JP6339002B2 - stage - Google Patents

Description

  The present invention relates to a stage, and more particularly to a stage used for holding plate-like samples such as substrates, liquid crystal display panels, and organic EL panels.

  In recent years, liquid crystal display panels and organic EL panels, which are being actively developed, are manufactured using a glass substrate on which an electric circuit including wiring and thin film transistors is formed. For example, a prober is used during the manufacturing process. Receive an electrical test called lighting test. In this inspection, a liquid crystal display panel or an organic EL panel, which is a plate-like sample, is usually adsorbed and held on a stage incorporated in a prober using negative pressure. Such a stage that holds and holds a plate-like sample such as a substrate or a liquid crystal display panel has been conventionally referred to as a suction table or the like.

  In order to remove the inspected plate-shaped sample safely and quickly from the stage, a plurality of lifting pins for lifting the sample can be provided on the holding surface of the stage (see, for example, Patent Document 1). The lifting pins can be provided on the stage so as to protrude from the holding surface.

  When the lifting pin at the protruding position receives the sample to be inspected from the transport robot above the holding surface, the lifting pin descends below the holding surface. When the sample moves on the holding surface by the lowering of the lift pins, a negative pressure is applied to the holding surface by the negative pressure mechanism incorporated in the stage. While the sample is inspected, the sample is securely fixed to the holding surface by the negative pressure described above and held. After the inspection, the sample is lifted from the holding surface to a predetermined raised position as the lifting pins are raised. The sample lifted from the holding surface to the raised position by the lift pins is removed from the stage by the transfer robot.

  However, since the contact area between the above-described lifting pins and the plate-shaped sample to be inspected is small, local stress that the sample receives at the contact portion with the lifting pins as the sample increases in size and area. Will grow. At this time, for example, local stress concentration in a plate-like sample configured using a glass substrate or the like is not desirable because it gives a large strain force to the sample.

  Therefore, instead of the above-described lifting pins, a stage has been proposed in which a holding surface for holding a plate-like sample is provided with a plurality of lifting bars arranged across the holding surface (see, for example, Patent Document 2). ). This stage uses a lift bar to receive a sample from the transfer robot above the holding surface and place the sample on the holding surface, or to lift the sample from the holding surface and pass the sample to the transfer robot The sample can be delivered.

  In the stage described in Patent Document 2, a plurality of elevating bars for delivering a plate-like sample above a rectangular holding surface are provided so as to cross the holding surface along the longitudinal direction of the holding surface. ing. Further, the holding surface of the stage is provided with a plurality of recesses so as to extend in parallel with each other along the longitudinal direction of the holding surface. In this stage, each of the plurality of recesses is opened at the end portion in the longitudinal direction of the holding surface so that the plurality of lifting bars can be accommodated without protruding from the holding surface.

  And the stage of patent document 2 is further provided with the raising / lowering mechanism containing the support mechanism for supporting the several raising / lowering bar collectively so that raising / lowering is possible. The support mechanism of the elevating mechanism is configured to support the end portions of each of the plurality of elevating bars at both ends of the stage released by the plurality of recesses, respectively. Then, the lifting mechanism is provided between the rising position where the lifting bar protrudes from the recess and the lowered position where the lifting bar is accommodated in the recess and does not protrude via the support mechanism. The raising / lowering operation can be controlled.

  By having the configuration as described above, the stage described in Patent Document 2 is a linear shape using a lifting bar from support by a conventional point-like contact portion using a lifting pin when delivering a plate-shaped sample. Can be supported by the contact portion. As a result, the stage described in Patent Document 2 can increase the contact area for support with the sample when the sample is delivered, and can reduce the distortion force applied to the sample. And the stage can deliver a plate-shaped sample above a holding surface, using a raising / lowering bar, reducing a distortion force.

JP 2002-246450 A JP2013-251486A

  However, in the stage described in Patent Document 2 described above, it is necessary to increase the length of the lifting bar as the plate-shaped sample increases in size and area. As a result, in the lifting bar, bending deformation due to its own weight sometimes becomes a problem.

  That is, in the stage described in Patent Document 2 described above, each of the plurality of lift bars is supported by the support mechanism of the lift mechanism at the end portion. Therefore, in the lift bar, bending deformation that becomes a state of being bent downward while being supported by the support mechanism may be a problem. When the plate-like sample is mounted and supported by the lifting bar, the weight of the sample is further added, and the above-described bending deformation may be promoted.

  As a result, the plate-like sample mounted on the lifting bar may be bent and deformed in the same manner as the lifting bar, and there may be a concern about an adverse effect when it becomes a final product.

  In addition, in the case of a conventional stage using a lifting bar, as described above, it is necessary to provide a recess as a storage space for the lifting bar in the lowered position on the holding surface. It is necessary to consider deformation. Then, the recess of the stage is required to be formed in a larger size in consideration of the increase in the bending deformation of the lifting bar so that the lifting bar in the lowered position does not protrude when the bending deformation of the lifting bar increases. . As a result, the rigidity of the stage is lowered, and there is a concern that the planar accuracy of the holding surface is lowered.

  Further, when the size of the cross section of the lifting bar is changed so as to reduce the bending by improving the rigidity of the lifting bar, it is necessary to change the size of the recess corresponding to the change. That is, when the size of the cross section is increased in order to increase the rigidity of the elevating bar, it is necessary to increase the size of the recess, which is the accommodation space, in accordance with the increase in the cross sectional size of the elevating bar. As a result, the rigidity of the stage is lowered, and there is a concern that the planar accuracy of the holding surface is lowered.

  It is possible to cope with such a concern by using a material exhibiting higher rigidity as a constituent material of the lifting bar. For example, it is possible to use a highly rigid CFRP material instead of the conventionally used aluminum material for the construction of the lifting bar. However, when such a material is used, the deflection of the lifting bar can be reduced, but there is a concern that the manufacturing cost of the stage increases and the productivity of the stage decreases.

  Further, in the lifting bar support mechanism, it is possible to provide a mechanism for reducing the bending deformation of the lifting bar by pulling both ends of the lifting bar in the direction in which the lifting bar extends. However, in addition to requiring a space for mounting such an additional mechanism, there is a concern that the manufacturing cost of the stage is increased and the productivity is lowered.

  That is, in the stage using the conventional lifting bar, the problem due to the bending deformation of the lifting bar is reduced at low cost and easily, and the complexity of providing a large recess for the lifting bar is avoided. Was difficult.

  Therefore, in the stage, there is a need for a technique that can easily and inexpensively reduce the problem of bending deformation caused by bending of the lifting bar while using the lifting bar for lifting the plate-shaped sample.

  The present invention has been made in view of these problems.

  That is, an object of the present invention is to provide a stage that has a raising / lowering bar for raising / lowering a sample and reduces bending deformation of the raising / lowering bar.

  Other objects and advantages of the present invention will become apparent from the following description.

A first aspect of the present invention is a stage for holding a plate-shaped sample,
A support with a holding surface for placing the sample;
A plurality of elevating bars disposed across the holding surface;
A plurality of recesses provided to extend parallel to each other on the holding surface so as to accommodate the lifting bar in the support base;
A support mechanism for supporting the elevating bar so as to be movable up and down;
An elevating device that controls the operation of the support mechanism to elevate between the raised position where the elevating bar protrudes from the recess and the lowered position accommodated in the recess;
The elevating bar has a shape to which bending deformation is applied in advance so as to cancel the bending caused by the support of the support mechanism.

  In the first aspect of the present invention, it is preferable that the support base has an adsorption port on the holding surface and adsorbs and holds the sample.

  1st aspect of this invention WHEREIN: It is preferable that the said recess has a magnitude | size accommodated in the said support stand, without the said raising / lowering bar in the said lowered position protruding from the said holding surface.

  1st aspect of this invention WHEREIN: The said raising / lowering bar has the rod-shaped shape from which the shape of the cross section orthogonal to the longitudinal direction becomes a rectangle, The said recessed part is the shape of the cross section orthogonal to the direction where this recessed part is extended. It is preferable to have a shape that becomes a rectangle.

A second aspect of the present invention is a stage for holding a plate-shaped sample,
A support with a holding surface for placing the sample to be inspected;
A plurality of elevating bars disposed across the holding surface;
A plurality of recesses provided to extend parallel to each other on the holding surface so as to be accommodated in the support base without protruding from the holding surface,
A support mechanism to which the elevating bar is attached and supports the elevating bar so as to be movable up and down;
An elevating device that controls the operation of the support mechanism so as to elevate between the ascending position where the elevating bar protrudes from the recess and the descending position accommodated in the recess;
The elevating bar has a shape that is deformed in advance so that the upper surface side warps in a convex shape, and is attached to the support mechanism so that the upper surface side that warps in the convex shape faces upward. Related to the stage.

  In the second aspect of the present invention, it is preferable that the support base has an adsorption port on the holding surface and adsorbs and holds the sample.

  According to the first aspect of the present invention, there is provided a stage that has an elevating bar for elevating and lowering a sample and that reduces bending deformation of the elevating bar.

  Moreover, according to the 2nd aspect of this invention, while having a raising / lowering bar for raising / lowering a sample, the stage which reduces the bending deformation of the raising / lowering bar is provided.

It is a top view which shows typically an example of the stage of embodiment of this invention with a conveyance robot. It is a typical top view of the stage which is an example of the embodiment of the present invention. It is a typical side view of the stage which is an example of the embodiment of the present invention. It is a typical front view of the stage explaining the bending which arises in a raising / lowering bar. It is a front view which shows typically the raising / lowering bar which the stage which is an example of embodiment of this invention has. It is a front view which shows the principal part structure of the stage which is an example of embodiment of this invention. In the stage which is an example of embodiment of the present invention, it is a typical sectional view of a raising / lowering bar, a recess, and a support stand which show a state where an raising / lowering bar exists in a lowered position. It is sectional drawing obtained along the VV line of the stage shown by FIG. It is a typical front view of the principal part of the stage which is an example of the embodiment of the present invention which shows the state where a raising / lowering bar exists in a raised position. It is a typical front view of the important section of the stage which is an example of the embodiment of the present invention which shows the state where the raising / lowering bar is in the lowered position.

  Hereinafter, the stage of the embodiment of the present invention will be described with reference to the drawings as appropriate.

  FIG. 1 is a plan view schematically showing an example of a stage according to an embodiment of the present invention together with a transfer robot.

  The stage 10 which is an example of embodiment of this invention can be used for mounting and holding the plate-shaped sample 12, as shown in FIG. Here, the plate-like sample 12 is used for the configuration of a liquid crystal panel used for the configuration of a display element, an organic EL panel used for a configuration of a display element or a lighting device, a liquid crystal panel, an organic EL panel, and the like. A substrate etc. can be mentioned.

  The stage 10 can be used by being incorporated into a prober (not shown) for inspecting the sample 12, such as a substrate, a liquid crystal panel, or an organic EL panel. FIG. 1 schematically shows an example in which the sample 12 is transferred to and from the transfer robot 14.

  As shown in FIG. 1, the transfer robot 14 has a known structure and is movable on the base 16 in both directions toward the stage 10 and away from the stage 10. A shaft member 22 that is coaxially supported by the installed support column 20 and that rotates around the axis and expands and contracts with respect to the support column 20 along the axis is provided. A fork-shaped robot arm 24 for mounting the plate-shaped sample 12 is fixed to the shaft member 22 capable of rotating and extending and contracting.

  For example, when the transfer robot 14 receives a plate-like sample 12 such as a substrate or a liquid crystal panel accommodated in the cassette from a cassette (not shown) on the robot arm 24, the robot arm 24 is extended with the shaft member 22 extended. The movable table 18 is operated so that moves toward the stage 10. Thereafter, when the shaft member 22 is contracted and the sample 12 is moved onto the stage 10, the movable base 18 is operated so that the robot arm 24 moves away from the stage 10 in this contracted state.

  When the electrical inspection or visual inspection of the sample 12 on the stage 10 is completed, the transfer robot 14 inserts the robot arm 24 under the sample 12 on the stage 10 with the shaft member 22 contracted. As described above, the movable base 18 is operated toward the stage 10. Thereafter, when the sample 12 held on the stage 10 is moved onto the robot arm 24 by extending the shaft member 22, the transfer robot 14 causes the robot arm 24 to move away from the stage 10 in this extended state. Then, the movable base 18 is operated. By the operation of the transfer robot 14, the sample 12 is transferred from the stage 10 to the cassette described above via the transfer robot 14.

  The stage 10 that delivers the sample 12 to and from the transfer robot 14 includes a support base 26 that includes a holding surface 26 a that holds the plate-like sample 12. In the example shown in FIG. 1, the support base 26 of the stage 10 is placed on a known XYZθ moving stand 28. Therefore, the support base 26 can rotate around the Z axis, which is a vertical axis, as in the prior art, and can move along the X axis and the Y axis on the XY plane perpendicular to the Z axis.

  FIG. 2 is a schematic plan view of a stage which is an example of an embodiment of the present invention.

  The stage 10, which is an example of an embodiment of the present invention, holds the plate-like sample 12 (not shown in FIG. 2) delivered from the transfer robot 14 of FIG. 26a is placed and held. In the example shown in FIGS. 1 and 2, the holding surface 26a has a rectangular shape having a long side and a short side on the XY plane. And the dimension of the long side can be set to 1 m to 4 m, for example, and the dimension of the short side can be set to 0.8 m to 3 m, for example, so that the large sample 12 having a large area can be placed. can do.

  In addition, as clearly shown in FIG. 2, the holding surface 26 a of the support base 26 is formed with a plurality of narrow grooves 30 a that extend along the long side and open at both ends of the support base 26 on both sides. ing. The holding surface 26a is formed with a suction port 30b having a rectangular shape on the holding surface 26a.

  When the plate-like sample 12 is placed and held on the holding surface 26a, a negative pressure for adsorbing the sample 12 is introduced into the suction port 30b from a negative pressure source (not shown). Therefore, the support base 26 of the stage 10 is configured such that the suction port 30b is formed in the holding surface 26a and the negative pressure opening is opened, and the plate-like sample 12 is sucked and held on the holding surface 26a. Can do.

  The narrow groove 30a formed in the holding surface 26a is an antistatic groove. The narrow groove 30a has an effect of weakening an air flow generated between the sample 12 and the holding surface 26a by taking air between the sample 12 and the holding surface 26a when the sample 12 is pulled away from the holding surface 26a. Due to the effect of the narrow groove 30a, generation of static electricity introduced into the sample 12 by the air flow between the sample 12 and the holding surface 26a can be suppressed.

  FIG. 3 is a schematic side view of a stage which is an example of an embodiment of the present invention.

  As shown in FIGS. 1 to 3, the holding surface 26 a of the support base 26 is formed with a plurality of recesses 32 extending linearly along its long side. The plurality of recesses 32 are provided on the holding surface 26a so as to extend in parallel with each other. As shown particularly in FIG. 3, each recess 32 reaches the ends on both sides of the support base 26 and opens on both sides. Accordingly, the recess 32 is formed with a length of 1 m to 4 m, for example, corresponding to the dimension of the long side of the holding surface 26a.

  A plurality of elevating bars 34 are arranged so as to cross the holding surface 26 a in the long side direction corresponding to the respective recesses 32. The elevating bar 34 is a constituent member for placing and supporting the plate-like sample 12. The elevating bar 34 can have, for example, a bar shape in which the shape of the cross section perpendicular to the longitudinal direction is a rectangle. And the raising / lowering bar 34 can be comprised using an aluminum material, for example.

  The elevating bar 34 is used to receive and deliver the plate-like sample 12 at an upper position away from the holding surface 26 a of the support base 26, that is, at the raised position. When the plate-like sample 12 is delivered, On the other hand, it can be supported by a linear contact portion. And the raising / lowering bar 34 can receive and deliver the plate-shaped sample 12 in the raised position spaced apart from the holding surface 26a, reducing the distortion force which arises in the plate-shaped sample 12. FIG.

  The lifting bar 34 preferably has a longitudinal dimension that is the same as or slightly longer than the long side of the holding surface 26a. Therefore, it is preferable that the longitudinal dimension of the elevating bar 34 is, for example, a dimension slightly longer than 1 m to a dimension slightly longer than 4 m. Since the elevating bar 34 has such a length dimension, it is easy to attach both ends of the elevating bar 34 to the corresponding support mechanisms 36 on both sides of the support base 26 as will be described later. It becomes. The lifting bar 34 can be easily supported by the support mechanism 36.

  As shown in FIGS. 2 and 3, the support mechanism 36 and the lifting device 38 of the lifting bar 34 are respectively disposed on both sides of the support base 26. As shown in FIGS. 2 and 3, the support mechanism 36 includes a beam member 40 disposed substantially horizontally along the support base 26 on the side of the support base 26. The support mechanism 36 can have a plurality of guide devices (not shown) for guiding the beam member 40 in the vertical direction along the Z axis. The pair of beam members 40 arranged on both sides of the support table 26 are held by the support table 26 so as to be movable in the vertical direction on both sides of the support table 26 by the guide device.

  As shown in FIGS. 2 and 3, the support mechanism 36 further includes a plurality of columns 54 that support the lift bars 34 corresponding to the lift bars 34 in order to couple the lift bars 34 to the beam members 40. Prepare. The end of each elevating bar 34 is coupled to the upper end of each corresponding column 54. As shown in FIG. 3, the lower end portion of each column 54 is coupled to the beam member 40. Therefore, in the stage 10, each elevating bar 34 is configured to be supported by being attached to the support mechanism 36 via the corresponding column 54 and the beam member 40.

  In the stage 10 which is an example of the embodiment of the present invention, an impact relaxation mechanism (not shown) using a compression coil spring or the like can be provided at the upper end portion of each support 54 of the support mechanism 36. In the case of having such an impact mitigation mechanism, the end portion of each lifting bar 34 is elastically coupled to the upper end portion of the corresponding column 54 via each impact mitigation mechanism.

  Further, in the support mechanism 36, as shown in FIG. 3, each column 54 is coupled to the corresponding beam member 40 via a height adjustment mechanism 72 provided at the lower portion thereof, and is supported by the beam member 40. It is possible to configure so that. By adjusting the height position of the column 54 by the height adjusting mechanism 72, the inclination of the elevating bar 34 supported by each column 54 and variations in the height position can be corrected, and the upper surface 34a of the elevating bar 34 is supported. It can be made to correspond to a virtual plane parallel to the holding surface 26a of the table 26. And the raising / lowering bar 34 can make it possible to mount a plate-shaped sample stably.

  As described above, in the stage 10, the elevating bar 34 is attached to and supported by the support mechanism 36 via the support column 54 and the beam member 40. At this time, the raising / lowering bar 34 has the above-described length dimension, and there is a concern about the occurrence of bending due to its own weight, which has been a problem in the past.

  FIG. 4 is a schematic front view of the stage for explaining the bending that occurs in the lifting bar.

  FIG. 4 schematically shows a support base 26 whose upper surface serves as a sample holding surface 26a, a support mechanism 36 provided on both sides of the support base 26, and a lift bar 34 attached to and supported by the support mechanism 36. Has been. As shown in FIG. 4, the lifting bar 34 is coupled at both ends to the corresponding column 54 of the support mechanism 36. The up / down bar 34 is attached to the support mechanism 36 by the support 54 being coupled to the beam member 40 of the support mechanism 36 via the height adjustment mechanism 72.

  And the raising / lowering bar | burr 34 can be previously formed as a rod-shaped member which does not bend or warp and extends straight, for example, as in the prior art. In this case, as shown in FIG. 4, the lifting bar 34 attached to the support mechanism 36 is supported by the support mechanism 36 at both ends, and therefore is lowered in the vertical direction (Z direction) by its own weight. The side becomes convex. In the stage 10 of FIG. 4, an example is shown in which the elevating bar 34 is in the raised position above the holding surface 26a, but the bending due to its own weight is in the lowered position with the elevating bar 34 being accommodated in the recess 32. This also occurs in some cases. In other words, the lift bar 34 is bent by its own weight when it is attached to the support mechanism 36 regardless of whether it is in the raised position or the lowered position.

  Generation | occurrence | production of the bending in the raising / lowering bar 34 as shown in FIG. 4 will cause the following problems.

  For example, as will be described later, the lifting bar 34 is attached to and supported by the support mechanism 36, and in that state, the lifting operation is controlled by the lifting device 38 (not shown in FIG. 4) shown in FIG. . And the raising / lowering bar 34 in the lowered position in the raising / lowering operation is accommodated in the recess 32 so as not to protrude from the holding surface 26a.

  Therefore, in the stage 10, when the above-described recess 32 is provided on the holding surface 26 a of the support base 26, the bending deformation of the elevating bar 34 is considered so as to sufficiently function as a storage space for the elevating bar 34 in the lowered position. There is a need. And when the bending deformation of the raising / lowering bar 34 increases, the recess 32 of the stage 10 is a larger size considering the increase in the bending deformation of the raising / lowering bar 34 so that the raising / lowering bar 34 in the lowered position does not protrude. It is required to be formed. As a result, the rigidity of the support base 26 of the stage 10 is lowered, and there is a concern that the planar accuracy of the holding surface is lowered.

  Therefore, in the stage 10 which is an example of the embodiment of the present invention, the lifting bar 34 having a shape to which bending deformation is given in advance so as to cancel the bending caused by the support of the support mechanism 36 is used.

  FIG. 5 is a front view schematically showing a lift bar included in a stage which is an example of an embodiment of the present invention.

  In the stage 10 which is an example of the embodiment of the present invention, as shown in FIG. It has a shape to which bending deformation is given in advance so as to warp in a convex shape.

  The lift bar 34 of the stage 10 which is an example of the embodiment of the present invention shown in FIG. 5 is formed by performing machining or bending after being formed as a rod-like member that does not bend or warp and extends straight. be able to.

  As shown in FIG. 5, when a plate-like sample (not shown) is placed on the upper surface 34a of the elevating bar 34 at the end of each elevating bar 34, the sample moves up and down in contact with the edge of the sample. A shoulder 34b is formed to prevent the bar 34 from protruding from the end. Further, in a region close to the shoulder portion 34b of the upper surface 34a of the lifting bar 34, a concave shape for preventing the edge of the sample from coming into contact with the upper surface 34a of the lifting bar 34 due to the inclination of the sample on the lifting bar 34. The relief groove 70 is formed. The shoulder 34b and the escape groove 70 may be omitted in the subsequent drawings showing the lifting bar 34.

  FIG. 6 is a front view showing a main structure of a stage which is an example of the embodiment of the present invention.

  In FIG. 6, in the stage 10 shown in FIG. 1 and the like, the support base 26 having the holding surface 26 a on the upper side, the recess 32 extending linearly along the long side of the holding surface 26 a, and the holding surface 26 a An elevating bar 34 disposed along the long side direction and a support mechanism 36 that supports the elevating bar 34 so as to be movable up and down are shown. The support mechanism 36 includes a support 54 that is coupled to the elevating bar 34 at an upper portion to support the elevating bar 34, and a beam member 40 that is connected to the support 54 via a height adjusting mechanism 72. And in the stage 10 shown in FIG. 6, the raising / lowering bar 34 is attached to the support mechanism 36, and exists in the raise position which is the upper direction of the holding surface 26a.

  As schematically shown in FIG. 6, the up-and-down bar 34 has a convex upper surface 34 a side on the upper side in the Z-axis direction (upper side in the figure), that is, a side on which a sample (not shown) is placed. It attaches to the support mechanism 36 so that it may face. As described above, both ends of the lifting bar 34 attached to the support mechanism 36 are supported by the columns 54 of the support mechanism 36. As a result, the elevating bar 34 is bent so as to protrude toward the lower side of the figure due to its own weight.

  However, in the stage 10 which is an example of the embodiment of the present invention, the above-described prior measures are taken against the expected bending of the lift bar 34. That is, as shown in FIG. 5 and schematically shown by a dotted line in FIG. 6, the elevating bar 34 is bent in advance so as to cancel out the bending caused by the support of both ends by the pillars 54 of the support mechanism 36. It has a shape with deformation. Specifically, the elevating bar 34 is previously subjected to distortion caused by being attached to the support mechanism 36, that is, deforming to be convex in the opposite direction with respect to the bending to be convex downward in the figure. Granted and configured.

  Therefore, in the stage 10 which is an example of the embodiment of the present invention, as shown in FIG. 6, at least a part of the bending that occurs in a state where the lifting bar 34 is attached to the support mechanism 36 is the lifting bar 34. It is canceled by the bending deformation previously applied to.

  As a result, in the raising / lowering bar 34, the above-mentioned bending deformation | transformation provided previously is reduced by generation | occurrence | production of bending. As shown in FIG. 6, the lift bar 34 is supported by the support mechanism 36, and its linearity is improved, and the lift bar 34 becomes closer to a straight shape that extends straight. And the parallelism between the raising / lowering bar 34 and the holding surface 26a is improved more, and it will be in the state nearer parallel. Therefore, the stage 10, which is an example of an embodiment of the present invention, can reduce bending deformation that occurs in the sample when the plate-like sample is placed on the upper surface 34 a of the elevating bar 34.

  Moreover, in the stage 10 which is an example of embodiment of this invention, the recessed part 32 of the holding surface 26a of the support stand 26 becomes an accommodation space of the raising / lowering bar 34 in a lowered position, as mentioned above, and the raising / lowering bar 34 Therefore, formation with a size that takes into account the flexural deformation is required. Therefore, in the stage 10 which is an example of the embodiment of the present invention, the recess 32 takes into account the deformation of the lifting bar 34, but as described above, the linearity of the lifting bar 34 is improved and its bending deformation is reduced. Since it is smaller, it can be formed in a smaller size as compared with the conventional technique using a lifting bar. As a result, a decrease in rigidity of the support base 26 of the stage 10 can be reduced, and a decrease in planar accuracy of the holding surface 26a can be suppressed.

  At this time, in the stage 10 which is an example of embodiment of this invention, the following illustration is possible about the bending deformation | transformation previously given to the raising / lowering bar 34. FIG.

  FIG. 7 is a schematic cross-sectional view of a lift bar, a recess, and a support base showing a state where the lift bar is in a lowered position in a stage that is an example of an embodiment of the present invention.

  The raising / lowering bar 34 can be formed from an aluminum material, for example. And in the stage 10 which is an example of embodiment of this invention as shown in FIG. 7, the raising / lowering bar | burr 34 can have a rod-shaped shape from which the shape of the cross section orthogonal to the longitudinal direction becomes a rectangle. In that case, in the lifting bar 34, the length can be set to 1310 mm in consideration of the size of the sample to be placed, the height dimension (H) of the rectangular cross section is 10 mm, and the width dimension (W) is It can be 5 mm.

  As shown in FIG. 7, in the stage 10 which is an example of the embodiment of the present invention, when the lifting bar 34 is in the lowered position, the upper surface 34 a of the lifting bar 34 is directed upward in the Z-axis direction, and the support base 26. Is accommodated in a recess 32 formed in the holding surface 26a.

  At this time, it is assumed that the elevating bar 34 having the above shape and dimensions has a straight linear shape to which no bending deformation is previously applied. In that case, as shown in FIG. 4, the maximum deflection generated by its own weight in a state where both ends thereof are supported by the columns 54 of the support mechanism 36 is about 2 mm toward the lower side of the figure. Therefore, the maximum bending deformation in a state where such a lifting bar 34 is supported by the support mechanism 36 is about 2 mm toward the lower side of the figure.

  On the other hand, in the stage 10 that transfers the plate-shaped sample using the lifting bar 34, the maximum bending deformation due to the weight of the lifting bar 34 is preferably 1.0 mm or less, and 0.5 mm or less. Is more preferable. That is, in the stage 10 which is an example of the embodiment of the present invention, the allowable deformation of the lifting bar 34 attached to the support mechanism 36 has an allowable range of 1.0 mm or less, more preferably 0.5 mm or less.

  When the bending deformation due to the weight of the lifting bar 34 is 0 mm, the space between the lifting bar 34 attached to the support mechanism 36 and the holding surface 26a of the support base 26 can be made parallel.

  Therefore, when the length of the lifting / lowering bar 34 is 1310 mm, the bending deformation previously applied to the lifting / lowering bar 34 before being attached to the support mechanism 36 is preferably 1.0 mm or more and 3.0 mm or less. That is, the elevating bar 34 having a length of 1310 mm has a shape to which bending deformation of 1.0 mm to 3.0 mm is applied in advance so that the upper surface 34 a side is warped in a convex shape, and the upper surface warping the convex shape. It is preferable to attach to the support mechanism 36 so that the 34a side faces the upper side. By doing in this way, in the stage 10, it becomes possible to make the largest bending deformation by the dead weight of the raising / lowering bar 34 supported by the support mechanism 36 into 1.0 mm or less, More preferably, 0.5 mm or less.

  Here, in the stage 10 which is an example of the embodiment of the present invention, the lifting bar 34 corresponds to the size of the sample to be placed. Specifically, according to the long side dimension of the holding surface 26a, for example, 1 m It is formed with a length of ˜4 m. The height and height dimensions (H) and width (W) of the rectangular cross-section orthogonal to the longitudinal direction of the lift bar 34 are determined in consideration of the rigidity of the lift bar 34 and the length dimension of the lift bar 34. Accordingly, a value slightly increased or decreased from the above value is set.

  However, in the stage 10, the maximum bending deformation due to the weight of the lifting bar 34 supported by the support mechanism 36 is preferably 1.0 mm or less, for example, 0.5 mm or less, as described above. Is more preferable.

  Accordingly, in consideration of the material, length dimension, cross-sectional shape, height dimension (H) and width dimension (W) of the cross-sectional shape of the lift bar 34, the lift bar 34 has a linear shape that extends straight. Therefore, it is preferable to analyze / calculate the amount of bending deformation that occurs when the lifting bar 34 is supported at both ends, or to obtain it by experiment / measurement. In addition, it is preferable to determine the amount of flexural deformation previously applied to the lift bar 34.

  As a result, in the stage 10 which is an example of the embodiment of the present invention, the elevating bar 34 has a length of 1 m to 4 m, and 1.0 mm to 5.0 mm so that the upper surface 34a side is warped in a convex shape. It is preferable to attach to the support mechanism 36 so that the upper surface 34a side faces upward. In this way, the stage 10 can hold samples of various sizes, and can make the maximum bending deformation due to the weight of the elevating bar 34 supported by the support mechanism 36 within a desired tolerance range. 1.0 mm or less, more preferably 0.5 mm or less.

  And the stage 10 which is an example of embodiment of this invention has the raising / lowering bar 34 of the above structure, and each recessed part 32 provided in the holding surface 26a of the support stand 26 as shown in FIG. The lift bar 34 can be accommodated. That is, as will be described in detail later, the recess 32 has a width dimension sufficient to accommodate the lift bar 34 attached to the support mechanism 36 and is the highest of the lift bar 34 in the accommodated state. The portion at the position has a depth dimension that matches the holding surface 26a, or a depth dimension that results in a position that is lower than the holding surface 26a.

  For example, in the stage 10, as shown in FIG. 7, the lifting bar 34 has a rod-like shape in which the cross-sectional shape orthogonal to the longitudinal direction is a rectangle, and the recess 32 of the holding surface 26 a is formed by the lifting bar 34. The shape of the cross section orthogonal to the direction in which the recess 32 extends can have a shape corresponding to the shape of the rectangle. In that case, as described above, the recess 32 has a width dimension sufficient to accommodate the lift bar 34 attached to and supported by the support mechanism, and the upper surface of the lift bar 34 in the accommodated state. Has a depth dimension corresponding to the holding surface 26a.

  At this time, in the conventional stage that does not take into account the bending that occurs in the lifting bar as in the prior art, it is necessary to form a larger recess corresponding to the bending deformation of the lifting bar. However, in the stage 10 which is an example of the embodiment of the present invention, in the lifting bar 34, the bending due to its own weight is taken into consideration, and the bending deformation that offsets the bending is given to the lifting bar 34 in advance. Therefore, in the stage 10 which is an example of the embodiment of the present invention, the recess 32 of the holding surface 26a can be made small, and particularly the depth can be made shallow. As a result, the stage 10 can suppress a decrease in the rigidity of the support base 26.

  The stage 10, which is an example of an embodiment of the present invention, has the lifting bar 34 having a structure to which bending deformation is applied in advance as described above, and the support base 26 has a recess 32 that is a storage space for the lifting bar 34. Furthermore, it has an elevating device for controlling the elevating operation of the elevating bar 34.

  FIG. 8 is a cross-sectional view taken along line VV of the stage shown in FIG.

  As shown in FIG. 2, the lifting device 38 is provided on both sides of the support base 26 so as to control the operation of the support mechanism 36 that lifts and lowers the pair of beam members 40 in the vertical direction. In the example shown in FIG. 8, the lifting device 38 can be a fluid cylinder device including a cylinder body 38 a fixed to the support base 26 via a mounting plate 50 and a piston rod 38 b protruding from the cylinder body 38 a. . The fluid cylinder device constituting the elevating device 38 is operated by air pressure or hydraulic pressure. The lifting and lowering device 38 is arranged with its axis line along the vertical direction, and the tip of the piston rod 38 b is fixed to a coupling member 52 fixed to the beam member 40.

  Therefore, in the stage 10, as shown in FIG. 3, the pair of lifting devices 38 disposed on both sides of the support base 26 are operated synchronously, so that the stage 10 is disposed along the support base 26 on both sides of the support base 26. The pair of beam members 40 can be moved up and down synchronously to control the lifting operation of the support mechanism 36. At this time, the support mechanism 36 includes the pair of beam members 40 and the plurality of columns 54 as described above. The upper ends of the plurality of columns 54 are respectively coupled to the corresponding lifting bars 34 to support the lifting bars 34. Therefore, the elevating device 38 can integrally control the elevating operation of the plurality of elevating bars 34 by controlling the elevating operation of the support mechanism 36.

  FIG. 9 is a schematic front view of a main part of a stage, which is an example of an embodiment of the present invention, showing a state in which the lifting bar is in the raised position.

  FIG. 10 is a schematic front view of a main part of a stage, which is an example of an embodiment of the present invention, showing a state where the lifting bar is in the lowered position.

  In the stage 10 which is an example of the embodiment of the present invention having the above-described configuration, by using the lifting device 38 (not shown in FIGS. 9 and 10), all the lifting bars 34 shown in FIG. 26, a raised position that protrudes from the recess 32 of the holding surface 26a and is located above the holding surface 26a, and a lifting bar 34 shown in FIG. 10 is accommodated in the recess 32, and its upper surface 34a is the holding surface of the support base 26. It is operated synchronously so that all the lifting bars 34 are operated synchronously with the lowered position below 26a.

  And the stage 10 which is an example of embodiment of this invention is a prober (not shown) for test | inspecting samples 12, such as a board | substrate and a liquid crystal panel, as demonstrated using FIGS. 1-3. It can be incorporated and used to inspect the sample 12.

  That is, with reference to FIG. 1, the sample 12 on the robot arm 24 of the transport robot 14 is moved onto the lift bar 34 at the raised position shown in FIG. 9. At this time, an impact corresponding to the weight of the sample 12 acts on the lifting bar 34 as the robot arm 24 descends due to the contraction operation of the shaft member 22 of the transfer robot 14. In the case where an impact relaxation mechanism is provided between the two, the sample 12 can be prevented from receiving an impact due to its elastic support action.

  When the sample 12 moves from the robot arm 24 to each lift bar 34, even if the sample 12 is inclined with respect to the longitudinal direction of the lift bar 34, for example, the both ends of each lift bar 34 are shown in FIG. 9 (not shown in FIGS. 9 and 10), the escape groove 70 can be formed close to the shoulder 34b, and the edge inclined downward of the sample 12 does not contact the upper surface 34a of the elevating bar 34. . As a result, the sample 12 is transferred to the lift bar 34 without being damaged by contact with the lift bar 34, and the sample 12 transferred onto the lift bar 34 is removed from the lift bar 34 by the shoulder 34 b of the lift bar 34. It is reliably prevented from falling off.

  When the sample 12 is moved onto the lift bar 34 and the robot arm 24 is retracted from the support base 26, the lift device 38, which is a pair of fluid cylinder devices, synchronously contracts. 10 is held in the lowered position.

  When the elevating bar 34 moves to the lowered position, as shown in FIG. 2, the sample 12 is adsorbed to the support 26 by the negative pressure acting on the adsorbing port 30b and is securely held. Etc. can undergo a predetermined inspection.

  When the above-described inspection of the sample 12 is completed, the lift bar 34 is moved toward the raised position shown in FIG. 9 by the operation of the pair of lift devices 38 (not shown in FIGS. 9 and 10). When the sample 12 on the support table 26 is about to float from the holding surface 26a of the support table 26 by the lifting bar 34 in accordance with the control of the lifting device 38, the sample is caused by the air guiding action of the narrow groove 30a shown in FIG. The generation of static electricity at 12 is suppressed.

  The inspected sample 12 on the lift bar 34 in the raised position is transferred to the robot arm 24 by the extension of the shaft member 22 with the robot arm 24 of the transfer robot 14 inserted between the lift bars 34. Thereafter, it is returned to the cassette described above by the transfer robot 14.

  According to the stage 10 as an example of the embodiment of the present invention, the bending deformation is reduced in the lifting bar 34 attached to the support mechanism 36 as shown in FIG. The plate-like sample 12 can be received and delivered on the upper side of the holding surface 26a while reducing the distortion force generated in the plate.

  Moreover, according to the stage 10 which is an example of embodiment of this invention, the recessed part 32 for accommodating the raising / lowering bar 34 in a descent | fall position can be formed in a small size by the support stand 26, and the support stand 26 Can be reduced, and consequently, the rigidity of the stage 10 can be reduced.

  And according to the stage 10 which is an example of embodiment of this invention, the raising / lowering bar 34 can be raised / lowered with the raising / lowering apparatus 38 provided in the side of the support stand 26. FIG. Therefore, it is possible to provide the stage 10 that can deliver and hold the sample 12 relatively inexpensively without complicating the configuration of the stage 10.

  In addition, in the stage 10 which is an example of embodiment of this invention mentioned above, although the example which formed the recessed part 32 in parallel with the long side of the holding | maintenance 26a was shown, it replaces with this and the recessed part 32 is the holding surface 26a. The plurality of recesses 32 can be formed in parallel so as to extend angularly with the long side. And the raising / lowering bar | burr 34 to which bending deformation | transformation was previously provided can be arrange | positioned so as to correspond to the arrangement structure of such a recess 32. FIG.

  In addition, as the lifting device 38, various lifting devices such as an electric motor, a rack and pinion, or a linear motor can be appropriately used instead of the above-described fluid cylinder device.

  Furthermore, in the stage 10 which is an example of the embodiment of the present invention, both ends of the elevating bar 34 are attached to the corresponding support mechanisms 36 on both sides of the support base 26. It is not limited to the structure. For example, the beam member 40 of the support mechanism 36 including the column 54 and the beam member 40 is provided below the support base 26, a through hole is provided in the support base 26, and the column 54 coupled to the beam member 40 is passed through the through hole. It is also possible to provide it. In that case, the column 54 coupled to the beam member 40 below the support base 26 passes through the support base 26 through the through hole of the support base 26, and on the holding surface 26 a side which is the upper side of the support base 26, It can comprise so that each raising / lowering bar 34 arrange | positioned there may be supported. The stage 10 can control the lifting / lowering operation of the lifting / lowering bar 34 by the control of the lifting / lowering device 38 via the support mechanism 36 including the support 54 penetrating the support base 26.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

  For example, as described above, an example in which the stage according to the embodiment of the present invention is used for inspecting a plate-like sample such as a liquid crystal panel has been described. However, the stage according to the embodiment of the present invention is used for inspecting a sample. Not only used. In addition to inspection, it can also be used for processing substrates and manufacturing liquid crystal panels and organic EL panels.

DESCRIPTION OF SYMBOLS 10 Stage 12 Sample 14 Transfer robot 16 Base 18 Movable base 20, 54 Post 22 Axis member 24 Robot arm 26 Support base 26a Holding surface 28 XYZθ moving stand 30a Narrow groove 30b Suction port 32 Recess 34 Elevating bar 34a Upper surface 34b Shoulder 36 Support mechanism 38 Lifting device 38a Cylinder body 38b Piston rod 40 Beam member 50 Mounting plate 52 Coupling member 70 Escape groove 72 Height adjustment mechanism

Claims (6)

A stage for holding a plate-shaped sample,
A support with a holding surface for placing the sample;
A plurality of elevating bars disposed across the holding surface;
A plurality of recesses provided to extend parallel to each other on the holding surface so as to accommodate the lifting bar in the support base;
A support mechanism for supporting the elevating bar so as to be movable up and down;
An elevating device that controls the operation of the support mechanism to elevate between the raised position where the elevating bar protrudes from the recess and the lowered position accommodated in the recess;
The stage, wherein the elevating bar has a shape to which bending deformation is applied in advance so as to cancel the bending caused by the support of the support mechanism.   The stage according to claim 1, wherein the support base has an adsorption port on the holding surface, and adsorbs and holds the sample.   3. The stage according to claim 1, wherein the recess has a size such that the elevating bar at the lowered position is accommodated in the support base without protruding from the holding surface. 4.   The elevating bar has a bar shape in which the shape of the cross section orthogonal to the longitudinal direction is a rectangle, and the recess has a shape in which the shape of the cross section orthogonal to the direction in which the recess extends is a rectangle. The stage according to any one of claims 1 to 3, characterized in that: A stage for holding a plate-shaped sample,
A support with a holding surface for placing the sample to be inspected;
A plurality of elevating bars disposed across the holding surface;
A plurality of recesses provided to extend parallel to each other on the holding surface so as to be accommodated in the support base without protruding from the holding surface,
A support mechanism to which the elevating bar is attached and supports the elevating bar so as to be movable up and down;
An elevating device that controls the operation of the support mechanism so as to elevate between the ascending position where the elevating bar protrudes from the recess and the descending position accommodated in the recess;
The elevating bar has a shape that is deformed in advance so that the upper surface side warps in a convex shape, and is attached to the support mechanism so that the upper surface side that warps in the convex shape faces upward. Stage to do.   The stage according to claim 5, wherein the support base has an adsorption port on the holding surface, and adsorbs and holds the sample.

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