JP6563689B2 - 絶縁ゲート型スイッチング素子の製造方法 - Google Patents
絶縁ゲート型スイッチング素子の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 31
- 239000010410 layer Substances 0.000 claims description 140
- 239000004065 semiconductor Substances 0.000 claims description 140
- 239000012535 impurity Substances 0.000 claims description 128
- 239000000758 substrate Substances 0.000 claims description 121
- 238000000034 method Methods 0.000 claims description 32
- 238000005498 polishing Methods 0.000 claims description 13
- 239000002344 surface layer Substances 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000002513 implantation Methods 0.000 description 44
- 210000000746 body region Anatomy 0.000 description 38
- 238000005468 ion implantation Methods 0.000 description 20
- 238000009792 diffusion process Methods 0.000 description 14
- 239000011229 interlayer Substances 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 7
- 229920005591 polysilicon Polymers 0.000 description 7
- 238000007517 polishing process Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- -1 if a recess exists Substances 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000005360 phosphosilicate glass Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Description
本明細書または図面に説明した技術要素は、単独であるいは各種の組み合わせによって技術的有用性を発揮するものであり、出願時請求項記載の組み合わせに限定されるものではない。また、本明細書または図面に例示した技術は複数目的を同時に達成するものであり、そのうちの一つの目的を達成すること自体で技術的有用性を持つものである。
20 :エミッタ領域
22 :ボディコンタクト領域
24 :ボディ領域
28 :ドリフト領域
30 :バッファ領域
32 :コレクタ領域
40 :トレンチ
42a :ゲート絶縁膜
42b :表面絶縁膜
44 :ゲート電極
46 :キャップ絶縁膜
47 :層間絶縁膜
50 :マスク層
51 :開口部
52 :電極層
60 :エミッタ電極
62 :コレクタ電極
Claims (3)
- 絶縁ゲート型スイッチング素子の製造方法であって、
半導体基板の表面にトレンチを形成する工程と、
前記トレンチ内に、ゲート絶縁膜を形成する工程と、
前記ゲート絶縁膜の形成後に、前記トレンチ内と前記半導体基板の前記表面上に半導体によって構成されている電極層を堆積させる工程と、
前記電極層を研磨することによって、前記半導体基板の前記表面上の前記電極層を除去して前記半導体基板の前記表面を露出させる工程と、
前記研磨によって露出させた前記半導体基板の前記表面が露出している状態で前記半導体基板を熱処理することによって前記トレンチ内の前記電極層の表層部にキャップ絶縁膜を形成する工程と、
前記キャップ絶縁膜の形成後に、前記研磨によって露出させた前記半導体基板の前記表面に絶縁膜が形成された状態で、前記半導体基板の前記表面側から、前記トレンチ内の前記電極層から前記半導体基板に跨る範囲に不純物を注入する工程、
を有する製造方法。 - 開口部の輪郭が前記キャップ絶縁膜の表面から前記半導体基板の前記表面に跨るように伸びるマスク層を形成する工程をさらに有し、
前記不純物を注入する工程では、前記マスク層を介して不純物を注入する請求項1の製造方法。 - 前記トレンチ内の前記電極層から前記半導体基板に跨る範囲に不純物を注入した後に、前記キャップ絶縁膜の表面から前記半導体基板の前記表面に跨って伸びるNSG膜を形成する工程をさらに有する請求項1または2の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015107486A JP6563689B2 (ja) | 2015-05-27 | 2015-05-27 | 絶縁ゲート型スイッチング素子の製造方法 |
TW105114149A TWI629786B (zh) | 2015-05-27 | 2016-05-06 | 絕緣閘型開關元件的製造方法 |
US15/157,967 US20160351688A1 (en) | 2015-05-27 | 2016-05-18 | Method of manufacturing insulated gate switching device |
CN201610363414.XA CN106206278A (zh) | 2015-05-27 | 2016-05-26 | 绝缘栅型开关元件制造方法 |
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JP2015107486A JP6563689B2 (ja) | 2015-05-27 | 2015-05-27 | 絶縁ゲート型スイッチング素子の製造方法 |
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JP2016225351A JP2016225351A (ja) | 2016-12-28 |
JP6563689B2 true JP6563689B2 (ja) | 2019-08-21 |
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US (1) | US20160351688A1 (ja) |
JP (1) | JP6563689B2 (ja) |
CN (1) | CN106206278A (ja) |
TW (1) | TWI629786B (ja) |
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CN109873033B (zh) * | 2017-12-05 | 2020-08-18 | 无锡华润上华科技有限公司 | 绝缘栅双极型晶体管及其制造方法 |
JP2020080343A (ja) * | 2018-11-12 | 2020-05-28 | トヨタ自動車株式会社 | 絶縁ゲートバイポーラトランジスタとその製造方法 |
CN111370475A (zh) * | 2018-12-25 | 2020-07-03 | 广东美的白色家电技术创新中心有限公司 | 沟槽栅igbt及装置 |
US11469313B2 (en) * | 2020-01-16 | 2022-10-11 | Ipower Semiconductor | Self-aligned trench MOSFET and IGBT structures and methods of fabrication |
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JP3502531B2 (ja) * | 1997-08-28 | 2004-03-02 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
US6413822B2 (en) * | 1999-04-22 | 2002-07-02 | Advanced Analogic Technologies, Inc. | Super-self-aligned fabrication process of trench-gate DMOS with overlying device layer |
JP4091242B2 (ja) * | 1999-10-18 | 2008-05-28 | セイコーインスツル株式会社 | 縦形mosトランジスタ及びその製造方法 |
JP3952914B2 (ja) * | 2002-09-09 | 2007-08-01 | 富士電機デバイステクノロジー株式会社 | 半導体装置の製造方法 |
US7851349B2 (en) * | 2005-09-26 | 2010-12-14 | Infineon Technologies Austria Ag | Method for producing a connection electrode for two semiconductor zones arranged one above another |
JP5266829B2 (ja) * | 2008-03-26 | 2013-08-21 | 株式会社リコー | 半導体装置及びその製造方法 |
JP4544360B2 (ja) * | 2008-10-24 | 2010-09-15 | トヨタ自動車株式会社 | Igbtの製造方法 |
US8084760B2 (en) * | 2009-04-20 | 2011-12-27 | Macronix International Co., Ltd. | Ring-shaped electrode and manufacturing method for same |
US8164114B2 (en) * | 2009-05-18 | 2012-04-24 | Force Mos Technology Co., Ltd. | Semiconductor devices with gate-source ESD diode and gate-drain clamp diode |
-
2015
- 2015-05-27 JP JP2015107486A patent/JP6563689B2/ja not_active Expired - Fee Related
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2016
- 2016-05-06 TW TW105114149A patent/TWI629786B/zh not_active IP Right Cessation
- 2016-05-18 US US15/157,967 patent/US20160351688A1/en not_active Abandoned
- 2016-05-26 CN CN201610363414.XA patent/CN106206278A/zh active Pending
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CN106206278A (zh) | 2016-12-07 |
TW201707205A (zh) | 2017-02-16 |
US20160351688A1 (en) | 2016-12-01 |
JP2016225351A (ja) | 2016-12-28 |
TWI629786B (zh) | 2018-07-11 |
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