SG11201407582SA - Laser-assisted device alteration using synchronized laser pulses - Google Patents

Abstract

(12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 19 December 2013 (19.12.2013) WIPOIPCT (10) International Publication Number WO 2013/188046 A4 (51) International Patent Classification: G01R 31/311 (2006.01) (21) International Application Number: (22) International Filing Date: (25) Filing Language: (26) Publication Language: PCT/US2013/041468 16 May 2013 (16.05.2013) English English (30) Priority Data: 61/648,042 16 May 2012 (16.05.2012) US (71) Applicant: DCG SYSTEMS, INC. [US/US]; 45900 Northport Loop East, Fremont, CA 94538 (US). (72) Inventors; and (71) Applicants VEDAGARBHA, Praveen : [US/US]; 45524 Cherokee Lane, Fremont, CA 94539 (US). REID, Derryck [GB/GB]; 6 Matthews Crofts, Blackridge, West Lothian EH48 3TJ (GB). SERRELS, Keith [GB/US]; 39600 Fre­ mont Boulevard, Apt. 125, Fremont, CA 94538 (US). VICKERS, James, S. [US/US]; 2002 Coastland Ave, San Jose, CA 95125 (US). (74) Agent: BACH, Joseph; Nixon Peabody LLP, P.O. Box 60610, Palo Alto, CA 94306 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available)'. AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available)'. ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3)) — with amended claims and statement (Art. 19(1)) — with information concerning one or more priority claims considered void (Rule 26bis.2(d)) Date of publication of the amended claims and statement: 27 February 2014 (54) Title: LASER-ASSISTED DEVICE ALTERATION USING SYNCHRONIZED LASER PULSES •t o 00 00 Figure 3 i-H o CJ (57) Abstract: A pulsed-laser LADA system is provided, which utilizes temporal resolution to enhance spatial resolution. The sys - tem is capable of resolving CMOS pairs within the illumination spot using synchronization of laser pulses with the DUT clock. The system can be implemented using laser wavelength having photon energy above the silicon bandgap so as to perform single- photon LADA or wavelength having photon energy below the silicon bandgap so as to generate two-photon LADA. The timing of the laser pulses can be adjusted using two feedback loops tied to the clock signal of an ATE, or by adjusting the ATE's clock signal with ref­ erence to a fixed- pulse laser source.