JP6214323B2 - 異質な表面特徴と固有の表面特徴とを区別するための装置 - Google Patents

異質な表面特徴と固有の表面特徴とを区別するための装置 Download PDF

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Publication number
JP6214323B2
JP6214323B2 JP2013215729A JP2013215729A JP6214323B2 JP 6214323 B2 JP6214323 B2 JP 6214323B2 JP 2013215729 A JP2013215729 A JP 2013215729A JP 2013215729 A JP2013215729 A JP 2013215729A JP 6214323 B2 JP6214323 B2 JP 6214323B2
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article
photons
surface features
focal plane
detector array
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Japanese (ja)
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JP2014081379A (ja
JP2014081379A5 (enExample
Inventor
ジョアキム・ワルター・アーナー
デイビッド・エム・タン
サミュエル・カー・ヘアン・ウォン
ヘンリー・ルイス・ロット
スティーブン・キース・マクラウリン
マイサラス・ナシロウ
フロリン・ザバリチェ
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Seagate Technology LLC
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Seagate Technology LLC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2013215729A 2012-10-16 2013-10-16 異質な表面特徴と固有の表面特徴とを区別するための装置 Expired - Fee Related JP6214323B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201261714546P 2012-10-16 2012-10-16
US61/714,546 2012-10-16
US14/032,186 US9377394B2 (en) 2012-10-16 2013-09-19 Distinguishing foreign surface features from native surface features
US14/032,186 2013-09-19

Publications (3)

Publication Number Publication Date
JP2014081379A JP2014081379A (ja) 2014-05-08
JP2014081379A5 JP2014081379A5 (enExample) 2016-07-21
JP6214323B2 true JP6214323B2 (ja) 2017-10-18

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JP2013215729A Expired - Fee Related JP6214323B2 (ja) 2012-10-16 2013-10-16 異質な表面特徴と固有の表面特徴とを区別するための装置

Country Status (2)

Country Link
US (2) US9377394B2 (enExample)
JP (1) JP6214323B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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US9581554B2 (en) * 2013-05-30 2017-02-28 Seagate Technology Llc Photon emitter array
US9513215B2 (en) * 2013-05-30 2016-12-06 Seagate Technology Llc Surface features by azimuthal angle
JP6657794B2 (ja) * 2015-10-30 2020-03-04 大日本印刷株式会社 光拡散度測定装置及び光拡散度測定方法

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Also Published As

Publication number Publication date
US9863892B2 (en) 2018-01-09
JP2014081379A (ja) 2014-05-08
US9377394B2 (en) 2016-06-28
US20160274037A1 (en) 2016-09-22
US20140104604A1 (en) 2014-04-17

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