CN214503709U - Test probe station capable of mounting various probe cards - Google Patents

Abstract

The utility model belongs to the technical field of the wafer detects and specifically relates to a test probe station of mountable multiple probe card is related to, it includes probe station body, probe station body is last to open there is the mounting groove, be equipped with the elevating platform in the mounting groove, be equipped with lifting unit between the diapire of elevating platform and mounting groove, lifting unit is used for controlling the elevating platform and rises or descend, it has the holding tank to open on the elevating platform, the diapire of holding tank and probe station body open jointly have the through-hole that is used for detecting the wafer, be equipped with two in the holding tank and support tight subassembly, two support tight subassembly about the length direction symmetry of holding tank, support tight subassembly including supporting tight board and supporting tight pressure spring, support the diapire of tight board perpendicular to holding tank, support tight board along the length direction sliding connection of holding tank on the diapire of holding tank, support tight pressure spring extrusion between the lateral wall of tight board and holding tank. The probe station has the effect that probe cards with different sizes can be installed on the probe station.

Description

Test probe station capable of mounting various probe cards

Technical Field

The present invention relates to the field of wafer inspection, and more particularly, to a test probe station capable of mounting a plurality of probe cards.

Background

The probe station is a wafer probe test device, the probe test has an important position in the manufacturing process of a semiconductor device, and the probe test can find grains with abnormal performance in the wafer in time and reduce the processing consumption of subsequent procedures. Typically, after the wafer processing is completed, the wafer is subjected to a chip acceptance test. The probe on the probe card is directly contacted with the welding pad or the bump on the wafer chip to lead out the chip signal, and then the aim of automatic measurement is achieved by matching with a peripheral test instrument and software control. The probe card is usually fixed on a probe station, so the taking and placing work of the probe card is very important.

Chinese patent publication No. CN205067532U discloses a probe station, which comprises a probe station main body and a probe card placing table, wherein a circular groove is formed in the probe station main body, the probe card placing table is arranged in the circular groove, through holes are formed in the center of the probe card placing table and the center of the bottom of the circular groove, and the bottom of the probe card placing table is connected with a lifting control device.

In view of the above-mentioned related technologies, the apparatus of the present invention can only be applied to a probe card with a specific size, and cannot be adjusted for use, and the application range is limited.

SUMMERY OF THE UTILITY MODEL

In order to enable a probe station to mount probe cards of different sizes, the present application provides a test probe station that can mount a variety of probe cards.

The test probe station capable of mounting various probe cards adopts the following technical scheme:

the utility model provides a test probe station of mountable multiple probe card, includes probe station body, it has the mounting groove to open on the probe station body, be equipped with the elevating platform in the mounting groove, be equipped with the lifting unit between the diapire of elevating platform and mounting groove, the lifting unit is used for controlling the elevating platform and rises or descend, it has the holding tank to open on the elevating platform, the through-hole that is used for detecting the wafer is opened jointly to the diapire of holding tank and probe station body, be equipped with two in the holding tank and support tight subassembly, two support tight subassembly and be symmetrical about the length direction of holding tank, support tight subassembly including supporting tight board and supporting tight pressure spring, support the diapire of tight board perpendicular to holding tank, support tight board along the length direction sliding connection of holding tank on the diapire of holding tank, support tight pressure spring extrusion between the lateral wall of supporting tight board and holding tank.

By adopting the technical scheme, when workers need to place the probe card, the lifting platform is lifted out of the mounting groove by virtue of the lifting assembly, then the two abutting plates slide towards the direction far away from the through hole, at the moment, the abutting plates extrude the abutting compression springs, the abutting compression springs shrink and deform to accumulate elastic potential energy, a space for placing the probe card is reserved, then, external force applied to the abutting plates is removed, the abutting compression springs restore to shapes and release the elastic potential energy, horizontal elastic force towards the probe card is applied to the abutting plates, the two abutting plates apply elastic force to the probe card at the same time, and the effect of clamping and fixing the probe card is achieved.

Optionally, a guide rod penetrates through the abutting pressure spring, one end of the guide rod is fixedly connected to the abutting plate, and the other end of the guide rod is slidably connected to the inner side wall of the accommodating groove.

Through adopting above-mentioned technical scheme, the guide bar wears to locate in propping tight pressure spring, plays the effect of direction to the deformation route of propping tight pressure spring.

Optionally, the bottom of the abutting plate is fixedly connected with a sliding block, a sliding groove for sliding the sliding block is formed in the bottom wall of the accommodating groove, and the sliding groove is formed perpendicular to the width direction of the lifting platform.

Through adopting above-mentioned technical scheme, the cooperation in sliding block and sliding groove makes to support tight board and can slide on the diapire of holding tank, plays the guide effect to the removal route that supports tight board simultaneously.

Optionally, be equipped with two relative locating levers, two on the diapire of holding tank the diapire of locating lever perpendicular to holding tank, the locating lever is located holding tank bottom length direction's side.

Through adopting above-mentioned technical scheme, because it has the locating hole to open on the probe card, can make the staff when placing the probe card with the help of the locating lever, confirm the position of placing of probe card with the help of the locating lever, it is more convenient.

Optionally, the bottom of locating lever is connected with the nut piece, it has the displacement groove that supplies the nut piece to slide to open on the diapire of holding tank, wear to be equipped with the lead screw in the nut piece, the end connection that the nut piece was kept away from to the lead screw has driving motor.

Through adopting above-mentioned technical scheme, driving motor drive lead screw rotates, and the nut piece can slide at the displacement inslot level through the screw-thread fit with the lead screw to realize the change of locating lever position.

Optionally, four lifting assemblies are arranged on the bottom surface of the lifting platform.

Through adopting above-mentioned technical scheme, four lifting unit make the rising or the decline process of elevating platform more steady.

Optionally, the lifting assembly is an air cylinder, the air cylinder is arranged on the bottom wall of the mounting groove, and the telescopic rod of the air cylinder is fixedly connected to the bottom of the lifting platform.

Through adopting above-mentioned technical scheme, when the dismouting of probe card is carried out to needs, outside the telescopic link with the help of the cylinder made the elevating platform rise to the mounting groove, the staff operation of being convenient for, when the probe platform need begin work, made the elevating platform descend to the mounting groove in with the help of the telescopic link of cylinder again.

Optionally, a buffer layer is attached to one side of the abutting plate facing the probe card.

By adopting the technical scheme, the buffer layer is made of deformable materials, the buffer layer plays a role in buffering when the clamping plate clamps and fixes the probe card, and the possibility that the clamping plate damages the probe card is reduced.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the two abutting components exert elastic force on the probe card simultaneously, so that the probe card is clamped and fixed, and due to the fact that the deformation range of the abutting compression spring is large, workers can place probe cards of different sizes in the accommodating groove, and the probe station is suitable for different probe cards;

2. the positioning rod is connected with the sliding assembly, so that the position of the positioning rod can be changed, and the probe station not only can be suitable for probe cards with different lengths, but also can be suitable for probe cards with different widths;

3. the lifting assembly enables the lifting platform to ascend or descend in the mounting groove, the lifting platform is lifted when workers carry out the dismounting and mounting of the probe card, and the lifting platform descends to the mounting groove when the probe platform needs to start working, so that the process of dismounting and mounting the probe card is more convenient and faster.

Drawings

Fig. 1 is a schematic structural diagram for embodying an embodiment of the present application.

FIG. 2 is a cross-sectional view for embodying embodiments of the present application.

Fig. 3 is a partially enlarged view for embodying a point a in fig. 2.

Fig. 4 is an exploded view for embodying the manner in which the lifting assembly is attached.

Description of reference numerals: 1. a probe station body; 2. mounting grooves; 3. a lifting platform; 31. accommodating grooves; 32. positioning the edge; 4. a lifting assembly; 41. a cylinder; 5. a through hole; 6. a propping component; 61. a propping plate; 611. a sliding block; 612. a sliding groove; 613. a buffer layer; 62. pressing the pressure spring tightly; 621. a guide bar; 6211. a force application plate; 7. positioning a rod; 71. a nut block; 711. a displacement slot; 712. a screw rod; 713. a drive motor; 7131. mounting a plate; 7132. a lifting groove.

Detailed Description

The present application is described in further detail below with reference to figures 1-4.

The embodiment of the application discloses a test probe station capable of mounting various probe cards. Referring to fig. 1, a test probe station that can mount various probe cards includes a probe station body 1.

Referring to fig. 2, a rectangular mounting groove 2 is formed in a probe station body 1, a rectangular lifting table 3 is arranged in the mounting groove 2, and the lifting table 3 is used for mounting a probe card.

Referring to fig. 2, four lifting assemblies 4 are connected to the lower side of the lifting table 3, and the four lifting assemblies 4 are respectively located at four corners of the lower surface of the lifting table 3. Lifting unit 4 is used for controlling the vertical height of elevating platform 3 in mounting groove 2, and four lifting unit 4's setting makes the rising or the decline process of elevating platform 3 more steady.

Referring to fig. 1 and 2, a receiving groove 31 for mounting a probe card is formed in the elevating table 3, and the receiving groove 31 is a rectangular groove. The center of the probe station body 1 is provided with a through hole 5 for placing a wafer, and the through hole 5 is communicated with the accommodating groove 31. The worker can manipulate the wafer placement device through the through holes 5 to the probe card probe positions for contact connection testing of the probes and the wafer.

Referring to fig. 2, 3 length direction's of elevating platform side integrated into one piece has location border 32, and location border 32 has two on 3 length direction's of elevating platform both sides top integrated into one piece, and two location borders 32 set up relatively, and location border 32 perpendicular to holding tank 31 width direction's side and orientation keep away from holding tank 31's direction. When the lifting platform 3 descends, the positioning edge 32 plays a role in positioning in the vertical direction, and when the positioning edge 32 is in contact with the side wall of the mounting groove 2, the position of the lifting platform 3 is proper.

Referring to fig. 1, two abutting assemblies 6 are slidably disposed on the bottom wall of the accommodating groove 31, and the two abutting assemblies 6 are symmetrical with respect to the length direction of the accommodating groove 31. When the lifting platform 3 is lifted by the lifting component 4, a worker places the probe card in the accommodating groove 31, the length direction of the probe card is parallel to the length direction of the accommodating groove 31, and then the probe card is clamped and fixed by the abutting components 6 on two sides of the length direction of the probe card, so that the possibility that the probe card shakes or misplaces in the lifting or working process is reduced.

Referring to fig. 1, the tightening assembly 6 includes a tightening plate 61 and a tightening pressure spring 62, the tightening plate 61 is parallel to the side wall of the accommodating groove 31 in the width direction, the tightening pressure spring 62 is extruded between the tightening plate 61 and the inner side wall of the accommodating groove 31, one end of the tightening pressure spring 62 is fixedly connected to the tightening plate 61, and the other end of the tightening pressure spring is fixedly connected to the inner side wall of the accommodating groove 31.

Referring to fig. 2, a dovetail-shaped sliding block 611 is fixedly connected to the bottom of the abutting plate 61, a sliding groove 612 for sliding the sliding block 611 is formed in the bottom wall of the accommodating groove 31, and the sliding groove 612 is dovetail-shaped and is formed parallel to the length direction of the accommodating groove 31. The sliding of the sliding block 611 in the sliding groove 612 guides the moving direction of the abutting plate 61, so that the abutting plate 61 can be accurately close to or far from the probe card.

Referring to fig. 1, a buffer layer 613 is adhesively attached to a side surface of the abutting plate 61 facing the probe card, and the buffer layer 613 is made of a deformable rubber material, so that when the abutting plate 61 abuts against the side surface of the probe card, the buffer layer 613 plays a role of buffering therein, thereby reducing the possibility that the abutting plate 61 damages the probe card.

Referring to fig. 2, a guide rod 621 penetrates through the pressing spring 62, the guide rod 621 is perpendicular to the pressing plate 61, one end of the guide rod 621 is fixedly connected to the pressing plate 61, and the other end of the guide rod 621 penetrates through the inner side wall of the accommodating groove 31 and is slidably connected with the inner side wall of the accommodating groove 31. The guide rod 621 plays a role of guiding a deformation path against the compression spring 62 on one hand, and on the other hand, the guide rod 621 is restricted by the through hole 311 so that the sliding block 611 does not escape from the sliding groove 612.

Referring to fig. 1 and 2, when probe cards with different lengths are mounted on the probe station body 1, since the clamping and fixing of the pressing component 6 to the probe cards are realized by the elastic force of the pressing spring 62, the pressing spring 62 can adjust the elastic force adaptively according to the probe cards with different sizes, so that the probe station can be suitable for the probe cards with different lengths.

Referring to fig. 2, the end of the guide bar 621 penetrating through the inner side wall of the receiving groove 31 is fixedly connected with a force applying plate 6211, and the force applying plate 6211 facilitates a worker to pull the guide bar 621, so that the gap between the two abutting plates 61 is enlarged to place a probe card.

Referring to fig. 2, two opposite positioning rods 7 are arranged on the bottom wall of the accommodating groove 31, the positioning rods 7 are perpendicular to the bottom wall of the accommodating groove 31, and the positioning rods 7 are close to the middle point of the side edges of the bottom wall of the accommodating groove 31 in the length direction. When the worker needs to place the probe card, the positioning rod 7 is matched with the positioning hole in the probe card, and the positioning angle and the positioning position of the probe card are guided and positioned.

Referring to fig. 3, the bottom end of the positioning rod 7 is fixedly connected with a nut block 71, a displacement groove 711 for sliding the nut block 71 is formed in the bottom wall of the accommodating groove 31, and the displacement groove 711 is perpendicular to the length direction of the accommodating groove 31. A screw 712 is inserted into the nut block 71, the screw 712 is in threaded connection with the nut block 71, and the screw 712 is parallel to the width direction of the lifting table 3.

Referring to fig. 3, a driving motor 713 is connected to an end of the screw 712 penetrating through the displacement slot 711 as a driving source, a mounting plate 7131 for placing the driving motor 713 is fixedly connected to a side edge of the lifting platform 3 in the length direction, a lifting slot 7132 for allowing the mounting plate 7131 to slide up and down is correspondingly formed in an inner side wall of the mounting slot 2, the displacement slot 711 is opened in the mounting plate, and the driving motor 713 is located in the displacement slot 711 in the mounting plate 7131.

Referring to fig. 3, the driving motor 713 drives the lead screw 712 to rotate, the nut block 71 moves back and forth along the axial direction of the lead screw 712 under the screw fit with the lead screw 712, and drives the positioning rod 7 to slide in the width direction of the receiving groove 31, so as to adjust the position of the positioning rod 7 in the width direction of the lifting table 3, and enable the positioning rod 7 to be adapted to positioning holes at different positions on various probe cards.

Referring to fig. 4, the lifting assembly 4 is a cylinder 41, the cylinder 41 is fixedly connected to the bottom of the mounting groove 2, and the telescopic rod of the cylinder 41 is fixedly connected to the bottom of the lifting platform 3. The elevating platform 3 is vertically displaced in the mounting groove 2 under the action of the telescopic rod of the cylinder 41.

The implementation principle of the test probe station capable of mounting various probe cards in the embodiment of the application is as follows: before the probe card is installed, a worker firstly uses the telescopic rod of the air cylinder 41 to lift the lifting table 3 to be higher than the installation groove 2, then the driving motor 713 is started to drive the screw rod 712 to rotate, and the screw rod 712 drives the nut block 71 to move, so that the distance between the two positioning rods 7 is adjusted. Then, the force application plate 6211 is pulled to enable the abutting plate 61 to extrude the abutting compression spring 62, the abutting compression spring 62 is deformed to accumulate elastic potential energy, the distance between the two abutting plates 61 is increased, a worker can conveniently place a probe card, after the positioning hole of the probe card is sleeved with the positioning rod 7 and the probe card is placed in the accommodating groove 31, the external force applied to the force application plate 6211 is removed, the abutting compression spring 62 releases the elastic potential energy at the moment, the abutting plate 61 is applied with elastic force towards the direction of the probe card until the buffer layer 613 abuts against the probe card, and therefore clamping and fixing of the probe card are achieved. And finally, the lifting platform 3 is driven by the telescopic rod of the air cylinder 41 to move downwards to return to the mounting groove 2, and subsequent probe detection is carried out. When the probe card needs to be removed, the lift table 3 is lifted by the air cylinder 41 to remove the probe card.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (8)

1. The utility model provides a test probe platform of mountable multiple probe card, includes probe platform body (1), it has mounting groove (2) to open on probe platform body (1), its characterized in that: the probe station comprises a mounting groove (2), a lifting platform (3) is arranged in the mounting groove (2), a lifting assembly (4) is arranged between the lifting platform (3) and the bottom wall of the mounting groove (2), the lifting assembly (4) is used for controlling the lifting platform (3) to ascend or descend, an accommodating groove (31) is formed in the lifting platform (3), a through hole (5) for detecting a wafer is formed in the bottom wall of the accommodating groove (31) and the probe station body (1) together, two abutting assemblies (6) are arranged in the accommodating groove (31), the two abutting assemblies (6) are symmetrical with respect to the length direction of the accommodating groove (31), each abutting assembly (6) comprises an abutting plate (61) and an abutting compression spring (62), each abutting plate (61) is perpendicular to the bottom wall of the accommodating groove (31), and the abutting plates (61) are connected to the bottom wall of the accommodating groove (31) in a sliding mode along the length direction of the accommodating groove (31), the pressing compression spring (62) is squeezed between the pressing plate (61) and the side wall of the accommodating groove (31).

2. The test probe station of claim 1, wherein: the pressing spring (62) is internally provided with a guide rod (621) in a penetrating manner, one end of the guide rod (621) is fixedly connected to the pressing plate (61), and the other end of the guide rod is connected to the inner side wall of the accommodating groove (31) in a sliding manner.

3. The test probe station of claim 2, wherein: the bottom of the abutting plate (61) is fixedly connected with a sliding block (611), the bottom wall of the accommodating groove (31) is provided with a sliding groove (612) for the sliding block (611) to slide, and the sliding groove (612) is formed in a direction perpendicular to the width direction of the lifting platform (3).

4. The test probe station of claim 3, wherein: be equipped with two relative locating levers (7) on the diapire of holding tank (31), two locating lever (7) perpendicular to the diapire of holding tank (31), locating lever (7) are located holding tank (31) bottom length direction's side.

5. The test probe station of claim 4, wherein: the bottom of locating lever (7) is connected with nut piece (71), it has displacement groove (711) that supplies nut piece (71) to slide to open on the diapire of holding tank (31), lead screw (712) wear to be equipped with in nut piece (71), the end connection that nut piece (71) were kept away from in lead screw (712) has driving motor (713).

6. The test probe station of claim 1, wherein: four lifting components (4) are arranged on the bottom surface of the lifting platform (3).

7. The test probe station of claim 6, wherein: the lifting component (4) is an air cylinder (41), the air cylinder (41) is arranged on the bottom wall of the mounting groove (2), and a telescopic rod of the air cylinder (41) is fixedly connected to the bottom of the lifting platform (3).

8. The test probe station of claim 1, wherein: a buffer layer (613) is attached to one side of the abutting plate (61) facing the probe card.

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