JP6615134B2 - ウエハ支持台 - Google Patents
ウエハ支持台 Download PDFInfo
- Publication number
- JP6615134B2 JP6615134B2 JP2017013980A JP2017013980A JP6615134B2 JP 6615134 B2 JP6615134 B2 JP 6615134B2 JP 2017013980 A JP2017013980 A JP 2017013980A JP 2017013980 A JP2017013980 A JP 2017013980A JP 6615134 B2 JP6615134 B2 JP 6615134B2
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- Prior art keywords
- electrode
- heater
- shield
- plasma generating
- wafer
- Prior art date
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-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32651—Shields, e.g. dark space shields, Faraday shields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5096—Flat-bed apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32559—Protection means, e.g. coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/026—Shields
- H01J2237/0266—Shields electromagnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
- H01J2237/3321—CVD [Chemical Vapor Deposition]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Description
ウエハ載置面を備えたセラミック基体に、前記ウエハ載置面に近い方からプラズマ発生電極、ヒータ電極がこの順に離間した状態で埋設され、前記プラズマ発生電極の配線部材及び前記ヒータ電極の配線部材が前記セラミック基体の前記ウェハ載置面とは反対側の面から前記セラミック基体の外部に引き出されたウエハ支持台であって、
前記プラズマ発生電極と前記ヒータ電極との間に両者と非接触な状態で前記セラミック基体に埋設されたシールドシートと、
前記シールドシートと電気的に接続され、前記セラミック基体の前記ウェハ載置面とは反対側の面から前記セラミック基体の外部に延出されたシールドパイプと、
を備え、
前記プラズマ発生電極の配線部材は、前記シールドパイプの内部に前記シールドパイプと非接触な状態で挿通され、
前記ヒータ電極の配線部材は、前記シールドパイプの外部に前記シールドパイプと非接触な状態で配置されている、
ものである。
Claims (5)
- ウエハ載置面を備えたセラミック基体に、前記ウエハ載置面に近い方からプラズマ発生電極、ヒータ電極がこの順に離間した状態で埋設され、前記プラズマ発生電極の配線部材及び前記ヒータ電極の配線部材が前記セラミック基体の前記ウェハ載置面とは反対側の面から前記セラミック基体の外部に引き出されたウエハ支持台であって、
前記プラズマ発生電極と前記ヒータ電極との間に両者と非接触な状態で前記セラミック基体に埋設されたシールドシートと、
前記シールドシートと前記セラミック基体の内部で直接電気的に接続されて前記シールドシートと一体化され、前記セラミック基体の前記ウェハ載置面とは反対側の面から前記セラミック基体の外部に延出されたシールドパイプと、
を備え、
前記プラズマ発生電極の配線部材は、前記シールドパイプの内部に前記シールドパイプと非接触な状態で挿通され、
前記ヒータ電極の配線部材は、前記シールドパイプの外部に前記シールドパイプと非接触な状態で配置されている、
ウエハ支持台。 - 前記ヒータ電極の配線部材は、前記ヒータ電極と外部電源との間にローパスフィルタを備えている、
請求項1に記載のウエハ支持台。 - 前記シールドシートは、メッシュ、パンチングメタル又は金属板の面状部材であり、
前記シールドパイプは、メッシュ、パンチングメタル又は金属板の筒状部材である、
請求項1又は2に記載のウエハ支持台。 - 前記プラズマ発生電極は、RF電源の電圧を印加する電極又はグランド電極である、
請求項1〜3のいずれか1項に記載のウエハ支持台。 - 前記プラズマ発生電極に流れるRF電流の周波数は、13MHz以上である、
請求項1〜4のいずれか1項に記載のウエハ支持台。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017013980A JP6615134B2 (ja) | 2017-01-30 | 2017-01-30 | ウエハ支持台 |
US15/878,532 US10861680B2 (en) | 2017-01-30 | 2018-01-24 | Wafer support |
KR1020180009364A KR102368339B1 (ko) | 2017-01-30 | 2018-01-25 | 웨이퍼 지지대 |
TW107102935A TWI749161B (zh) | 2017-01-30 | 2018-01-26 | 晶圓支撐台 |
CN201810083616.8A CN108376635B (zh) | 2017-01-30 | 2018-01-29 | 晶圆支承台 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017013980A JP6615134B2 (ja) | 2017-01-30 | 2017-01-30 | ウエハ支持台 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018123348A JP2018123348A (ja) | 2018-08-09 |
JP6615134B2 true JP6615134B2 (ja) | 2019-12-04 |
Family
ID=62980707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017013980A Active JP6615134B2 (ja) | 2017-01-30 | 2017-01-30 | ウエハ支持台 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10861680B2 (ja) |
JP (1) | JP6615134B2 (ja) |
KR (1) | KR102368339B1 (ja) |
CN (1) | CN108376635B (ja) |
TW (1) | TWI749161B (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10354905B2 (en) * | 2015-03-11 | 2019-07-16 | Nv Bekaert Sa | Carrier for temporary bonded wafers |
JP6758143B2 (ja) * | 2016-09-29 | 2020-09-23 | 日本特殊陶業株式会社 | 加熱装置 |
US11062887B2 (en) * | 2018-09-17 | 2021-07-13 | Applied Materials, Inc. | High temperature RF heater pedestals |
CN110265323B (zh) * | 2019-05-31 | 2021-09-03 | 拓荆科技股份有限公司 | 具有接点阵列的晶圆加热座 |
CN114245936A (zh) | 2019-08-08 | 2022-03-25 | 日本碍子株式会社 | 半导体制造装置用构件 |
US12020912B2 (en) * | 2019-10-07 | 2024-06-25 | Applied Materials, Inc. | Integrated electrode and ground plane for a substrate support |
CN114051765B (zh) * | 2019-12-04 | 2024-05-28 | 日本碍子株式会社 | 陶瓷加热器 |
US12020957B2 (en) * | 2020-08-31 | 2024-06-25 | Applied Materials, Inc. | Heater assembly with process gap control for batch processing chambers |
JP7372224B2 (ja) * | 2020-10-16 | 2023-10-31 | 日本碍子株式会社 | ウエハ載置台 |
WO2022168368A1 (ja) * | 2021-02-04 | 2022-08-11 | 日本碍子株式会社 | 半導体製造装置用部材及びその製法 |
JP7060771B1 (ja) * | 2021-02-04 | 2022-04-26 | 日本碍子株式会社 | 半導体製造装置用部材 |
WO2022264922A1 (ja) * | 2021-06-15 | 2022-12-22 | 京セラ株式会社 | プラズマ処理装置用部材 |
US20230054444A1 (en) * | 2021-08-18 | 2023-02-23 | Applied Materials, Inc. | Bipolar esc with balanced rf impedance |
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JP2656326B2 (ja) | 1988-11-07 | 1997-09-24 | 国際電気株式会社 | ドライプロセス装置における高周波印加電極の加熱装置 |
JPH10204645A (ja) | 1997-01-17 | 1998-08-04 | Hitachi Electron Eng Co Ltd | 下部電極 |
JP4236329B2 (ja) * | 1999-04-15 | 2009-03-11 | 日本碍子株式会社 | プラズマ処理装置 |
KR100588774B1 (ko) | 2001-11-26 | 2006-06-14 | 주성엔지니어링(주) | 웨이퍼 서셉터 |
JP4129855B2 (ja) * | 2001-12-13 | 2008-08-06 | 東京エレクトロン株式会社 | プラズマ処理装置 |
CN100350569C (zh) * | 2003-05-02 | 2007-11-21 | 东京毅力科创株式会社 | 处理气体导入机构和等离子体处理装置 |
KR100739890B1 (ko) | 2003-05-02 | 2007-07-13 | 동경 엘렉트론 주식회사 | 처리가스도입기구 및 플라즈마 처리장치 |
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WO2010008827A2 (en) * | 2008-06-24 | 2010-01-21 | Applied Materials, Inc. | Pedestal heater for low temperature pecvd application |
DE102010060762B4 (de) * | 2010-11-24 | 2019-05-23 | Meyer Burger (Germany) Gmbh | Plasmabearbeitungsvorrichtung |
US8633648B2 (en) * | 2011-06-28 | 2014-01-21 | Recarbon, Inc. | Gas conversion system |
WO2015146563A1 (ja) * | 2014-03-27 | 2015-10-01 | 日本碍子株式会社 | セラミックスプレートと金属製の円筒部材との接合構造 |
CN104046965A (zh) * | 2014-05-27 | 2014-09-17 | 中国电子科技集团公司第四十八研究所 | 一种辐射加热元件、辐射加热器及mocvd反应器 |
CN105887049B (zh) * | 2016-04-21 | 2018-05-29 | 郑亮 | 一种低温纳米疏水真空放电沉积镀膜方法 |
WO2017184223A1 (en) * | 2016-04-22 | 2017-10-26 | Applied Materials, Inc. | Substrate support pedestal having plasma confinement features |
CN106119811B (zh) * | 2016-08-30 | 2018-10-12 | 湖南玉丰真空科学技术有限公司 | 一种真空设备的基板加热台 |
-
2017
- 2017-01-30 JP JP2017013980A patent/JP6615134B2/ja active Active
-
2018
- 2018-01-24 US US15/878,532 patent/US10861680B2/en active Active
- 2018-01-25 KR KR1020180009364A patent/KR102368339B1/ko active IP Right Grant
- 2018-01-26 TW TW107102935A patent/TWI749161B/zh active
- 2018-01-29 CN CN201810083616.8A patent/CN108376635B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
US20180218885A1 (en) | 2018-08-02 |
KR20200067241A (ko) | 2020-06-12 |
KR102368339B1 (ko) | 2022-03-02 |
CN108376635A (zh) | 2018-08-07 |
JP2018123348A (ja) | 2018-08-09 |
TW201827642A (zh) | 2018-08-01 |
TWI749161B (zh) | 2021-12-11 |
CN108376635B (zh) | 2021-09-03 |
US10861680B2 (en) | 2020-12-08 |
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