TWI505401B - Suction table - Google Patents

Description

Suction table

The present invention relates to a sorption table suitable for holding a display panel such as a liquid crystal display panel or an organic light-emitting panel.

A display panel of a liquid crystal display panel in which a circuit is formed on a glass substrate, for example, in a process, a probe is used to receive an electrical inspection. In this test, generally, a liquid crystal display panel as an object to be inspected is held by a negative pressure on a sorption table assembled on a probe station.

In order to safely and quickly remove the inspected object to be inspected from the suction table, a plurality of lifting pins protruding from the suction surface are provided on the suction table to suck the object to be inspected from the suction table. The surface floats (for example, refer to Patent Document 1).

When the lift pin positioned at the protruding position receives the test object from the transport robot above the suction surface, it descends to the suction surface. When the object to be inspected moves to the suction surface by the lowering of the lift pin, a negative pressure is applied to the suction surface by a negative pressure mechanism incorporated in the suction table. During the inspection of the test object, the test object can be reliably held by the suction surface by the negative pressure. After the inspection, the object to be inspected is lifted from the suction surface as the lift pin rises. Lifted from the suction surface according to the aforementioned lifting pin The aforementioned object to be inspected is not strongly affected by static electricity acting between the absorbing surface and the object to be inspected, but is removed from the sorption table by the transport robot.

However, since the contact area between the lift pin and the object to be inspected is small, the local stress on the contact portion of the test object with the lift pin will increase as the weight increases due to the enlargement of the test object. Become bigger. Due to the concentration of the local stress of the object to be inspected including such a glass substrate, it is desirable to avoid a large distortion force on the object to be inspected.

Therefore, there has been proposed a technique in which a plurality of fixed holding members arranged in parallel with each other at intervals and a plurality of belt-shaped lifting members that are arranged to be lifted and lowered between the fixing members are provided. When the object to be inspected is transferred to the suction surface, the elevating member is lowered with respect to the fixed holding member (see, for example, Patent Document 2).

According to the device described in Patent Document 2, the elevating member forms a flat absorbing surface together with the fixed holding member at the raised position. When the suction surface is transferred to the object to be inspected by the robot arm, since the robot arm can be inserted into the space formed by the descending of the plurality of belt-shaped lifting members, the robot arm and the suction surface are not The plurality of fixed holding members which are arranged in parallel and which are arranged in parallel with each other support the object to be inspected in a wide strip-shaped area, so that the strong object can be applied to the object to be inspected without being subjected to strong local stress.

However, in the device described in Patent Document 2, the suction surface that adsorbs and holds the negative pressure of the test object is composed of a plurality of fixed holding members and lifting members that can be lifted and lowered between the fixed holding members. Composition. Therefore, the configuration of the support table forming the absorbing surface is complicated, and it is necessary to provide a mechanism for raising and lowering a plurality of lifting members at the same time inside the support table. Since the configuration of the support table is complicated, the absorbing device is constituted. The disadvantage of becoming expensive due to complexity.

[Patent Literature]

(Patent Document 1) Japanese Patent Laid-Open Publication No. 2002-246450

(Patent Document 2) Japanese Patent Laid-Open Publication No. 2011-29565

Accordingly, it is an object of the present invention to provide a absorbing table which does not complicate the configuration and which does not cause a strong stress to locally act on the display panel as the object to be inspected, so that the display panel can be handed over. When lifting on the suction surface.

The present invention relates to a sorption table for holding a display panel, comprising: a support table having a suction surface with a negative pressure opening; and a plurality of lifting rods disposed across the absorbing surface; a groove for arranging the lifting rods in parallel with each other in the support base so as not to protrude from the suction surface; the support mechanism is open to the plurality of grooves The side of the support table supports the lifting rod in a manner capable of lifting and lowering; and the lifting device is configured to raise and lower the lifting rod between a rising position protruding from the groove and a lowering position of the groove. The connection is set in the aforementioned support mechanism, before The supporting mechanism is provided with: a pair of pillars for supporting the lifting rod at both ends of the lifting rod; a guide pin supported by one of the pillar and the lifting rod; and a slot In order to allow the guide pin to pass through, the other of the support post and the lift rod is provided.

In the absorbing table according to the present invention, the support base is formed with the groove for accommodating the lifting rod across the suction surface of the support table. The lifting rod that can be accommodated in the groove is protruded (raised) protruding from the suction surface by a support mechanism provided at a side portion of the support base at a retracted (lowering) position of the groove. Lift between positions. Therefore, since it is not necessary to form the support table as a plurality of sets of the fixed member and the movable member as before, and in order to transfer the display panel to the absorbing table, the display panel can be raised and lowered by using the plurality of lifting rods. Since the absorbing surface is complicated, the configuration of the absorbing table is not complicated, and even a large display panel can prevent a strong stress from locally acting on the display panel.

At least one of a pair of slits respectively provided at both end portions of the pair of pillars or the lifter bar may be formed as an elongated slot extending in the longitudinal direction of the lifter. By the elongated slot, since the inclination toward the longitudinal direction of the lift lever can be allowed, the offset of the lifting operation at both end portions of the lift lever can be compensated.

The slot may be provided in the lifting rod, and the slot may penetrate the thickness direction of the lifting rod and extend along the longitudinal direction of the lifting rod.

A spring member may be disposed on the support mechanism The guide pin is coupled to the tension rod that is outwardly directed toward the longitudinal direction of the lift rod. The deflection of the lifter can be suppressed by the tension of the spring member.

The lifting rod may be provided with a corresponding locking pin parallel to the guiding pin in the vicinity of the end portion, and the locking pin is disposed at a position closer to the inner side of the lifting rod than the position where the slot is provided, and the spring member may be A tension coil spring that is locked at both ends to the aforementioned guide pin and the aforementioned locking pin corresponding to the guide pin is used.

An impact mitigation mechanism that mitigates an impact acting on the lifter can be provided in the support mechanism. With the impact mitigating mechanism, for example, when the display panel is handed over to the robot arm, it is not necessary to significantly decelerate the motion of the robot arm as before to prevent the impact from acting on the display panel. Therefore, since the slow movement of the robot arm is not required, the takt time can be reduced.

The impact mitigation mechanism may be composed of a struts and a compression coil spring supported by the support base, and a guide groove is formed at the top, and the guide groove can guide the lifting rod in the up and down direction, and the compression coil spring system The utility model is disposed between the bottom of the guiding groove and the lifting rod.

The lifting rod may be provided with an adjusting screw that abuts against the end of the compression coil spring for adjusting the compression amount of the coil spring. The spring force of the compression coil spring can be appropriately adjusted according to the adjustment of the compression amount of the adjustment screw, and according to the change of the size of the display panel, that is, the weight of the display panel, and the displacement of the compression coil spring The amount becomes roughly constant.

Each of the pillars may be provided with a height adjusting mechanism capable of adjusting the length direction of the pillar. Each height adjusting mechanism provided in each of the pillars can adjust the inclination and height position of the lifting rod according to each of the lifting rods.

The support mechanism may be provided with a pair of beam members disposed along the support table on both sides of the support table. The pair of beam members are supported by the support table so as to be movable in the vertical direction, and can be moved in the vertical direction by the operation of the lifting device. In this case, each of the beam members can support the end of the corresponding lifting rod through the struts.

Further, the height adjusting mechanism for adjusting the height position of the pillar is provided between the beam member and each of the pillars.

Each lifting rod may form an edge of the aforementioned display panel that abuts the lifting rod to prevent the falling edge of the display panel. By the stop function of the shoulder, it is possible to surely prevent the aforementioned display panel from being inadvertently detached from the lifting rod.

Further, in relation to the shoulder portion, an upper surface of the lifting rod may be disposed adjacent to the shoulder portion for preventing an edge of the object to be inspected and the foregoing surface caused by the inclination of the object to be inspected on the lifting rod The interference slot of the interference. Thereby, when the object to be inspected is placed on or removed from the lifting rod, even if the object to be inspected is inclined with respect to the lifting rod, the edge of the object to be inspected and the lifting rod can be prevented. The abutment above, so it can be prevented from being caused by the abutment Check the damage of the body.

According to the present invention, it is not necessary to form the support table as a plurality of sets of the fixed member and the movable member as before, and the support stand may be formed to have an integral structure for accommodating the aforementioned groove of the lift rod, or The lifting rod is raised and lowered by the lifting device provided on the side of the support table. Therefore, it is possible to provide a relatively inexpensive absorbing table which does not entail the complication of the configuration of the absorbing table, and even a large display panel does not cause a strong stress to locally act on the display panel and can be processed. The display panel.

10‧‧‧ suction table

12‧‧‧Inspected body (display panel)

14‧‧‧Handling robot

16‧‧‧Base

18‧‧‧ movable platform

20‧‧‧ pillar

22‧‧‧Axis components

24‧‧‧ robot arm

26‧‧‧Support table

26a‧‧‧Sucking face

28‧‧‧XYZ θ stage

30a‧‧‧Slot

30b‧‧‧ Negative pressure tank

32‧‧‧ Groove

34‧‧‧ Lifting rod

34a‧‧‧Upper pole

34b‧‧‧Shoulder

36‧‧‧Support institutions

38‧‧‧ Lifting device

38a‧‧‧Cylinder body

38b‧‧‧Piston rod

40‧‧‧beam components

42‧‧‧Guide

44‧‧‧Installation board

46‧‧‧ rails

46a‧‧‧stops

48‧‧‧Sliding members

50‧‧‧Installation board

52‧‧‧Combined components

54‧‧‧ pillar

56‧‧‧ Shock mitigation agency

58‧‧‧The recess of the pillar

58a‧‧‧ vertical wall of the recess

58b‧‧‧Bottom of the recess

60‧‧‧ slots

62‧‧ ‧ sales guide

64‧‧‧Compressed coil spring

66‧‧‧ hole

68‧‧‧Fixed screw components (adjusting screw)

70‧‧‧ clearance slot

72‧‧‧ Height adjustment mechanism

74‧‧‧ fixing screws

76‧‧‧ Anchor members

78‧‧‧ fastenings

80‧‧‧ fixing screws

82‧‧‧Slots

84‧‧‧ screw holes

86‧‧‧screw table

86a‧‧‧ Screw hole

88‧‧‧ card sales

90‧‧‧Spring member (stretching coil spring)

Fig. 1 is a perspective view showing the transfer robot and the sorption table of the present invention together.

Fig. 2 is a plan view of the sorption table shown in Fig. 1.

Figure 3 is a side view of the sorption table shown in Figure 1.

Fig. 4 is a cross-sectional view taken along line IV-IV shown in Fig. 3.

Fig. 5 is a cross-sectional view taken along line V-V shown in Fig. 3.

Fig. 6 is a cross-sectional view taken along line VI-VI shown in Fig. 3.

Fig. 7 is an enlarged view showing a portion surrounded by a circular circle symbol shown by a symbol A in Fig. 3.

Fig. 8 is a front view of the height adjusting mechanism of the pillar as seen in the direction of the arrow indicated by the symbol B shown in Fig. 6.

Figure 9 is a front view of the sorption table shown in Figure 1, where (a) shows The state in which the lifter is in the raised position is shown, and (b) shows the state in which the lifter is in the lowered position.

Fig. 10 is a perspective view showing a part of another embodiment of the present invention broken.

Figure 11 is a perspective view showing another embodiment of the present invention.

As shown in Fig. 1, the absorbing table 10 of the present invention is used in a probe station (not shown) for inspecting the display panel 12 such as a liquid crystal panel or an organic light-emitting panel. The first figure shows an example in which the object 12 to be inspected is transferred to and from the transfer robot 14.

As described above, the transport robot 14 includes a movable table 18 that is movable toward the absorbing table 10 and away from the base 16 and a shaft member 22 that is coaxially supported. The pillar 20 provided on the movable table rotates around the axis and expands and contracts the pillar 20 along the axis. The shaft member 22 capable of performing the rotation and the expansion and contraction operation is provided with a fork-shaped robot arm 24 on which the test object 12 is placed, as is conventionally known.

When the conveyance robot 14 receives the display panel (that is, the inspection object 12) accommodated in the cassette from the cassette (not shown), the conveyance robot 14 is in a state in which the shaft member 22 is extended. The movable arm 18 is moved by moving the robot arm 24 toward the absorbing table 10. Thereafter, when the shaft member 22 is contracted and the subject 12 is moved to the absorbing table 10, the movable table 18 is operated to move the robot arm 24 away from the absorbing table 10 in the contracted state.

Further, when the electrical or visual inspection of the test object 12 on the absorbing table 10 is completed, the transfer robot 14 is inserted into the absorbing table 10 with the robot arm 24 in a state where the shaft member 22 is contracted. The movable table 18 is moved toward the absorbing table 10 so as to be below the object 12 to be inspected. Thereafter, when the shaft member 22 is extended and the object 12 to be inspected on the absorbing table 10 is moved to the robot arm 24, the transport robot 14 is moved away from the absorbing table 10 by the robot arm 24 in this extended state. The movable table 18 is operated. By the operation of the transport robot 14, the object 12 to be inspected is moved from the absorbing table 10 to the cassette via the transport robot 14.

The absorbing table 10 that transfers the test object 12 to and from the transfer robot 14 is provided with a support table 26 having a absorbing surface 26a. The support table 26 of the sorption table 10 is placed on the previously known XYZ θ stage 28 in the example shown in Fig. 1. Therefore, the support table 26 can rotate around the Z axis of the vertical axis as before, and can move along the X axis and the Y axis on the XY plane at right angles to the Z axis.

The absorbing table 10 holds the object 12 to be inspected from the transfer robot 14 by the absorbing surface 26a of the support table 26. This absorbing surface 26a is a rectangular shape having a long side and a short side on the XY plane in the examples of Figs. 1 and 2 . Further, as clearly shown in Fig. 2, the suction surface 26a is formed with a plurality of previously known plurality of narrow grooves 30a which are elongated along the long sides thereof and which are open to both sides of the support table 26, and A negative pressure groove 30b that draws a rectangle is formed on the absorbing surface 26a.

The negative pressure groove 30b is as previously known, in the suction surface When the object to be inspected 12 is held by 26a, the negative pressure for sucking the object to be inspected is introduced from a negative pressure source (not shown). The narrow groove 30a is a groove for preventing electrification. When the small groove 30a is used to separate the object 12 to be inspected from the absorbing surface 26a, it is weakened in both 12, 26a by guiding air between the object 12 and the absorbing surface 26a as previously known. The generated air flow thereby suppresses the occurrence of static electricity introduced into the test object 12 in accordance with the air flow.

Further, as shown in Fig. 2, the absorbing surface 26a is formed with a plurality of grooves 32 extending linearly along the long sides thereof. As clearly shown in Fig. 3, each of the grooves 32 reaches both sides of the support table 26 and is open on both sides. Further, a lifting lever 34 that crosses the suction surface 26a in the longitudinal direction thereof is provided corresponding to each of the grooves 32. The recess 32 has a width dimension sufficient to accommodate the corresponding lifting rod 34, and has a depth dimension in which the upper surface of the elevating rod 34 accommodated coincides with the absorbing surface 26a.

As shown in FIGS. 2 and 3, the support mechanism 36 and the lifting device 38 of the lifting rod 34 are disposed on both sides of the support base 26, respectively. As shown in FIGS. 2 and 3, the support mechanism 36 includes a beam member 40 that is disposed substantially horizontally along the support base on the side of the support base 26, and a vertical direction of the beam member along the Z axis. A plurality of guiding devices 42 are guided (see Fig. 3).

As clearly shown in Fig. 4, each guide device 42 includes a mounting plate 44 fixed to the support base so as to extend downward from the support base 26, and a guide rail 46 attached to the mounting plate and extending in the vertical direction; And a sliding member 48 fixed to the beam member 40 and guided in the vertical direction by the guide rail 46. Abutting on the both ends of the guide rail 46 The moving member 48 restrains the stoppers 46a, 46a of its range of movement.

Therefore, the pair of beam members 40 disposed on both sides of the support table 26 are moved on both sides of the support table 26 by the respective guiding devices 42 so as to be movable in the vertical direction between the two stoppers 46a and 46a. It is held by the support table 26.

The lifting device 38 is provided on both sides of the support base 26 in order to elevate and lower the pair of beam members 40 between the two stoppers 46a and 46a. In the examples of Figs. 3 and 5, the lifting device 38 is constituted by a fluid pressure cylinder device 38 (hereinafter, the lifting device 38 is also referred to as a fluid pressure cylinder device 38), and the fluid pressure cylinder device 38 is provided. a cylinder body 38a fixed to the support base 26 through the mounting plate 50; and a piston rod 38b protruding from the cylinder body. The fluid pressure cylinder device 38 is operated by air pressure or oil pressure. The fluid pressure cylinder device 38 has its axis arranged in the vertical direction, and the front end of the piston rod 38b is fixed to the coupling member 52 fixed to the beam member 40.

Therefore, by simultaneously operating the pair of fluid pressure cylinder devices 38 disposed on both sides of the support base 26, the pair of beam members 40 disposed along the support table on both sides of the support base 26 can be simultaneously raised and lowered.

Further, as shown in FIG. 3, the support mechanism 36 is provided with a support 54 that couples the lift rods 34 to the corresponding beam members 40. As shown in FIGS. 6 and 7, the upper end portion of each of the pillars 54 is provided with an impact mitigation mechanism 56, and the end portions of the respective lifting rods 34 are elastically coupled to the upper ends of the corresponding pillars 54 through the respective impact mitigation mechanisms 56. unit.

Each of the impact mitigation mechanisms 56 is provided to be open to the pillar 54 a recess 58 that accommodates an end portion of the corresponding lift rod 34 with a gap; a slot 60 that is formed across the lift rod 34 and penetrates the end portion of the lift rod in a horizontal direction; penetrates the slot And a guide pin 62 supported by the vertical wall 58a of the recess 58 at both ends; and a compression coil spring 64 disposed between the end of the lift rod 34 and the bottom wall 58b of the recess 58.

The lower end of the compression coil spring 64 is received in a hole 66 provided in the bottom wall 58b of the recess 58, and the upper end of the compression coil spring 64 abuts against the fixed screw member 68 of the slit. The fixing screw member 68 is screwed to the lifting rod 34 from the upper end of the lifting rod 34 from the end of the lifting rod 34, and the lower end protrudes from the lower surface of the lifting rod 34. The compression coil spring 64 is positioned between the lift rod 34 and the bottom wall 58b by abutting against the lower end of the fixed screw member 68 with the slit. Further, the slot 60 is elongated in the vertical direction (Z-axis) in order to allow the vertical movement of the lift rod 34 accompanying the compression deformation of the compression coil spring 64. Therefore, each end portion of the lifter lever 34 is elastically supported by the stay 54 by the spring force of the compression coil spring 64 with respect to the external force acting in the direction of gravity.

Since the distance between the lift rod 34 and the bottom wall 58b of the recess 58 can be restricted by the interference of the slot 60 with the guide pin 62 accommodated in the slot, the rotation from the upper end of the fixed screw member 68 can be performed. The compression coil spring 64 is compressed, whereby the spring force of the compression coil spring 64 can be adjusted. As a result, the fixed screw member 68 functions as an adjusting screw that adjusts the amount of compression of the compression coil spring 64.

Further, as shown in Fig. 6, at the end of each of the lifting rods 34, a shoulder portion 34b is formed, which is placed on the upper surface 34a of the lifting rod 34. When the body 12 is inspected, it abuts against the edge of the object to be inspected to prevent the object 12 from exceeding the end of the lifter 34. Further, a region of the shoulder portion 34b close to the upper surface 34a of the lifting rod 34 is formed with a concave clearance groove 70 for preventing the inspection of the object to be inspected by the inclination of the lifting rod 34. The edge of the body 12 abuts against the upper surface 34a of the lifting rod 34.

Each of the pillars 54 is supported by the corresponding beam member 40 through the height adjusting mechanism 72 provided at the lower portion thereof. As shown in FIGS. 6 and 8, each height adjustment mechanism 72 includes an anchor member 76 that is fixed to a lower portion of each of the pillars 54 by a fixing screw 74, and is coupled to the support base so as to be detachable. The fastening member 78 of the beam member 40; and a fixing screw 80 for adjusting the height position of the anchor member 76 to the beam member 40 in a state where the fastening member 78 is loosened.

The anchor member 76 is formed with a pair of slots 82 that penetrate the anchor member 76 toward the beam member 40 in order to allow the insertion of the fastener 78. As clearly shown in Fig. 6, the slot 82 is configured to extend the anchor member 76 in the vertical direction so as to accommodate the corresponding fastener 78 with a gap in the vertical direction. The fastener 78 that penetrates each of the slits 82 is constituted by a bolt member whose front end is screwed with the screw hole 84 formed in the beam member 40 (hereinafter, the fastener 78 is referred to as a bolt member 78). Therefore, in a state where the bolt member 78 is loosened, the anchor member 76 and the height position at which the lower end is fixed to the stay 54 of the support table can be adjusted within the range of the length dimension of the upper and lower sides of the slot 82.

In order to facilitate the adjustment of the height position of the anchor member 76, that is, the height position of the support post 54, the upper end of the fixing screw 80 can protrude from the screw hole 86a of the screw table 86 fixed to the beam member 40 to be screwed. Screw hole 86a The screw table 86 is inserted in the vertical direction, and the upper end of the fixing screw 80 projecting from the screw hole abuts against the bottom surface of the anchor member 76.

Therefore, as described above, by loosely fixing the screw 80 in a state where the bolt member 78 is loosened, the anchor member 76 can be lifted, for example, from the upper end of the fixing screw, whereby the aforementioned length of the slot 82 can be Within the range of dimensions, the height position of the strut 54 is adjusted. After the height position is adjusted by the fixing screw 80, the anchor member 76 is fastened to the beam member 40 by the bolt member 78, and the height adjustment operation of each of the pillars 54 is completed.

By adjusting the height position of the support post 54, the unevenness of the tilting or height position of the lifting rod 34 supporting the end portion of each of the pillars 54 can be corrected, and the upper surface 34a of the lifting rod 34 can be parallel to the support table 26. The virtual planes of the absorbing faces 26a are identical.

The aforementioned anchor member 76 and the post 54 can be integrally formed. Also, the height adjustment mechanism 72 may not be required.

The pair of fluid pressure cylinder devices 38 perform a synchronous operation such that all of the lifting rods 34 are synchronized between the raised position and the lowered position, as shown in the figure (9a), and all the lifting rods 34 are supported from the support table. The groove 32 of the absorbing surface 26a of 26 (refer to FIG. 5) protrudes and is positioned above the absorbing surface 26a. The lowered position is as shown in FIG. 9(b), and the lifting rod 34 is received in the groove. 32 and its upper 34a position is below the suction surface 26a.

As described above, at the rising position shown in Fig. 9(a), the object 12 to be inspected on the robot arm 24 of the transport robot 14 is moved to the lifter lever 34. At this time, the contraction of the shaft member 22 due to the transfer robot 14 is accompanied. The lowering action of the robot arm 24 caused by the action causes the impact corresponding to the weight of the object to be inspected 12 to act on the lifting rod 34. However, when the object to be inspected 12 is moved to the elevating rod 34, the object to be inspected 12 is not subjected to an impact by the elastic supporting action of the impact relieving mechanism 56 provided between each of the elevating rods 34 and the strut 54.

Further, since the impact mitigation mechanism 56 is provided, it is not necessary to decelerate the lowering operation of the above-described robot arm 24 as before, and the impact on the object to be inspected 12 can be prevented, so that the slow movement of the robot arm 24 is not required. By moving, it is possible to shorten the working time.

As described above, the impact mitigation mechanism 56 can be rotated by the weight of the workpiece 12 to be inspected, regardless of the weight of the workpiece 12 to be inspected, regardless of whether the weight of the object 12 is increased or decreased. The amount of deformation of the compression coil spring 64 due to the weight of the object to be inspected 12 is kept substantially constant. Therefore, the impact mitigation mechanism 56 can effectively absorb the impact by the rotation operation of the fixed screw member 68 corresponding to the weight of the object to be inspected 12.

When the object to be inspected 12 is moved from the robot arm 24 to each of the lifting rods 34, the object to be inspected is inclined with respect to the longitudinal direction of the lifting rod 34, and the shoulder portions are formed at both end portions of the respective lifting rods 34. Since the clearance groove 70 of the 34b is inclined, the edge portion inclined below the inspection object 12 does not abut against the upper surface 34a of the lift rod 34. Thereby, the object to be inspected 12 can be moved to the lifting rod without being damaged by the contact with the lifting rod 34, and the object to be inspected 12 moved to the lifting rod 34 is supported by the lifting rod 34. The shoulder portion 34b can surely prevent falling off from the lifting rod 34.

When the object to be inspected 12 is moved to the elevating rod 34 and the robot arm 24 is retracted from the support table 26, the pair of fluid pressure cylinder devices 38 are synchronized and contracted, whereby the elevating rod 34 is held in Fig. 9(b) The lowered position shown.

When the elevating rod 34 is moved to the lowered position, as described above, the subject 12 is reliably held on the support table 26 by the negative pressure acting on the negative pressure groove 30b, and the subject 12 is subjected to a predetermined inspection.

When the aforementioned inspection of the test object 12 is completed, the lift rod 34 is moved toward the raised position shown in Fig. 9(a) by the operation of the pair of fluid pressure cylinder devices 38. With the fluid pressure cylinder device 38, when the test object 12 on the support table 26 is to be floated from the suction surface 26a of the support table 26 by the lift lever 34, the thin groove 30a can be used as described above. The air guiding action suppresses the occurrence of static electricity in the object to be inspected 12.

The inspected body 12 that has been inspected on the elevating rod 34 at the ascending position is moved to the state in which the robot arm 24 of the transport robot 14 is inserted between the elevating rods 34, and the shaft member 22 is extended. The robot arm 24 is then returned to the aforementioned cassette by the transport robot 14.

According to the absorbing table 10 of the present invention, the recess 32 for accommodating the lifting rod 34 can be formed on the support table 26, and the lifting rod 34 can be raised and lowered by the lifting device 38 provided on the side of the support table 26. Therefore, it is possible to provide a complication that does not attract the structure of the absorbing table 10 relatively inexpensively, and even if the display panel 12 is large, the strong stress is not locally applied to the display panel, and the display can be processed. The suction table 10 of the panel.

In the foregoing, it has been shown that the grooves 32 are formed in parallel in the suction Instead of the long side of the face 26a, a plurality of grooves 32 may be formed in parallel so that the groove 32 and the long side of the absorbing surface 26a extend at a predetermined angle.

Further, the depth of the recess 32 may be formed larger than the height of the lifter 34, and the upper surface of the lifter 34 may be positioned below the suction surface 26a at the lowered position of the lifter 34.

Instead of the aforementioned fluid pressure cylinder device, various types of lifting devices such as an electric motor, a rack-and-pinion or a linear motor can be suitably used in the lifting device 38.

As shown in Fig. 10, in order to accommodate the guide pin 62 having a circular cross section supported by the support post 54, the slot 60 provided at both end portions of the elevating lever 34 that receives the test object 12 can be formed to face. A slender slot in the lateral direction of the elongate side of the elevating rod (X-axis). In this case, the compression coil spring 64 of the impact mitigation mechanism 56 may not be provided because it has no function. The laterally elongated elongated slot 60 allows the tilting of the lifter 34 to compensate for the synchronized offset between the pair of lifts 38 disposed on opposite ends of the lifter 34.

One of the pair of slots 60 may be squared into the aforementioned elongated slot in the lateral direction, and on the other hand formed to receive the slot of the guide pin 62 having a circular cross section instead of being disposed on the lift bar 34. A pair of slots 60 at both ends are formed as the laterally elongated slots that are laterally elongated. Thereby, since the lifting rod 34 can be tilted, the synchronization between the pair of lifting devices 38 can be compensated for.

As shown in Fig. 11, the ends of the guide pin 62 can be oriented The pillar 54 protrudes outside. Further, a locking pin 88 may be provided on both sides of the lifting rod 34, and the locking pin 88 is closer to the inner side of the lifting rod 34 than the position of the slot 60 extending toward the longitudinal direction of each of the lifting rods 34, and Parallel to the adjacent guide pins 62, a pair of spring members 90 that impart a tensile force between the corresponding guide pins 62 and the locking pins 88 are disposed on both sides of the lift rod 34. In the example shown in Fig. 11, each spring member 90 is constituted by a tension coil spring.

The pair of tension coil springs 90, which are locked at the both ends to the corresponding guide pins 62 and the lock pins 88, apply tension to the lift rod 34 outward in the longitudinal direction of the lift rod 34. The deflection of the lift rod 34 is suppressed by the tension. Therefore, in the case where the lifting rod 34 is formed by a flat angle bar of aluminum having a low rigidity for weight reduction, the deflection of the lifting rod 34 can be suppressed by the tension of the tension coil spring 90, and the lifting rod can be effectively prevented. The deflection of the object to be inspected. When the lifting rod 34 is formed of a CFRP material having a relatively high rigidity, the tension coil spring 90 may not be required.

Further, although FIGS. 10 and 11 have shown that the guide pin 62 is provided to the stay 54 and the laterally elongated slot 60 for accommodating the guide pin 62 is provided to the lift lever 34, the guide pin 62 can be set. Instead of the lifting rod 34, or a laterally elongated slot 60 is provided in the post 54.

(industrial availability)

The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit and scope of the invention.

10‧‧‧ suction table

12‧‧‧Inspected body (display panel)

14‧‧‧Handling robot

16‧‧‧Base

18‧‧‧ movable platform

20‧‧‧ pillar

22‧‧‧Axis components

24‧‧‧ robot arm

26‧‧‧Support table

26a‧‧‧Sucking face

28‧‧‧XYZ θ stage

32‧‧‧ Groove

34‧‧‧ Lifting rod

36‧‧‧Support institutions

38‧‧‧ Lifting device

Claims (5)

A absorbing table for holding a display panel comprises: a support table having an open suction surface with a negative pressure opening; a plurality of lifting rods configured to cross the absorbing surface; a plurality of concave a groove for accommodating the lifting rod in the support base so as not to protrude from the suction surface, and to be disposed in parallel with the suction surface; and a support mechanism for the plurality of grooves to be open a side portion of the support table that supports the lifting rod in a manner capable of lifting and lowering; and a lifting device for raising and lowering the lifting rod between a rising position protruding from the groove and a lowering position of the groove The support mechanism is connected to the support mechanism, and the support mechanism includes a pair of pillars for supporting the lifting rod at both end portions of the lifting rod, and a guide pin which is one of the pillar and the lifting rod a support; and a slot provided in the other of the support post and the lift bar for allowing the guide pin to pass therethrough. The absorbing table according to claim 1, wherein at least one of the pair of slits provided at both end portions of the pair of struts or the elevating rod is elongated along a longitudinal direction of the elevating rod Slender slot. The absorbing table according to claim 2, wherein the slit is provided in the lifting rod, penetrates the thickness direction of the lifting rod, and is elongated along a longitudinal direction of the lifting rod. The absorbing table according to the third aspect of the invention, wherein the support mechanism is provided with a spring member coupled to the guide pin, and the longitudinal direction of the lifting rod is provided to the corresponding lifting rod The tension of the foreign side. The absorbing table according to claim 4, wherein the lifting rod is provided with a corresponding locking pin parallel to the guiding pin near the end portion, and the locking pin is disposed on the lifting rod The position of the slot is closer to the inner side, and the spring member is constituted by a tension coil spring whose both ends are locked to the guide pin and the lock pin corresponding to the guide pin.