CN113804701B - Visual inspection device - Google Patents
Visual inspection device Download PDFInfo
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- CN113804701B CN113804701B CN202110992087.5A CN202110992087A CN113804701B CN 113804701 B CN113804701 B CN 113804701B CN 202110992087 A CN202110992087 A CN 202110992087A CN 113804701 B CN113804701 B CN 113804701B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
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- Health & Medical Sciences (AREA)
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- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The application relates to the technical field of semiconductor processing and discloses a visual detection device which comprises a working platform, a control system, a material storage mechanism, a moving mechanism, a bearing mechanism, a clamping mechanism and a visual detection mechanism, wherein the moving mechanism, the bearing mechanism, the clamping mechanism and the visual detection mechanism are arranged on the working platform; secondly, the guide groove of the supporting component plays roles of auxiliary support, guide and limit, so that the to-be-detected piece is stably placed on the bearing table in the process that the clamping mechanism moves the to-be-detected piece to the bearing table and in the process that the bearing table moves along with the supporting component, the to-be-detected piece is prevented from sliding and even slipping, and the detection accuracy is improved; in addition, the detection process of the visual detection device is intelligent and automatic, manual picking and placing are not needed, the manual participation degree is greatly reduced, and the detection efficiency is improved.
Description
Technical Field
The application relates to the technical field of semiconductor processing, in particular to a visual detection device.
Background
At present, with the development of technology, the integrated circuit industry has been greatly developed in China, and the application of semiconductors is increasingly wide, so how to efficiently detect and manufacture semiconductors has become an important subject. Wafers and bars used in the fabrication of semiconductors are susceptible to contamination, scratches, and cracks during the fabrication process, and therefore require visual inspection.
The existing visual detection device is only used for detecting wafers, has single detection varieties, and cannot meet the requirements of detecting wafers and strips with different sizes.
Disclosure of Invention
The application aims to provide a visual detection device which can be adapted to various wafers and strips and has high automation degree and can prevent slippage.
In order to achieve the above object, the present application provides a visual inspection device, which comprises a working platform, a control system, a storage mechanism, a moving mechanism, a bearing mechanism, a clamping mechanism and a visual inspection mechanism, wherein the moving mechanism, the bearing mechanism, the clamping mechanism and the visual inspection mechanism are arranged on the working platform, the storage mechanism is used for storing a piece to be inspected, the bearing mechanism comprises a supporting component, a guiding component and a bearing table, the supporting component is arranged on the moving mechanism, the guiding component and the bearing table are detachably arranged on the supporting component, the guiding component is provided with a guiding groove, and the moving mechanism, the clamping mechanism and the visual inspection mechanism are electrically connected with the control system;
the control system controls the clamping mechanism to clamp the piece to be detected from the storage mechanism into the guide groove and move the piece to be detected onto the bearing table, the moving mechanism drives the bearing table to move to the lower side of the visual detection mechanism, and the visual detection mechanism is used for detecting the piece to be detected.
In some embodiments of the present application, the guiding assembly includes a first guide rail, a first driving device, a first pressing plate, a second guide rail, a second driving device and a second pressing plate, wherein the first guide rail is arranged at one side of the supporting assembly and extends along the Y axis, the first pressing plate is arranged on the first guide rail in parallel to form the guiding groove therebetween, and the first driving device is used for driving the first pressing plate to approach or separate from the first guide rail;
the second guide rail is detachably arranged on the other side of the supporting component and is parallel to the first guide rail, the second pressing plate is arranged on the second guide rail in parallel, the guide groove is formed between the second guide rail and the second guide rail, the second driving device is used for driving the second pressing plate to be close to or far away from the second guide rail, the first driving device and the second driving device are electrically connected with the control system, and the control system controls the clamping mechanism to clamp the workpiece to be tested to move so that one side of the workpiece to be tested is positioned in the guide groove between the first guide rail and the first pressing plate, and the other side of the workpiece to be tested is positioned in the guide groove between the second guide rail and the second pressing plate.
In some embodiments of the present application, the supporting component includes a support, a first bracket, a first lifting device and an induction device, the bearing platform is disposed on the support, the first bracket is liftably disposed on the support, the first guide rail and the second guide rail are respectively disposed on two sides of the first bracket, the induction device is disposed on the first bracket and is used for inducing a height position of the first bracket, and the control system is electrically connected with the first lifting device and the induction device and controls the first lifting device to drive the first bracket to lift so as to move the workpiece to be tested to the top of the bearing platform.
In some embodiments of the present application, the first bracket has a first mounting point, a second mounting point and a third mounting point aligned along the X-axis direction, the carrier is a wafer carrier or a bar carrier, the second guide rail is mounted on the first mounting point or the second mounting point when the carrier is the wafer carrier, and the second guide rail is mounted on the third mounting point when the carrier is the bar carrier.
In some embodiments of the present application, the support assembly further includes a sliding block, a sliding rail, and a third driving device, the sliding rail is disposed on one side of the first bracket and extends along the X-axis direction, the sliding block is disposed on the sliding rail, the first guiding rail is disposed on the sliding block, and the control system is electrically connected to the third driving device and controls the third driving device to drive the sliding block to move.
In some embodiments of the present application, the visual detection mechanism includes a surface scanning module and a line scanning module that are disposed on the working platform, the surface scanning module includes a second bracket, a first adjusting component, and a surface scanning camera and a surface scanning light source that are disposed on the second bracket, the second bracket and the first adjusting component are disposed on the working platform, the first adjusting component is used for adjusting the height of the second bracket in the Z-axis direction, and the surface scanning camera and the surface scanning light source are electrically connected with the control system;
the line scanning module comprises a third support, a second adjusting component, a line scanning camera and a line scanning light source, wherein the third support and the second adjusting component are obliquely arranged on the working platform and are positioned on one side of the line scanning camera, the line scanning camera is arranged on the third support, the line scanning light source is obliquely arranged on the working platform and is positioned on the other side of the line scanning camera, the second adjusting component is used for adjusting the oblique upward height of the third support, and the line scanning camera and the line scanning light source are electrically connected with the control system.
In some embodiments of the present application, the working platform is provided with a mounting plate and a second lifting device, the second bracket, the first adjusting component, the third bracket and the second adjusting component are all arranged on the mounting plate, and the control system is electrically connected with the second lifting device and controls the second lifting device to drive the mounting plate to move up and down.
In some embodiments of the present application, the storage mechanism includes a support plate, a storage box and a third lifting device, the support plate is disposed on the third lifting device, the storage box is disposed on the support plate, the storage box can be used for taking and placing the workpiece to be tested, and the control system is electrically connected with the third lifting device and controls the third lifting device to drive the storage box to move up and down.
In some embodiments of the present application, the gripping mechanism includes a third guide rail, a connecting plate, a clamping jaw, a fourth driving device, a fifth driving device and a sixth driving device, where the third guide rail extends along the Y-axis direction, one end of the connecting plate is slidably disposed on the third guide rail, the clamping jaw is movably disposed on the connecting plate, the fourth driving device is used to drive the connecting plate to slide, the fifth driving device is used to drive the clamping jaw to move along the Y-axis direction, the sixth driving device is used to drive the clamping jaw to clamp or unclamp, and the fourth driving device, the fifth driving device and the sixth driving device are all electrically connected with the control system.
In some embodiments of the present application, the moving mechanism includes a moving platform, a transverse motor, a screw driving assembly, a bottom plate, a slideway and a longitudinal motor, the screw driving assembly is arranged on the working platform, the bottom plate is arranged on the screw driving assembly, the transverse motor is used for driving the bottom plate to move along the X-axis direction, the slideway is arranged on the bottom plate and extends along the Y-axis direction, the moving platform is arranged on the slideway, the supporting assembly is arranged on the moving platform, the longitudinal motor is used for driving the moving platform to move along the Y-axis direction, and the transverse motor and the longitudinal motor are electrically connected with the control system.
Compared with the prior art, the visual detection device provided by the application has the beneficial effects that:
the visual detection device provided by the application comprises a working platform, a control system, a material storage mechanism, a moving mechanism, a bearing mechanism, a clamping mechanism and a visual detection mechanism, wherein the moving mechanism, the bearing mechanism, the clamping mechanism and the visual detection mechanism are arranged on the working platform; secondly, the guide groove of the supporting component plays roles of auxiliary support, guide and limit, so that the to-be-detected piece is stably placed on the bearing table in the process that the clamping mechanism moves the to-be-detected piece to the bearing table and in the process that the bearing table moves along with the supporting component, the to-be-detected piece is prevented from sliding and even slipping, and the detection accuracy is improved; in addition, through control system's control, press from both sides and get the mechanism and press from both sides and get to guide way and plummer, moving mechanism drives plummer and removes to visual detection mechanism's below, visual detection mechanism detects the piece that awaits measuring, moving mechanism brings plummer back to storage mechanism department after the detection, press from both sides and get the mechanism and press from both sides the wafer or the material strip that have been detected and get and put into the storage box, whole intelligent automation need not the manual work and gets and put, greatly reduced artifical participation, improved the efficiency of detection.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a visual inspection apparatus according to an embodiment of the present application;
FIG. 2 is a schematic structural diagram of a storage mechanism according to an embodiment of the present application;
FIG. 3 is a schematic view of a part of a moving mechanism according to an embodiment of the present application;
FIG. 4 is a schematic view of a part of a moving mechanism according to an embodiment of the present application;
FIG. 5 is a schematic view of a partial structure of a carrying mechanism according to an embodiment of the present application;
FIG. 6 is a schematic view of a partial structure of a carrying mechanism according to an embodiment of the present application;
FIG. 7 is a schematic view of a structure of a carrying platform according to an embodiment of the application;
FIG. 8 is a schematic view of a clamping mechanism according to an embodiment of the present application;
FIG. 9 is a schematic view of a part of a visual inspection mechanism according to an embodiment of the present application;
fig. 10 is a schematic partial structure of a visual inspection mechanism according to an embodiment of the application.
In the figure: 1. a working platform; 11. a mounting plate; 12. a second lifting device; 2. a control system; 3. a storage mechanism; 31. a support plate; 32. a storage box; 33. a third lifting device; 4. a moving mechanism; 41. a motion platform; 42. a transverse motor; 43. a screw rod transmission assembly; 44. a bottom plate; 45. a slideway; 46. a longitudinal motor; 5. a carrying mechanism; 51. a support assembly; 511. a support; 512. a first bracket; 512a, a first mounting point; 512b, a second mounting point; 512c, third mounting point; 513. a first lifting device; 514. an induction device; 515. a slide block; 516. a slide rail; 517. a third driving device; 518. a receiving rod; 52. a guide assembly; 521. a guide groove; 522. a first guide rail; 523. a first driving device; 524. a first platen; 525. a second guide rail; 526. a second driving device; 527. a second pressing plate; 528. a feeding sensor; 529. an in-place sensor; 53. a carrying platform; 531. a wafer suction plate; 532. a first support leg; 533. a material strip sucker; 534. a strip detection light source; 535. a second support leg; 6. a clamping mechanism; 61. a third guide rail; 62. a connecting plate; 63. a clamping jaw; 64. a fourth driving device; 65. a fifth driving device; 66. a sixth driving device; 7. a visual detection mechanism; 71. a surface scanning module; 711. a second bracket; 712. a first adjustment assembly; 713. a face scanning camera; 714. a surface scanning light source; 715. a third adjustment assembly; 72. a line scanning module; 721. a third bracket; 722. a second adjustment assembly; 723. a line scanning camera; 724. a line scanning light source; 725. and a fourth adjustment assembly.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
It is to be understood that in the description of the present application, the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. The terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated, i.e., features defining "first," "second," may explicitly or implicitly include one or more such features. Furthermore, unless otherwise indicated, the meaning of "a plurality" is two or more.
It should be noted that, in the description of the present application, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.
As shown in fig. 1, 5 and 6, the embodiment of the application provides a visual inspection device, which comprises a working platform 1, a control system 2, a storage mechanism 3, a moving mechanism 4, a bearing mechanism 5, a gripping mechanism 6 and a visual inspection mechanism 7 which are arranged on the working platform 1, wherein the storage mechanism 3 is used for storing a piece to be inspected, the bearing mechanism 5 comprises a supporting component 51, a guiding component 52 and a bearing table 53, the supporting component 51 is arranged on the moving mechanism 4, the guiding component 52 and the bearing table 53 are detachably arranged on the supporting component 51, the guiding component 52 is provided with a guiding groove 521, and the moving mechanism 4, the gripping mechanism 6 and the visual inspection mechanism 7 are electrically connected with the control system 2; the control system 2 controls the clamping mechanism 6 to clamp the workpiece to be detected from the storage mechanism 3 into the guide groove 521 and move the workpiece to be detected onto the carrying table 53, the moving mechanism 4 drives the carrying table 53 to move to the lower side of the visual detection mechanism 7, and the visual detection mechanism 7 is used for detecting the workpiece to be detected.
Based on the structure, the corresponding guide assembly 52 and the bearing table 53 are selected for wafers and material strips with different sizes and are mounted on the supporting assembly 51, so that the bearing mechanism 5 can adaptively support the wafers and the material strips with different sizes, and the diversified detection requirements are met; secondly, the guide groove 521 of the supporting component 51 plays roles of auxiliary support, guide and limit, so that the to-be-detected piece is stably placed on the bearing table 53 in the process of moving the to-be-detected piece to the bearing table 53 by the clamping mechanism 6 and in the process of moving the bearing table 53 along with the supporting component 51, the to-be-detected piece is prevented from sliding or slipping, and the detection accuracy is improved; in addition, through control system 2's control, press from both sides and get mechanism 6 and press from both sides and get to guide way 521 and plummer 53, moving mechanism 4 drives plummer 53 and removes to the below of vision detection mechanism 7, vision detection mechanism 7 detects the piece that awaits measuring, moving mechanism 4 brings plummer 53 back to storage mechanism 3 department after the detection, press from both sides and get mechanism 6 and press from both sides the wafer or the material strip that have detected and get and put into storage box 32, whole intelligent automation need not the manual work and get and put, greatly reduced artifical participation, improved the efficiency of detection.
Alternatively, as shown in fig. 6, in the present embodiment, the guiding assembly 52 includes a first guide rail 522, a first driving device 523, a first pressing plate 524, a second guide rail 525, a second driving device 526, and a second pressing plate 527, where the first guide rail 522 is disposed on one side of the supporting assembly 51 and extends along the Y axis, the first pressing plate 524 is disposed on the first guide rail 522 in parallel, and a guiding slot 521 is formed therebetween, that is, the guiding slot 521 extends along the Y axis direction, and the first driving device 523 is used to drive the first pressing plate 524 to approach or separate from the first guide rail 522; the second guide rail 525 is detachably arranged on the other side of the supporting component 51 and parallel to the first guide rail 522, the second pressing plate 527 is arranged on the second guide rail 525 in parallel, a guide groove 521 is formed between the second guide rail and the second guide rail, the second driving device 526 is used for driving the second pressing plate 527 to be close to or far away from the second guide rail 525, the first driving device 523 and the second driving device 526 are electrically connected with the control system 2, the control system 2 controls the clamping mechanism 6 to clamp the workpiece to move, so that one side of the workpiece to be tested is positioned in the guide groove 521 between the first guide rail 522 and the first pressing plate 524, and the other side of the workpiece to be tested is positioned in the guide groove 521 between the second guide rail 525 and the second pressing plate 527. Based on this, the distance between the first guide rail 522 and the first pressing plate 524 can be adjusted by controlling the first driving device 523 according to the thickness of the workpiece to be tested, and the distance between the second guide rail 525 and the second pressing plate 527 can be adjusted by controlling the second driving device 526, so as to form a guiding groove 521 with a proper width, thereby realizing auxiliary support, fixing and guiding of the workpiece to be tested without crushing the workpiece to be tested. The first driving means 523 and the second driving means 526 are preferably air cylinders. Preferably, the guiding assembly 52 further includes a feeding sensor 528 and an in-place sensor 529, the feeding sensor 528 is disposed at one end of the second guide rail 525 near the storage box 32, the in-place sensor 529 is disposed on the second guide rail 525, and the feeding sensor 528 and the in-place sensor 529 are electrically connected with the control system 2. Thus, the feeding sensor 528 can feed back the feeding condition to the control system 2, and the in-place sensor 529 can detect whether the workpiece to be measured moves to the designated position.
Optionally, as shown in fig. 5, in the present embodiment, the supporting assembly 51 includes a support 511, a first support 512, a first lifting device 513, and a sensing device 514, the bearing platform 53 is disposed on the support 511, the first support 512 is liftably disposed on the support 511, the first guide rail 522 and the second guide rail 525 are respectively disposed on two sides of the first support 512, the sensing device 514 is disposed on the first support 512 and is used for sensing a height position of the first support 512, the control system 2 is electrically connected with the first lifting device 513 and the sensing device 514, and controls the first lifting device 513 to drive the first support 512 to lift so as to move the workpiece to be tested to the top of the bearing platform 53. Based on this, the first support 512 can be controlled to lift and drive the workpiece to be tested to descend onto the carrying table 53. The sensing means 514 is preferably a photoelectric sensor and the first elevating means 513 is preferably a stepping motor.
Alternatively, as shown in fig. 5 to 7, in the present embodiment, the first bracket 512 has a first mounting point 512a, a second mounting point 512b, and a third mounting point 512c aligned in the X-axis direction, the stage 53 is a wafer carrier or a bar carrier, the second guide rail 525 is mounted to the first mounting point 512a or the second mounting point 512b when the stage 53 is a wafer carrier, and the second guide rail 525 is mounted to the third mounting point 512c when the stage 53 is a bar carrier. In this way, when a large-size wafer, for example, a 12-inch wafer, needs to be detected, the second guide rail 525 is mounted on the first mounting point 512a, so that the distance between the first guide rail 522 and the second guide rail 525 is matched with the size of the wafer, the wafer is accurately supported and fixed, the error is smaller, and the mounting position is more accurate when the distance between the first guide rail 522 and the second guide rail 525 is adjusted relative to the arrangement of the moving component so as to be matched with the size of the wafer; when a small-sized wafer, for example, a 10-inch wafer, needs to be detected, the second guide rail 525 is mounted on the second mounting point 512b, so that the distance between the first guide rail 522 and the second guide rail 525 is adapted to the size of the wafer, and the wafer can be accurately supported and fixed; when the material strip with smaller size needs to be detected, the second guide rail 525 is installed at the third installation point 512c, so that the distance between the first guide rail 522 and the second guide rail 525 is matched with the size of the material strip, and the material strip is accurately supported and fixed. Specifically, the wafer carrier includes a wafer suction plate 531 and two first support legs 532, the two first support legs 532 are disposed at a position near the center of the support 511, and the wafer suction plate 531 is disposed at the top of the two first support legs 532. The strip bearing part comprises a strip sucker 533, a strip detection light source 534 and two second support legs 535, wherein the two second support legs 535 are arranged at the position of the support 511 close to the center, the strip sucker 533 is arranged at the top of the two second support legs 535, and the strip detection light source 534 is arranged between the two second support legs 535 and is positioned below the strip sucker 533.
Optionally, as shown in fig. 5, in the present embodiment, the supporting assembly 51 further includes a sliding block 515, a sliding rail 516, and a third driving device 517, the sliding rail 516 is disposed on one side of the first bracket 512 and extends along the X-axis direction, the sliding block 515 is disposed on the sliding rail 516, the first rail 522 is disposed on the sliding block 515, and the control system 2 is electrically connected to the third driving device 517 and controls the third driving device 517 to drive the sliding block 515 to move. Based on this, when more sized wafers and bars need to be accommodated, the position of the first rail 522 can be fine-tuned by the slider 515 and the slide rail 516, thereby fine-tuning the distance between the first rail 522 and the second rail 525.
Optionally, as shown in fig. 5, in this embodiment, the supporting assembly 51 further includes a receiving rod 518, where the receiving rod 518 is disposed at an end of the first bracket 512 near the storage mechanism 3 and is located between the first rail 522 and the second rail 525, for supporting the workpiece to be tested in an auxiliary manner.
Alternatively, as shown in fig. 1, 9 and 10, in the present embodiment, the visual inspection mechanism 7 includes a surface scanning module 71 and a line scanning module 72 that are disposed on the work platform 1, the surface scanning module 71 includes a second bracket 711, a first adjusting component 712, and a surface scanning camera 713 and a surface scanning light source 714 that are disposed on the second bracket 711, the second bracket 711 and the first adjusting component 712 are disposed on the work platform 1, the first adjusting component 712 is used for adjusting the height of the second bracket 711 in the Z-axis direction, and the surface scanning camera 713 and the surface scanning light source 714 are electrically connected to the control system 2; the line scanning module 72 includes a third bracket 721, a second adjusting component 722, a line scanning camera 723 and a line scanning light source 724, the third bracket 721 and the second adjusting component 722 are obliquely arranged on the working platform 1 and located at one side of the surface scanning camera 713, the line scanning camera 723 is arranged on the third bracket 721, the line scanning light source 724 is obliquely arranged on the working platform 1 and located at the other side of the surface scanning camera 713, the second adjusting component 722 is used for adjusting the obliquely upward height of the third bracket 721, and the line scanning camera 723 and the line scanning light source 724 are electrically connected with the control system 2. Based on this, the height of the surface scanning camera 713 can be flexibly adjusted by the first adjusting component 712, and the height of the line scanning camera 723 can be adjusted by the second adjusting component 722, thereby making the position adjustment of the visual detection mechanism 7 more flexible. Second, multiple detection is performed on the object to be detected by the line scanning camera 723 and the surface scanning camera 713, and the detection accuracy is greatly improved. In addition, the line scanning light source 724, the surface scanning camera 713, and the line scanning camera 723 are arranged in a reasonable position, and do not interfere with each other. Preferably, the surface scanning module 71 further includes a third adjusting component 715 disposed on the second bracket 711, the line scanning module 72 further includes a fourth adjusting component 725 disposed on the working platform 1, the third adjusting component 715 is connected to the surface scanning light source 714 for adjusting the height of the surface scanning light source 714, and the fourth adjusting component 725 is connected to the line scanning light source 724 for adjusting the height of the surface scanning light source 714 obliquely upward.
Alternatively, as shown in fig. 1, in this embodiment, the working platform 1 is provided with a mounting plate 11 and a second lifting device 12, and the second bracket 711, the first adjusting component 712, the third bracket 721 and the second adjusting component 722 are all disposed on the mounting plate 11, and the control system 2 is electrically connected to the second lifting device 12 and controls the second lifting device 12 to drive the mounting plate 11 to move up and down. In this way, the whole of the face scanning camera 713 and the line scanning camera 723 can be lifted and lowered, thereby making the position adjustment of the visual detection mechanism 7 faster.
Alternatively, as shown in fig. 2, in the present embodiment, the storage mechanism 3 includes a support plate 31, a storage box 32, and a third lifting device 33, the support plate 31 is disposed on the third lifting device 33, the storage box 32 is disposed on the support plate 31, the storage box 32 can be used for taking and placing a workpiece, and the control system 2 is electrically connected to the third lifting device 33 and controls the third lifting device 33 to drive the storage box 32 to move up and down. Based on this, the storage box 32 can be automatically lifted to the feeding position under the control of the control system 2, so that the clamping mechanism 6 is convenient for clamping the piece to be tested, and the feeding is more intelligent and automatic.
Alternatively, as shown in fig. 8, in the present embodiment, the gripping mechanism 6 includes a third rail 61, a connecting plate 62, a jaw 63, a fourth driving device 64, a fifth driving device 65, and a sixth driving device 66, the third rail 61 extends in the Y-axis direction, one end of the connecting plate 62 is slidably provided on the third rail 61, the jaw 63 is movably provided on the connecting plate 62, the fourth driving device 64 is for driving the connecting plate 62 to slide along the third rail 61, the fifth driving device 65 is for driving the jaw 63 to slide in the Y-axis direction, the sixth driving device 66 is for driving the jaw 63 to grip or release, and the fourth driving device 64, the fifth driving device 65, and the sixth driving device 66 are all electrically connected to the control system 2. Based on this, the movement of the gripping jaw 63 can be made more precise and flexible. The fourth drive 64 is preferably a servomotor, and the fifth drive 65 and the sixth drive 66 are preferably air cylinders.
Alternatively, as shown in fig. 3 and 4, in the present embodiment, the moving mechanism 4 includes a moving platform 41, a transverse motor 42, a screw transmission assembly 43, a bottom plate 44, a slide 45, and a longitudinal motor 46, the screw transmission assembly 43 is disposed on the working platform 1, the bottom plate 44 is disposed on the screw transmission assembly 43, the transverse motor 42 is used for driving the bottom plate 44 to move along the X-axis direction, the slide 45 is disposed on the bottom plate 44 and extends along the Y-axis direction, the moving platform 41 is disposed on the slide 45, a supporting assembly 51 is disposed on the moving platform 41, the longitudinal motor 46 is used for driving the moving platform 41 to move along the Y-axis direction, and both the transverse motor 42 and the longitudinal motor 46 are electrically connected with the control system 2. So, can realize driving plummer 53 along X axle, Y axle and remove, on the one hand make the detection to the piece that awaits measuring more nimble accurate, on the other hand moving mechanism 4 drive first support 512 and plummer 53 and remove between pan feeding position and detection position for material loading and detection process are more intelligent automatic.
The application method of the visual detection device provided by the embodiment of the application comprises the following steps: according to the type and specification of the workpiece to be tested, the first guide rail 522 and the corresponding bearing table 53 are installed, the third lifting device 33 drives the storage box 32 to lift to the feeding position, the moving platform 41 and the first lifting device 513 drive the first support 512 to move to the feeding position, the clamping jaw 63 clamps the workpiece to be tested from the storage box 32 to the guide groove 521 and slides to the upper part of the bearing table 53, the first lifting device 513 drives the first support 512 to descend, the workpiece to be tested falls onto the bearing table 53, the moving platform 41 drives the workpiece to be tested to the detection position, the third lifting device 33 drives the surface scanning camera 713 and the line scanning camera 723 to lift to the preset position, scanning detection is carried out on the workpiece to be tested, after detection is finished, the moving platform 41 and the first lifting device 513 drive the first support 512 to return to the feeding position, and the clamping jaw 63 clamps and puts the detected wafer or material strip into the storage box 32.
In summary, the embodiment of the application provides a visual inspection device, which mainly comprises a working platform 1, a control system 2, a storage mechanism 3, a moving mechanism 4, a bearing mechanism 5, a clamping mechanism 6 and a visual inspection mechanism 7 which are arranged on the working platform 1, wherein the storage mechanism 3 is used for storing a piece to be inspected, the bearing mechanism 5 comprises a supporting component 51, a guiding component 52 and a bearing table 53, the supporting component 51 is arranged on the moving mechanism 4, the guiding component 52 and the bearing table 53 are detachably arranged on the supporting component 51, the guiding component 52 is provided with a guiding groove 521, and the moving mechanism 4, the clamping mechanism 6 and the visual inspection mechanism 7 are electrically connected with the control system 2; the control system 2 controls the clamping mechanism 6 to clamp the workpiece to be detected from the storage mechanism 3 into the guide groove 521 and move the workpiece to be detected onto the carrying table 53, the moving mechanism 4 drives the carrying table 53 to move to the lower side of the visual detection mechanism 7, and the visual detection mechanism 7 is used for detecting the workpiece to be detected. Compared with the prior art, the visual detection device has the advantages of being adaptive to various wafers and strips, high in automation degree, capable of preventing slipping and the like.
The foregoing is merely a preferred embodiment of the present application, and it should be noted that modifications and substitutions can be made by those skilled in the art without departing from the technical principles of the present application, and these modifications and substitutions should also be considered as being within the scope of the present application.
Claims (7)
1. The visual inspection device is characterized by comprising a working platform, a control system, a storage mechanism, a moving mechanism, a bearing mechanism, a clamping mechanism and a visual inspection mechanism, wherein the moving mechanism, the bearing mechanism, the clamping mechanism and the visual inspection mechanism are arranged on the working platform;
the control system controls the clamping mechanism to clamp the piece to be detected from the storage mechanism into the guide groove and move the piece to be detected onto the bearing table, the moving mechanism drives the bearing table to move to the position below the visual detection mechanism, and the visual detection mechanism is used for detecting the piece to be detected;
the guide assembly comprises a first guide rail, a first driving device, a first pressing plate, a second guide rail, a second driving device and a second pressing plate, wherein the first guide rail is arranged on one side of the supporting assembly and extends along a Y axis, the first pressing plate is arranged on the first guide rail in parallel, the guide groove is formed between the first guide rail and the first pressing plate, and the first driving device is used for driving the first pressing plate to be close to or far away from the first guide rail;
the second guide rail is detachably arranged on the other side of the supporting component and is parallel to the first guide rail, the second pressing plate is arranged on the second guide rail in parallel, the guide groove is formed between the second guide rail and the second guide rail, the second driving device is used for driving the second pressing plate to be close to or far away from the second guide rail, the first driving device and the second driving device are electrically connected with the control system, and the control system controls the clamping mechanism to clamp the workpiece to be tested to move so that one side of the workpiece to be tested is positioned in the guide groove between the first guide rail and the first pressing plate, and the other side of the workpiece to be tested is positioned in the guide groove between the second guide rail and the second pressing plate;
the supporting assembly comprises a support, a first bracket, a first lifting device and an induction device, the bearing table is arranged on the support, the first bracket is arranged on the support in a lifting manner, the first guide rail and the second guide rail are respectively arranged on two sides of the first bracket, the induction device is arranged on the first bracket and is used for inducing the height position of the first bracket, and the control system is electrically connected with the first lifting device and the induction device and controls the first lifting device to drive the first bracket to lift so as to enable the to-be-detected piece to move to the top of the bearing table;
the first support has first mounting point, second mounting point and the third mounting point of arranging along X axis direction, the plummer is wafer carrier or material strip carrier, works as the plummer is when the wafer carrier, the second guide rail install in first mounting point or the second mounting point works as the plummer is when the material strip carrier, the second guide rail install in the third mounting point.
2. The visual inspection device of claim 1, wherein the support assembly further comprises a slide rail, a slide rail and a third driving device, the slide rail is disposed on one side of the first bracket and extends along the X-axis direction, the slide rail is disposed on the slide rail, the first guide rail is disposed on the slide rail, and the control system is electrically connected with the third driving device and controls the third driving device to drive the slide rail to move.
3. The visual inspection device of claim 1, wherein the visual inspection mechanism comprises a surface scanning module and a line scanning module which are arranged on the working platform, the surface scanning module comprises a second bracket, a first adjusting component, a surface scanning camera and a surface scanning light source which are arranged on the second bracket, the second bracket and the first adjusting component are arranged on the working platform, the first adjusting component is used for adjusting the height of the second bracket in the Z-axis direction, and the surface scanning camera and the surface scanning light source are electrically connected with the control system;
the line scanning module comprises a third support, a second adjusting component, a line scanning camera and a line scanning light source, wherein the third support and the second adjusting component are obliquely arranged on the working platform and are positioned on one side of the line scanning camera, the line scanning camera is arranged on the third support, the line scanning light source is obliquely arranged on the working platform and is positioned on the other side of the line scanning camera, the second adjusting component is used for adjusting the oblique upward height of the third support, and the line scanning camera and the line scanning light source are electrically connected with the control system.
4. A visual inspection device as claimed in claim 3, wherein said work platform is provided with a mounting plate and a second lifting device, said second support, said first adjustment assembly, said third support and said second adjustment assembly are all disposed on said mounting plate, said control system is electrically connected to said second lifting device and controls said second lifting device to drive said mounting plate to move up and down.
5. The vision inspection device of claim 1, wherein the storage mechanism comprises a support plate, a storage box and a third lifting device, the support plate is arranged on the third lifting device, the storage box is arranged on the support plate, the storage box can be used for taking and placing the piece to be inspected, and the control system is electrically connected with the third lifting device and controls the third lifting device to drive the storage box to move in a lifting manner.
6. The visual inspection device of claim 1, wherein the gripping mechanism comprises a third rail, a connecting plate, a clamping jaw, a fourth driving device, a fifth driving device and a sixth driving device, wherein the third rail extends along the Y-axis direction, one end of the connecting plate is slidably arranged on the third rail, the clamping jaw is movably arranged on the connecting plate, the fourth driving device is used for driving the connecting plate to slide, the fifth driving device is used for driving the clamping jaw to move along the Y-axis direction, the sixth driving device is used for driving the clamping jaw to clamp or unclamp, and the fourth driving device, the fifth driving device and the sixth driving device are all electrically connected with the control system.
7. The visual inspection device of claim 1, wherein the movement mechanism comprises a movement platform, a transverse motor, a screw drive assembly, a base plate, a slideway and a longitudinal motor, wherein the screw drive assembly is arranged on the working platform, the base plate is arranged on the screw drive assembly, the transverse motor is used for driving the base plate to move along the X-axis direction, the slideway is arranged on the base plate and extends along the Y-axis direction, the movement platform is arranged on the slideway, the support assembly is arranged on the movement platform, the longitudinal motor is used for driving the movement platform to move along the Y-axis direction, and the transverse motor and the longitudinal motor are electrically connected with the control system.
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| CN202110992087.5A CN113804701B (en) | 2021-08-26 | 2021-08-26 | Visual inspection device |
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| CN114486737B (en) * | 2022-01-17 | 2022-11-15 | 东莞市合易自动化科技有限公司 | Visual detection equipment capable of high-precision positioning of MiniLED wafer lighting effect |
| CN114813762B (en) * | 2022-06-27 | 2022-09-16 | 苏州格拉尼视觉科技有限公司 | Chip appearance detection device and method |
| CN116698753B (en) * | 2023-07-25 | 2024-03-26 | 广州纳动半导体设备有限公司 | Mini-LED panel defect detection equipment and method based on machine vision |
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