JP6298275B2 - 特に超純水を得るための水の処理 - Google Patents
特に超純水を得るための水の処理 Download PDFInfo
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims description 74
- 239000012498 ultrapure water Substances 0.000 title description 7
- 229910021642 ultra pure water Inorganic materials 0.000 title description 6
- 238000005349 anion exchange Methods 0.000 claims description 212
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 88
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 77
- 229910052796 boron Inorganic materials 0.000 claims description 76
- 238000000034 method Methods 0.000 claims description 59
- 229920005989 resin Polymers 0.000 claims description 54
- 239000011347 resin Substances 0.000 claims description 54
- 239000000377 silicon dioxide Substances 0.000 claims description 44
- 238000005342 ion exchange Methods 0.000 claims description 32
- 230000008929 regeneration Effects 0.000 claims description 32
- 238000011069 regeneration method Methods 0.000 claims description 32
- 238000011144 upstream manufacturing Methods 0.000 claims description 23
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 18
- 230000002441 reversible effect Effects 0.000 claims description 16
- 238000005341 cation exchange Methods 0.000 claims description 14
- 239000002253 acid Substances 0.000 claims description 10
- 150000002500 ions Chemical class 0.000 claims description 3
- 230000001172 regenerating effect Effects 0.000 claims 8
- 239000007788 liquid Substances 0.000 claims 5
- 239000002585 base Substances 0.000 description 70
- 230000008569 process Effects 0.000 description 45
- 150000001450 anions Chemical class 0.000 description 13
- 238000005070 sampling Methods 0.000 description 12
- 239000000243 solution Substances 0.000 description 12
- 230000002378 acidificating effect Effects 0.000 description 9
- 239000012535 impurity Substances 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
- 238000005498 polishing Methods 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 238000010828 elution Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 150000007513 acids Chemical class 0.000 description 4
- 238000002242 deionisation method Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000001223 reverse osmosis Methods 0.000 description 4
- 239000004793 Polystyrene Substances 0.000 description 3
- 238000005054 agglomeration Methods 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 3
- 235000010338 boric acid Nutrition 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 238000007872 degassing Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 208000016253 exhaustion Diseases 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 239000007970 homogeneous dispersion Substances 0.000 description 3
- 229910052500 inorganic mineral Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011707 mineral Substances 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 150000007524 organic acids Chemical class 0.000 description 3
- 235000005985 organic acids Nutrition 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- 229920005990 polystyrene resin Polymers 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 125000001453 quaternary ammonium group Chemical group 0.000 description 3
- 239000012508 resin bead Substances 0.000 description 3
- 238000000108 ultra-filtration Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- FKNQFGJONOIPTF-UHFFFAOYSA-N Sodium cation Chemical compound [Na+] FKNQFGJONOIPTF-UHFFFAOYSA-N 0.000 description 2
- 239000004327 boric acid Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000011033 desalting Methods 0.000 description 2
- -1 hydroxide ions Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical group CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 230000009918 complex formation Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003651 drinking water Substances 0.000 description 1
- 235000020188 drinking water Nutrition 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012458 free base Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000003673 groundwater Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 238000011545 laboratory measurement Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- MEFBJEMVZONFCJ-UHFFFAOYSA-N molybdate Chemical compound [O-][Mo]([O-])(=O)=O MEFBJEMVZONFCJ-UHFFFAOYSA-N 0.000 description 1
- 229920005673 polypropylene based resin Polymers 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L sulfate group Chemical group S(=O)(=O)([O-])[O-] QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- 125000001302 tertiary amino group Chemical group 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
- 235000020681 well water Nutrition 0.000 description 1
- 239000002349 well water Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
- B01D15/08—Selective adsorption, e.g. chromatography
- B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
- B01D15/36—Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction
- B01D15/361—Ion-exchange
- B01D15/363—Anion-exchange
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J41/00—Anion exchange; Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/04—Processes using organic exchangers
- B01J41/05—Processes using organic exchangers in the strongly basic form
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J49/00—Regeneration or reactivation of ion-exchangers; Apparatus therefor
- B01J49/80—Automatic regeneration
- B01J49/85—Controlling or regulating devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J47/00—Ion-exchange processes in general; Apparatus therefor
- B01J47/02—Column or bed processes
- B01J47/022—Column or bed processes characterised by the construction of the column or container
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J49/00—Regeneration or reactivation of ion-exchangers; Apparatus therefor
- B01J49/05—Regeneration or reactivation of ion-exchangers; Apparatus therefor of fixed beds
- B01J49/07—Regeneration or reactivation of ion-exchangers; Apparatus therefor of fixed beds containing anionic exchangers
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
- C02F2001/422—Treatment of water, waste water, or sewage by ion-exchange using anionic exchangers
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/10—Inorganic compounds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/10—Inorganic compounds
- C02F2101/108—Boron compounds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/08—Multistage treatments, e.g. repetition of the same process step under different conditions
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2303/00—Specific treatment goals
- C02F2303/16—Regeneration of sorbents, filters
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Analytical Chemistry (AREA)
- Treatment Of Water By Ion Exchange (AREA)
Description
102:入口
106:出口
110:弱塩基性アニオン交換ベッド
114、124、134:不活性樹脂層
120:第1の強塩基性アニオン交換ベッド
130:第2の強塩基性アニオン交換ベッド
140:シリカ分析装置
145:シリカ・サンプリング・ライン
150:ホウ素分析装置
155:ホウ素サンプリング・ライン
160:強酸性カチオン交換ベッド
Claims (9)
- 水を処理する方法であって、
脱カチオン化された水流が逆流再生式イオン交換ユニットに通され、
前記逆流再生式イオン交換ユニットは、第1の強塩基性交換チャンバ及び第2の強塩基性交換チャンバを備える単一の塔と、上部液体透過基部を備えた第1の強塩基性アニオン交換チャンバ内の第1の強塩基性アニオン交換ベッドと、前記第1の強塩基性アニオン交換ヘッドの下流に配置される別の上部液体透過基部を備えた第2の強塩基性アニオン交換チャンバ内の第2の強塩基性アニオン交換ベッドと、を有し、前記脱カチオン化された水流が、前記第1の強塩基性アニオン交換ベッドに通された後に、前記第2の強塩基性アニオン交換ベッドに通され、
前記水流のシリカ濃度は、前記第2の強塩基性アニオン交換ベッドの上流位置で監視され、且つ前記水流のホウ素濃度は、前記第2の強塩基性アニオン交換ベッドの下流位置で監視され、
前記シリカ濃度と前記ホウ素濃度の一方が所定の閾値を上回ったときに、再生溶液が、前記第2の強塩基性アニオン交換ヘッドに通された後に、前記第1の強塩基性アニオン交換ヘッドに通されることによって、前記逆流再生式イオン交換ユニットが再生されることを特徴とする方法。 - 前記水流のサンプルが、前記第2の強塩基性アニオン交換ベッドの下流の強酸性カチオン交換ベッドに通され、前記強酸性カチオン交換ベッドは、前記第2の強塩基性アニオン交換ベッドとホウ素分析装置との間に配置されることを特徴とする、請求項1に記載の方法。
- 前記アニオン交換ベッドは、前記シリカ濃度が、20ppbの閾値を上回ったときに再生されることを特徴とする、請求項1に記載の方法。
- 前記アニオン交換ベッドは、前記ホウ素濃度が、100pptの閾値を上回ったときに再生されることを特徴とする、請求項1に記載の方法。
- 前記第1の強塩基性アニオン交換ベッドと前記第2の強塩基性アニオン交換ベッドとの間に第1の不活性樹脂層があり、前記第2の強塩基性アニオン交換ベッドと逆流再生式イオン交換ユニットの出口との間に第2の不活性樹脂層があることを特徴とする、請求項1に記載の方法。
- 前記再生溶液は、水酸化ナトリウム溶液であることを特徴とする、請求項1に記載の方法。
- 水を処理する方法であって、
脱カチオン化された水流が逆流再生式イオン交換ユニットに通され、
前記逆流再生式イオン交換ユニットは、弱塩基性アニオン交換チャンバ、第1の強塩基性交換チャンバ及び第2の強塩基性交換チャンバを備える単一の塔と、上部液体透過基部を備えた前記弱塩基性アニオン交換チャンバ内の弱塩基性アニオン交換ベッドと、前記弱塩基性アニオン交換ベッドの下流に配置される別の上部液体透過基部を備えた第1の強塩基性アニオン交換チャンバ内の第1の強塩基性アニオン交換ベッドと、前記第1の強塩基性アニオン交換ヘッドの下流に配置される更に別の上部液体透過基部を備えた第2の強塩基性アニオン交換チャンバ内の第2の強塩基性アニオン交換ベッドと、を有し、前記脱カチオン化された水流が、前記弱塩基性アニオン交換ベッドに通された後に、前記第1の強塩基性アニオン交換ベッド、前記第2の強塩基性アニオン交換ベッドに通され、
前記水流のシリカ濃度は、前記第2の強塩基性アニオン交換ベッドの上流位置で監視され、且つ前記水流のホウ素濃度は、前記第2の強塩基性アニオン交換ベッドの下流位置で監視され、
前記シリカ濃度と前記ホウ素濃度の一方が所定の閾値を上回ったときに、再生溶液が、前記第2の強塩基性アニオン交換ヘッドに通された後に、前記第1の強塩基性アニオン交換ヘッド、前記弱塩基性アニオン交換ベッドに通されることによって、前記逆流再生式イオン交換ユニットが再生されることを特徴とする方法。 - 前記弱塩基性アニオン交換ベッドと前記第1の強塩基アニオン交換ベッドとの間に第3の不活性樹脂層があり、前記第1の強塩基アニオン交換ベッドと前記第2の強塩基性アニオン交換ベッドとの間に第1の不活性樹脂層があり、前記第2の強塩基アニオン交換ベッドと逆流再生式イオン交換ユニットの出口との間に第2の不活性樹脂層があることを特徴とする、請求項7に記載の方法。
- 前記再生溶液は、水酸化ナトリウム溶液であることを特徴とする、請求項7に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP12193683.5A EP2735546B1 (en) | 2012-11-21 | 2012-11-21 | Treatment of water, particularly for obtaining ultrapure water |
EP12193683.5 | 2012-11-21 |
Publications (3)
Publication Number | Publication Date |
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JP2014100706A JP2014100706A (ja) | 2014-06-05 |
JP2014100706A5 JP2014100706A5 (ja) | 2017-01-05 |
JP6298275B2 true JP6298275B2 (ja) | 2018-03-20 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013241332A Active JP6298275B2 (ja) | 2012-11-21 | 2013-11-21 | 特に超純水を得るための水の処理 |
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Country | Link |
---|---|
US (1) | US9776892B2 (ja) |
EP (1) | EP2735546B1 (ja) |
JP (1) | JP6298275B2 (ja) |
KR (1) | KR102194404B1 (ja) |
CN (1) | CN103833107B (ja) |
IL (1) | IL229520B (ja) |
SG (1) | SG2013085360A (ja) |
TW (1) | TWI620717B (ja) |
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JP6331014B2 (ja) * | 2014-06-19 | 2018-05-30 | 栗田工業株式会社 | 複層式陰イオン交換樹脂塔の再生方法および装置 |
JP6119886B1 (ja) * | 2016-01-28 | 2017-04-26 | 栗田工業株式会社 | 超純水製造装置および超純水製造装置の運転方法 |
EP3414447B1 (de) * | 2016-02-09 | 2021-09-01 | Kautex Textron GmbH & Co. Kg | System und verfahren zur bevorratung und zuführung von wasser an eine brennkraftmaschine eines kraftfahrzeuges |
JP6907514B2 (ja) * | 2016-11-28 | 2021-07-21 | 栗田工業株式会社 | 超純水製造システム及び超純水製造方法 |
JP2019118891A (ja) * | 2018-01-09 | 2019-07-22 | 栗田工業株式会社 | 純水製造装置及び純水製造方法 |
US11332008B2 (en) | 2018-06-12 | 2022-05-17 | Kubota Corporation | Working machine |
JP7454330B2 (ja) * | 2018-06-20 | 2024-03-22 | オルガノ株式会社 | 被処理水中のホウ素除去方法、ホウ素除去システム、超純水製造システム及びホウ素濃度の測定方法 |
JP6860648B1 (ja) * | 2019-12-25 | 2021-04-21 | オルガノ株式会社 | 水処理システム及び水処理方法 |
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DE2221561C3 (de) * | 1972-05-03 | 1982-02-04 | Bayer Ag, 5090 Leverkusen | Verfarhen zur Durchführung von Ionenaustausch- und Adsorptionsvorgängen unter Verwendung eines Gegenstromfilters |
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- 2013-11-21 JP JP2013241332A patent/JP6298275B2/ja active Active
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KR20140065349A (ko) | 2014-05-29 |
SG2013085360A (en) | 2014-06-27 |
JP2014100706A (ja) | 2014-06-05 |
TW201433545A (zh) | 2014-09-01 |
KR102194404B1 (ko) | 2020-12-24 |
EP2735546B1 (en) | 2018-02-07 |
IL229520B (en) | 2019-09-26 |
EP2735546A1 (en) | 2014-05-28 |
TWI620717B (zh) | 2018-04-11 |
US20140138318A1 (en) | 2014-05-22 |
IL229520A0 (en) | 2014-03-31 |
US9776892B2 (en) | 2017-10-03 |
CN103833107A (zh) | 2014-06-04 |
CN103833107B (zh) | 2018-10-19 |
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