JP5925764B2 - 電子銃又はイオン銃の取扱方法および収容体 - Google Patents
電子銃又はイオン銃の取扱方法および収容体 Download PDFInfo
- Publication number
- JP5925764B2 JP5925764B2 JP2013505853A JP2013505853A JP5925764B2 JP 5925764 B2 JP5925764 B2 JP 5925764B2 JP 2013505853 A JP2013505853 A JP 2013505853A JP 2013505853 A JP2013505853 A JP 2013505853A JP 5925764 B2 JP5925764 B2 JP 5925764B2
- Authority
- JP
- Japan
- Prior art keywords
- gun
- electron gun
- container
- anode
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 21
- 239000002184 metal Substances 0.000 claims description 32
- 229910052751 metal Inorganic materials 0.000 claims description 32
- 239000004020 conductor Substances 0.000 claims description 15
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 230000005611 electricity Effects 0.000 description 9
- 230000003068 static effect Effects 0.000 description 9
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000012856 packing Methods 0.000 description 7
- 239000012212 insulator Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229920006248 expandable polystyrene Polymers 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000012260 resinous material Substances 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
- H01R43/26—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for engaging or disengaging the two parts of a coupling device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Elimination Of Static Electricity (AREA)
- Electron Sources, Ion Sources (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
以下、実施例について説明する。
電子銃EGの導電端子部をアクリル容器に固定する。固定方法は、図3に示すようにアクリル容器10の保持部10aに穴を開け、そこに導電端子4の一端4aを挿入し、側面からネジ13で締めこむことで行う。弾性金属部材11として、穴を開けた金属板を使用し、弾性金属部材11の穴をネジ13に挿入しておく。この弾性金属部材11をナット12で固定しつつ、ネジ13を締結して導電端子4とネジ13を接触させる。
実施例に用いた金属板を使用しなかったこと以外は、実施例と同じ方法で梱包した電子銃を、実施例と同様の方法で振動を与え、開封後走査型電子顕微鏡による陰極先端観察を実施した。
固定容器をアクリル容器10から金属製容器に変更し、それ以外は比較例1と同様の方法で試験を実施した。
電子銃から陽極を取り外した、いわゆる電子源を用いて、それ以外は比較例1と同様の方法で試験を実施した。
2:拡散源
3:フィラメント
4:導電端子
5:絶縁碍子
6:制御電極
7:ねじ
8:絶縁碍子
9:陽極(引き出し電極)
10:アクリル容器
11:弾性金属部材(導体)
12:ナット
EG:電子銃
Claims (9)
- 陰極と陽極を有する電子銃又はイオン銃を、両極間を導体で接続した状態で容器に収容し、保管又は輸送することを特徴とする電子銃又はイオン銃の取扱方法。
- 前記陰極、又は前記陽極が先鋭端を有する請求項1記載の電子銃又はイオン銃の取扱方法。
- 前記陰極、又は前記陽極がタングステンからなる請求項2記載の電子銃又はイオン銃の取扱方法。
- 前記電子銃又はイオン銃が容器に収容されていると共に、前記両極間を接続する導体が前記電子銃又はイオン銃の端子を前記容器に固定するための金属部材を含む請求項1記載の電子銃又はイオン銃の取扱方法。
- 前記両極間を接続する導体が、弾性復元力により前記陰極又は前記陽極に接触する弾性金属部材を含む請求項1記載の電子銃又はイオン銃の取扱方法。
- 前記電子銃又はイオン銃が容器に収容されていると共に、前記弾性金属部材が前記容器に固着されている請求項5記載の電子銃又はイオン銃の取扱方法。
- 陰極と陽極を有する電子銃又はイオン銃を、両極間を導体で接続した状態で、保管又は輸送用の容器に収容していることを特徴とする電子銃又はイオン銃の収容体。
- 前記陰極、又は前記陽極が先鋭端を有する請求項7記載の電子銃又はイオン銃の収容体。
- 前記陰極、又は前記陽極がタングステンからなる請求項8記載の電子銃又はイオン銃の収容体。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011060615 | 2011-03-18 | ||
JP2011060615 | 2011-03-18 | ||
PCT/JP2012/054119 WO2012127963A1 (ja) | 2011-03-18 | 2012-02-21 | 電子銃又はイオン銃の取扱方法および収容体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2012127963A1 JPWO2012127963A1 (ja) | 2014-07-24 |
JP5925764B2 true JP5925764B2 (ja) | 2016-05-25 |
Family
ID=46879126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013505853A Active JP5925764B2 (ja) | 2011-03-18 | 2012-02-21 | 電子銃又はイオン銃の取扱方法および収容体 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9496673B2 (ja) |
JP (1) | JP5925764B2 (ja) |
CN (1) | CN103430275B (ja) |
DE (1) | DE112012001287B4 (ja) |
IL (1) | IL228286A (ja) |
TW (1) | TWI558631B (ja) |
WO (1) | WO2012127963A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106816350B (zh) * | 2017-03-24 | 2019-06-14 | 中国工程物理研究院流体物理研究所 | 一种电子枪 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4020318A (en) * | 1975-01-24 | 1977-04-26 | The Welding Institute | Electron beam generators |
JPS6149965U (ja) * | 1984-09-05 | 1986-04-03 | ||
JPS63168956U (ja) * | 1987-04-24 | 1988-11-02 | ||
JPH0294238A (ja) * | 1988-09-29 | 1990-04-05 | Denki Kagaku Kogyo Kk | 荷電粒子放射源構造体の保管方法 |
JPH04190547A (ja) * | 1990-11-22 | 1992-07-08 | Jeol Ltd | 電界放出型電子銃 |
JPH0545887U (ja) * | 1991-11-20 | 1993-06-18 | 株式会社日立製作所 | 荷電粒子銃 |
JPH0982255A (ja) * | 1995-09-11 | 1997-03-28 | Denki Kagaku Kogyo Kk | 電界放射型荷電粒子銃 |
WO2008123338A1 (ja) * | 2007-03-27 | 2008-10-16 | Denki Kagaku Kogyo Kabushiki Kaisha | 荷電粒子装置用部品とその製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5834781A (en) | 1996-02-14 | 1998-11-10 | Hitachi, Ltd. | Electron source and electron beam-emitting apparatus equipped with same |
US6238582B1 (en) * | 1999-03-30 | 2001-05-29 | Veeco Instruments, Inc. | Reactive ion beam etching method and a thin film head fabricated using the method |
JP4210131B2 (ja) * | 2003-02-03 | 2009-01-14 | 電気化学工業株式会社 | 電子源及び電子源の使用方法 |
WO2007055154A1 (ja) * | 2005-11-08 | 2007-05-18 | Advantest Corporation | 電子銃、電子ビーム露光装置及び露光方法 |
JP4782736B2 (ja) * | 2007-07-12 | 2011-09-28 | 電気化学工業株式会社 | 電子源 |
JP5074879B2 (ja) * | 2007-10-16 | 2012-11-14 | 双葉電子工業株式会社 | 電子放出素子及び表示素子 |
JP2009100540A (ja) | 2007-10-16 | 2009-05-07 | Nippon Densan Corp | チャッキング装置を備えたモータ、およびこのモータを搭載したディスク駆動装置 |
GB2460855B (en) * | 2008-06-11 | 2013-02-27 | Kratos Analytical Ltd | Electron spectroscopy |
FR2957455B1 (fr) * | 2010-03-09 | 2012-04-20 | Essilor Int | Enveloppe de protection pour canon a ions, dispositif de depot de materiaux par evaporation sous vide comprenant une telle enveloppe de protection et procede de depot de materiaux |
-
2012
- 2012-02-21 US US14/005,469 patent/US9496673B2/en active Active
- 2012-02-21 DE DE112012001287.9T patent/DE112012001287B4/de active Active
- 2012-02-21 CN CN201280013818.6A patent/CN103430275B/zh active Active
- 2012-02-21 WO PCT/JP2012/054119 patent/WO2012127963A1/ja active Application Filing
- 2012-02-21 JP JP2013505853A patent/JP5925764B2/ja active Active
- 2012-02-29 TW TW101106576A patent/TWI558631B/zh active
-
2013
- 2013-09-03 IL IL228286A patent/IL228286A/en active IP Right Grant
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4020318A (en) * | 1975-01-24 | 1977-04-26 | The Welding Institute | Electron beam generators |
JPS6149965U (ja) * | 1984-09-05 | 1986-04-03 | ||
JPS63168956U (ja) * | 1987-04-24 | 1988-11-02 | ||
JPH0294238A (ja) * | 1988-09-29 | 1990-04-05 | Denki Kagaku Kogyo Kk | 荷電粒子放射源構造体の保管方法 |
JPH04190547A (ja) * | 1990-11-22 | 1992-07-08 | Jeol Ltd | 電界放出型電子銃 |
JPH0545887U (ja) * | 1991-11-20 | 1993-06-18 | 株式会社日立製作所 | 荷電粒子銃 |
JPH0982255A (ja) * | 1995-09-11 | 1997-03-28 | Denki Kagaku Kogyo Kk | 電界放射型荷電粒子銃 |
WO2008123338A1 (ja) * | 2007-03-27 | 2008-10-16 | Denki Kagaku Kogyo Kabushiki Kaisha | 荷電粒子装置用部品とその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW201238868A (en) | 2012-10-01 |
CN103430275B (zh) | 2018-01-16 |
WO2012127963A1 (ja) | 2012-09-27 |
CN103430275A (zh) | 2013-12-04 |
US9496673B2 (en) | 2016-11-15 |
TWI558631B (zh) | 2016-11-21 |
DE112012001287B4 (de) | 2016-01-21 |
DE112012001287T5 (de) | 2014-06-26 |
US20140000104A1 (en) | 2014-01-02 |
IL228286A (en) | 2016-10-31 |
JPWO2012127963A1 (ja) | 2014-07-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW421824B (en) | Etching method, cleaning method, plasma processing apparatus, and matching circuit | |
JP2018046179A (ja) | 静電チャック及び半導体製造装置 | |
US9117630B2 (en) | Insulation structure of high voltage electrodes for ion implantation apparatus | |
JP6529170B2 (ja) | ワークの外観検査装置およびワークの外観検査方法 | |
JP5925764B2 (ja) | 電子銃又はイオン銃の取扱方法および収容体 | |
CN101536180A (zh) | 电子部件的封装体 | |
KR20160032889A (ko) | 이차 전지 | |
JP4589096B2 (ja) | イオンソース及びこれを有するイオン注入装置 | |
JP2019220503A (ja) | 静電チャック及びその製造方法 | |
JP4725969B2 (ja) | 同軸型真空アーク蒸着源及びこれを用いた蒸着装置 | |
KR20210027992A (ko) | 접착제 도포 장치 및 접착제 도포 방법 | |
KR101678810B1 (ko) | 용접봉 정렬용 홀을 포함하고 있는 지그를 구비한 용접 장치 | |
JP4805868B2 (ja) | 放電管の電極形成用冶具と、該電極形成用冶具を用いた放電管の電極形成方法 | |
JP4847912B2 (ja) | 放電管の電極形成方法 | |
JP7330081B2 (ja) | キャリアスペーサおよび半導体装置の製造方法 | |
JP6230491B2 (ja) | 電気集塵機用貫通碍子、及び電気集塵機 | |
US11817592B2 (en) | Battery holder and electronic device | |
JP2000348659A (ja) | 放射ビーム装置 | |
WO2020240655A1 (ja) | 試料保持器および荷電粒子線装置 | |
JP2007119025A (ja) | 電子部品搬送用トレー | |
JP6551264B2 (ja) | 質量分析装置 | |
JPH06119990A (ja) | 回転陽極x線管装置 | |
JP2005082178A (ja) | 電子部品の搬送用トレー | |
KR20230037210A (ko) | 이차 전지용 테이프 공급 장치 | |
JP2001126649A (ja) | 蛍光表示管およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20141024 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150901 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20151022 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20151027 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160405 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160420 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5925764 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |