JP6362337B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP6362337B2 JP6362337B2 JP2014009004A JP2014009004A JP6362337B2 JP 6362337 B2 JP6362337 B2 JP 6362337B2 JP 2014009004 A JP2014009004 A JP 2014009004A JP 2014009004 A JP2014009004 A JP 2014009004A JP 6362337 B2 JP6362337 B2 JP 6362337B2
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- Prior art keywords
- plating
- electrode
- semiconductor device
- manufacturing
- gold
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- 239000004065 semiconductor Substances 0.000 title claims description 96
- 238000004519 manufacturing process Methods 0.000 title claims description 37
- 238000007747 plating Methods 0.000 claims description 292
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 144
- 229910052737 gold Inorganic materials 0.000 claims description 144
- 239000010931 gold Substances 0.000 claims description 144
- 238000000034 method Methods 0.000 claims description 72
- 238000012545 processing Methods 0.000 claims description 48
- 239000013078 crystal Substances 0.000 claims description 25
- 230000003746 surface roughness Effects 0.000 claims description 16
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 12
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 238000003756 stirring Methods 0.000 description 62
- 235000012431 wafers Nutrition 0.000 description 61
- 239000000243 solution Substances 0.000 description 54
- 238000009713 electroplating Methods 0.000 description 22
- 238000007689 inspection Methods 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 12
- 239000007788 liquid Substances 0.000 description 9
- 238000011282 treatment Methods 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000003860 storage Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000002161 passivation Methods 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 230000005856 abnormality Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- SRCZENKQCOSNAI-UHFFFAOYSA-H gold(3+);trisulfite Chemical compound [Au+3].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O.[O-]S([O-])=O SRCZENKQCOSNAI-UHFFFAOYSA-H 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- -1 inorganic acid salt Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- ZWZLRIBPAZENFK-UHFFFAOYSA-J sodium;gold(3+);disulfite Chemical compound [Na+].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O ZWZLRIBPAZENFK-UHFFFAOYSA-J 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052716 thallium Inorganic materials 0.000 description 2
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Description
≪金めっき電極の製造工程≫
本実施の形態による半導体装置の製造方法を図1〜図6を用いて工程順に説明する。図1〜図6は金めっき電極の製造工程を説明する半導体装置の要部断面図である。
本実施の形態による第1めっき装置を用いた金めっき電極(前述の図5に示す金めっき電極AP)の形成方法を以下に説明する。第1めっき装置は、撹拌棒でめっき液を撹拌する構造の処理カップを有している。
まず、第1めっき装置の処理カップの内部構造を図7(a)および(b)を用いて説明する。図7(a)および(b)は第1めっき装置の処理カップの要部断面図であり、図7(a)は半導体ウェハを着脱する際の第1めっき装置の処理カップの態様を示す要部断面図、図7(b)は半導体ウェハにめっきを施す際の第1めっき装置の処理カップの態様を示す要部断面図である。
次に、めっき処理の工程を図8を用いて説明する。図8は第1めっき装置を用いた場合のめっき処理の工程図である。
複数の半導体ウェハをウェハ収納容器、所謂フープ(Foup)に収納し、ウェハ収納容器を第1めっき装置に備わるロードポートにセットする。
搬送用ロボットによってフープ内で待機している半導体ウェハをフープから取り出してウェハ位置合わせ部へ搬送し、ウェハ位置合わせ部で半導体ウェハの位置合わせを行う。
搬送用ロボットによって半導体ウェハをウェハ位置合わせ部から洗浄部へ搬送し、洗浄部で半導体ウェハを純水により洗浄する。
搬送用ロボットによって半導体ウェハを洗浄部からめっき部の処理カップへ搬送し、処理カップ内で半導体ウェハに電解めっきを施す。
搬送用ロボットによって半導体ウェハをめっき部の処理カップから水洗&乾燥部へ搬送し、水洗&乾燥部で半導体ウェハの純水による水洗およびスピン乾燥を行う。
搬送用ロボットによって半導体ウェハを水洗&乾燥部から元のウェハ収納容器または必要に応じて他のウェハ収納容器へ搬送し、収納する。
次に、電解金めっき法を用いた金めっき電極の形成方法(電解めっき工程(前述の図8の工程S4))を前述の図7(a)および(b)、図9(a)および(b)、図10(a)および(b)、並びに図11を用いて説明する。図9(a)は第1めっき装置を用いためっき時のレシピ構成を示す説明図である。図9(b)は本発明者らが比較検討した第1めっき装置を用いためっき時のレシピ構成を示す説明図である。図10(a)は金めっき電極を模式的に示す断面図である。図10(b)は本発明者らが比較検討した金めっき電極を模式的に示す断面図である。図11は通電ON時間および通電OFF時間をパラメータとした金めっき電極の表面粗さを示すグラフ図である。
前述の図7(a)に示すように、純水により洗浄された半導体ウェハSWを処理カップTC1のめっき槽PT1へ搬送し、めっき槽PT1の上部に、デバイス形成面をめっき槽PT1の内部に向けて半導体ウェハSWを載置する。半導体ウェハSWを載置する際は、処理カップTC1の底部が下となる正立状態である。続いて、処理カップTC1に備わる蓋TOを閉じて、めっき槽PT1の開放面を塞ぐ。
処理カップTC1の上部(めっき槽PT1の中央部よりも上側の側面)に設けられた液導入口PI1からめっき液を供給し、めっき槽PT1内をめっき液で充填する。めっき液は非シアン系めっき液であり、例えば亜硫酸金系のめっき液(主要成分が亜硫酸金ナトリウム、エチレンジアミン、無機酸塩、他の微量添加物の水溶液)である。また、めっき液の温度は、例えば40℃程度であり、めっき液の供給流量は、例えば5リットル/分程度である。
前述の図7(b)に示すように、処理カップTC1の上下を180度反転して、処理カップTC1を倒立状態とする。従って、処理カップTC1の底部が上に、めっき槽PT1の開放面を塞ぐ蓋TOが下となり、半導体ウェハSWのデバイス形成面が上方を向く。ここでは、電解めっきのための通電は行っておらず、アノード電極AE1とカソード電極との間に電流は印加されていない。
次に、図9(a)に示すように、撹拌棒を正回転(左回り回転)させてめっき液を撹拌する(撹拌正転1)。このとき、アノード電極とカソード電極との間に連続して所定の電流を印加する(通電ON)。撹拌棒の回転速度は、例えば90rpm程度であり、通電ON時間は、例えば20〜60秒程度である。この連続通電により、シード膜上に金が等方的に結晶成長して金めっき層が形成される。
前述の図7(a)に示すように、めっき槽PT1内へのめっき液の供給を停止した後、処理カップTC1の上下を180度反転して、処理カップTC1を正立状態とする。従って、処理カップTC1の底部が下に、めっき槽PT1を塞ぐ蓋TOが上となり、半導体ウェハSWのデバイス形成面が下方を向く。
めっき槽PT1内から液排出口POを介してめっき液を排出する。処理カップTC1を正立状態としているので、めっき槽PT1の上から下に向かってめっき液が流れ、処理カップTC1の底部から排出される。
めっき槽PT1の開放面を塞いでいる蓋TOを開けて、処理カップTC1から半導体ウェハSWを取り出す。
前述の3.電解金めっき法を用いた金めっき電極の形成方法(<電解めっき工程の動作4>)では、めっき時に2〜15秒程度の通電OFF時間を設け、かつ通電ON時間を短くすることにより、表面の粗い金めっき電極が形成できることを説明した。ここでは、表面の粗い金めっき電極の形成方法の変形例について表1を用いて説明する。表1は通電ON時間と、電流密度と、金めっき電極の表面粗さとの関係をまとめた表である。
本実施の形態による第2めっき装置を用いた金めっき電極(前述の図5に示す金めっき電極AP)の形成方法を以下に説明する。第2めっき装置は、噴流でめっき液を撹拌する構造の処理カップを有している。
第2めっき装置の処理カップの内部構造を図12を用いて説明する。図12は第2めっき装置の処理カップの要部断面図である。
次に、電解金めっき法を用いた金めっき電極の形成方法(電解めっき工程(前述の図8の工程S4))を前述の図10(a)および(b)、前述の図12、並びに図13(a)および(b)を用いて説明する。図13(a)は第2めっき装置を用いためっき時のレシピ構成を示す説明図である。図13(b)は本発明者らが比較検討した第2めっき装置を用いためっき時のレシピ構成を示す説明図である。
前述の図12に示すように、純水により洗浄された半導体ウェハSWを処理カップTC2のめっき槽PT2へ搬送し、めっき槽PT2の上部に、デバイス形成面をめっき槽PT2の内部に向けて半導体ウェハSWを載置する。ここで、半導体ウェハSWによってめっき槽PT1の開放面を塞ぐ。また、半導体ウェハSWのデバイス形成面の周縁部とカソード電極CEとが接触する。
前述の図12に示すように、処理カップTC2の底部に設けられた液導入口PI2からめっき液を供給し、噴流によりめっき槽PT2内のめっき液を撹拌する。めっき液は非シアン系めっき液であり、例えば亜硫酸金系のめっき液(主要成分が亜硫酸金ナトリウム、エチレンジアミン、無機酸塩、他の微量添加物の水溶液)である。ここでは、電解めっきのための通電は行っておらず、アノード電極AE2とカソード電極CEとの間に電流は印加されていない。
図13(a)に示すように、アノード電極とカソード電極との間に所定時間、所定の電流を印加する(通電ON)。通電ON時間は、例えば20〜60秒程度である。この連続通電により、シード膜上に金が等方的に結晶成長して、第1金めっき層が形成される。
めっき槽PT2内へのめっき液の供給を停止した後、処理カップTC2から半導体ウェハSWを取り出す(前述の図12参照)。
このように、本実施の形態によれば、電解めっきを行っている際に、処理回数およびめっき液建浴からの経過時間が増すに従い、めっき液中の成分が経時変化しても、金めっき電極APの表面状態の変化が抑えられて、例えば0.25rad以上の表面粗さの表面状態を維持することができる。これにより、金めっき電極を形成する工程において、金が析出(外観検査において異常と判断する必要がない金の析出)しても、外観検査において金析出を認識せずに金めっき電極を外観正常と判断することができるので、半導体装置の外観検査の虚報を減らすことができる。
AP,APR 金めっき電極
BO1,BO2 底面
CE カソード電極
CN1 パッド開口部
CN2 開口部
IL1 表面保護膜
IL2 パッシベーション膜
IL2a 酸化シリコン膜
IL2b 窒化シリコン膜
P1 第1金めっき層
P2 第2金めっき層
P3 第3金めっき層
P4 第4金めっき層
P5 第5金めっき層
P6 第6金めっき層
PD パッド電極
PI1,PI2 液導入口
PO 液排出口
PT1,PT2 めっき槽
RP レジストパターン
SB 撹拌棒(スターラ)
SW 半導体ウェハ
TC1,TC2 処理カップ
TO 蓋
UM シード膜(下地膜)
Claims (10)
- (a)めっき装置の処理カップに備わるアノード電極とカソード電極との間に電流を印加して、前記カソード電極と電気的に接続された半導体ウェハの主面上に、めっき電極を形成する工程、
を含む半導体装置の製造方法であって、
前記工程(a)は、
(a1)前記アノード電極と前記カソード電極との間を通電して、めっき層を結晶成長させる工程、
(a2)前記アノード電極と前記カソード電極との間を通電しない工程、を含み、
前記工程(a1)と前記工程(a2)とを交互に繰り返して、前記工程(a1)で形成された前記めっき層を積層して前記めっき電極を形成し、
積層された前記めっき層の結晶粒は、前記めっき層毎に不連続である、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記工程(a2)の通電しない時間は2秒以上であり15秒以下である、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記工程(a2)の通電しない時間は3秒以上であり11秒以下である、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記工程(a2)の通電しない時間は5秒以上であり7秒以下である、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記工程(a1)の通電する時間は、前記工程(a2)の通電しない時間よりも長い、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記工程(a1)の通電する時間は、20秒以上であり60秒以下である、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記めっき電極の表面粗さは0.025rad以上である、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記めっき電極は金、銅、またはニッケルを主要な成分とする、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記工程(a)の前に、
(b)前記半導体ウェハの主面上にパッド電極を形成する工程、
(c)前記工程(b)の後、前記パッド電極を覆うように、前記半導体ウェハの主面上に絶縁膜を形成する工程、
(d)前記工程(c)の後、前記絶縁膜に開口部を形成して、前記パッド電極の上面を露出させる工程、
(e)前記工程(d)の後、前記半導体ウェハの主面上にシード膜を形成する工程、
をさらに含み、
前記シード膜上に前記めっき電極が形成される、半導体装置の製造方法。 - 請求項9記載の半導体装置の製造方法において、
前記パッド電極はアルミニウム膜から成り、前記シード膜はチタン膜およびパラジウム膜を順に形成した積層膜から成る、半導体装置の製造方法。
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TW104101022A TW201538807A (zh) | 2014-01-21 | 2015-01-13 | 半導體裝置之製造方法 |
US14/597,487 US9735017B2 (en) | 2014-01-21 | 2015-01-15 | Method of manufacturing semiconductor device |
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MX2023002015A (es) | 2020-08-18 | 2023-04-11 | Enviro Metals Llc | Refinamiento metálico. |
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JPH06188267A (ja) * | 1992-12-18 | 1994-07-08 | Nippon Sheet Glass Co Ltd | 薄膜トランジスタアレイの製造方法 |
JP3289459B2 (ja) * | 1993-12-29 | 2002-06-04 | カシオ計算機株式会社 | メッキ方法及びメッキ装置 |
JP3681306B2 (ja) * | 1999-06-18 | 2005-08-10 | 沖電気工業株式会社 | 発光素子アレイ、ledアレイ及び電子写真プリンタ |
JP2002009248A (ja) * | 2000-06-26 | 2002-01-11 | Oki Electric Ind Co Ltd | キャパシタおよびその製造方法 |
JP3681670B2 (ja) * | 2001-09-25 | 2005-08-10 | シャープ株式会社 | 半導体集積回路の製造装置および製造方法 |
US7008867B2 (en) * | 2003-02-21 | 2006-03-07 | Aptos Corporation | Method for forming copper bump antioxidation surface |
US7736474B2 (en) * | 2004-01-29 | 2010-06-15 | Ebara Corporation | Plating apparatus and plating method |
JP2006131926A (ja) * | 2004-11-02 | 2006-05-25 | Sharp Corp | 微細孔に対するメッキ方法、及びこれを用いた金バンプ形成方法と半導体装置の製造方法、並びに半導体装置 |
US7226856B1 (en) * | 2004-11-15 | 2007-06-05 | Kla-Tencor Technologies Corporation | Nano-electrode-array for integrated circuit interconnects |
JP5178064B2 (ja) * | 2007-06-27 | 2013-04-10 | 富士フイルム株式会社 | 金属表面粗化層を有する金属層積層体及びその製造方法 |
JP5134339B2 (ja) * | 2007-11-02 | 2013-01-30 | ルネサスエレクトロニクス株式会社 | 半導体集積回路装置の製造方法 |
US8263795B2 (en) * | 2007-11-05 | 2012-09-11 | Air Products And Chemicals, Inc. | Copper precursors for thin film deposition |
US20130112564A1 (en) * | 2008-05-15 | 2013-05-09 | Solopower, Inc. | Electroplating Solutions and Methods For Deposition of Group IIIA-VIA Films |
JP5442400B2 (ja) | 2009-11-13 | 2014-03-12 | ルネサスエレクトロニクス株式会社 | 半導体集積回路装置の製造方法 |
JP5333353B2 (ja) * | 2010-06-14 | 2013-11-06 | 住友金属鉱山株式会社 | 半導体素子搭載用基板及びその製造方法 |
JP5714361B2 (ja) * | 2011-03-01 | 2015-05-07 | 日本碍子株式会社 | 端子電極形成方法及びそれを用いた圧電/電歪素子の製造方法 |
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US9735017B2 (en) | 2017-08-15 |
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