JP6186721B2 - ノズルプレートの製造方法、液体噴射ヘッドの製造方法及び液体噴射装置の製造方法 - Google Patents
ノズルプレートの製造方法、液体噴射ヘッドの製造方法及び液体噴射装置の製造方法 Download PDFInfo
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
かかる態様では、原子層堆積法により成膜された第1の保護膜がノズル開口内周面などの小さな領域にも均一で且つ緻密に形成され、その上にプラズマCVDにより形成された第2の保護膜が積層されている。原子層堆積法により成膜された第1の保護膜上に撥液膜の下地となるプラズマCVDにより形成された第2の保護膜を設けたので、厚膜で機械的強度に優れ、耐液性にも優れ、撥液膜を設ける際の密着性が良好となる。
まず、本発明の実施形態1に係るノズルプレートの一例について説明する。図1は、ノズルプレートの斜視図及びその要部拡大断面図である。
図2は、ノズルプレート20の製造工程について説明する模式図である。
本実施形態におけるノズルプレート20の材料としては、上述したシリコン単結晶基板(シリコン基板)25が用いられ、1つの基板25から複数のノズルプレート20が作製される。このシリコン基板25に対して、図2(a)に示すように、まずドライエッチングによって第1円筒部22及び第2円筒部23からなるノズル開口21が形成される。
なお、かかる熱酸化膜200の形成工程は省略してもよい。
以下、上述した実施形態1のノズルプレート20を用いた液体噴射ヘッドの一例であるインクジェット式記録ヘッドについて説明する。
以上、本発明の実施形態1、2について説明したが、本発明の基本的構成は上述したものに限定されるものではない。
Claims (11)
- シリコン基板に液体を吐出する複数のノズル開口を設けたノズルプレートの製造方法であって、
前記シリコン基板の両面及び前記ノズル開口内面には原子層堆積により形成された第1の保護膜が設けられ、前記シリコン基板の前記両面のうち前記液体を吐出する側の面である吐出面の前記第1の保護膜の上には、プラズマCVDにより形成された第2の保護膜が積層されることを特徴とするノズルプレートの製造方法。 - 前記第1の保護膜および前記第2の保護膜は、酸化シリコン膜であることを特徴とする請求項1に記載するノズルプレートの製造方法。
- 前記第1の保護膜および前記第2の保護膜は、酸化金属膜であることを特徴とする請求項1に記載するノズルプレートの製造方法。
- 前記第1の保護膜および前記第2の保護膜は、酸化タンタル膜であることを特徴とする請求項1に記載するノズルプレートの製造方法。
- 前記第1の保護膜の厚さは、0.3Å以上、50nm以下の範囲にあり、前記第2の保護膜の厚さは、200nm以上、1000nm以下の範囲にあることを特徴とする請求項1〜4の何れか一項に記載するノズルプレートの製造方法。
- 前記第1の保護膜の下層には、シリコンの熱酸化膜が形成されることを特徴とする請求項1〜5の何れか一項に記載するノズルプレートの製造方法。
- 前記第2の保護膜の上には、金属アルコキシド膜をアニールした撥液膜が積層されることを特徴とする請求項1〜6の何れか一項に記載するノズルプレートの製造方法。
- 請求項1〜7の何れか一項に記載のノズルプレートの製造方法によりノズルプレートを製造する工程と、前記ノズル開口に連通する圧力発生室が設けられた流路形成基板を前記ノズルプレートに接合する工程と、を具備することを特徴とする液体噴射ヘッドの製造方法。
- 請求項8に記載の液体噴射ヘッドの製造方法により液体噴射ヘッドを製造する工程を具備することを特徴とする液体噴射装置の製造方法。
- シリコン基板に液体を吐出する複数のノズル開口を設けたノズルプレートの製造方法であって、
前記シリコン基板の両面及び前記ノズル開口内面には原子層堆積により形成された第1の保護膜が設けられ、前記シリコン基板の前記両面のうち前記液体を吐出する側の面である吐出面の前記第1の保護膜の上には、CVD又はスパッタリングにより形成された第2の保護膜が積層されることを特徴とするノズルプレートの製造方法。 - 前記第1の保護膜の密度は、7g/cm 2 以上であることを特徴とする請求項4に記載するノズルプレートの製造方法。
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