JP6123500B2 - 半導体モジュール - Google Patents
半導体モジュール Download PDFInfo
- Publication number
- JP6123500B2 JP6123500B2 JP2013118684A JP2013118684A JP6123500B2 JP 6123500 B2 JP6123500 B2 JP 6123500B2 JP 2013118684 A JP2013118684 A JP 2013118684A JP 2013118684 A JP2013118684 A JP 2013118684A JP 6123500 B2 JP6123500 B2 JP 6123500B2
- Authority
- JP
- Japan
- Prior art keywords
- divided
- wirings
- wiring
- semiconductor
- semiconductor module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 title claims description 96
- 239000000758 substrate Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 7
- 230000002500 effect on skin Effects 0.000 description 10
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 9
- 229910010271 silicon carbide Inorganic materials 0.000 description 9
- 238000000034 method Methods 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Inverter Devices (AREA)
Description
[第1の実施形態]
以下では、トランジスタチップ20として、SiCからなるMOSFETを用いた場合を例示する。
[第2の実施形態]
Claims (3)
- 絶縁性を有する基板と、
前記基板上に形成された第1及び第2の配線と、
前記第1及び第2の配線にそれぞれ接続された第1及び第2の電極を有するパワーデバイス用の複数の半導体装置と、
を備え、
前記第1及び第2の配線のうちの少なくとも一方が、電流方向に沿った溝によって分割された複数の分割配線、もしくは、前記電流方向と交差する幅方向に分割された複数の分割配線を有し、
前記複数の半導体装置それぞれにおける前記第1及び第2の電極のうちの少なくとも一方が、前記第1及び第2の配線のうちの対応の配線における前記複数の分割配線のうちの何れかに選択的に接続されており、
前記複数の半導体装置それぞれにおける前記第1及び第2の電極のうちの少なくとも一方と、前記第1及び第2の配線のうちの対応の配線における前記複数の分割配線のうちの選択されない分割配線との間に配置された絶縁膜を更に備える、
半導体モジュール。 - 前記溝の幅、もしくは、前記幅方向に分割された分割配線の間隔が、0.01mm〜0.5mmである、請求項1に記載の半導体モジュール。
- 前記複数の半導体装置それぞれの材料が、ワイドバンドギャップ半導体を含む、請求項1又は2に記載の半導体モジュール。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013118684A JP6123500B2 (ja) | 2013-06-05 | 2013-06-05 | 半導体モジュール |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013118684A JP6123500B2 (ja) | 2013-06-05 | 2013-06-05 | 半導体モジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014236179A JP2014236179A (ja) | 2014-12-15 |
JP6123500B2 true JP6123500B2 (ja) | 2017-05-10 |
Family
ID=52138643
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013118684A Active JP6123500B2 (ja) | 2013-06-05 | 2013-06-05 | 半導体モジュール |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6123500B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021141222A (ja) | 2020-03-06 | 2021-09-16 | 富士電機株式会社 | 半導体モジュール |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0582922A (ja) * | 1991-09-24 | 1993-04-02 | Mitsubishi Electric Corp | 電力用半導体装置 |
JP2004095670A (ja) * | 2002-08-29 | 2004-03-25 | Toshiba Corp | 半導体装置 |
JP4196001B2 (ja) * | 2004-02-17 | 2008-12-17 | パナソニック株式会社 | 半導体パワーモジュール |
JP5136343B2 (ja) * | 2008-10-02 | 2013-02-06 | 三菱電機株式会社 | 半導体装置 |
JPWO2010147199A1 (ja) * | 2009-06-19 | 2012-12-06 | 株式会社安川電機 | 配線基板および電力変換装置 |
JP2011036015A (ja) * | 2009-07-31 | 2011-02-17 | Daikin Industries Ltd | 電力変換装置 |
JP2011254021A (ja) * | 2010-06-03 | 2011-12-15 | Sumitomo Electric Ind Ltd | 半導体装置の製造方法 |
JP5251991B2 (ja) * | 2011-01-14 | 2013-07-31 | トヨタ自動車株式会社 | 半導体モジュール |
JP5876299B2 (ja) * | 2012-01-18 | 2016-03-02 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 回路装置 |
-
2013
- 2013-06-05 JP JP2013118684A patent/JP6123500B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2014236179A (ja) | 2014-12-15 |
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