JP6578489B2 - カーボン薄膜、それを製造するプラズマ装置および製造方法 - Google Patents
カーボン薄膜、それを製造するプラズマ装置および製造方法 Download PDFInfo
- Publication number
- JP6578489B2 JP6578489B2 JP2016538266A JP2016538266A JP6578489B2 JP 6578489 B2 JP6578489 B2 JP 6578489B2 JP 2016538266 A JP2016538266 A JP 2016538266A JP 2016538266 A JP2016538266 A JP 2016538266A JP 6578489 B2 JP6578489 B2 JP 6578489B2
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- JP
- Japan
- Prior art keywords
- carbon
- cathode member
- arc
- substrate
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 119
- 229910052799 carbon Inorganic materials 0.000 title claims description 111
- 239000010409 thin film Substances 0.000 title claims description 59
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 239000010408 film Substances 0.000 claims description 69
- 238000000034 method Methods 0.000 claims description 62
- 239000000758 substrate Substances 0.000 claims description 54
- 230000008020 evaporation Effects 0.000 claims description 38
- 238000001704 evaporation Methods 0.000 claims description 38
- 229910021397 glassy carbon Inorganic materials 0.000 claims description 29
- 230000035939 shock Effects 0.000 claims description 18
- 150000002500 ions Chemical class 0.000 claims description 14
- 238000005452 bending Methods 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 4
- 238000001241 arc-discharge method Methods 0.000 claims 1
- 238000010891 electric arc Methods 0.000 description 25
- 230000007547 defect Effects 0.000 description 22
- 230000000052 comparative effect Effects 0.000 description 17
- 238000012360 testing method Methods 0.000 description 17
- 230000003746 surface roughness Effects 0.000 description 15
- 239000002245 particle Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 10
- 239000010406 cathode material Substances 0.000 description 10
- 239000011362 coarse particle Substances 0.000 description 9
- 238000005336 cracking Methods 0.000 description 9
- 230000008646 thermal stress Effects 0.000 description 9
- 229910003481 amorphous carbon Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000003610 charcoal Substances 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 238000007550 Rockwell hardness test Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910021398 atomic carbon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 229910021385 hard carbon Inorganic materials 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 239000010705 motor oil Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910019912 CrN Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 241001422033 Thestylus Species 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 238000010000 carbonizing Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014152626 | 2014-07-28 | ||
| JP2014152626 | 2014-07-28 | ||
| PCT/JP2015/070413 WO2016017438A1 (ja) | 2014-07-28 | 2015-07-16 | カーボン薄膜、それを製造するプラズマ装置および製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2016017438A1 JPWO2016017438A1 (ja) | 2017-06-08 |
| JP6578489B2 true JP6578489B2 (ja) | 2019-09-25 |
Family
ID=55217343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016538266A Active JP6578489B2 (ja) | 2014-07-28 | 2015-07-16 | カーボン薄膜、それを製造するプラズマ装置および製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6578489B2 (zh) |
| CN (1) | CN106661715B (zh) |
| WO (1) | WO2016017438A1 (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH715878A1 (de) | 2019-02-26 | 2020-08-31 | Oerlikon Surface Solutions Ag Pfaeffikon | Magnetanordnung für eine Plasmaquelle zur Durchführung von Plasmabehandlungen. |
| CN115418610A (zh) * | 2022-09-01 | 2022-12-02 | 深圳市商德先进陶瓷股份有限公司 | 陶瓷劈刀及其制备方法和应用 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3214891B2 (ja) * | 1992-05-15 | 2001-10-02 | 日本特殊陶業株式会社 | ダイヤモンド類被覆部材 |
| JPH06240451A (ja) * | 1993-02-18 | 1994-08-30 | Seiko Instr Inc | 硬質炭素膜被覆部材の製造方法 |
| JPH10130865A (ja) * | 1996-09-06 | 1998-05-19 | Sanyo Electric Co Ltd | 硬質炭素被膜基板及びその形成方法 |
| EP1067210A3 (en) * | 1996-09-06 | 2002-11-13 | Sanyo Electric Co., Ltd. | Method for providing a hard carbon film on a substrate and electric shaver blade |
| JP4251738B2 (ja) * | 1998-12-25 | 2009-04-08 | 住友電気工業株式会社 | 硬質被膜及び被覆部材 |
| EP2000560B1 (en) * | 1999-07-08 | 2013-10-02 | Sumitomo Electric Industries, Ltd | Hard coating and coated member |
| JP2002256414A (ja) * | 2001-03-06 | 2002-09-11 | Mitsubishi Heavy Ind Ltd | 硬質炭素膜被覆材およびその製造方法 |
| JP2014133912A (ja) * | 2013-01-09 | 2014-07-24 | Nissin Electric Co Ltd | プラズマ装置およびそれを用いたカーボン薄膜の製造方法 |
| WO2014115733A1 (ja) * | 2013-01-22 | 2014-07-31 | 日新電機株式会社 | プラズマ装置、それを用いたカーボン薄膜の製造方法およびコーティング方法 |
| JP5669117B2 (ja) * | 2013-11-05 | 2015-02-12 | 国立大学法人豊橋技術科学大学 | Ｄｌｃ膜の製造方法 |
-
2015
- 2015-07-16 CN CN201580040273.1A patent/CN106661715B/zh active Active
- 2015-07-16 JP JP2016538266A patent/JP6578489B2/ja active Active
- 2015-07-16 WO PCT/JP2015/070413 patent/WO2016017438A1/ja active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2016017438A1 (ja) | 2017-06-08 |
| CN106661715A (zh) | 2017-05-10 |
| CN106661715B (zh) | 2019-11-19 |
| WO2016017438A1 (ja) | 2016-02-04 |
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