JP6105731B2 - 回折光学素子及び測定方法 - Google Patents
回折光学素子及び測定方法 Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
- G01B9/02028—Two or more reference or object arms in one interferometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
- G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
- G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/005—Testing of reflective surfaces, e.g. mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
- G02B5/1871—Transmissive phase gratings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49764—Method of mechanical manufacture with testing or indicating
- Y10T29/49771—Quantitative measuring or gauging
Description
本発明は、光学素子の光学面の実際形状の、意図した形状からの偏差を測定する方法、こうした方法を実行するための回折光学素子、光学素子を製造する方法、並びにこうした光学素子に関するものである。
本発明の目的は、上述した問題を解決することにあり、特に、あらゆる形状の光学面、特に、回転対称でない非球面の光学面を、改善された精度で測定するための方法及び回折光学素子を提供することにある。
一例として、本発明によれば、上述した目的は、基板、及びこの基板上に配置された回折構造パターンを有する回折光学素子によって達成される。この回折構造パターンは、この構造上に放射される平面波または球面波の入力波を、少なくとも4つの別個の出力波に変換し、これらの出力波のうち少なくとも1つは非球面波であり、これらの出力波のうち少なくとも他の1つは球面波であり、これらの出力波のうち少なくとも他の2つのそれぞれは、平面波または球面波である。
以下に説明する好適な実施形態では、機能的または構造的に互いに類似した要素には、できる限り同一または同様の符号を与える。従って、特定の好適な実施形態の個別要素の特徴を理解するためには、他の好適な実施形態、あるいは本発明の概要を参照すべきである。
10 干渉計測システム
12 光学面
14 光学素子
16 干渉計
18 光源
20 照明放射
21 レーザー
22 レーザービーム
24 フォーカスレンズ
26 止め具
28 発散ビーム
30 レンズ素子グループ
32 光軸
34 ビームスプリッタ
36 フィゾー素子
38 フィゾー領域
40 参照波
42 入力波
44 平面波面
45 干渉計カメラ
46 レンズ系
47 検出領域
48 カメラチップ
49 評価装置
50 回折光学素子
52 基板
54 回折構造パターン
56 非球面出力波
58 球面出力波
60x +1 平面出力波
60x -1 平面出力波
60y +1 平面出力波
60y -1 平面出力波
62 較正球
64 平面鏡
66 戻り測定波
70 球面出力波
72 球面出力波
74 球面出力波
76 近似境界直線
80 回転軸
82 最も良く合う回転対称非球面
84 意図した形状
Claims (6)
- 光学素子の光学面の実際形状の、意図した形状からの偏差を測定する方法であって、
入力波を発生するステップと、
前記入力波のビーム経路中に回折光学素子を配置し、前記入力波を、前記回折光学素子との相互作用によって、少なくとも3つの別個の出力波に変換するステップであって、前記出力波のうち1つは測定波であり、前記光学面の前記意図した形状に適合し、非球形波面を有し、前記出力波のうち少なくとも他の2つは較正波であるステップと、
前記少なくとも2つの較正波の各々を用いて、前記回折光学素子の較正補正値を決定するステップと、
前記光学面を、前記適合した測定波のビーム経路中に配置し、前記測定波の波面を、前記光学面との相互作用後に測定するステップであって、前記適合した測定波の波面を、前記較正補正値を決定するステップ中と同様に前記入力波に対して配向された前記回折素子を用いて測定するステップと、
前記決定した較正補正値を用いて、前記測定した波面を補正するステップと
を含むことを特徴とする方法。 - 前記回折光学素子が、複合符号化位相格子を具えていることを特徴とする請求項1に記載の方法。
- 前記少なくとも3つの出力波の各々を、前記回折光学素子において、1次の回折次数で発生することを特徴とする請求項1または2に記載の方法。
- 前記出力波の各々が、当該出力波の異なる伝搬方向を強度で重み付け平均して出る伝搬方向である平均伝搬方向を有し、前記出力波の前記平均伝搬方向は、前記少なくとも2つの較正波が、前記測定波の前記平均伝搬方向によって規定される軸線に対して互いに非対称に配置されるように、互いに対して配向されていることを特徴とする請求項1〜3のいずれかに記載の方法。
- 前記較正波のうち少なくとも1つが球面波であることを特徴とする請求項1〜4のいずれかに記載の方法。
- 光学素子を製造する方法であって、
500mmより大きい直径dを有する光学面を有する前記光学素子を製造するステップと、
1つの回折光学素子のみを用いた請求項1に記載の方法によって、前記光学面の意図した形状に対する当該光学面の実際形状を、前記意図した形状からの前記実際形状の偏差が0.05nmの精度で測定されるような精度で測定するステップであって、前記偏差は、d/100〜d/5の振動波長を有する振動に由来し、前記意図した形状は自由形状面であり、回転対称な非球面の各々から5μmより大きい偏差を有するステップと、
前記干渉計測の結果に基づいて、前記光学面を機械的に処理することによって、前記光学面を前記意図した形状に適合させるステップと
を含むことを特徴とする方法。
Applications Claiming Priority (5)
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US201261707014P | 2012-09-28 | 2012-09-28 | |
DE102012217800.7A DE102012217800A1 (de) | 2012-09-28 | 2012-09-28 | Diffraktives optisches Element sowie Messverfahren |
US61/707,014 | 2012-09-28 | ||
DE102012217800.7 | 2012-09-28 | ||
PCT/EP2013/002904 WO2014048574A2 (en) | 2012-09-28 | 2013-09-27 | Diffractive optical element and measuring method |
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JP2017039346A Division JP6462025B2 (ja) | 2012-09-28 | 2017-03-02 | 回折光学素子、及びこの回折光学素子を用いた測定方法及びシステム |
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JP2015535930A JP2015535930A (ja) | 2015-12-17 |
JP6105731B2 true JP6105731B2 (ja) | 2017-03-29 |
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JP2015532335A Active JP6105731B2 (ja) | 2012-09-28 | 2013-09-27 | 回折光学素子及び測定方法 |
JP2017039346A Active JP6462025B2 (ja) | 2012-09-28 | 2017-03-02 | 回折光学素子、及びこの回折光学素子を用いた測定方法及びシステム |
JP2018243265A Pending JP2019090819A (ja) | 2012-09-28 | 2018-12-26 | 回折光学素子及び測定方法 |
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JP2018243265A Pending JP2019090819A (ja) | 2012-09-28 | 2018-12-26 | 回折光学素子及び測定方法 |
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US (1) | US20150198438A1 (ja) |
EP (1) | EP2901101B1 (ja) |
JP (3) | JP6105731B2 (ja) |
KR (2) | KR101869141B1 (ja) |
CN (2) | CN104685317B (ja) |
DE (1) | DE102012217800A1 (ja) |
WO (1) | WO2014048574A2 (ja) |
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CN107816939B (zh) | 2020-04-14 |
CN104685317A (zh) | 2015-06-03 |
KR20180069923A (ko) | 2018-06-25 |
KR101869141B1 (ko) | 2018-06-19 |
JP2019090819A (ja) | 2019-06-13 |
CN104685317B (zh) | 2017-12-22 |
JP2015535930A (ja) | 2015-12-17 |
DE102012217800A1 (de) | 2014-04-03 |
KR20150046282A (ko) | 2015-04-29 |
EP2901101B1 (en) | 2022-05-18 |
WO2014048574A2 (en) | 2014-04-03 |
JP2017167133A (ja) | 2017-09-21 |
EP2901101A2 (en) | 2015-08-05 |
CN107816939A (zh) | 2018-03-20 |
JP6462025B2 (ja) | 2019-01-30 |
WO2014048574A3 (en) | 2014-05-30 |
US20150198438A1 (en) | 2015-07-16 |
KR102056552B1 (ko) | 2019-12-16 |
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