JP6571718B2 - 高周波電源 - Google Patents
高周波電源 Download PDFInfo
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- JP6571718B2 JP6571718B2 JP2017123006A JP2017123006A JP6571718B2 JP 6571718 B2 JP6571718 B2 JP 6571718B2 JP 2017123006 A JP2017123006 A JP 2017123006A JP 2017123006 A JP2017123006 A JP 2017123006A JP 6571718 B2 JP6571718 B2 JP 6571718B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32155—Frequency modulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/493—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode the static converters being arranged for operation in parallel
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F3/217—Class D power amplifiers; Switching amplifiers
- H03F3/2173—Class D power amplifiers; Switching amplifiers of the bridge type
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33569—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
- H02M3/33573—Full-bridge at primary side of an isolation transformer
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/4815—Resonant converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/497—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode sinusoidal output voltages being obtained by combination of several voltages being out of phase
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/538—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a push-pull configuration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F3/217—Class D power amplifiers; Switching amplifiers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
- H05H2242/26—Matching networks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Dc-Dc Converters (AREA)
- Inverter Devices (AREA)
Description
θ=2・cos-1(√x(t))
ただし、θが前記位相差であり、x(t)は所望の波形を示す関数である。
vR=vPA−vPB=V・[sin(ω・t)−sin(ω・t+θ)] …(1)
であり、入力ポートNA,NBから伝送トランスT3に流れ込む電流iA,iBと抵抗Rを流れる電流iRは、
iA=vPA/Ro=V・sin(ω・t)/Ro…(2)
iB=vPB/Ro=V・sin(ω・t+θ)/Ro…(3)
iR=vR/(2・Ro)
=V・[sin(ω・t)−sin(ω・t+θ)]/(2・Ro)…(4)
である。
iLA=iA−iR=V・[sin(ω・t)+sin(ω・t+θ)]/(2・Ro)…(5)
iLB=iB+iR=V・[sin(ω・t)+sin(ω・t+θ)]/(2・Ro)…(6)
で表わされ、サム・ポートNSから出力される高周波電流iPXと高周波電圧vPXは、
iPX=iLA+iLB=V・[sin(ω・t)+sin(ω・t+θ)]/Ro…(7)
vPX=iPX・(Ro/2)
=V・[sin(ω・t)+sin(ω・t+θ)]/2
=V・[sin{(ω・t+θ/2)−θ/2}+sin{(ω・t+θ/2)+θ/2}]/2
=V・[sin(ω・t+θ/2)・cos(θ/2)−cos(ω・t+θ/2)・sin(θ/2)
+sin(ω・t+θ/2)・cos(θ/2)+cos(ω・t+θ/2)・sin(θ/2)]/2
=V・cos(θ/2)・sin(ω・t+θ/2)…(8)
となる。
PX=vPX 2/(Ro/2)=2・vPX 2/Ro
=V2・[sin(ω・t)+sin(ω・t+θ)]2/(2・Ro)
=2・[V・cos(θ/2)]2・sin2(ω・t+θ/2)/Ro…(9)
PR=vR 2/(2・Ro)
=V2・[sin(ω・t)−sin(ω・t+θ)]2/(2・Ro)
=V2・[sin{(ω・t+θ/2)−θ/2}
−sin{(ω・t+θ/2)+θ/2}]2/(2・Ro)
=V2・[sin(ω・t+θ/2)・cos(θ/2)−cos(ω・t+θ/2)・sin(θ/2)
−sin(ω・t+θ/2)・cos(θ/2)−cos(ω・t+θ/2)・sin(θ/2)]2/(2・Ro)
=V2・[−2cos(ω・t+θ/2)・sin(θ/2)]2/(2・Ro)
=2・[V・sin(θ/2)]2・cos2(ω・t+θ/2)/Ro…(10)
となる。
Pin=PA+PB=V2・[sin2(ω・t)+sin2(ω・t+θ)]/Ro
である。一方、RF合成部5から出力される電力PXと抵抗Rで熱消費される電力PRの合計電力Psumは、
Psum=PX+PR
=V2・[sin(ω・t)+sin(ω・t+θ)]2/(2・Ro)
+V2・[sin(ω・t)−sin(ω・t+θ)]2/(2・Ro)
=V2・[2sin2(ω・t)+2sin2(ω・t+θ)]/(2・Ro)
=V2・[sin2(ω・t)+sin2(ω・t+θ)]/Ro
であるから、Pin=Psumである。
Xは、第1のDC−RF変換部4Aより出力される電力PAと第2のDC−RF変換部4Bより出力される電力PBとを合わせた電力Pinの約95%になる(電力Pinの約5%がRF合成部5で熱消費される)。
vPX=V・sin(ω・t)
で表される。したがって、第3のDC−RF変換部4Cにvb=A・sin(ω・t+θ)(A3=A、φ3=θ)の高周波信号を入力し、第3のDC−RF変換部4CからvPC=V・sin(ω・t+θ)を出力させると、第2のRF合成部5Bから、
vPZ=V・cos(θ/2)・sin(ω・t+θ/2)
の出力電圧vPZが出力される。
PZ=2・[V・cos(θ/2)]2・sin2(ω・t+θ/2)/Ro
で表される電力PZが出力される。
vPX=V・cos(θ/2)・sin(ω・t+θ/2)
で表される。
vPZ=V・cos(θ/2)・cos(ψ/2)・sin(ω・t+θ/2+ψ/2)
で表される出力電圧vPZが出力され、
PZ=2・[V・cos(θ/2)・cos(ψ/2)]2・sin2(ω・t+θ/2+ψ/2)/Ro
で表される出力電力PZが出力される。
PX=PY=2・V2・cos2(θ/2)・sin2(ω・t+θ/2)/Ro
で表される。そして、第3のRF合成部5Cでは出力電力PXと出力電力PYが熱消費されることなく合成されるから、第3のRF合成部5Cからは、
PZ=PX+PY=4・V2・cos2(θ/2)・sin2(ω・t+θ/2)/Ro
の出力電力PZが負荷に出力される。
vPX=V・sin(ω・t)
で表される。また、第3,第4のDC−RF変換部4C,4Dに入力する高周波信号v3,v4の波形をv3=v4=vb=A・sin(ω・t+θ)(A3=A4=A,φ3=φ4=θ)とすると、第2のRF合成部5Bの出力電圧vPYは、(8)式より、
vPY=V・sin(ω・t+θ)
で表される。
vPZ=V・cos(θ/2)・sin(ω・t+θ/2)]
の出力電圧vPZが出力され、(9)式より、
PZ=2・[V・cos(θ/2)]2・sin2(ω・t+θ/2)/Ro
の出力電力vPZが負荷に出力される。
θ=2・cos-1(√η) …(11)
θ=(θ1/T)・t …(12)
2 AC−DC変換部
3 DC−DC変換部
4,4',4" DC−RF変換部(高周波生成手段)
4A 第1のDC−RF変換部(高周波生成手段)
4B 第2のDC−RF変換部(高周波生成手段)
4C 第3のDC−RF変換部(高周波生成手段)
4D 第4のDC−RF変換部(高周波生成手段)
401 ローパスフィルタ
5,5',5" RF合成部(高周波合成手段)
5A 第1のRF合成部(高周波合成手段)
5B 第2のRF合成部(高周波合成手段)
5C 第3のRF合成部(高周波合成手段)
6 フィルタ回路
7 PWM信号生成部
8 高周波信号生成部(高周波生成手段)
8a 第1の高周波発生回路
8b 第2の高周波発生回路
9 制御部(出力制御手段)
10 電力検出部
11 プラズマ処理装置
12 インピーダンス整合装置
U,U',U" 高周波生成部
Claims (9)
- 相互の位相差が変更可能な複数の高周波を生成する高周波生成手段と、
前記高周波生成手段に、直流電圧を供給する電圧供給手段と、
前記高周波生成手段から出力される複数の高周波を、前記位相差に基づく所定の割合で合成して負荷に出力する高周波合成手段と、
前記高周波生成手段に対して、前記位相差を変化させることで、前記高周波合成手段より出力される高周波電力を制御する出力制御手段と、
を備えた高周波電源であって、
前記出力制御手段は、
前記電圧供給手段から前記高周波生成手段に供給される直流電圧が一定値のときに、前記高周波生成手段に前記複数の高周波を生成させたままで、前記高周波合成手段より出力される高周波電力を所望の波形にするように、前記位相差を第1の所定値または第2の所定値のいずれかに切り替える、
ことを特徴とする高周波電源。 - 前記位相差を前記第1の所定値とした場合の方が、前記位相差を前記第2の所定値とした場合より、前記所定の割合が大きくなる、
請求項1に記載の高周波電源。 - 前記第1の所定値は0[deg]以上90[deg]未満であり、
前記第2の所定値は90[deg]以上180[deg]以下ある、
請求項2に記載の高周波電源。 - 前記出力制御手段は、前記第1の所定値または前記第2の所定値を変化させることで、前記高周波電力のフィードバック制御を行う、
請求項1ないし3のいずれかに記載の高周波電源。 - 前記高周波生成手段は、第1の高周波と第2の高周波とを生成し、
前記出力制御手段は、前記第1の高周波に対する前記第2の高周波の位相差を前記第1の所定値または前記第2の所定値のいずれかに切り替える、
請求項1ないし4のいずれかに記載の高周波電源。 - 前記出力制御手段は、前記負荷への出力開始時に、前記位相差を、前記第1の所定値および第2の所定値とした場合の出力よりも大きい出力となる位相差とする、
請求項1に記載の高周波電源。 - 相互の位相差が変更可能な複数の高周波を生成する高周波生成手段と、
前記高周波生成手段に、直流電圧を供給する電圧供給手段と、
前記高周波生成手段から出力される複数の高周波を、前記位相差に基づく所定の割合で合成して負荷に出力する高周波合成手段と、
前記高周波生成手段に対して、前記位相差を変化させることで、前記高周波合成手段より出力される高周波電力を制御する出力制御手段と、
を備えた高周波電源であって、
前記出力制御手段は、
前記電圧供給手段から前記高周波生成手段に供給される直流電圧が一定値のときに、前記高周波生成手段に前記複数の高周波を生成させたままで、前記高周波合成手段より出力される高周波電力を所望の波形にするように、前記位相差を第1の所定値、第2の所定値および第3の所定値のいずれかに切り替える、
ことを特徴とする高周波電源。 - 前記出力制御手段は、前記所定の割合をゼロにしない、
請求項1〜3、6〜7のいずれかに記載の高周波電源。 - 前記高周波合成手段は、
伝送トランスと電力消費用の抵抗を含むハイブリッド回路で構成され、前記複数の高周波に位相差がある場合、当該位相差に応じた電力を前記抵抗で熱消費し、残りの電力を出力する、
請求項1ないし8のいずれかに記載の高周波電源。
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KR102092213B1 (ko) * | 2016-03-23 | 2020-03-23 | 베이징 나우라 마이크로일렉트로닉스 이큅먼트 씨오., 엘티디. | 임피던스 매칭 시스템, 임피던스 매칭 방법 및 반도체 공정장비 |
KR101924689B1 (ko) * | 2016-07-15 | 2019-02-28 | 연세대학교 산학협력단 | 이차원 나노 물질의 처리 장치 및 방법 |
US10673354B2 (en) * | 2017-05-19 | 2020-06-02 | Mitsubishi Electric Corporation | Power conversion device |
US10264663B1 (en) * | 2017-10-18 | 2019-04-16 | Lam Research Corporation | Matchless plasma source for semiconductor wafer fabrication |
CN108011602B (zh) * | 2017-12-14 | 2021-08-03 | 苏州众能医疗科技有限公司 | 用于mri系统的混合型开关功率放大器及其控制方法 |
CN111602471A (zh) * | 2018-01-23 | 2020-08-28 | 株式会社富士 | 等离子体发生装置和信息处理方法 |
US10672590B2 (en) * | 2018-03-14 | 2020-06-02 | Lam Research Corporation | Frequency tuning for a matchless plasma source |
JP6846387B2 (ja) * | 2018-06-22 | 2021-03-24 | 東京エレクトロン株式会社 | プラズマ処理方法及びプラズマ処理装置 |
GB2584146A (en) * | 2019-05-23 | 2020-11-25 | Comet Ag | Radio frequency generator |
JP7423233B2 (ja) | 2019-09-26 | 2024-01-29 | 株式会社ダイヘン | 高周波電源装置及び高周波電力の出力方法 |
DE102019135497B4 (de) * | 2019-12-20 | 2021-11-11 | Nova Plasma Ltd | Piezoelektrischer Plasmagenerator und Verfahren zum Betrieb eines piezoelektrischen Plasmagenerators |
JP2021106077A (ja) * | 2019-12-26 | 2021-07-26 | 株式会社ダイヘン | 高周波電源装置 |
JP7381336B2 (ja) * | 2019-12-26 | 2023-11-15 | 株式会社ダイヘン | 高周波電源装置 |
KR102369880B1 (ko) * | 2020-04-16 | 2022-03-03 | 주식회사 뉴파워 프라즈마 | 이중 출력 감시 기능을 가진 고주파 제너레이터 |
CN113539773A (zh) * | 2020-04-16 | 2021-10-22 | 新动力等离子体株式会社 | 具有双重输出的高频发生器及其驱动方法 |
KR102381756B1 (ko) * | 2020-04-16 | 2022-04-01 | 주식회사 뉴파워 프라즈마 | 이중 출력을 가진 무선 주파수 제너레이터 |
JP7068540B1 (ja) * | 2021-12-16 | 2022-05-16 | 株式会社京三製作所 | 高周波電源装置及び高周波電力の出力制御方法 |
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US7368880B2 (en) * | 2004-07-19 | 2008-05-06 | Intersil Americas Inc. | Phase shift modulation-based control of amplitude of AC voltage output produced by double-ended DC-AC converter circuitry for powering high voltage load such as cold cathode fluorescent lamp |
US7602127B2 (en) * | 2005-04-18 | 2009-10-13 | Mks Instruments, Inc. | Phase and frequency control of a radio frequency generator from an external source |
US9097791B2 (en) * | 2010-07-16 | 2015-08-04 | Panasonic Intellectual Property Management Co., Ltd. | Radar device |
JP5681943B2 (ja) * | 2010-08-30 | 2015-03-11 | 株式会社ダイヘン | 高周波電源装置 |
CN103222175B (zh) * | 2010-09-29 | 2015-07-01 | 松下电器产业株式会社 | 电力变换装置 |
JP5729693B2 (ja) * | 2011-03-30 | 2015-06-03 | 株式会社ダイヘン | 高周波電源装置 |
JP5808012B2 (ja) | 2011-12-27 | 2015-11-10 | 東京エレクトロン株式会社 | プラズマ処理装置 |
CA2868700C (en) * | 2012-03-30 | 2016-10-11 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Power supply apparatus |
JP2014173534A (ja) * | 2013-03-11 | 2014-09-22 | Univ Of Tokyo | 小型低消費電力イオンエンジンに用いるマイクロ波電源の起動時パワーアップ回路 |
JP6219057B2 (ja) * | 2013-04-02 | 2017-10-25 | 株式会社ダイヘン | 高周波電源 |
US9304146B2 (en) * | 2013-07-18 | 2016-04-05 | National Taiwan University | Radio-frequency reflectometry scanning tunneling microscope |
US8863311B1 (en) * | 2013-07-18 | 2014-10-14 | National Taiwan University | Radio-frequency reflectometry scanning tunneling microscope |
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KR102404469B1 (ko) | 2022-06-02 |
CN107006113A (zh) | 2017-08-01 |
WO2016093269A1 (ja) | 2016-06-16 |
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