JP5956877B2 - Suction table - Google Patents

Description

  The present invention relates to a suction table suitable for holding a display panel such as a liquid crystal display panel or an organic light emitting panel.

  A display panel such as a liquid crystal display panel in which an electric circuit is formed on a glass substrate is subjected to an electrical inspection using a prober, for example, during the manufacturing process. In this test, a liquid crystal display panel, which is an object to be inspected, is generally held on a suction table incorporated in a prober using negative pressure.

  In order to safely and quickly remove the object to be inspected from the suction table, the suction table is provided with a plurality of elevating pins that can lift the object from the suction surface so as to protrude from the suction surface ( For example, see Patent Document 1).

  When the lifting pin at the protruding position receives the object to be inspected from the transport robot above the suction surface, the lift pin descends below the suction surface. When the object to be inspected moves on the suction surface by the lowering of the lifting pins, a negative pressure is applied to the suction surface by a negative pressure mechanism incorporated in the suction table. While the inspection object is inspected, the inspection object is securely held on the suction surface by the negative pressure. After the inspection, the object to be inspected is lifted from the suction surface as the elevating pins are raised. The inspection object lifted from the suction surface by the lifting pins is removed from the suction table by the transfer robot without being strongly affected by static electricity acting between the suction surface and the inspection object.

  However, since the contact area between the lift pins and the test object is small, the local stress that the test object receives at the contact portion with the lift pins increases as the test object increases in weight. . This local stress concentration of the object to be inspected including the glass substrate is not desirable because it gives a large distortion force to the object to be inspected.

  Therefore, an adsorption surface is constituted by a large number of fixing holding members arranged in parallel with a space between each other, and a large number of belt-like elevating members arranged so as to be movable up and down between the respective fixing members. It has been proposed to lower the elevating member with respect to the fixed holding member during delivery of the object to be inspected to a surface (see, for example, Patent Document 2).

  According to the device described in Patent Document 2, the elevating member constitutes a flat suction surface in cooperation with the fixed holding member at the raised position. When transferring the object to be inspected between the suction surface and the robot arm, the robot arm can be inserted into the space formed by the descending of the plurality of belt-shaped lifting members, so that the robot arm and the suction surface interfere with each other. In addition, since the plurality of fixed holding members arranged in parallel to each other support the object to be inspected with a wide band-like area, the object to be inspected is preferably handled without applying strong local stress to the object to be inspected. be able to.

  However, in the apparatus described in Patent Document 2, the suction surface for applying a negative pressure for sucking and holding the object to be inspected is composed of a large number of fixed holding members and lifting members that can be raised and lowered between the fixed holding members. Composed. This complicates the configuration of the support base that forms the suction surface, and requires a mechanism for simultaneously raising and lowering a number of lifting members inside the support base, which complicates the configuration of the support base. However, there is a drawback that the configuration of the adsorption device becomes complicated and expensive.

JP 2002-246450 A JP 2011-29565 A

  Therefore, an object of the present invention is to raise and lower the display panel on the suction surface at the time of delivery without causing a strong stress to the display panel that is an object to be inspected without causing a complicated configuration. It is to provide a suction table that can be used.

  The present invention is a suction table that holds a display panel, and includes a support base having a suction surface that opens a negative pressure opening, a plurality of lift bars arranged across the suction surface, and the suction bar. The plurality of recesses provided in parallel to the suction surface to be accommodated in the support table without protruding from the surface, and the lifting bar is lifted by the side of the support table where the plurality of recesses are opened A support mechanism that supports the lift mechanism; and a lifting device that is provided in association with the support mechanism to move up and down between a raised position that protrudes the lift bar from the recess and a lowered position that is received in the recess. The support mechanism includes a pair of support columns for supporting the lift bar at both ends of the lift bar, a guide pin supported by one of the support bar and the lift bar, and a penetration of the guide pin To allow the above struts and And a slot provided in the other of said elevation bar.

  In the suction table according to the present invention, the recess for accommodating the elevating bar in the support base is formed across the suction surface of the support base. The elevating bar that can be accommodated in the recess is moved up and down between a retracted position accommodated in the recess and a protruding position protruding from the suction surface by the support mechanism provided on a side portion of the support base. To do. Therefore, it is not necessary to form the support base as an assembly of a large number of fixed members and movable members as in the prior art, and the display panel is provided with a plurality of lift bars for delivery of the display panel to the suction table. Therefore, even if the display panel is large, it is possible to prevent a strong stress from acting locally on the display panel without complicating the structure of the suction table. be able to.

  At least one of the pair of slots or the pair of slots provided at both ends of the pair of support bars or the lift bar can be an elongated slot extending along the longitudinal direction of the lift bar. Since the elongate slot allows the elevating bar to be inclined in the longitudinal direction, it is possible to compensate for a shift in the elevating operation at both ends of the elevating bar.

  The slot can be provided in the lift bar, and the slot can penetrate the lift bar in the thickness direction and extend along the longitudinal direction of the lift bar.

  The support mechanism may be provided with a spring member that applies a tension toward the outer side in the longitudinal direction of the lifting bar corresponding to the guide pin. Due to the tension of the spring member, the bending of the lifting bar can be suppressed.

  The lifting bar is provided with a corresponding locking pin parallel to the guide pin in the vicinity of the end located inward of the position where the slot of the lifting bar is provided, and the guide pin and the same are provided as the spring member. A tension coil spring having both ends locked to the corresponding locking pin can be used.

  An impact mitigation mechanism for mitigating an impact acting on the lifting bar can be provided in the support mechanism. For example, when the display panel is transferred to or from the robot arm by this impact mitigation mechanism, it is not necessary to significantly reduce the operation of the robot arm as in the conventional case in order to avoid an impact acting on the display panel. As a result, the slow movement of the robot arm can be eliminated, and the tact time can be reduced.

  The impact mitigating mechanism is disposed between a support column supported by the support base and having a guide groove formed at a top portion for receiving the elevating bar so that the elevating bar can be guided in a vertical direction, and a bottom portion of the guide groove and the elevating bar. And a compression coil spring.

  The elevating bar may be provided with an adjusting screw for adjusting the amount of compression of the coil spring in contact with the end of the compression coil spring. By adjusting the amount of compression by the adjusting screw, the spring force of the compression coil spring is appropriately adjusted so that the displacement amount of the compression coil spring becomes substantially constant in accordance with the change in the size, that is, the weight of the display panel to be handled. can do.

  Each strut can be provided with a height adjusting mechanism that enables adjustment of the lengthwise dimension of the strut. Each height adjustment mechanism provided in each column enables adjustment of the inclination and height position of the lift bar for each lift bar.

  The support mechanism may be provided with a pair of beam members arranged along the support table on both sides of the support table. The pair of beam members are supported by the support base so as to be movable in the vertical direction, and can be moved in the vertical direction by the operation of the lifting device. In this case, each beam member can be supported by the corresponding end portion of the lifting bar via the support column.

  In addition, the height adjusting mechanism for adjusting the height position of the column is provided between the beam member and each column.

  Each lift bar can be formed with a shoulder that abuts against the edge of the display panel on the lift bar to prevent the display panel from falling off. By the stopper function of the shoulder portion, it is possible to reliably prevent the display panel from being unexpectedly detached from the lift bar.

  Further, in relation to the shoulder, on the upper surface of the lifting bar, in the vicinity of the shoulder, the interference between the edge of the subject and the upper surface due to the inclination of the subject on the lifting bar is prevented. An escape groove can be provided. Thereby, even when the test object is inclined with respect to the lift bar when the test object is placed on or removed from the lift bar, the edge of the test object and the lift bar Since contact with the upper surface can be prevented, damage to the object to be inspected due to this contact can be prevented.

  According to the present invention, it is not necessary to form a support base as an assembly of a large number of fixed members and movable members as in the prior art, and the support base has an integrated structure having the recess for accommodating the lift bar. The lifting bar can be lifted and lowered by the lifting device provided on the side of the support base. Therefore, a suction table that can handle the display panel without causing a strong stress locally even on a large display panel without complicating the structure of the suction table. It can be provided at low cost.

It is a perspective view which shows the suction table which concerns on this invention with a conveyance robot. It is a top view of the adsorption | suction table shown in FIG. It is a side view of the suction table shown in FIG. FIG. 4 is a sectional view taken along line IV-IV shown in FIG. 3. FIG. 5 is a sectional view taken along line VV shown in FIG. 3. FIG. 4 is a sectional view taken along line VI-VI shown in FIG. 3. It is drawing which expands and shows the part enclosed with the round mark shown by the code | symbol A in FIG. It is a front view of the height adjustment mechanism of the support | pillar seen in the arrow direction shown by the code | symbol B shown by FIG. It is a front view of the adsorption | suction table shown in FIG. 1, (a) shows the state which has a raising / lowering bar in a raise position, (b) shows the state which has a raising / lowering bar in a lowered position. It is a perspective view which fractures | ruptures and shows other embodiment which concerns on this invention. It is a perspective view which shows other embodiment which concerns on this invention.

  As shown in FIG. 1, the suction table 10 according to the present invention is used by being incorporated in a prober (not shown) for inspecting a display plate 12 such as a liquid crystal panel or an organic light emitting panel. FIG. 1 shows an example in which the inspection object 12 is delivered to and from the transfer robot 14.

  As is well known in the art, the transfer robot 14 is coaxial with a movable base 18 that is movable on the base 16 toward and away from the suction table 10 and a column 20 installed on the movable base. And a shaft member 22 that rotates around an axis and that expands and contracts with respect to the column 20 along the axis. As is well known in the art, a fork-like robot arm 24 for mounting the object 12 to be inspected is fixed to the shaft member 22 capable of rotating and extending / contracting.

  When the transfer robot 14 receives, for example, a display plate accommodated in the cassette from a cassette (not shown), that is, the inspection object 12 on the robot arm 24, the robot arm 24 is placed on the suction table 10 with the shaft member 22 extended. The movable base 18 is actuated so as to move in the direction. After that, when the shaft member 22 is contracted and the inspection object 12 is moved to the suction table 10, the movable base 18 is operated so that the robot arm 24 is separated from the suction table 10 in this contracted state.

  When the electrical or visual inspection of the object 12 to be inspected on the suction table 10 is completed, the transport robot 14 causes the robot arm 24 to be inspected 12 on the suction table 10 with the shaft member 22 contracted. The movable base 18 is operated toward the suction table 10 so as to be inserted under the suction table 10. After that, when the test object 12 on the suction table 10 is moved onto the robot arm 24 by extending the shaft member 22, the transfer robot 14 moves the robot arm 24 away from the suction table 10 in this extended state. Thus, the movable table 18 is operated. By the operation of the transfer robot 14, the inspection object 12 is moved from the suction table 10 to the cassette via the transfer robot 14.

  The suction table 10 that delivers the transfer robot 14 to and from the transfer robot 14 includes a support base 26 having a suction surface 26a. In the example shown in FIG. 1, the support table 26 of the suction table 10 is placed on a well-known XYZθ stage 28. Therefore, the support base 26 can rotate around the Z axis, which is a vertical axis, as in the prior art, and can move along the X axis and the Y axis on the XY plane perpendicular to the Z axis.

  The suction table 10 holds the object 12 to be inspected from the transport robot 14 on the suction surface 26 a of the support base 26. In the example shown in FIGS. 1 and 2, the suction surface 26a has a rectangular shape having a long side and a short side on the XY plane. As clearly shown in FIG. 2, the suction surface 26 a has a plurality of well-known narrow grooves 30 a that extend along the long side and open at both ends of the support base 26. In addition, a negative pressure groove 30b that forms a rectangle on the suction surface 26a is formed.

  As is well known in the art, the negative pressure groove 30b receives a negative pressure from a negative pressure source (not shown) for holding the object 12 to be inspected when the object 12 is held on the suction surface 26a. be introduced. The narrow groove 30a is an antistatic groove. The narrow groove 30a guides air between the test object 12 and the suction surface 26a, as is well known in the art, when the test object 12 is separated from the suction surface 26a. The air flow generated between them is weakened, thereby suppressing the generation of static electricity introduced into the device under test 12 by this air flow.

  Further, as shown in FIG. 2, the suction surface 26a is formed with a plurality of recesses 32 extending linearly along its long side. Each recess 32 reaches both sides of the support base 26 and opens on both sides, as clearly shown in FIG. Corresponding to each recess 32, an elevating bar 34 that crosses the suction surface 26a in the long side direction is provided. The recess 32 has a width dimension sufficient to accommodate the corresponding lifting bar 34, and has a depth dimension in which the upper surface of the accommodated lifting bar 34 coincides with the suction surface 26a.

  As shown in FIGS. 2 and 3, the support mechanism 36 and the lifting device 38 of the lifting bar 34 are respectively disposed on both sides of the support base 26. As shown in FIGS. 2 and 3, the support mechanism 36 includes a beam member 40 disposed substantially horizontally along the support table on the side of the support table 26, and the beam member along the Z axis. And a plurality of guide devices 42 (see FIG. 3) for guiding in the vertical direction.

  As clearly shown in FIG. 4, each guide device 42 is attached to the mounting plate 44 and fixed to the mounting plate 44 so as to extend downward from the supporting table 26. A guide rail 46 extending in the direction and a slide member 48 fixed to the beam member 40 and guided in the vertical direction by the guide rail 46 are provided. At both ends of the guide rail 46, stoppers 46a and 46a are provided that abut against the slide member 48 and restrict the movement range thereof.

  Accordingly, the pair of beam members 40 arranged on both sides of the support table 26 are held by the support table 26 so as to be movable in the vertical direction between the stoppers 46a and 46a on both sides of the support table 26 by the guide devices 42. ing.

  The elevating device 38 is provided on both sides of the support base 26 so as to elevate and lower the pair of beam members 40 between the stoppers 46a and 46a. In the example shown in FIGS. 3 and 5, the elevating device 38 is a fluid cylinder device 38 that includes a cylinder main body 38 a fixed to the support base 26 via a mounting plate 50, and a piston rod 38 b protruding from the cylinder main body. Become. The cylinder device 38 is operated by air pressure or hydraulic pressure. The cylinder device 38 is arranged with its axis line along the vertical direction, and the tip of the piston rod 38 b is fixed to a coupling member 52 fixed to the beam member 40.

  Therefore, by synchronously operating the pair of fluid cylinder devices 38 disposed on both sides of the support base 26, the pair of beam members 40 disposed along the support base on both sides of the support base 26 are synchronized. You can go up and down.

  As shown in FIG. 3, the support mechanism 36 further includes a column 54 that couples each lifting bar 34 to the corresponding beam member 40. As shown in FIG. 6 and FIG. 7, an impact mitigation mechanism 56 is provided at the upper end of each column 54, and the end of each lifting bar 34 corresponds to the corresponding column 54 via each impact mitigation mechanism 56. It is elastically connected to the upper end of the.

  Each impact mitigating mechanism 56 is formed across the beam member 40 by opening the upper end of the column 54 and receiving the corresponding end of the beam member 40 with play, and the end of the beam member is substantially horizontal. , A guide pin 62 penetrating through the slot and supported at both ends by the vertical wall 58a of the recess 58, and the end of the beam member 40 and the bottom wall 58b of the recess 58. A compression coil spring 64.

  The lower end of the compression coil spring 64 is received in a hole 66 provided in the bottom wall 58 b of the recess 58, and the upper end of the compression coil spring 64 abuts against a set screw member 68 with a slide. The set screw member 68 is screwed into the beam member 40 from above the beam member at the end of the beam member 40, and the lower end protrudes from the lower surface of the beam member 40. The compression coil spring 64 is positioned between the beam member 40 and the bottom wall 58b by abutting against the lower end of the set screw member 68 with a slide. The slot 60 extends in the vertical (Z-axis) direction so as to allow the beam member 40 to move in the vertical direction accompanying the compression deformation of the compression coil spring 64. Accordingly, each end portion of the beam member 40 is elastically supported by the column 54 against an external force acting in the direction of gravity by the spring force of the compression coil spring 64.

  Since the distance between the elevating bar 34 and the bottom wall 58b of the recess 58 is regulated by the interference between the slot 60 and the guide pin 62 received in the slot, the compression coil is rotated by the rotation operation from the upper end of the set screw member 68. The spring 64 can be compressed, whereby the spring force of the compression coil spring 64 can be adjusted. As a result, the set screw member 68 functions as an adjustment screw that adjusts the compression amount of the compression coil spring 64.

  Further, as shown in FIG. 6, when the test object 12 is placed on the upper surface 34 a of the lift bar 34, the test object 12 comes into contact with the edge of the test object at the end of each lift bar 34. A shoulder portion 34b that prevents the lift bar 34 from protruding from the end portion is formed. Further, in an area close to the shoulder portion 34b of the upper surface 34a of the lift bar 34, the edge of the test object 12 abuts on the upper surface 34a of the lift bar 34 due to the inclination of the test object 12 on the lift bar 34. A concave relief groove 70 is formed to prevent this.

  Each column 54 is supported by the corresponding beam member 40 via a height adjustment mechanism 72 provided in the lower part thereof. As shown in FIGS. 6 and 8, each height adjustment mechanism 72 releases the anchor member 76 fixed to the lower portion of each column 54 with a fixing screw 74 and the support base to the corresponding beam member 40. A fastener 78 which can be coupled is provided, and a set screw 80 with a slot for adjusting the height position of the anchor member 76 with respect to the beam member 40 in a state where the fastener 78 is loosened.

  The anchor member 76 is formed with a pair of slots 82 that pass through the anchor member 76 toward the beam member 40 to allow the fastener 78 to be inserted. The slot 82 extends the anchor member 76 in the vertical direction to receive the corresponding fastener 78 in the vertical direction with play, as clearly shown in FIG. The fastener 78 penetrating each slot 82 is formed by a bolt member whose tip is screwed into a screw hole 84 formed in the beam member 40. Therefore, in the state where the bolt member 78 is loosened, the height position of the anchor member 76 and the column 54 whose lower end is fixed to the support base can be adjusted within the range of the vertical dimension of the slot 82.

  In order to easily adjust the height position of the anchor member 76, that is, the height position of the column 54, the set screw 80 is screwed so that the upper end can protrude from the screw hole 86 a of the screw base 86 fixed to the beam member 40. To do. The screw hole 86 a penetrates the screw base 86 in the vertical direction, and the upper end of the set screw 80 protruding from the screw hole comes into contact with the bottom surface of the anchor member 76.

  Therefore, by rotating the set screw 80 with the bolt 78 loosened as described above, the anchor member 76 can be pushed up by the upper end of the set screw, for example, and the height position of the column 54 is thereby adjusted to the slot. The length can be adjusted within a range of 82. After the height position is adjusted by the set screw 80, the anchor member 76 is fastened to the beam member 40 with the bolt 78, whereby the height adjustment operation of each column 54 is completed.

  By adjusting the height position of the column 54, the inclination of the beam member 40 supported by the end of each column 54 and the variation in the height position can be corrected, and the upper surface 34a of the beam member 40 is fixed to the support base 26. It can be made to coincide with a virtual plane parallel to the suction surface 26a.

  The anchor member 76 described above can be formed integrally with the column 54. Further, the height adjusting mechanism 72 can be dispensed with.

  As shown in FIG. 9 (a), the pair of fluid cylinder devices 38 includes a lift position in which all the lifting bars 34 protrude from the recesses 32 of the suction surface 26a of the support base 26 and are located above the suction surface 26a. As shown in FIG. 9 (b), the elevating bars 34 are accommodated in the recesses 32, and the elevating bars 34 are synchronized so that all the elevating bars 34 are operated synchronously with the lowered position where the upper surface 34a is below the adsorption surface 26a. Actuated.

  As described above, the inspection object 12 on the robot arm 24 of the transfer robot 14 is moved onto the lift bar 34 at the raised position shown in FIG. At this time, an impact corresponding to the weight of the object to be inspected 12 acts on the lift bar 34 as the robot arm 24 descends due to the contraction operation of the shaft member 22 of the transport robot 14. However, when the device under test 12 is moved to the lift bar 34, the device under test 12 does not receive an impact due to the elastic support action of the shock relaxation mechanism 56 provided between each lift bar 34 and the column 54. .

  Further, since the impact mitigating mechanism 56 is provided, it is possible to prevent the impact acting on the inspected object 12 without decelerating the lowering operation of the robot arm 24 as in the prior art. The 24 slow movements are unnecessary, and the tact time can be shortened.

  As described above, the impact mitigation mechanism 56 rotates the set screw member 68 according to the increase or decrease of the weight of the object 12 to be handled, regardless of the increase or decrease of the weight of the object 12 to be inspected. The amount of deformation of the compression coil spring 64 can be kept substantially constant. Therefore, the impact can be effectively absorbed by the impact mitigating mechanism 56 by rotating the set screw member 68 according to the weight of the device under test 12.

  When the test object 12 moves from the robot arm 24 to each lift bar 34, even if the test object is inclined with respect to the longitudinal direction of the lift bar 34, both ends of each lift bar 34 have shoulders 34b. Since the escape groove 70 is formed in the vicinity, the edge inclined downward of the inspection object 12 does not contact the upper surface 34a of the elevating bar 34. Thereby, the test object 12 is moved to the lift bar without being damaged by the contact with the lift bar 34, and the test object 12 transferred onto the lift bar 34 is moved by the shoulder 34 b of the lift bar 34. The drop-off from the lift bar 34 is reliably prevented.

  When the object to be inspected 12 is moved onto the lift bar 34 and the robot arm 24 is retracted from the support base 26, the pair of fluid cylinder devices 38 are contracted synchronously. It is held at the lowered position shown in b).

  When the elevating bar 34 moves to the lowered position, as described above, the device under test 12 is securely held by the support base 26 by the negative pressure acting on the negative pressure groove 30b, and the device under test 12 undergoes a predetermined test.

  When the inspection of the inspection object 12 is completed, the lift bar 34 is moved toward the ascending position shown in FIG. 9A by the operation of the pair of fluid cylinder devices 38. With this fluid cylinder device 38, when the object 12 to be inspected on the support base 26 is about to float from the suction surface 26a of the support base 26 by the elevating bar 34, the air guide action of the narrow groove 30a as described above causes the object to be inspected. Generation of static electricity in the inspection object 12 is suppressed.

  The inspected object 12 on the lift bar 34 in the raised position is extended by the shaft member 22 in a state where the robot arm 24 of the transfer robot 14 is inserted between the lift bars 34. And then returned to the cassette by the transfer robot 14.

  According to the suction table 10 of the present invention, the recess 32 for accommodating the elevating bar 34 is formed in the support base 26, and the elevating bar 34 is moved up and down by the elevating device 38 provided on the side of the support base 26. be able to. Therefore, the suction table 10 that can handle the display panel without causing a strong stress to be exerted on the display panel even if it is a large display panel 12 without complicating the structure of the suction table 10. It can be provided at a relatively low cost.

  As described above, the example in which the recess 32 is formed in parallel with the long side of the suction surface 26a has been shown, but instead, the recess 32 extends angularly with the long side of the suction surface 26a. A plurality of recesses 32 can be formed in parallel.

  Further, the depth dimension of the recess 32 can be made larger than the height dimension of the elevating bar 34, and the upper surface of the elevating bar can be set below the suction surface 26a at the lowered position of the elevating bar 34.

  As the elevating device 38, various elevating devices such as an electric motor, a rack and pinion, or a linear motor can be appropriately used in place of the above-described fluid cylinder device.

  As shown in FIG. 10, in order to receive the guide pin 62 having a circular cross section supported by the column 54, the slots 60 provided at both ends of the lift bar 34 for receiving the object 12 to be inspected are arranged in the longitudinal direction of the lift bar (X axis). ) In a transversely elongated slot extending in the direction. In this case, the compression coil spring 64 of the impact relaxation mechanism 56 is not provided because it does not function. The elongated slot 60 extending in the lateral direction compensates for the synchronization shift between the pair of lifting devices 38 provided at both ends of the lifting bar 34 by allowing the lifting bar 34 to be inclined.

  Instead of the pair of slots 60 provided at both ends of the elevating bar 34 being elongated in the lateral direction as described above, one of the pair of slots 60 is formed as a slot elongated in the lateral direction, and the other Can be a slot having a circular cross-section to receive the guide pin 62. This also makes it possible to incline the elevating bar 34, so that a synchronization shift between the pair of elevating devices 38 can be compensated.

  As shown in FIG. 11, both ends of the guide pin 62 can be protruded outward of the column 54. Further, locking pins 88 that are parallel to the guide pins 62 in the inner position of the elevating bar 34 rather than the position of the slot 60 that extends in the longitudinal direction of each elevating bar 34 are provided on both sides of the elevating bar 34. A pair of spring members 90 that exert a tensile force between the guide pin 62 and the locking pin 88 to be arranged can be arranged on both sides of the elevating bar 34. In the example shown in FIG. 11, each spring member 90 consists of a tension coil spring.

  A pair of tension coil springs 90 whose both ends are locked to the corresponding guide pin 62 and locking pin 88 apply tension to the elevating bar 34 outward in the longitudinal direction. Due to this tension, the bending deformation of the elevating bar 34 is suppressed. Therefore, when the lifting bar 34 is formed of an aluminum flat bar with relatively low rigidity for weight reduction, the bending of the lifting bar 34 is suppressed by the tension of the tension coil spring 90, and the object to be inspected on the lifting bar is restrained. Deflection can be effectively prevented. When the elevating bar 3 is formed of a rigid and highly rigid CFRP material, the tension coil spring 90 can be dispensed with.

  Further, FIGS. 10 and 11 show an example in which the guide pin 62 is provided on the support 54 and the elongate slot 60 is provided in the elevating bar 34 in the lateral direction for receiving the guide pin 62, but instead of this, the guide pin 62 is provided. Slots 60 which are provided in the lifting bar 34 and which are elongated in the lateral direction can be provided in the support posts 54.

  The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

10 Suction table 12 Inspected object (display panel)
26 support base 26a adsorption surface 32 recess 34 lift bar 36 support mechanism 38 lift device 40 beam member 54 column 56 shock mitigation mechanism 58 column recess 58b recess bottom wall 60 slot 62 guide pin 64 compression coil spring 68 set screw member ( Adjustment screw)
70 Escape Groove 72 Height Adjustment Mechanism 88 Locking Pin 90 Spring Member (Tension Coil Spring)

Claims (5)

A suction table for holding a display panel,
A support base having a suction surface through which the negative pressure opening opens;
A plurality of elevating bars arranged across the adsorption surface;
A plurality of recesses provided parallel to each other on the suction surface to accommodate the lifting bar in the support base without protruding from the suction surface;
A support mechanism for supporting the lifting bar so as to be movable up and down at a side portion of the support base where the plurality of recesses are opened;
An elevating device provided in association with the support mechanism to elevate the elevating bar between a raised position protruding from the recess and a lowered position accommodated in the recess;
The support mechanism should allow a pair of support columns for supporting the lift bar at both ends of the lift bar, a guide pin supported by one of the support bar and the lift bar, and penetration of the guide pin. A suction table comprising: the support column and a slot provided on the other side of the lift bar.   2. The suction table according to claim 1, wherein at least one of a pair of slots respectively provided at both ends of the pair of support columns or the lifting bar is an elongated slot extending along a longitudinal direction of the lifting bar.   The suction table according to claim 2, wherein the slot is provided in the lift bar, extends through the lift bar in the thickness direction and extends in the longitudinal direction of the lift bar.   The suction mechanism according to claim 3, wherein the support mechanism is provided with a spring member that applies a tension toward the outer side in the longitudinal direction of the lift bar corresponding to the guide pin. table.   The elevating bar is provided with a corresponding locking pin parallel to the guide pin in the vicinity of the end portion located inward of the position where the slot of the elevating bar is provided, and the spring member is connected to the guide pin. The suction table according to claim 4, comprising a tension coil spring having both ends locked to the locking pin corresponding to.

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