JP6144495B2 - 加熱接合装置及び加熱接合製品の製造方法 - Google Patents

加熱接合装置及び加熱接合製品の製造方法 Download PDF

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Publication number
JP6144495B2
JP6144495B2 JP2013011040A JP2013011040A JP6144495B2 JP 6144495 B2 JP6144495 B2 JP 6144495B2 JP 2013011040 A JP2013011040 A JP 2013011040A JP 2013011040 A JP2013011040 A JP 2013011040A JP 6144495 B2 JP6144495 B2 JP 6144495B2
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Japan
Prior art keywords
temperature
heat
vacuum
buffer
see
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JP2013011040A
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English (en)
Japanese (ja)
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JP2014143304A5 (enExample
JP2014143304A (ja
Inventor
純 松田
純 松田
鈴木 隆之
隆之 鈴木
正己 黒田
正己 黒田
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Origin Electric Co Ltd
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Origin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority to JP2013011040A priority Critical patent/JP6144495B2/ja
Application filed by Origin Electric Co Ltd filed Critical Origin Electric Co Ltd
Priority to CN201480005967.7A priority patent/CN104956780B/zh
Priority to EP14742961.7A priority patent/EP2950622B1/en
Priority to HK16101806.4A priority patent/HK1214072B/xx
Priority to PCT/JP2014/050239 priority patent/WO2014115583A1/ja
Priority to US14/763,150 priority patent/US9919372B2/en
Priority to TW103102421A priority patent/TWI639478B/zh
Publication of JP2014143304A publication Critical patent/JP2014143304A/ja
Publication of JP2014143304A5 publication Critical patent/JP2014143304A5/ja
Application granted granted Critical
Publication of JP6144495B2 publication Critical patent/JP6144495B2/ja
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/005Soldering by means of radiant energy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/008Soldering within a furnace
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/0008Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016Brazing of electronic components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/04Heating appliances
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08Auxiliary devices therefor
    • B23K3/085Cooling, heat sink or heat shielding means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • B23K2101/42Printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08Treatments involving gases
    • H05K2203/085Using vacuum or low pressure
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3494Heating methods for reflowing of solder

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP2013011040A 2013-01-24 2013-01-24 加熱接合装置及び加熱接合製品の製造方法 Active JP6144495B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2013011040A JP6144495B2 (ja) 2013-01-24 2013-01-24 加熱接合装置及び加熱接合製品の製造方法
EP14742961.7A EP2950622B1 (en) 2013-01-24 2014-01-09 Heat-bonding device and heat-bonded-article manufacturing method
HK16101806.4A HK1214072B (en) 2013-01-24 2014-01-09 Heat-bonding device and heat-bonded-article manufacturing method
PCT/JP2014/050239 WO2014115583A1 (ja) 2013-01-24 2014-01-09 加熱接合装置及び加熱接合製品の製造方法
CN201480005967.7A CN104956780B (zh) 2013-01-24 2014-01-09 加热接合装置及加热接合产品的制造方法
US14/763,150 US9919372B2 (en) 2013-01-24 2014-01-09 Heat-bonding apparatus and method of manufacturing heat-bonded products
TW103102421A TWI639478B (zh) 2013-01-24 2014-01-23 加熱接合裝置及加熱接合製品的製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013011040A JP6144495B2 (ja) 2013-01-24 2013-01-24 加熱接合装置及び加熱接合製品の製造方法

Publications (3)

Publication Number Publication Date
JP2014143304A JP2014143304A (ja) 2014-08-07
JP2014143304A5 JP2014143304A5 (enExample) 2016-02-12
JP6144495B2 true JP6144495B2 (ja) 2017-06-07

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JP2013011040A Active JP6144495B2 (ja) 2013-01-24 2013-01-24 加熱接合装置及び加熱接合製品の製造方法

Country Status (6)

Country Link
US (1) US9919372B2 (enExample)
EP (1) EP2950622B1 (enExample)
JP (1) JP6144495B2 (enExample)
CN (1) CN104956780B (enExample)
TW (1) TWI639478B (enExample)
WO (1) WO2014115583A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5902107B2 (ja) * 2013-01-24 2016-04-13 オリジン電気株式会社 加熱接合装置及び加熱接合製品の製造方法
CN107000092B (zh) 2014-12-09 2019-06-21 平克塞莫系统有限公司 用于制造电子部件的焊接连接部的传热装置
DE102015106298B4 (de) * 2015-04-24 2017-01-26 Semikron Elektronik Gmbh & Co. Kg Vorrichtung, Verfahren und Anlage zur inhomogenen Abkühlung eines flächigen Gegenstandes
JP6720033B2 (ja) * 2016-09-14 2020-07-08 株式会社Screenホールディングス 熱処理装置
JP6215426B1 (ja) * 2016-09-21 2017-10-18 オリジン電気株式会社 加熱装置及び板状部材の製造方法
JP6322746B1 (ja) * 2017-03-30 2018-05-09 オリジン電気株式会社 ワーク処理装置及び処理済ワークの製造方法
JP6803617B2 (ja) * 2017-12-13 2020-12-23 株式会社シンアペックス リフロー装置
CN107855623B (zh) * 2017-12-29 2023-07-18 山东才聚电子科技有限公司 一种真空焊接炉控制系统及其控制方法
CN107931768B (zh) * 2017-12-29 2023-05-16 山东才聚电子科技有限公司 一种真空焊接炉及焊接工艺
CN107838516B (zh) * 2017-12-29 2023-10-03 山东才聚电子科技有限公司 一种真空焊接炉的焊接机构
CN108788363B (zh) * 2018-07-17 2024-05-14 兴宁市光科电子有限公司 电感线圈生产用自动焊锡设备
JP2020064936A (ja) * 2018-10-16 2020-04-23 トヨタ自動車株式会社 半導体装置の製造方法
JP7168430B2 (ja) * 2018-12-04 2022-11-09 株式会社アイシン福井 レーザ溶接装置
JP7239307B2 (ja) * 2018-12-04 2023-03-14 株式会社アイシン福井 レーザ溶接装置
JP6879482B1 (ja) * 2020-01-09 2021-06-02 株式会社オリジン 酸化物除去済部材の製造方法及び酸化物除去装置
CN113492240B (zh) * 2020-03-18 2024-09-03 上海朗仕电子设备有限公司 一种用于真空回流焊炉的传送系统
CN115702489A (zh) * 2020-06-18 2023-02-14 库利克和索夫工业公司 用于如晶粒附接系统、覆晶接合系统、及片夹附接系统之设备的烤箱及相关方法
US20250187093A1 (en) * 2023-12-08 2025-06-12 Hanon Systems Brazed components and improved method of manufacturing them

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3693239A (en) * 1969-07-25 1972-09-26 Sidney Dix A method of making a micromodular package
US4278867A (en) * 1978-12-29 1981-07-14 International Business Machines Corporation System for chip joining by short wavelength radiation
JPS63196363A (ja) 1987-02-10 1988-08-15 Asahi Glass Co Ltd 乱反射面を有する陰極線管の製造方法
JPS63196363U (enExample) * 1987-06-05 1988-12-16
JPH01147281A (ja) * 1987-12-02 1989-06-08 Matsushita Electric Ind Co Ltd 基板加熱装置
JPH06268B2 (ja) * 1988-02-23 1994-01-05 エイティックテクトロン株式会社 リフロー半田付け方法及び装置
JPH05211391A (ja) * 1992-01-21 1993-08-20 Hitachi Ltd 高精度はんだ付け方法及び装置
JP2668330B2 (ja) * 1994-03-04 1997-10-27 日本無線株式会社 樹脂基板バンプ貼合わせ方法及び装置
JP3390268B2 (ja) * 1994-10-18 2003-03-24 日本電熱計器株式会社 はんだ付け装置
US5785233A (en) * 1996-02-01 1998-07-28 Btu International, Inc. Apparatus and method for solder reflow bottom cooling
JP3409679B2 (ja) * 1998-02-06 2003-05-26 神港精機株式会社 半田付け装置
JP2001308511A (ja) * 2000-04-19 2001-11-02 Nec Corp リフローはんだ付け方法およびその装置
TW467788B (en) * 2000-09-18 2001-12-11 Shyi-Kaan Wu The manufacturing of single layer superabrasive tools by infrared brazing
US6649887B2 (en) * 2001-03-30 2003-11-18 General Electric Company Apparatus and method for protective atmosphere induction brazing of complex geometries
JP4073183B2 (ja) * 2001-08-01 2008-04-09 株式会社日立製作所 Pbフリーはんだを用いた混載実装方法及び実装品
JP4371619B2 (ja) * 2001-09-21 2009-11-25 パナソニック株式会社 リフロー装置
JP2004006657A (ja) * 2002-03-22 2004-01-08 Seiko Epson Corp 半導体装置の製造方法及びその製造装置
JP3809806B2 (ja) * 2002-03-29 2006-08-16 富士電機デバイステクノロジー株式会社 半導体装置の製造方法
JP4233905B2 (ja) * 2003-03-26 2009-03-04 Juki株式会社 部品装着装置
JP4448749B2 (ja) * 2004-09-16 2010-04-14 神港精機株式会社 加熱及び冷却装置
DE102004047359B3 (de) * 2004-09-29 2006-01-26 eupec Europäische Gesellschaft für Leistungshalbleiter mbH Verfahren und Vorrichtung zur Regelung und Überwachung eines Lötprozesses
JP2008284557A (ja) * 2007-05-15 2008-11-27 Shinko Seiki Co Ltd 加熱冷却装置
JP5251456B2 (ja) * 2008-11-27 2013-07-31 株式会社デンソー 半田付け用真空加熱装置
JP2010267769A (ja) * 2009-05-14 2010-11-25 Toyota Motor Corp はんだ付け方法及び装置
JP5424201B2 (ja) * 2009-08-27 2014-02-26 アユミ工業株式会社 加熱溶融処理装置および加熱溶融処理方法
JP5892682B2 (ja) * 2011-04-27 2016-03-23 アピックヤマダ株式会社 接合方法
WO2013161875A1 (ja) * 2012-04-25 2013-10-31 オリジン電気株式会社 半田付け装置及び半田付け製品の製造方法
JP5902107B2 (ja) * 2013-01-24 2016-04-13 オリジン電気株式会社 加熱接合装置及び加熱接合製品の製造方法

Also Published As

Publication number Publication date
US9919372B2 (en) 2018-03-20
HK1214072A1 (zh) 2016-07-15
US20150321278A1 (en) 2015-11-12
EP2950622B1 (en) 2020-08-19
WO2014115583A1 (ja) 2014-07-31
JP2014143304A (ja) 2014-08-07
TWI639478B (zh) 2018-11-01
TW201436908A (zh) 2014-10-01
EP2950622A1 (en) 2015-12-02
CN104956780A (zh) 2015-09-30
EP2950622A4 (en) 2016-09-07
CN104956780B (zh) 2018-05-15

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