端部で駆動部の前記第1の回転軸に結合される前記第1のアームリンクと、
第1端部で前記第1のアームリンクの第2端部に肘関節部を中心に回転可能に結合され、前記第1のアームリンクに従属制御され、長さが前記第1のアームリンクの長さと異なっている前記第2のアームリンクと、
それぞれが少なくとも1つの基板を保持するように構成され、手首関節部で前記第2のアームリンクの第2端部に回転可能に結合される、少なくとも2つの基板ホルダと、を備え、
前記手首関節部では、前記の少なくとも2つの基板ホルダは、前記の少なくとも2つの基板ホルダが互いに対して実質的に等しい逆の回転をするために、差動的に前記駆動部の第2の回転軸のみに結合され、前記第2の回転軸が前記少なくとも2つの基板ホルダの両方に共通の回転軸となり、前記搬送機は前記の少なくとも2つの基板ホルダが前記肩関節部に対して双方向的に伸長するように構成されていることを特徴とする基板処理装置。 - 前記直線経路を含む経路に沿った連続的な動作における前記2方向への前記SCARAアームの伸展が基板の移送をもたらし、前記長さの異なるSCARAアームが前記フレーム内では実質的に曲線状の経路に沿って基板を搬送し、前記フレーム外では前記基板搬送機の中心線に沿った実質的に直線の経路に沿って基板を搬送することを特徴とする請求項7に記載の基板処理装置。
- 前記駆動部が少なくとも1つのリニア動作軸を含むことを特徴とする請求項7に記載の基板処理装置。
- 前記基板搬送アームおよび駆動部が、大気または真空環境で作動するように構成されていることを特徴とする請求項7に記載の基板処理装置。
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US12/123,329 US8562271B2 (en) | 2007-05-18 | 2008-05-19 | Compact substrate transport system |
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US8562271B2 (en) | 2013-10-22 |
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