CN113804701A - Visual detection device - Google Patents
Visual detection device Download PDFInfo
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- CN113804701A CN113804701A CN202110992087.5A CN202110992087A CN113804701A CN 113804701 A CN113804701 A CN 113804701A CN 202110992087 A CN202110992087 A CN 202110992087A CN 113804701 A CN113804701 A CN 113804701A
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- guide rail
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
Abstract
The invention relates to the technical field of semiconductor processing, and discloses a visual detection device which comprises a working platform, a control system, a material storage mechanism, a moving mechanism, a bearing mechanism, a clamping mechanism and a visual detection mechanism, wherein the moving mechanism, the bearing mechanism, the clamping mechanism and the visual detection mechanism are arranged on the working platform; secondly, the guide groove of the supporting assembly plays roles of auxiliary supporting, guiding and limiting, so that the to-be-detected part is stably arranged on the bearing table in the process that the clamping mechanism moves the to-be-detected part to the bearing table and the process that the bearing table moves along with the supporting assembly, the to-be-detected part is prevented from sliding or even slipping, and the detection accuracy is improved; in addition, the detection process of the visual detection device is intelligent and automatic, manual taking and placing are not needed, the manual participation degree is greatly reduced, and the detection efficiency is improved.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to a visual detection device.
Background
At present, with the development of science and technology, the integrated circuit industry is greatly developed in China, the application of semiconductors is increasingly wide, and how to efficiently detect and manufacture semiconductors becomes an important subject. Wafers and bars used for manufacturing semiconductors are prone to defects such as contamination, scratches and cracks during the manufacturing process, and thus need to be visually inspected.
The existing visual detection device is only used for detecting wafers, has single detection variety and can not meet the requirements of detecting wafers and material strips with different sizes and specifications.
Disclosure of Invention
The invention aims to provide a visual detection device which can be adapted to various wafers and material strips, has high automation degree and can prevent slippage.
In order to achieve the purpose, the invention provides a visual detection device, which comprises a working platform, a control system, a storage mechanism, a moving mechanism, a bearing mechanism, a clamping mechanism and a visual detection mechanism, wherein the moving mechanism, the bearing mechanism, the clamping mechanism and the visual detection mechanism are arranged on the working platform;
the control system controls the clamping mechanism to clamp the piece to be detected from the storing mechanism into the guide groove and move to the bearing table, the moving mechanism drives the bearing table to move to the position below the visual detection mechanism, and the visual detection mechanism is used for detecting the piece to be detected.
In some embodiments of the present application, the guide assembly includes a first guide rail, a first driving device, a first pressing plate, a second guide rail, a second driving device, and a second pressing plate, the first guide rail is disposed on one side of the support assembly and extends along the Y-axis, the first pressing plate is disposed in parallel on the first guide rail, the guide groove is formed therebetween, and the first driving device is configured to drive the first pressing plate to approach or depart from the first guide rail;
the second guide rail is detachably arranged on the other side of the supporting assembly and is parallel to the first guide rail, the second pressing plate is arranged on the second guide rail in parallel, the guide groove is formed between the second guide rail and the second guide rail, the second driving device is used for driving the second pressing plate to be close to or far away from the second guide rail, the first driving device and the second driving device are electrically connected with the control system, the control system controls the clamping mechanism to clamp the part to be tested to move, so that one side of the part to be tested is located in the guide groove between the first guide rail and the first pressing plate, and the other side of the part to be tested is located in the guide groove between the second guide rail and the second pressing plate.
In some embodiments of this application, the supporting component includes support, first elevating gear and induction system, the plummer is located on the support, first support is located with liftable on the support, first guide rail with the second guide rail is located respectively the both sides of first support, induction system locates on the first support, be used for responding to the high position of first support, control system with first elevating gear the equal electricity of induction system is connected, and control first elevating gear drive first support goes up and down, so that the piece that awaits measuring removes extremely the top of plummer.
In some embodiments of this application, first support has first mounting point, second mounting point and the third mounting point of arranging along the X axle direction, the plummer is that wafer holds carrier or material strip and holds carrier, works as the plummer does during wafer holds carrier, the second guide rail install in first mounting point or the second mounting point, works as the plummer does during material strip holds carrier, the second guide rail install in the third mounting point.
In some embodiments of the present application, the supporting assembly further includes a sliding block, a sliding rail, and a third driving device, the sliding rail is disposed on one side of the first bracket and extends along the X-axis direction, the sliding block is disposed on the sliding rail, the first guiding rail is disposed on the sliding block, the control system is electrically connected to the third driving device, and controls the third driving device to drive the sliding block to move.
In some embodiments of the present application, the visual inspection mechanism includes a surface scanning module and a line scanning module, which are disposed on the working platform, the surface scanning module includes a second bracket, a first adjusting component, and a surface scanning camera and a surface scanning light source, which are disposed on the second bracket, the second bracket and the first adjusting component are disposed on the working platform, the first adjusting component is used to adjust the height of the second bracket in the Z-axis direction, and both the surface scanning camera and the surface scanning light source are electrically connected to the control system;
the line scanning module includes third support, second adjusting part, line scanning camera and line scanning light source, the third support with the slope of second adjusting part is located work platform is last and is located one side of face scanning camera, line scanning camera locates on the third support, the slope of line scanning light source is located work platform is last and is located the opposite side of face scanning camera, the second adjusting part is used for adjusting third support slant ascending height, line scanning camera with line scanning light source all with the control system electricity is connected.
In some embodiments of the application, be equipped with mounting panel and second elevating gear on the work platform, the second support the first adjusting part the third support with the second adjusting part all locates on the mounting panel, control system with the second elevating gear electricity is connected, and control the drive of second elevating gear the mounting panel elevating movement.
In some embodiments of the present application, the storage mechanism includes a supporting plate, a storage box and a third lifting device, the supporting plate is disposed on the third lifting device, the storage box is disposed on the supporting plate, the storage box can supply the piece to be tested to be taken and placed, the control system is electrically connected to the third lifting device, and controls the third lifting device to drive the storage box to move up and down.
In some embodiments of this application, press from both sides and get mechanism and include third guide rail, connecting plate, clamping jaw, fourth drive arrangement, fifth drive arrangement and sixth drive arrangement, the third guide rail extends along the Y axle direction, locate slidably the one end of connecting plate on the third guide rail, the clamping jaw is movably located on the connecting plate, fourth drive arrangement is used for the drive the connecting plate slides, fifth drive arrangement is used for the drive the clamping jaw removes along the Y axle direction, sixth drive arrangement is used for driving the clamping jaw and presss from both sides tightly or unclamp, fourth drive arrangement fifth drive arrangement with sixth drive arrangement all with the control system electricity is connected.
In some embodiments of this application, moving mechanism includes motion platform, horizontal motor, screw drive subassembly, bottom plate, slide and vertical motor, the screw drive subassembly is located work platform is last, the bottom plate is located on the screw drive subassembly, horizontal motor is used for the drive the bottom plate is followed X axle direction and is moved, and the slide is located on the bottom plate and is extended along Y axle direction, motion platform locates on the slide, the supporting component is located on the motion platform, vertical motor is used for the drive motion platform is followed Y axle direction and is moved, horizontal motor with vertical motor all with the control system electricity is connected.
The invention provides a visual detection device, compared with the prior art, the visual detection device has the following beneficial effects:
the visual detection device provided by the invention comprises a working platform, a control system, a material storage mechanism, a moving mechanism, a bearing mechanism, a clamping mechanism and a visual detection mechanism, wherein the moving mechanism, the bearing mechanism, the clamping mechanism and the visual detection mechanism are arranged on the working platform; secondly, the guide groove of the supporting assembly plays roles of auxiliary supporting, guiding and limiting, so that the to-be-detected part is stably arranged on the bearing table in the process that the clamping mechanism moves the to-be-detected part to the bearing table and the process that the bearing table moves along with the supporting assembly, the to-be-detected part is prevented from sliding or even slipping, and the detection accuracy is improved; in addition, through control system's control, press from both sides and get the mechanism and press from both sides the piece that awaits measuring and get to guide way and plummer on, moving mechanism drives the plummer and removes to the below of visual detection mechanism, visual detection mechanism detects the piece that awaits measuring, moving mechanism takes the plummer to get back to storage mechanism department after finishing detecting, press from both sides the mechanism and get the wafer or the material strip clamp that will detect and put into in the storage box, whole intelligent automation need not the manual work and gets and put, greatly reduced artifical participation, the efficiency of detection has been improved.
Drawings
FIG. 1 is a schematic overall structure diagram of a visual inspection apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of a storing mechanism according to an embodiment of the invention;
FIG. 3 is a partial schematic structural diagram of a moving mechanism according to an embodiment of the present invention;
FIG. 4 is a partial schematic structural diagram of a moving mechanism according to an embodiment of the present invention;
FIG. 5 is a partial structural schematic view of a support mechanism according to an embodiment of the present invention;
FIG. 6 is a partial structural schematic view of a support mechanism according to an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a carrier stage according to an embodiment of the invention;
FIG. 8 is a schematic structural view of a gripping mechanism according to an embodiment of the present invention;
FIG. 9 is a schematic view of a partial structure of a visual inspection mechanism according to an embodiment of the present invention;
fig. 10 is a partial structural schematic view of a visual inspection mechanism according to an embodiment of the invention.
In the figure: 1. a working platform; 11. mounting a plate; 12. a second lifting device; 2. a control system; 3. a material storage mechanism; 31. a support plate; 32. a storage box; 33. a third lifting device; 4. a moving mechanism; 41. a motion platform; 42. a transverse motor; 43. the screw rod transmission assembly; 44. a base plate; 45. a slideway; 46. a longitudinal motor; 5. a carrying mechanism; 51. a support assembly; 511. a support; 512. a first bracket; 512a, a first mounting point; 512b, a second mounting point; 512c, a third mounting point; 513. a first lifting device; 514. an induction device; 515. a slider; 516. a slide rail; 517. a third driving device; 518. a receiving rod; 52. a guide assembly; 521. a guide groove; 522. a first guide rail; 523. a first driving device; 524. a first platen; 525. a second guide rail; 526. a second driving device; 527. a second platen; 528. a feeding sensor; 529. an in-position sensor; 53. a bearing table; 531. a wafer getter plate; 532. a first support leg; 533. a material strip sucker; 534. a material strip detection light source; 535. a second support leg; 6. a gripping mechanism; 61. a third guide rail; 62. a connecting plate; 63. a clamping jaw; 64. a fourth drive device; 65. a fifth driving device; 66. a sixth driving device; 7. a visual detection mechanism; 71. a surface scanning module; 711. a second bracket; 712. a first adjustment assembly; 713. a surface scanning camera; 714. a surface scanning light source; 715. a third adjustment assembly; 72. a line scanning module; 721. a third support; 722. a second adjustment assembly; 723. a line scanning camera; 724. a line scanning light source; 725. and a fourth adjustment assembly.
Detailed Description
The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It will be understood that in the description of the present application, the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for ease of description and simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the present application. The terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated, i.e. a feature defined as "first", "second" may explicitly or implicitly include one or more of such features. Further, unless otherwise specified, "a plurality" means two or more.
It should be noted that, in the description of the present application, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
As shown in fig. 1, 5 and 6, an embodiment of the present invention provides a visual inspection apparatus, which includes a working platform 1, a control system 2, a storing mechanism 3, and a moving mechanism 4, a carrying mechanism 5, a clamping mechanism 6 and a visual inspection mechanism 7 which are disposed on the working platform 1, where the storing mechanism 3 is used to store a workpiece to be inspected, the carrying mechanism 5 includes a supporting assembly 51, a guiding assembly 52 and a carrying platform 53, the supporting assembly 51 is disposed on the moving mechanism 4, the guiding assembly 52 and the carrying platform 53 are both detachably mounted on the supporting assembly 51, the guiding assembly 52 is provided with a guiding slot 521, and the moving mechanism 4, the clamping mechanism 6 and the visual inspection mechanism 7 are all electrically connected to the control system 2; the control system 2 controls the clamping mechanism 6 to clamp the piece to be detected from the storing mechanism 3 into the guide groove 521 and move the piece to the bearing table 53, the moving mechanism 4 drives the bearing table 53 to move below the visual detection mechanism 7, and the visual detection mechanism 7 is used for detecting the piece to be detected.
Based on the structure, the corresponding guide assembly 52 and the corresponding bearing table 53 are selected for wafers and material strips with different dimensions and are installed on the supporting assembly 51, so that the bearing mechanism 5 can be adapted to support wafers and material strips with different dimensions, and diversified detection requirements are met; secondly, the guide groove 521 of the supporting component 51 plays a role in auxiliary supporting, guiding and limiting, so that the to-be-detected part is stably placed on the bearing table 53 in the process that the clamping mechanism 6 moves the to-be-detected part to the bearing table 53 and the process that the bearing table 53 moves along with the supporting component 51, the to-be-detected part is prevented from sliding or even slipping, and the detection accuracy is improved; in addition, through control system 2's control, press from both sides and get mechanism 6 and press from both sides the piece that awaits measuring and get to guide way 521 and plummer 53 on, moving mechanism 4 drives plummer 53 and moves to the below of visual detection mechanism 7, visual detection mechanism 7 detects the piece that awaits measuring, moving mechanism 4 takes plummer 53 to get back to storage mechanism 3 department after finishing detecting, press from both sides and get mechanism 6 and press from both sides the wafer or the material strip that detect and put into storage box 32 in, whole intelligent automation, need not the manual work and get, greatly reduced artifical participation, the efficiency of detection has been improved.
Optionally, as shown in fig. 6, in the present embodiment, the guide assembly 52 includes a first guide rail 522, a first driving device 523, a first pressing plate 524, a second guide rail 525, a second driving device 526, and a second pressing plate 527, the first guide rail 522 is disposed on one side of the support assembly 51 and extends along the Y axis, the first pressing plate 524 is disposed on the first guide rail 522 in parallel, a guide slot 521 is formed therebetween, that is, the guide slot 521 extends along the Y axis direction, and the first driving device 523 is configured to drive the first pressing plate 524 to approach or depart from the first guide rail 522; the second guide rail 525 is detachably arranged on the other side of the supporting assembly 51 and is parallel to the first guide rail 522, the second pressing plate 527 is arranged on the second guide rail 525 in parallel, a guide groove 521 is formed between the second pressing plate and the second guide rail 525, the second driving device 526 is used for driving the second pressing plate 527 to be close to or far from the second guide rail 525, the first driving device 523 and the second driving device 526 are both electrically connected with the control system 2, and the control system 2 controls the clamping mechanism 6 to clamp the workpiece to move, so that one side of the workpiece is located in the guide groove 521 between the first guide rail 522 and the first pressing plate 524, and the other side of the workpiece is located in the guide groove 521 between the second guide rail 525 and the second pressing plate 527. Based on this, the first driving device 523 can be controlled to adjust the distance between the first guide rail 522 and the first pressing plate 524 according to the thickness of the workpiece to be tested, and the second driving device 526 can be controlled to adjust the distance between the second guide rail 525 and the second pressing plate 527, so as to form a guide groove 521 with a proper width, so that the workpiece to be tested can be supported, fixed and guided in an auxiliary manner, and meanwhile, the workpiece to be tested cannot be crushed. The first driving means 523 and the second driving means 526 are preferably air cylinders. Preferably, the guide assembly 52 further comprises a feed sensor 528 and a position sensor 529, the feed sensor 528 is disposed on one end of the second guide 525 near the magazine 32, the position sensor 529 is disposed on the second guide 525, and both the feed sensor 528 and the position sensor 529 are electrically connected to the control system 2. Thus, the feeding sensor 528 can feed back the feeding condition to the control system 2, and the in-place sensor 529 can detect whether the object is moved to a specific position.
Optionally, as shown in fig. 5, in this embodiment, the supporting assembly 51 includes a support 511, a first support 512, a first lifting device 513, and a sensing device 514, the bearing platform 53 is disposed on the support 511, the first support 512 is disposed on the support 511 in a liftable manner, the first guide rail 522 and the second guide rail 525 are respectively disposed on two sides of the first support 512, the sensing device 514 is disposed on the first support 512 and is configured to sense a height position of the first support 512, and the control system 2 is electrically connected to the first lifting device 513 and the sensing device 514 and controls the first lifting device 513 to drive the first support 512 to lift, so that the to-be-measured object moves to a top of the bearing platform 53. Therefore, the first support 512 can be controlled to ascend and descend, and the to-be-tested object is driven to descend onto the bearing table 53. The sensing device 514 is preferably a photoelectric sensor and the first elevating device 513 is preferably a stepping motor.
Alternatively, as shown in fig. 5 to 7, in the present embodiment, the first bracket 512 has a first mounting point 512a, a second mounting point 512b and a third mounting point 512c arranged in the X-axis direction, the susceptor 53 is a wafer carrier or a bar carrier, the second guide rail 525 is mounted at the first mounting point 512a or the second mounting point 512b when the susceptor 53 is a wafer carrier, and the second guide rail 525 is mounted at the third mounting point 512c when the susceptor 53 is a bar carrier. Thus, when a large-sized wafer, for example, a 12-inch wafer needs to be detected, the second guide rail 525 is mounted on the first mounting point 512a, so that the distance between the first guide rail 522 and the second guide rail 525 is adapted to the size of the wafer, the wafer is accurately supported and fixed, and compared with the situation that a moving part is arranged to adjust the distance between the first guide rail 522 and the second guide rail 525 to adapt to the size of the wafer, the error is smaller and the mounting position is more accurate; when a small-sized wafer, for example, a 10-inch wafer, needs to be detected, the second guide rail 525 is mounted on the second mounting point 512b, so that the distance between the first guide rail 522 and the second guide rail 525 is adapted to the size of the wafer, and the wafer is accurately supported and fixed; when the material strips with smaller sizes need to be detected, the second guide rail 525 is mounted on the third mounting point 512c, so that the distance between the first guide rail 522 and the second guide rail 525 is matched with the size of the material strips, and the material strips are accurately supported and fixed. Specifically, the wafer carrier includes a wafer suction plate 531 and two first support legs 532, the two first support legs 532 are disposed near the center of the support 511, and the wafer suction plate 531 is disposed on the top of the two first support legs 532. The material strip bearing piece comprises a material strip sucking disc 533, a material strip detection light source 534 and two second supporting legs 535, the two second supporting legs 535 are arranged at the position, close to the center, of the support 511, the material strip sucking disc 533 is arranged at the top of the two second supporting legs 535, and the material strip detection light source 534 is arranged between the two second supporting legs 535 and is located below the material strip sucking disc 533.
Optionally, as shown in fig. 5, in this embodiment, the supporting assembly 51 further includes a sliding block 515, a sliding rail 516, and a third driving device 517, the sliding rail 516 is disposed on one side of the first bracket 512 and extends along the X-axis direction, the sliding block 515 is disposed on the sliding rail 516, the first guiding rail 522 is disposed on the sliding block 515, and the control system 2 is electrically connected to the third driving device 517 and controls the third driving device 517 to drive the sliding block 515 to move. Based on this, when more sizes of wafers and material strips need to be adapted, the position of the first guide rail 522 can be finely adjusted through the sliding block 515 and the sliding rail 516, so that the distance between the first guide rail 522 and the second guide rail 525 can be finely adjusted.
Optionally, as shown in fig. 5, in this embodiment, the supporting assembly 51 further includes a material receiving rod 518, and the material receiving rod 518 is disposed at one end of the first frame 512 close to the magazine 3 and between the first guide rail 522 and the second guide rail 525, and is used for assisting in supporting the to-be-tested member.
Alternatively, as shown in fig. 1, 9 and 10, in the present embodiment, the visual detection mechanism 7 includes a surface scanning module 71 and a line scanning module 72 which are disposed on the working platform 1, the surface scanning module 71 includes a second bracket 711, a first adjusting component 712, and a surface scanning camera 713 and a surface scanning light source 714 which are disposed on the second bracket 711, the second bracket 711 and the first adjusting component 712 are disposed on the working platform 1, the first adjusting component 712 is used for adjusting the height of the second bracket 711 in the Z-axis direction, and the surface scanning camera 713 and the surface scanning light source 714 are both electrically connected to the control system 2; the line scanning module 72 includes a third support 721, a second adjusting component 722, a line scanning camera 723 and a line scanning light source 724, the third support 721 and the second adjusting component 722 are obliquely disposed on the working platform 1 and located at one side of the surface scanning camera 713, the line scanning camera 723 is disposed on the third support 721, the line scanning light source 724 is obliquely disposed on the working platform 1 and located at the other side of the surface scanning camera 713, the second adjusting component 722 is used for adjusting the height of the third support 721 in an oblique direction, and the line scanning camera 723 and the line scanning light source 724 are both electrically connected to the control system 2. Based on this, the height of the surface scanning camera 713 can be flexibly adjusted by the first adjusting unit 712, and the height of the line scanning camera 723 can be adjusted by the second adjusting unit 722, thereby making the position adjustment of the visual detection mechanism 7 more flexible. Secondly, multiple detection is performed on the to-be-detected part through the line scanning camera 723 and the area scanning camera 713, and the detection accuracy is greatly improved. In addition, the line scanning light source 724, the surface scanning camera 713 and the line scanning camera 723 are reasonably arranged and do not interfere with each other. Preferably, the surface scanning module 71 further includes a third adjusting component 715 disposed on the second bracket 711, the line scanning module 72 further includes a fourth adjusting component 725 disposed on the working platform 1, the third adjusting component 715 is connected to the surface scanning light source 714 for adjusting the height of the surface scanning light source 714, and the fourth adjusting component 725 is connected to the line scanning light source 724 for adjusting the height of the surface scanning light source 714 in an oblique direction.
Optionally, as shown in fig. 1, in this embodiment, a mounting plate 11 and a second lifting device 12 are disposed on the working platform 1, a second bracket 711, a first adjusting component 712, a third bracket 721 and a second adjusting component 722 are disposed on the mounting plate 11, and the control system 2 is electrically connected to the second lifting device 12 and controls the second lifting device 12 to drive the mounting plate 11 to move up and down. In this way, the entire face scanning camera 713 and the line scanning camera 723 can be raised and lowered, and the position adjustment of the visual detection mechanism 7 can be made faster.
Optionally, as shown in fig. 2, in the present embodiment, the storage mechanism 3 includes a support plate 31, a storage box 32 and a third lifting device 33, the support plate 31 is disposed on the third lifting device 33, the storage box 32 is disposed on the support plate 31, the storage box 32 can be used for a to-be-tested object to be taken and placed, and the control system 2 is electrically connected to the third lifting device 33 and controls the third lifting device 33 to drive the storage box 32 to move up and down. Based on this, storage box 32 accessible control system 2's control is automatic to rise to the pan feeding position to be convenient for press from both sides and get mechanism 6 and press from both sides the piece that awaits measuring and get, the material loading is more intelligent automatic.
Alternatively, as shown in fig. 8, in the present embodiment, the gripping mechanism 6 includes a third rail 61, a connecting plate 62, a clamping jaw 63, a fourth driving device 64, a fifth driving device 65, and a sixth driving device 66, the third rail 61 extends along the Y-axis direction, one end of the connecting plate 62 is slidably disposed on the third rail 61, the clamping jaw 63 is movably disposed on the connecting plate 62, the fourth driving device 64 is configured to drive the connecting plate 62 to slide along the third rail 61, the fifth driving device 65 is configured to drive the clamping jaw 63 to slide along the Y-axis direction, the sixth driving device 66 is configured to drive the clamping jaw 63 to clamp or unclamp, and the fourth driving device 64, the fifth driving device 65, and the sixth driving device 66 are electrically connected to the control system 2. Based on this, the movement of the clamping jaw 63 can be more accurate and flexible. The fourth drive means 64 is preferably a servo motor and the fifth drive means 65 and the sixth drive means 66 are preferably pneumatic cylinders.
Alternatively, as shown in fig. 3 and 4, in the present embodiment, the moving mechanism 4 includes a moving platform 41, a transverse motor 42, a screw transmission assembly 43, a bottom plate 44, a slide way 45, and a longitudinal motor 46, the screw transmission assembly 43 is disposed on the working platform 1, the bottom plate 44 is disposed on the screw transmission assembly 43, the transverse motor 42 is used for driving the bottom plate 44 to move along the X-axis direction, the slide way 45 is disposed on the bottom plate 44 and extends along the Y-axis direction, the moving platform 41 is disposed on the slide way 45, the supporting assembly 51 is disposed on the moving platform 41, the longitudinal motor 46 is used for driving the moving platform 41 to move along the Y-axis direction, and both the transverse motor 42 and the longitudinal motor 46 are electrically connected to the control system 2. So, can realize driving plummer 53 and remove along X axle, Y axle, make the detection to the piece that awaits measuring more nimble accurate on the one hand, on the other hand moving mechanism 4 drives first support 512 and plummer 53 and removes between pan feeding position and detection position for material loading and detection process are more intelligent automatic.
The application method of the visual detection device provided by the embodiment of the invention comprises the following steps: according to the type and specification of the to-be-detected piece, a first guide rail 522 and a corresponding bearing table 53 are installed, a third lifting device 33 drives a storage box 32 to rise to a feeding position, a moving platform 41 and a first lifting device 513 drive a first support 512 to move to the feeding position, a clamping jaw 63 clamps the to-be-detected piece from the storage box 32 to a guide groove 521 and slides to the upper side of the bearing table 53, the first lifting device 513 drives the first support 512 to descend so that the to-be-detected piece falls on the bearing table 53, the moving platform 41 drives the to-be-detected piece to move to a detection position, the third lifting device 33 drives a surface scanning camera 713 and a line scanning camera 723 to rise to a preset position and scan and detect the to-be-detected piece, after detection is finished, the moving platform 41 and the first lifting device 513 drive the first support 512 to return to the feeding position, and the clamping jaw 63 clamps the detected wafer or material strip and places the detected wafer or material strip into the storage box 32.
To sum up, the embodiment of the present invention provides a visual inspection device, which mainly comprises a working platform 1, a control system 2, a storage mechanism 3, a moving mechanism 4, a carrying mechanism 5, a clamping mechanism 6 and a visual inspection mechanism 7, wherein the moving mechanism 4, the carrying mechanism 5, the clamping mechanism 6 and the visual inspection mechanism 7 are arranged on the working platform 1, the storage mechanism 3 is used for storing a to-be-inspected piece, the carrying mechanism 5 comprises a supporting component 51, a guiding component 52 and a carrying platform 53, the supporting component 51 is arranged on the moving mechanism 4, the guiding component 52 and the carrying platform 53 are both detachably mounted on the supporting component 51, the guiding component 52 is provided with a guiding groove 521, and the moving mechanism 4, the clamping mechanism 6 and the visual inspection mechanism 7 are all electrically connected with the control system 2; the control system 2 controls the clamping mechanism 6 to clamp the piece to be detected from the storing mechanism 3 into the guide groove 521 and move the piece to the bearing table 53, the moving mechanism 4 drives the bearing table 53 to move below the visual detection mechanism 7, and the visual detection mechanism 7 is used for detecting the piece to be detected. Compared with the prior art, the visual detection device has the advantages of being adaptive to various wafers and material strips, high in automation degree, capable of preventing slippage and the like.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.
Claims (10)
1. A visual detection device is characterized by comprising a working platform, a control system, a storage mechanism, a moving mechanism, a bearing mechanism, a clamping mechanism and a visual detection mechanism, wherein the moving mechanism, the bearing mechanism, the clamping mechanism and the visual detection mechanism are arranged on the working platform;
the control system controls the clamping mechanism to clamp the piece to be detected from the storing mechanism into the guide groove and move to the bearing table, the moving mechanism drives the bearing table to move to the position below the visual detection mechanism, and the visual detection mechanism is used for detecting the piece to be detected.
2. The visual inspection device of claim 1, wherein the guide assembly includes a first rail, a first driving device, a first pressing plate, a second rail, a second driving device, and a second pressing plate, the first rail is disposed on one side of the support assembly and extends along the Y-axis, the first pressing plate is disposed in parallel on the first rail, the guide groove is formed therebetween, and the first driving device is configured to drive the first pressing plate to approach or move away from the first rail;
the second guide rail is detachably arranged on the other side of the supporting assembly and is parallel to the first guide rail, the second pressing plate is arranged on the second guide rail in parallel, the guide groove is formed between the second guide rail and the second guide rail, the second driving device is used for driving the second pressing plate to be close to or far away from the second guide rail, the first driving device and the second driving device are electrically connected with the control system, the control system controls the clamping mechanism to clamp the part to be tested to move, so that one side of the part to be tested is located in the guide groove between the first guide rail and the first pressing plate, and the other side of the part to be tested is located in the guide groove between the second guide rail and the second pressing plate.
3. The vision inspection device of claim 2, wherein the supporting assembly includes a support, a first bracket, a first lifting device, and a sensing device, the platform is disposed on the support, the first bracket is disposed on the support in a liftable manner, the first guide rail and the second guide rail are respectively disposed on two sides of the first bracket, the sensing device is disposed on the first bracket for sensing a height position of the first bracket, and the control system is electrically connected to the first lifting device and the sensing device and controls the first lifting device to drive the first bracket to lift, so that the object to be inspected moves to a top of the platform.
4. The visual inspection device of claim 3, wherein the first support has a first mounting point, a second mounting point, and a third mounting point arranged along the X-axis, the susceptor is a wafer carrier or a strip carrier, the second rail is mounted to the first mounting point or the second mounting point when the susceptor is the wafer carrier, and the second rail is mounted to the third mounting point when the susceptor is the strip carrier.
5. The visual inspection device of claim 4, wherein the support assembly further comprises a slide, a slide rail, and a third driving device, the slide rail is disposed on one side of the first bracket and extends along the X-axis, the slide is disposed on the slide rail, the first guide rail is disposed on the slide, and the control system is electrically connected to the third driving device and controls the third driving device to drive the slide to move.
6. The vision inspection device of claim 1, wherein the vision inspection mechanism comprises a surface scanning module and a line scanning module disposed on the working platform, the surface scanning module comprises a second bracket, a first adjusting component, a surface scanning camera and a surface scanning light source disposed on the second bracket, the second bracket and the first adjusting component are disposed on the working platform, the first adjusting component is used for adjusting the height of the second bracket in the Z-axis direction, and the surface scanning camera and the surface scanning light source are both electrically connected to the control system;
the line scanning module includes third support, second adjusting part, line scanning camera and line scanning light source, the third support with the slope of second adjusting part is located work platform is last and is located one side of face scanning camera, line scanning camera locates on the third support, the slope of line scanning light source is located work platform is last and is located the opposite side of face scanning camera, the second adjusting part is used for adjusting third support slant ascending height, line scanning camera with line scanning light source all with the control system electricity is connected.
7. The visual inspection device of claim 6, wherein the working platform is provided with a mounting plate and a second lifting device, the second bracket, the first adjustment assembly, the third bracket and the second adjustment assembly are all disposed on the mounting plate, and the control system is electrically connected to the second lifting device and controls the second lifting device to drive the mounting plate to move up and down.
8. The vision inspection device according to claim 1, wherein the storage mechanism includes a supporting plate, a storage box and a third lifting device, the supporting plate is disposed on the third lifting device, the storage box is disposed on the supporting plate, the storage box is capable of being picked and placed by the dut, and the control system is electrically connected to the third lifting device and controls the third lifting device to drive the storage box to move up and down.
9. The vision inspection device of claim 1, wherein the clamping mechanism includes a third rail, a connecting plate, a clamping jaw, a fourth driving device, a fifth driving device, and a sixth driving device, the third rail extends along the Y-axis direction, one end of the connecting plate is slidably disposed on the third rail, the clamping jaw is movably disposed on the connecting plate, the fourth driving device is configured to drive the connecting plate to slide, the fifth driving device is configured to drive the clamping jaw to move along the Y-axis direction, the sixth driving device is configured to drive the clamping jaw to clamp or unclamp, and the fourth driving device, the fifth driving device, and the sixth driving device are electrically connected to the control system.
10. The visual inspection device of claim 1, wherein the moving mechanism includes a moving platform, a transverse motor, a lead screw assembly, a bottom plate, a slide way, and a longitudinal motor, the lead screw assembly is disposed on the working platform, the bottom plate is disposed on the lead screw assembly, the transverse motor is used for driving the bottom plate to move along an X-axis direction, the slide way is disposed on the bottom plate and extends along a Y-axis direction, the moving platform is disposed on the slide way, the supporting assembly is disposed on the moving platform, the longitudinal motor is used for driving the moving platform to move along the Y-axis direction, and both the transverse motor and the longitudinal motor are electrically connected to the control system.
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