JP5993909B2 - レーザ電圧画像化状態マッピングのためのシステム - Google Patents
レーザ電圧画像化状態マッピングのためのシステム Download PDFInfo
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- 238000013507 mapping Methods 0.000 title description 9
- 238000003384 imaging method Methods 0.000 title description 5
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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Description
X∝VsigcosΘ
Y∝VsigsinΘ
である。ここで、Vsigは関心のある信号(反射レーザビーム)の振幅であり、Θは関心のある信号と参照信号(例えば、参照クロック信号)との間の位相差、即ち、Θ=Θsig-Θrefである。反対の状態又は極性に調整された一対のトランジスタにとっては、X又はY出力値は、入力参照周波数の位相にかかわらず、反対の極性になるであろう。例えば、トランジスタAがΘ1で変調している場合には、トランジスタBがΘ2 = Θ1 +/- 180°(非同期)で変調している。それゆえ、トランジスタAに対するX値は、cosΘ1に比例する一方、トランジスタBに対するX値は、cosΘ1+/-180°に比例する。つまり、
XA∝VsigcosΘ1
XB∝Vsigcos(Θ1 +/- 180°) = -VsigcosΘ1 = - XA
同様に、
YA∝VsigsinΘ1
YB∝Vsigsin(Θ1 +/- 180°) = -VsigsinΘ1 = - YA
である。
それゆえ、相対論理状態がロックインアンプのX又はY出力から抽出され得る。但し、この論理体系は、同期及び非同期検出に制限されないことに注意すべきである。むしろ、2つのトランジスタ間の位相の違いが90°よりも大きい限り、絶対振幅が異なっていたとしても、これらの2つのトランジスタのX及びY値が反対極性のものになる。ロックインアンプのX又はY出力は、グレースケール画像に変換される。ここで、各ピクセルの値は、その空間位置における位相に対応する。
R = Vsig = √(X2+Y2)
Θ = tan-1(Y/X)
Θは、関心のある信号と参照信号との間の位相差である。但し、レーザビームがICにおいてトランジスタがない領域を走査するときには、反射するRF電気信号がなく、Θ値は、乱雑になる。結果として、ロックインアンプのΘ出力電圧は乱雑であり、この電圧は、ノイズとしてみなされる。このことは、トランジスタ由来のΘ値をΘ「ノイズ」によって覆い隠すようにする。それゆえ、一実施形態によると、R出力は、Θ出力電圧値が用いられるべきか否か、即ち、Θ値が乱雑であるか否かを決定するために監視される。反射したRF電気信号は、Rがゼロでない値になると、Θ値をICの走査領域における特定の画素に用いることができる。他方、反射したRF電気信号が存在しない場合には、Rがほぼゼロ値となり、Θ値を特定のピクセルに使用することができない。一例では、Θ値の使用を許可する/許可しないR値の大きさに、閾値が設定される。
-ポイントAでの2x a.u.
-活性がない(RF干渉信号のみが測定される)場所でのx a.u.
-ポイントBでの0 a.u.
これをグレースケールレベルに標準化すると、ポイントAは白色画素に、活性のないポイントは灰色画素(背景レベル)、ポイントBは黒色画素に見え、これによりポイントAとBとの間での相対的な論理状態マッピングを提供する。
Claims (10)
- ICである被テストデバイス(DUT)を試験するためのシステムであって、
レーザビームを生成するレーザ光源と、
前記レーザビームを調整して、反対の論理状態に変調された少なくとも2つの能動デバイスが位置している、前記DUTの選択領域上で該レーザビームを走査するための光学素子と、
前記DUTからの反射ビームを収集するための光学素子と、
前記反射ビームを電気信号に変換するためのセンサと、
前記電気信号のAC成分が入力され、X/Y又はR/Θ出力を出力するロックインアンプと、
前記ロックインアンプのX/Y又はR/Θ出力が入力され、走査領域のグレースケール画像に変換し、前記X/Y又はR/Θ出力から前記2つの能動デバイスの相対位相情報を抽出して前記DUT内の能動デバイスの論理状態を抽出する変換器とを備え、
前記グレースケール画像におけるグレースケールの値は、前記DUTの走査領域における能動デバイスの位相を表していることを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記レーザビームを調整して、前記DUTの選択領域上で該レーザビームを走査するための光学素子は、レーザ走査顕微鏡であることを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記センサは、アバランシェフォトダイオードであることを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
Θ値の使用を許可するか許可しないかを決める振幅Rの閾値が設定されていることを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記変換器は、ビデオアンプ及びフレームグラバを有することを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記センサからの前記電気信号が入力されるトランスインピーダンスアンプをさらに備えることを特徴とするシステム。 - 請求項6に記載のシステムにおいて、
前記トランスインピーダンスアンプからの電気信号が入力され、該電気信号をDC成分とAC成分とに分離する信号分離器をさらに備えることを特徴とするシステム。 - 請求項7に記載のシステムにおいて、
前記トランスインピーダンスアンプからのAC成分が入力され、該AC成分を調整するRFアンプをさらに備えることを特徴とするシステム。 - 請求項7に記載のシステムにおいて、
前記DC成分が入力され、該DC成分を増幅するビデオアンプと、
前記DC成分から走査領域の画像を生成するフレームグラバとをさらに備えることを特徴とするシステム。 - 請求項7に記載のシステムにおいて、
前記信号分離器は、ダイプレクサを有することを特徴とするシステム。
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2010
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- 2010-05-03 SG SG10201401887YA patent/SG10201401887YA/en unknown
- 2010-05-03 SG SG201003100-3A patent/SG166089A1/en unknown
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- 2010-05-06 JP JP2010106569A patent/JP5607418B2/ja active Active
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- 2014-08-28 JP JP2014174168A patent/JP5993909B2/ja active Active
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US8754633B2 (en) | 2014-06-17 |
US20160139200A1 (en) | 2016-05-19 |
JP5607418B2 (ja) | 2014-10-15 |
SG10201401887YA (en) | 2014-06-27 |
US20100277159A1 (en) | 2010-11-04 |
US20140292363A1 (en) | 2014-10-02 |
US9244121B2 (en) | 2016-01-26 |
JP2010271307A (ja) | 2010-12-02 |
JP2015025811A (ja) | 2015-02-05 |
SG166089A1 (en) | 2010-11-29 |
SG10201506637YA (en) | 2015-10-29 |
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