KR20140031101A - Suction table - Google Patents

Abstract

The present invention provides an adsorption table capable of lifting and lowering a display panel on an adsorption surface when taking and giving the display panel without causing complication in configuration or a locally strong tension to the display panel. The adsorption table is an adsorption table maintaining a display panel, which comprises a support stand maintaining an adsorption surface, in which a negative pressure opening is open; multiple lifting bars arranged to cross the absorption surface; multiple recessions mutually in parallel with the absorption surface to receive the lifting bars without projecting the lifting bars from the adsorption surface within the supporting stand; a supporting device supporting to lift and lower the lifting bars on the side of the supporting stand, in which multiple recessions are open; and an elevation device installed with the supporting device so as to ascend and descend between an ascending position projecting the lifting bars from recessions, and a descending position accommodating the lifting bars in recessions. The supporting device has a pillar for supporting the lifting bar on both sides, a guide pin supported by the pillar, and a slot prepared in a lifting bar to allow passing-through of the guide pin.

Description

Suction table {suction table}

The present invention relates to an adsorption table suitable for holding a display panel such as a liquid crystal display panel or an organic luminescent panel.

A display panel such as a liquid crystal display panel on which an electric circuit is formed on a glass substrate is subjected to electrical inspection using, for example, a prober during the manufacturing process. In this test, a liquid crystal display panel to be inspected is held by using a negative pressure on a suction table which is generally fitted to a prober.

In order to safely and quickly detach the inspected object from the suction table, a plurality of lift pins for lifting the object from the suction surface are provided on the suction table so as to protrude from the suction surface (see, for example, Patent Document 1 ).

The lift pin at the protruding position descends below the attracting surface when the object is received from the conveying robot above the attracting surface. When the subject moves onto the attracting surface in accordance with the descent of the elevating pin, a negative pressure acts on the attracting surface by a negative pressure mechanism fitted to the attracting table. While the subject is being inspected, the subject is reliably held on the suction surface by the negative pressure. After the inspection, the object to be inspected is lifted up from the adsorption surface with the lift of the lift pin. The subject to be lifted from the adsorption surface by the lifting pin is removed from the adsorption table by the carrier robot without being strongly influenced by the static electricity acting between the adsorption surface and the subject.

However, since the contact area between the lift pin and the object to be inspected is small, the local stress that the object undergoes at the contact portion with the lift pin increases with the increase in weight due to the enlargement of the inspection object. The local stress concentration of the object to be inspected including the glass substrate is not desirable because it gives a large force to the object.

Therefore, a plurality of fixed holding members arranged in parallel with each other at a distance from each other, and a plurality of band-shaped lifting members arranged so as to be capable of elevating with respect to the holding members between the holding members, It has been proposed to lower the elevating member with respect to the fixed holding member when the subject is transferred (see, for example, Patent Document 2).

According to the apparatus described in Patent Document 2, the elevating member forms a flat adsorbing surface in a cavity with the fixed holding member at the elevated position. The robot arm can be inserted into the space formed by the descending of the plurality of band-like elevation members when the attracting surface and the robot arm exchange the test subject, so that the robot arm and the attracting surface do not interfere with each other, The object to be inspected can be suitably handled without exerting a strong local stress on the object to be inspected.

However, in the apparatus described in Patent Document 2, the adsorption surface for applying a negative pressure for adsorbing and holding the object to be inspected is composed of a plurality of fixed holding members and a lift member capable of being lifted and lowered between the fixed holding members. As a result, the structure of the supporting table for forming the adsorption surface becomes complicated, and it is necessary to provide a mechanism for simultaneously raising and lowering the plurality of elevating members inside the supporting table, so that the structure of the supporting table becomes complicated, There was a drawback.

Japanese Patent Application Laid-Open No. 2002-246450 Japanese Patent Laid-Open Publication No. 2011-29565

Accordingly, an object of the present invention is to provide an adsorption table capable of lifting and lowering the display panel when the display panel is exchanged without applying a strong local stress to the display panel to be inspected without complicating the structure will be.

A suction table for holding a display panel, comprising: a support having an adsorption surface on which a negative pressure opening is opened; a plurality of lifting bars disposed across the adsorption surface; A plurality of recesses provided in parallel to each other on the attracting surface so as to be able to be accommodated in the support without projecting the elevating bar from the attracting surface; And a lifting device installed in relation to the supporting mechanism so as to be able to move up and down between a lifting position where the lifting bar is projected from the recess and a lowering position where the lifting bar is accommodated in the recess, Wherein the support mechanism comprises a pair of supports for supporting the elevator bar at both ends of the elevator bar, A guide pin supported on the one and, to allow the penetration of the guide pin is provided with the holding and the other side provided with slots of the lifting bar.

In the suction table according to the present invention, the concave portion for accommodating the elevating bar is formed on the supporting base across the adsorption face of the supporting base. The lift bar that can be accommodated in the recess is raised and lowered between a retracted position, which is accommodated in the concave portion, and a protruded position, which protrudes from the attracting surface, by the support mechanism provided on the side of the support. Therefore, it is not necessary to form the support as an aggregate of a plurality of fixing members and movable members as in the prior art, and in order to send / receive the display panel to / from the suction table, So that it is possible to prevent a strong local stress from acting on the display panel even if the display panel is a large display panel without complicating the structure of the suction table.

At least one of the pair of pillars or a pair of slots provided at both ends of the elevating bar may be an elongated slot extending in the longitudinal direction of the elevating bar. Since the slant in the longitudinal direction of the lifting bar is allowed by the elongated slot, it is possible to compensate for the deviation of the lifting and lowering operation at both ends of the lifting bar.

The slot may be provided in the elevating bar, and the slot may extend along the longitudinal direction of the elevating bar while penetrating the elevating bar in its thickness direction.

The support mechanism may be provided with a spring member for imparting a tensile force to the lift bar corresponding to the guide pin in the longitudinal direction of the lift bar. And the warp of the lifting bar can be suppressed by the tension of the spring member.

Wherein a corresponding engaging pin parallel to the guide pin is provided in the vicinity of an end of the lifting bar located inwardly of the position of the slot of the lifting bar, A herring tension spring with both ends tied to the retaining pin can be used.

A shock-absorbing mechanism for relieving the impact acting on the elevating bar can be provided on the supporting mechanism. With this shock-absorbing mechanism, for example, when the display panel is exchanged with the robot arm, it is not necessary to significantly decelerate the operation of the robot arm as before to avoid the impact on the display panel. Therefore, since the gentle movement of the robot arm is not required, it is possible to reduce the takt time.

Wherein the shock absorbing mechanism comprises a strut formed on a top portion of a guide groove which is supported by the support and receives the lift bar so as to guide the lift bar in a vertically guidable manner, and a compression coil spring disposed between the bottom portion of the guide groove and the lift bar Can be configured.

The elevating bar may be provided with an adjusting screw for adjusting the amount of compression of the coil spring by abutting against the end of the compression coil spring. By adjusting the amount of compression by the adjusting screw, the elastic force of the compression coil spring can be appropriately adjusted so that the amount of displacement of the compression coil spring becomes substantially constant in accordance with the size or weight change of the display panel to be handled.

Each pillar can be provided with a height adjusting mechanism for adjusting the lengthwise dimension of the pillar. Each of the height adjustment mechanisms provided on each support allows adjustment of the inclination and height position of the lift bar for each lift bar.

The supporting mechanism may be provided with a pair of beam members disposed on both sides of the supporting base along the supporting base. The pair of beam members are supported by the support frame so as to be movable in the vertical direction, and can be moved in the vertical direction by the operation of the lift device. In this case, each beam member can support the corresponding end of the lifting bar through the struts.

In addition, the height adjusting mechanism for adjusting the position of the pillar height is provided between the beam member and each support.

A shoulder portion that abuts against the rim of the display panel on the lift bar and prevents the display panel from falling off can be formed on each lift bar. By this stopper function of the shoulder portion, it is possible to reliably prevent unauthorized removal of the lift bar of the display panel.

Further, in relation to the shoulder portion, on the upper surface of the lifting bar, a clearance crush portion (for preventing interference between the upper surface and the rim of the test subject due to the inclination of the test subject on the lifting bar close to the shoulder portion (Escape groove) can be provided. This makes it possible to prevent the edge of the inspection object from contacting the upper surface of the elevating bar even when the inspection object is tilted with respect to the elevating bar when the inspection object is placed on the elevating bar or removed on the elevating bar Therefore, it is possible to prevent the object from being damaged by the contact.

According to the present invention, it is not necessary to form a support as an aggregate of a plurality of fixed members and movable members as in the prior art, and the support base can be formed as an integral structure having the recess for accommodating the lift bar, And can be raised and lowered by the elevating device installed on the side of the support. Therefore, even if a large display panel does not cause complication of the structure of the adsorption table, it is possible to provide the adsorption table capable of handling the display panel relatively inexpensively without exerting a strong local stress on the display panel .

1 is a perspective view showing a suction table according to the present invention together with a carrier robot,
Fig. 2 is a plan view of the adsorption table shown in Fig. 1,
3 is a side view of the adsorption table shown in Fig. 1,
Fig. 4 is a sectional view taken along the line IV-IV shown in Fig. 3,
5 is a cross-sectional view taken along the line V-V shown in Fig. 3,
Fig. 6 is a sectional view taken along the line VI-VI shown in Fig. 3,
Fig. 7 is an enlarged view of a portion surrounded by circles denoted by A in Fig. 3,
8 is a front view of the height adjustment mechanism of the strut viewed in the direction of the arrow indicated by B in Fig. 6,
Fig. 9 is a front view of the attraction table shown in Fig. 1, wherein (a) shows a state in which the lifting bar is in the lifted position, (b) shows a state in which the lifting bar is in the lifted position,
FIG. 10 is a perspective view showing a part of another embodiment according to the present invention,
11 is a perspective view showing still another embodiment according to the present invention.

The adsorption table 10 related to the present invention is inserted into a prober (not shown) for inspecting a display panel 12 such as a liquid crystal panel or an organic luminescent panel as shown in Fig. Fig. 1 shows an example in which the subject 12 is exchanged with the carrying robot 14. Fig.

The transfer robot 14 includes a movable base 18 movable on a base 16 in a direction toward and away from the suction table 10 and a post 20 And is provided with a shaft member 22 which rotates about the axis and which extends and operates with respect to the support 20 along the axis. As is well known in the art, the shaft member 22 capable of rotating and expanding and contracting is fixed to a fork-shaped robot arm 24 for raising the test object 12. [

The carrying robot 14 receives the display panel (the display panel), that is, the subject 12, on the robot arm 24 from a cassette, not shown, for example, The movable arm 18 is operated to move the robot arm 24 toward the top of the suction table 10. The robot arm 24 is moved away from the suction table 10 in the contracted state when the shaft member 22 is contracted and the subject 12 is moved to the suction table 10, Lt; / RTI >

When the electric or visual inspection of the inspection object 12 on the suction table 10 is completed, the transport robot 14 moves the robot arm 24 to the suction tape 10 in a state in which the shaft member 22 is contracted, The movable table 18 is operated toward the suction table 10 so as to be inserted under the object 12 on the table. When the subject 12 on the suction table 10 is moved onto the robot arm 24 by extension of the shaft member 22, the carrying robot 14 moves the robot arm 24 in the extended state, The movable base 18 is operated to move away from the table 10. The subject 12 is moved from the suction table 10 to the cassette through the carrying robot 14 by the operation of the carrying robot 14. [

The suction table 10 for transferring the subject 12 between the transfer robot 14 and the suction table 10 has a support table 26 having a suction surface 26a. The support table 26 of the suction table 10 is placed on a well-known XYZ? Stage 28 in the example shown in Fig. Thus, the support table 26 is rotatable around a vertical Z axis, as in the prior art, and is movable along the X and Y axes, respectively, on an XY plane perpendicular to the Z axis.

The suction table 10 holds the test object 12 in the transfer robot 14 on the attracting surface 26a of the support table 26. [ The adsorption surface 26a has a rectangular shape with long sides and short sides on the XY plane in the example shown in Figs. 2, a plurality of conventionally well-known narrow grooves 30a extending along the long side of the adsorption surface 26a and both ends of which are open on both sides of the support table 26 are formed And a negative pressure groove 30b having a rectangular shape is formed on the adsorption surface 26a.

In the negative pressure groove 30b, a negative pressure for adsorbing the test object is introduced from a negative pressure source (not shown) when the test target 12 is held on the attracting surface 26a, as is well known in the art. The narrow groove 30a is an antistatic groove. The narrow groove 30a guides the air between the subject 12 and the attracting surface 26a when the subject 12 is dropped from the attracting surface 26a so that the proton 12 and 26a ), Thereby suppressing the generation of static electricity introduced into the subject 12 along the airflow.

2, a plurality of concave portions 32 extending in a straight line form along the longer side thereof are formed on the attracting surface 26a. Each recess 32 reaches both sides of the support 26, as is clearly shown in Fig. 3, and opens on both sides thereof. Corresponding to the recesses 32, there is provided a lifting bar 34 which traverses the suction surface 26a in the longitudinal direction. The concave portion 32 has a width dimension sufficient to accommodate the corresponding lifting bar 34 and has a depth dimension such that the upper surface of the lifting bar 34 accommodated therein coincides with the attracting surface 26a.

As shown in Figs. 2 and 3, a supporting mechanism 36 and an elevating device 38 of the elevating bar 34 are disposed on both sides of the supporting table 26, respectively. 2 and 3, the support mechanism 36 includes a beam member 40 disposed substantially horizontally along its support on the side of the support member 26, and a beam member 40 for guiding the beam member in the vertical direction along the Z- And a plurality of guide devices 42 (see Fig. 3).

Each guide device 42 includes a mounting plate 44 fixed to its support so as to extend downwardly from the support plate 26 as clearly shown in Fig. 4, A guide rail 46 and a slide member 48 fixed to the beam member 40 and guided in a vertical direction by the guide rail 46. Both ends of the guide rail 46 are provided with stoppers 46a and 46a which come in contact with the slide member 48 and restrain the movement range thereof.

A pair of beam members 40 disposed on both sides of the support table 26 are movable in the vertical direction between the two stoppers 46a and 46a on both sides of the support table 26 by the respective guide devices 42 As shown in Fig.

The elevating device 38 is provided on both sides of the support table 26 so as to raise and lower the pair of beam members 40 between the both stoppers 46a and 46a. 3 and 5, the lifting device 38 includes a cylinder body 38a fixed to a support base 26 through a mounting plate 50 and a piston rod 38b protruding from the cylinder body And a fluid cylinder device (38). The cylinder device 38 is operated by air pressure or hydraulic pressure. The cylinder device 38 is disposed along the vertical direction of its axis and the tip of the piston rod 38b is fixed to the engaging member 52 fixed to the beam member 40. [

Therefore, a pair of beam members 40 arranged along the support at both sides of the support 26 can be synchronously moved by synchronously operating a pair of fluid cylinder devices 38 disposed on both sides of the support 26, .

3, the supporting mechanism 36 further includes a strut 54 which engages with the beam member 40 corresponding to each of the elevating bars 34. As shown in Fig. As shown in FIGS. 6 and 7, the upper end of each strut 54 is provided with a shock absorbing mechanism 56. The end of each of the elevating bars 34 is connected to the corresponding strut 54 As shown in Fig.

Each of the shock absorbing mechanisms 56 includes a concave portion 58 which is opened at the upper end of the support 54 to receive the corresponding end portion of the elevating bar 34 loosely and is formed across the elevating bar 34, A guide pin 62 extending through the slot and supported at both ends by the vertical wall 58a of the concave portion 58, And a compression coil spring 64 disposed between the end of the recess 34 and the bottom wall 58b of the recess 58.

The lower end of the compression coil spring 64 is received in the hole 66 provided in the bottom wall 58b of the recess 58 and the upper end of the compression coil spring 64 is fixed to the fixing screw member 68 It touches. The fixing screw member 68 is screwed to the elevating bar 34 at the upper end of the elevating bar 34 and at the lower end of the elevating bar 34 at the end of the elevating bar 34. The compression coil spring 64 is positioned between the lift bar 34 and the bottom wall 58b by abutting against the lower end of the fixing screw member 68 of the groove head. The slot 60 also extends in the vertical direction (Z-axis direction) so as to allow the vertical movement of the lifting bar 34 accompanied by compressive deformation of the compression coil spring 64. Therefore, each end of the lifting bar 34 is elastically supported by the strut 54 against an external force acting in the direction of gravity by the spring force of the compression coil spring 64.

The distance between the lift bar 34 and the bottom wall 58b of the concave portion 58 is restricted by the interference between the slot 60 and the guide pin 62 received in the slot, The compression coil spring 64 can be compressed by the rotation operation at the upper end of the compression coil spring 64 so that the spring force of the compression coil spring 64 can be adjusted. As a result, the fixing screw member 68 functions as an adjusting screw for adjusting the amount of compression of the compression coil spring 64.

6, when the test object 12 is placed on the upper surface of the lifting bar 34a, the test object 12 is brought into contact with the edge of the test subject, And a shoulder portion 34b is formed to prevent it from protruding from the end portion of the lifting bar 34. [ The rim of the test object 12 is inclined by the inclination of the test object 12 on the elevating bar 34 in the vicinity of the shoulder portion 34b of the upper surface 34a of the elevating bar 34 A clearance groove 70 is formed in a concave shape to prevent the upper surface 34a from coming into contact with the upper surface 34a.

Each strut 54 is supported by a corresponding beam member 40 through a height adjusting mechanism 72 provided thereunder. Each height adjusting mechanism 72 includes an anchor member 76 fixed to a lower portion of each strut 54 by a fixing screw 74 as shown in Figs. 6 and 8, A fastener 78 for releasably engaging the member 40 and a threaded head for adjusting the height of the anchor member 76 relative to the beam member 40 with the fastener 78 loosened And a fixing screw (80).

The anchor member 76 is formed with a pair of slots 82 which penetrate the anchor member 76 toward the beam member 40 in order to permit the insertion of the fastener 78. The slot 82 extends upwardly and downwardly so that the corresponding fastener 78 is loosely received in the vertical direction as clearly shown in Fig. The fastener 78 passing through each slot 82 is formed by a bolt member whose tip end is screwed to the screw hole 84 formed in the beam member 40. Therefore, in a state in which the bolt member 78 is loosened, the height position of the anchors 76 and the pillars 54 to which the lower ends thereof are fixed can be adjusted in the range of the length of the slots 82 in the vertical direction.

The fixing screws 80 are formed in the screw hole 86a of the screw base 86 fixed to the beam member 40 so as to facilitate adjustment of the height position of the anchor member 76, In a projecting manner. The threaded hole 86a penetrates the screw base 86 vertically and the upper end of the fixing screw 80 protruding from the screw hole abuts the bottom face of the anchor member 76. [

Accordingly, as the bolt 78 is loosened, the anchor member 76 can be pushed up from the upper end of the fixing screw 80 by rotating the fixing screw 80, Can be adjusted in the range of the length dimension of the slot 82. [ After the adjustment of the height position by the fixing screw 80, the anchoring member 76 is tightly fastened to the beam member 40 with the bolts 78, and the height adjustment work of each support 54 ends.

It is possible to correct the unevenness of the inclination or the height position of the elevation bar 34 supported at the ends of the support pillars 54 by adjusting the height position of the pillars 54 and to adjust the height of the upper surface 34a of the elevation bar 34 Can be made to coincide with an imaginary plane parallel to the attracting surface (26a) of the support table (26).

The anchor member 76 may be integrally formed with the support 54. [ Further, the height adjusting mechanism 72 may not be required.

9A, all the lifting and lowering bars 34 protrude from the concave portion 32 of the attracting surface 26a of the support table 26, as shown in Fig. 9 (a) The lifting bar 34 is received in the concave portion 32 and the upper surface 34a thereof is positioned below the attracting surface 26a as shown in Fig. 9 (b) Synchronized so as to synchronously operate all the lifting bars 34 between the lifting position and the lifting position.

The object 12 on the robot arm 24 of the carrying robot 14 is transferred onto the lifting bar 34 at the elevated position shown in Fig. At this time, a shock due to the weight of the test object 12 is caused to accompany the descending operation of the robot arm 24 by the shrinking operation of the shaft member 22 of the conveying robot 14, acting on the lifting bar 34. However, when the test object 12 is moved to the elevating bar 34, the test object 12 is moved by the elastic supporting action of the impact reducing mechanism 56 provided between the elevating bar 34 and the supporting column 54 There is no shock.

In addition, since the shock absorbing mechanism 56 is provided, the robot arm 24 can be prevented from impacting on the subject 12 without decelerating the downward movement of the robot arm 24 as in the prior art. It is possible to shorten the tact time without requiring a gentle movement of the tact time.

The shock absorbing mechanism 56 is not limited to the increase or decrease of the weight of the subject 12 in accordance with the rotation of the fixing screw member 68 due to the increase or decrease of the weight of the subject 12 to be handled, The amount of deformation of the compression coil spring 64 due to the weight of the compression coil spring 12 can be kept substantially constant. Therefore, the impact can be effectively absorbed by the shock-absorbing mechanism 56 by the rotation operation of the fixing screw member 68 depending on the weight of the object 12 to be inspected.

Even when the subject 12 moves from the robot arm 24 to each of the elevation bars 34 regardless of the inclination of the subject in the longitudinal direction of the elevation bar 34, Since the clearance grooved portion 70 is formed close to the shoulder portion 34b, the edge inclined downwardly of the test object 12 does not come into contact with the upper surface 34a of the lifting bar 34. [ The object 12 to be inspected is moved to the elevation bar 34 without being damaged by the contact with the elevation bar 34 and the object 12 to be moved onto the elevation bar 34 is moved to the shoulder portion of the elevation bar 34 34b are reliably prevented from falling off from the lifting bar 34. [

When the test object 12 is transferred onto the lifting bar 34 and the robot arm 24 is retracted on the support table 26, the pair of fluid cylinder devices 38 are synchronously operated to contract, The lifting bar 34 is held at the lowered position shown in Fig. 9 (b).

When the lifting bar 34 moves to the lowered position, the subject 12 is surely held on the supporting table 26 by the negative pressure acting on the negative pressure groove 30b as described above, I get a test.

When the inspection of the inspection object 12 is completed, the lift bar 34 moves toward the raised position shown in Fig. 9 (a) by the operation of the pair of fluid cylinder devices 38. [ When the subject 12 on the support table 26 tries to rise from the attracting surface 26a of the support table 26 by the lifting bar 34 in conjunction with the fluid cylinder device 38, The generation of the static electricity in the subject 12 is suppressed by the air guiding action of the air passage 30a.

The inspected object 12 on the ascending bar 34 at the elevated position is moved in a state in which the shaft member 22 is extended in the state in which the robot arm 24 of the conveying robot 14 is inserted between the elevating bars 34 And is then returned to the cassette by the transport robot 14. The robot arm 24 is then returned to the cassette.

According to the suction table 10 related to the present invention, the concave portion 32 for receiving the lift bar 34 is formed in the support base 26 and the lift bar 34 is mounted on the side of the support base 26 And can be raised and lowered to the apparatus 38. Therefore, the structure of the suction table 10 is not complicated, and even if the large display panel 12 is provided with the suction table 10 capable of handling the display panel without exerting a locally strong stress on the display panel And can be provided at relatively low cost.

The concave portion 32 is formed at an angle to the long side of the adsorption surface 26a and the elongation of the adsorption surface 26a is not limited to the elongation of the adsorption surface 26a, A plurality of concave portions 32 can be formed in parallel.

It is also possible to set the depth dimension of the recess 32 to be larger than the height dimension of the lifting bar 34 so that the upper surface of the lifting bar 34 can be set below the lifting bar 26 at the lowering position of the lifting bar 34. [

The elevating device 38 can be suitably used with various types of elevating devices such as an electric motor and a rack pinion or a linear motor in place of the fluid cylinder device.

The slot 60 provided at both ends of the lift bar 34 receiving the test object 12 to receive the guide pin 62 having a circular cross section supported by the column 54 as shown in Fig. (X-axis) direction. In this case, the compression coil spring 64 of the shock-absorbing mechanism 56 does not function and is not provided. The elongated slot 60 extending in the transverse direction permits the inclination of the elevating bar 34 to allow the synchronization of the pair of elevating devices 38 provided at both ends of the elevating bar 34 Compensate.

A pair of slots 60 provided at both ends of the lifting bar 34 may be formed in the transversely elongated slot extending in the transverse direction, And the other can be a slot having a circular cross-sectional surface for receiving the guide pin 62. [0050] This makes it possible to compensate for the deviation of the synchronization between the pair of elevating devices 38 since the elevating bar 34 can be inclined.

Both ends of the guide pin 62 can be projected to the outside of the support 54 as shown in Fig. The engaging pin 88 parallel to the guide pin 62 in the vicinity of the inner position of the lifting bar 34 is positioned above the position of the slot 60 extending in the longitudinal direction of each lifting bar 34, And a pair of spring members 90 having tensile force between the corresponding guide pins 62 and the engaging pins 88 can be disposed on both sides of the lifting bar 34. [ In the example shown in Fig. 11, each spring member 90 is formed of a tension coil spring.

A pair of tension coil springs 90 having both ends thereof engaged with the corresponding guide pin 62 and the engaging pin 88 impart tension to the lifting bar 34 in the longitudinal direction thereof. The warp deformation of the lifting bar 34 is suppressed by this tension. Therefore, when the lifting bar 34 is made of a flat rod of aluminum having a relatively low rigidity for reducing the weight, the buckling of the lifting bar 34 is suppressed by the tension of the tension coil spring 90, It is possible to effectively prevent the warping of the carcass. When the lifting bar 3 is formed of a high rigidity CFRP material having high rigidity, the tension coil spring 90 may not be required.

10 and 11 show examples in which the guide pin 62 is provided on the support 54 and the slot 60 in the transverse direction receiving the guide pin 62 is installed on the lifting bar 34 The guide pin 62 may be provided in the elevating bar 34 and the slot 54 in the transverse direction may be provided in the support 54 instead.

The present invention is not limited to the above-described embodiments, and various modifications may be made without departing from the spirit of the present invention.

10; Absorption table
12; The object (display panel)
26; support fixture
26a; Adsorption surface
32; Concave portion
34; Lift bar
36; Support mechanism
38; Lifting device
40; Beam member
54; landlord
56; Shock-absorbing mechanism
58; Recess
58b; The bottom wall (bottom wall)
60; slot
62; guide pin
64; Compression coil spring
68; Fixing screw member (adjusting screw)
70; Clearance groove
72; Height adjustment mechanism
88; Hook pin
90; Spring member (tension coil spring)

Claims (5)

An adsorption table for holding a display panel,
A support having an adsorption surface on which a negative pressure opening is opened,
A plurality of elevating bars disposed across the adsorption surface,
A plurality of concave portions provided on the attracting surface in parallel with each other so as to be accommodated in the support frame without protruding from the attracting surface;
A supporting mechanism for vertically supporting the elevating bar on a side portion of the support base from which the plurality of recesses are opened;
And a lift device provided with respect to the support mechanism so as to raise and lower the lift bar between a raised position where the lift bar protrudes from the concave portion and a lowered position that is accommodated in the concave portion,
The support mechanism includes a pair of struts for supporting the elevating bar at both ends of the elevating bar, a guide pin supported on either one of the strut and the elevating bar, and the strut and the support to permit penetration of the guide pin. A suction table having a slot provided on the other side of the elevating bar. The method of claim 1,
At least one of the pair of struts or the pair of slots provided at both ends of the elevating bar, respectively, is an elongated slot extending along the longitudinal direction of the elevating bar. 3. The method of claim 2,
Wherein the slot is provided in the lifting bar and extends in the thickness direction of the lifting bar and extends along the longitudinal direction of the lifting bar. The method of claim 3, wherein
The support mechanism is provided with a spring member for imparting a tension in the longitudinal direction of the elevating bar to the elevating bar corresponding to the guide pin. 5. The method of claim 4,
Wherein the lift bar is provided with a corresponding engagement pin in parallel with the guide pin in the vicinity of an end located inwardly of the position of the slot of the lift bar and the spring member is provided with the guide pin, And a tension coil spring having both ends connected to the pin.

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