JP6625838B2 - 加圧装置およびそれを備えた個片化装置、樹脂成形装置、デバイス製造装置、ならびに加圧方法およびそれを含む樹脂成形方法、デバイス製造方法 - Google Patents
加圧装置およびそれを備えた個片化装置、樹脂成形装置、デバイス製造装置、ならびに加圧方法およびそれを含む樹脂成形方法、デバイス製造方法 Download PDFInfo
- Publication number
- JP6625838B2 JP6625838B2 JP2015137062A JP2015137062A JP6625838B2 JP 6625838 B2 JP6625838 B2 JP 6625838B2 JP 2015137062 A JP2015137062 A JP 2015137062A JP 2015137062 A JP2015137062 A JP 2015137062A JP 6625838 B2 JP6625838 B2 JP 6625838B2
- Authority
- JP
- Japan
- Prior art keywords
- pressurizing
- pressure
- plate
- pressing
- pressurized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000011347 resin Substances 0.000 title claims description 29
- 229920005989 resin Polymers 0.000 title claims description 29
- 238000000465 moulding Methods 0.000 title claims description 20
- 238000000034 method Methods 0.000 title claims description 17
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000003825 pressing Methods 0.000 claims description 90
- 230000007246 mechanism Effects 0.000 claims description 70
- 230000005484 gravity Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 14
- 210000000078 claw Anatomy 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000009969 flowable effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011120 plywood Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
- B29C43/361—Moulds for making articles of definite length, i.e. discrete articles with pressing members independently movable of the parts for opening or closing the mould, e.g. movable pistons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/30—Mounting, exchanging or centering
- B29C33/301—Modular mould systems [MMS], i.e. moulds built up by stacking mould elements, e.g. plates, blocks, rods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/30—Mounting, exchanging or centering
- B29C33/305—Mounting of moulds or mould support plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B7/00—Presses characterised by a particular arrangement of the pressing members
- B30B7/02—Presses characterised by a particular arrangement of the pressing members having several platens arranged one above the other
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Press Drives And Press Lines (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015137062A JP6625838B2 (ja) | 2015-07-08 | 2015-07-08 | 加圧装置およびそれを備えた個片化装置、樹脂成形装置、デバイス製造装置、ならびに加圧方法およびそれを含む樹脂成形方法、デバイス製造方法 |
KR1020187000971A KR102128301B1 (ko) | 2015-07-08 | 2016-06-07 | 가압 장치 및 그것을 구비한 개편화 장치, 수지 성형 장치, 디바이스 제조 장치, 및 가압 방법 및 그것을 포함하는 개편화 방법, 수지 성형 방법, 디바이스 제조 방법 |
CN201680040116.5A CN107848165A (zh) | 2015-07-08 | 2016-06-07 | 加压装置及包括该加压装置的单片化装置、树脂成形装置、器件制造装置、以及加压方法及包括该加压方法的单片化方法、树脂成形方法、器件制造方法 |
PCT/JP2016/066851 WO2017006682A1 (ja) | 2015-07-08 | 2016-06-07 | 加圧装置およびそれを備えた個片化装置、樹脂成形装置、デバイス製造装置、ならびに加圧方法およびそれを含む個片化方法、樹脂成形方法、デバイス製造方法 |
TW105118515A TWI583532B (zh) | 2015-07-08 | 2016-06-14 | A pressing device, and a sheeting device having the pressing device, a resin forming device, an apparatus manufacturing apparatus, a pressurizing method, and a sheeting method including the pressing method, a resin forming method, an apparatus manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015137062A JP6625838B2 (ja) | 2015-07-08 | 2015-07-08 | 加圧装置およびそれを備えた個片化装置、樹脂成形装置、デバイス製造装置、ならびに加圧方法およびそれを含む樹脂成形方法、デバイス製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017019143A JP2017019143A (ja) | 2017-01-26 |
JP6625838B2 true JP6625838B2 (ja) | 2019-12-25 |
Family
ID=57685332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015137062A Active JP6625838B2 (ja) | 2015-07-08 | 2015-07-08 | 加圧装置およびそれを備えた個片化装置、樹脂成形装置、デバイス製造装置、ならびに加圧方法およびそれを含む樹脂成形方法、デバイス製造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6625838B2 (ko) |
KR (1) | KR102128301B1 (ko) |
CN (1) | CN107848165A (ko) |
TW (1) | TWI583532B (ko) |
WO (1) | WO2017006682A1 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107498838A (zh) * | 2017-09-25 | 2017-12-22 | 南京律智诚专利技术开发有限公司 | 一种保温板自动送料防变形装置 |
JP7203414B2 (ja) * | 2018-12-27 | 2023-01-13 | アピックヤマダ株式会社 | 樹脂供給取出装置、ワーク搬送装置及び樹脂モールド装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050559B2 (ja) * | 1983-07-07 | 1985-11-08 | 株式会社名機製作所 | 多段プレス装置 |
JPS61104801A (ja) * | 1984-10-29 | 1986-05-23 | 株式会社 太平製作所 | ホツトプレス用部材の構造 |
JP2873173B2 (ja) | 1994-10-17 | 1999-03-24 | 株式会社山本鉄工所 | 発泡合成樹脂充填板材の製造方法 |
CN1498062A (zh) * | 2002-10-21 | 2004-05-19 | 三荣技研股份有限公司 | 压力装置及方法 |
US20070158871A1 (en) * | 2004-02-04 | 2007-07-12 | Sumitomo Heavy Industries, Ltd. | Press-molding apparatus, mold, and press-molding method |
WO2008149801A1 (ja) * | 2007-06-07 | 2008-12-11 | Kitagawa Seiki Kabushiki Kaisha | プレス装置及びプレス装置システム |
JP2009166487A (ja) * | 2007-12-18 | 2009-07-30 | Nichigo Morton Co Ltd | 平面プレス装置および積層装置ならびにそれらを用いた積層方法 |
CN102197005B (zh) * | 2008-10-23 | 2014-06-25 | 旭硝子株式会社 | 玻璃基板层叠装置及层叠玻璃基板的制造方法 |
JP2010284862A (ja) * | 2009-06-11 | 2010-12-24 | Sintokogio Ltd | 樹脂シートの電動シリンダ駆動式加圧成形機 |
KR20120070580A (ko) * | 2009-09-10 | 2012-06-29 | 기타가와 세이키 가부시키가이샤 | 큐어 처리 장치 및 라미네이트 가공 시스템 |
WO2012002417A1 (ja) * | 2010-06-30 | 2012-01-05 | 東レ株式会社 | シート状プリプレグの製造方法および装置 |
JP6269496B2 (ja) * | 2012-10-12 | 2018-01-31 | 新東工業株式会社 | 減圧治具及び減圧治具を用いた被加圧物の加圧方法 |
-
2015
- 2015-07-08 JP JP2015137062A patent/JP6625838B2/ja active Active
-
2016
- 2016-06-07 CN CN201680040116.5A patent/CN107848165A/zh active Pending
- 2016-06-07 WO PCT/JP2016/066851 patent/WO2017006682A1/ja active Application Filing
- 2016-06-07 KR KR1020187000971A patent/KR102128301B1/ko active IP Right Grant
- 2016-06-14 TW TW105118515A patent/TWI583532B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR20180027515A (ko) | 2018-03-14 |
WO2017006682A1 (ja) | 2017-01-12 |
CN107848165A (zh) | 2018-03-27 |
TW201713485A (zh) | 2017-04-16 |
KR102128301B1 (ko) | 2020-06-30 |
TWI583532B (zh) | 2017-05-21 |
JP2017019143A (ja) | 2017-01-26 |
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