JP6101417B2 - 密閉構造及びこれを備えた搬送ロボット - Google Patents

密閉構造及びこれを備えた搬送ロボット Download PDF

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Publication number
JP6101417B2
JP6101417B2 JP2014553901A JP2014553901A JP6101417B2 JP 6101417 B2 JP6101417 B2 JP 6101417B2 JP 2014553901 A JP2014553901 A JP 2014553901A JP 2014553901 A JP2014553901 A JP 2014553901A JP 6101417 B2 JP6101417 B2 JP 6101417B2
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JP
Japan
Prior art keywords
magnetic
seal member
magnetic seal
bellows
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014553901A
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English (en)
Japanese (ja)
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JPWO2014102887A1 (ja
Inventor
寛晃 安藤
寛晃 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirata Corp
Original Assignee
Hirata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corp filed Critical Hirata Corp
Publication of JPWO2014102887A1 publication Critical patent/JPWO2014102887A1/ja
Application granted granted Critical
Publication of JP6101417B2 publication Critical patent/JP6101417B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sealing Devices (AREA)
  • Diaphragms And Bellows (AREA)
JP2014553901A 2012-12-28 2012-12-28 密閉構造及びこれを備えた搬送ロボット Active JP6101417B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/008465 WO2014102887A1 (ja) 2012-12-28 2012-12-28 密閉構造及びこれを備えた搬送ロボット

Publications (2)

Publication Number Publication Date
JPWO2014102887A1 JPWO2014102887A1 (ja) 2017-01-12
JP6101417B2 true JP6101417B2 (ja) 2017-03-22

Family

ID=51020048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014553901A Active JP6101417B2 (ja) 2012-12-28 2012-12-28 密閉構造及びこれを備えた搬送ロボット

Country Status (3)

Country Link
JP (1) JP6101417B2 (zh)
TW (1) TWI532574B (zh)
WO (1) WO2014102887A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190081603A (ko) * 2017-12-29 2019-07-09 주식회사 에스에프에이 링크 아암 장치

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11198216B2 (en) 2018-06-19 2021-12-14 Kawasaki Jukogyo Kabushiki Kaisha Horizontal articulated robot
JP6885980B2 (ja) 2019-03-28 2021-06-16 平田機工株式会社 駆動装置及び搬送装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2591965Y2 (ja) * 1993-06-18 1999-03-10 日本精工株式会社 密封装置
JPH10181870A (ja) * 1996-12-20 1998-07-07 Kokusai Electric Co Ltd 密閉容器内搬送装置
JP2000002338A (ja) * 1998-06-12 2000-01-07 Nok Corp 磁性流体を利用した密封装置
JP4106172B2 (ja) * 2000-03-27 2008-06-25 新明和工業株式会社 搬送ロボット及び真空チャンバ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190081603A (ko) * 2017-12-29 2019-07-09 주식회사 에스에프에이 링크 아암 장치
KR102045762B1 (ko) * 2017-12-29 2019-11-18 주식회사 에스에프에이 링크 아암 장치

Also Published As

Publication number Publication date
TWI532574B (zh) 2016-05-11
TW201433425A (zh) 2014-09-01
JPWO2014102887A1 (ja) 2017-01-12
WO2014102887A1 (ja) 2014-07-03

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