JP6020239B2 - 成膜方法及び成膜装置 - Google Patents
成膜方法及び成膜装置 Download PDFInfo
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- JP6020239B2 JP6020239B2 JP2013027972A JP2013027972A JP6020239B2 JP 6020239 B2 JP6020239 B2 JP 6020239B2 JP 2013027972 A JP2013027972 A JP 2013027972A JP 2013027972 A JP2013027972 A JP 2013027972A JP 6020239 B2 JP6020239 B2 JP 6020239B2
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- Engineering & Computer Science (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
- Chemical Vapour Deposition (AREA)
Description
真空引きされた処理容器内で被処理体の表面に高分子薄膜よりなる絶縁膜を形成する成膜方法において、酸無水物よりなる第1の原料ガスとジアミンよりなる第2の原料ガスとを供給して絶縁膜を形成し、第1の工程の後に第2の原料ガスの供給を停止すると共に第1の原料ガスを供給して絶縁膜を改質することによりバリア機能を持たせ、これにより、高アスペクト比の凹部の埋め込に適用でき、しかも、バリア性を兼ね備えた高分子薄膜の絶縁膜を形成することができる。
ここで、上記絶縁膜140であるポリイミド膜の界面(表面)の改質による変化ついて図5を参照して説明する。図5中において”P”はPMDA分子を示し、”O”はODA分子を示す。まず、図5(A)に示すように第1の工程S1でPMDAとODAとを供給して絶縁膜140であるポリイミド膜を形成した時点では、基板4上に蒸気重合法によって形成されるポリイミド膜は”P”で終端しているものと、”O”で終端しているものとが混在している。
次に、ポリイミド膜のCu拡散耐性について検討を行ったので、その結果について図6を参照して説明する。図6はポリイミド膜の終端処理に対するCu拡散耐性を示すグラフである。ここでは、試料としてシリコン基板の表面に高分子薄膜であるポリイミド膜を0.3μm程度の厚さで形成し、このポリイミド膜の表面にCu膜を形成した。
次に、バリア膜とポリイミド膜とを併用した時のCu拡散耐性について検討を行ったので、その評価結果について図7を参照して説明する。図7はバリア膜を用いた時のポリイミド膜のCu拡散耐性を示すグラフである。この図7には試料となる薄膜の積層状態の模式図が併記されている。
4 基板
6 導電層
20 成膜装置
26 処理容器
34 ウエハボート(保持手段)
64 真空排気系
74 ガス供給手段
76 第1の原料ガス供給系
78 第2の原料ガス供給系
82 第1の原料
102 第2の原料
128 装置制御部
140 絶縁膜
142 バリア膜
S1 第1の工程
S2 第2の工程
Claims (6)
- 真空引きされた処理容器内で被処理体の表面に高分子薄膜よりなる絶縁膜を形成する成膜方法において、
酸無水物よりなる第1の原料ガスとジアミンよりなる第2の原料ガスとを供給して前記絶縁膜を形成する第1の工程と、
前記第1の工程の後に前記第2の原料ガスの供給を停止すると共に前記第1の原料ガスを供給して前記絶縁膜を改質することにより銅拡散防止用のバリア機能を持たせる第2の工程と、
を有することを特徴とする成膜方法。 - 前記第1と第2の工程におけるプロセス温度は20〜450℃の範囲内であることを特徴とする請求項1記載の成膜方法。
- 前記第1と第2の工程におけるプロセス圧力は0.1〜1.0Torrの範囲内であることを特徴とする請求項1又は2記載の成膜方法。
- 前記酸無水物は、ピロメリット酸二無水物とオキシジフタル酸二無水物とビフタル酸無水物とカルボニルジフタル酸無水物とジフタル酸無水物とスルホニルジフタル酸無水物とシクロヘキサンテトラカルボン酸二無水物とシクロペンタンテトラカルボン酸二無水物とシクロブタンテトラカルボン酸二無水物とよりなる群から選択される1以上の材料を含み、前記ジアミンは、オキシジアニリンとジアミノデカンとエチレンジアミンとジアミノウンデカンとトリメチレンジアミンとジアミノドデカンとジアミノブタンとヘキヘサルオロプロパンとジアミノペンタンとチオジアニリンとアミノフェニルスルフィドとジアミノヘキサンとジアミノジフェニルスルホンとヘプテンジアミンとジアミノベンゾフェノンとジアミノオクタンとジアミノノナンとジアミノシクロヘキシルメタンとメチルシクロヘキシルアミンとよりなる群から選択される1以上の材料を含むことを特徴とする請求項1乃至3のいずれか一項に記載の成膜方法。
- 前記改質された絶縁膜の表面にバリア膜を形成するようにしたことを特徴とする請求項1乃至4のいずれか一項に記載の成膜方法。
- 被処理体の表面に高分子薄膜よりなる絶縁膜を形成する成膜装置において、
前記被処理体を収容する処理容器と、
前記処理容器内で前記被処理体を保持する保持手段と、
前記処理容器内を真空引きする真空排気系と、
前記処理容器内へ前記高分子薄膜の複数の原料ガスを含む必要なガスを供給するガス供給手段と、
前記被処理体を加熱する加熱手段と、
請求項1乃至4のいずれか一項に記載の成膜方法を実施するように装置全体を制御する装置制御部と、
を備えたことを特徴とする成膜装置。
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