JP5898540B2 - ワーク保持治具及び表面処理装置 - Google Patents

ワーク保持治具及び表面処理装置 Download PDF

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Publication number
JP5898540B2
JP5898540B2 JP2012065564A JP2012065564A JP5898540B2 JP 5898540 B2 JP5898540 B2 JP 5898540B2 JP 2012065564 A JP2012065564 A JP 2012065564A JP 2012065564 A JP2012065564 A JP 2012065564A JP 5898540 B2 JP5898540 B2 JP 5898540B2
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Japan
Prior art keywords
energization
workpiece
members
vertical
holding jig
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JP2012065564A
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English (en)
Japanese (ja)
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JP2013194309A (ja
JP2013194309A5 (enExample
Inventor
朝裕 野田
朝裕 野田
重幸 渡邉
重幸 渡邉
勝己 石井
勝己 石井
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Almex PE Inc
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Almex PE Inc
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Application filed by Almex PE Inc filed Critical Almex PE Inc
Priority to JP2012065564A priority Critical patent/JP5898540B2/ja
Priority to DE102012012990.4A priority patent/DE102012012990B4/de
Priority to KR1020120069715A priority patent/KR101500966B1/ko
Priority to CN201510065719.8A priority patent/CN104651910B/zh
Priority to US13/537,862 priority patent/US9346632B2/en
Priority to CN201711236172.9A priority patent/CN107893255B/zh
Priority to CN201510065136.5A priority patent/CN104532331B/zh
Priority to TW101123506A priority patent/TWI477658B/zh
Priority to CN201510065740.8A priority patent/CN104674328B/zh
Priority to CN201210220405.7A priority patent/CN102851722B/zh
Publication of JP2013194309A publication Critical patent/JP2013194309A/ja
Publication of JP2013194309A5 publication Critical patent/JP2013194309A5/ja
Application granted granted Critical
Publication of JP5898540B2 publication Critical patent/JP5898540B2/ja
Priority to US15/140,869 priority patent/US20160237588A1/en
Priority to US15/920,179 priority patent/US10487414B2/en
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JP2012065564A 2011-06-30 2012-03-22 ワーク保持治具及び表面処理装置 Active JP5898540B2 (ja)

Priority Applications (12)

Application Number Priority Date Filing Date Title
JP2012065564A JP5898540B2 (ja) 2012-03-22 2012-03-22 ワーク保持治具及び表面処理装置
KR1020120069715A KR101500966B1 (ko) 2011-06-30 2012-06-28 표면 처리 장치 및 워크 유지 지그
DE102012012990.4A DE102012012990B4 (de) 2011-06-30 2012-06-28 Oberflächenbehandlungssystem und Werkstückhaltestütze
TW101123506A TWI477658B (zh) 2011-06-30 2012-06-29 Surface treatment devices and workpiece to maintain a rule
CN201711236172.9A CN107893255B (zh) 2011-06-30 2012-06-29 表面处理装置及工件保持夹具
CN201510065136.5A CN104532331B (zh) 2011-06-30 2012-06-29 表面处理装置及工件保持夹具
CN201510065719.8A CN104651910B (zh) 2011-06-30 2012-06-29 表面处理装置及工件保持夹具
CN201510065740.8A CN104674328B (zh) 2011-06-30 2012-06-29 表面处理装置及工件保持夹具
CN201210220405.7A CN102851722B (zh) 2011-06-30 2012-06-29 表面处理装置及工件保持夹具
US13/537,862 US9346632B2 (en) 2011-06-30 2012-06-29 Surface treatment system and workpiece-holding jig
US15/140,869 US20160237588A1 (en) 2011-06-30 2016-04-28 Surface treatment system and workpiece-holding jig
US15/920,179 US10487414B2 (en) 2011-06-30 2018-03-13 Surface treatment system and workpiece-holding jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012065564A JP5898540B2 (ja) 2012-03-22 2012-03-22 ワーク保持治具及び表面処理装置

Publications (3)

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JP2013194309A JP2013194309A (ja) 2013-09-30
JP2013194309A5 JP2013194309A5 (enExample) 2015-03-12
JP5898540B2 true JP5898540B2 (ja) 2016-04-06

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JP2012065564A Active JP5898540B2 (ja) 2011-06-30 2012-03-22 ワーク保持治具及び表面処理装置

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JP (1) JP5898540B2 (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200034964A (ko) 2017-07-25 2020-04-01 우에무라 고교 가부시키가이샤 워크 유지 지그(jig) 및 전기 도금 장치
KR20200079490A (ko) * 2017-10-27 2020-07-03 우에무라 고교 가부시키가이샤 워크 유지 지그(Jig) 및 로딩 / 언로딩 장치
KR20210114957A (ko) 2019-01-23 2021-09-24 우에무라 고교 가부시키가이샤 워크 유지 지그 및 전기 도금 장치
KR20210114956A (ko) 2019-01-23 2021-09-24 우에무라 고교 가부시키가이샤 워크 유지 지그 및 전기 도금 장치
KR20210118084A (ko) 2019-01-23 2021-09-29 우에무라 고교 가부시키가이샤 워크 유지 지그 및 전기 도금 장치
KR20210123334A (ko) 2019-01-31 2021-10-13 가부시키가이샤 아루멕쿠스 테크놀로지스 워크 유지 지그 및 표면처리 장치
KR20210123335A (ko) 2019-01-31 2021-10-13 가부시키가이샤 아루멕쿠스 테크놀로지스 워크 유지 지그 및 표면처리 장치
KR20210123332A (ko) 2019-01-31 2021-10-13 가부시키가이샤 아루멕쿠스 테크놀로지스 워크 유지 지그 및 표면처리 장치
KR20210123336A (ko) 2019-01-31 2021-10-13 가부시키가이샤 아루멕쿠스 테크놀로지스 워크 유지 지그 및 표면처리 장치

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6517574B2 (ja) * 2015-02-23 2019-05-22 京セラ株式会社 電解めっき装置
JP6317299B2 (ja) 2015-08-28 2018-04-25 株式会社荏原製作所 めっき装置、めっき方法、及び基板ホルダ
TWI698554B (zh) * 2015-10-20 2020-07-11 香港商亞洲電鍍器材有限公司 電鍍機器及電鍍方法
KR102579796B1 (ko) * 2015-10-20 2023-09-15 프로세스 오토메이션 인터내셔날 리미티드 전기도금 머신 및 전기도금 방법
JP7182911B2 (ja) * 2018-06-21 2022-12-05 株式会社荏原製作所 めっき装置、及びめっき方法
JP7529277B2 (ja) * 2021-08-04 2024-08-06 株式会社アルメックステクノロジーズ ワーク保持治具及び表面処理装置
KR102391717B1 (ko) * 2022-01-12 2022-04-29 (주)네오피엠씨 고전류의 통전이 가능한 기판 도금용 지그

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05239698A (ja) * 1992-02-28 1993-09-17 Nec Corp 電気めっき方法
JPH10145030A (ja) * 1996-11-07 1998-05-29 Maruya Seisakusho:Kk プリント配線基板の基板保持用治具とその取付装置
JPH10265998A (ja) * 1997-03-26 1998-10-06 Matsushita Electric Works Ltd ハンガー
JP4044191B2 (ja) * 1997-12-26 2008-02-06 株式会社荏原製作所 ウエハのメッキ装置
JP4611341B2 (ja) * 1998-11-09 2011-01-12 株式会社荏原製作所 めっき方法及び装置
JP2001234397A (ja) * 2000-02-24 2001-08-31 Matsushita Electric Works Ltd 電気メッキ用冶具
JP2003096596A (ja) * 2001-09-25 2003-04-03 Ebara Corp めっき方法及びめっき装置
JP5340642B2 (ja) * 2008-05-30 2013-11-13 上村工業株式会社 めっき処理用ワーク保持治具
JP5419386B2 (ja) * 2008-06-03 2014-02-19 上村工業株式会社 めっき処理用ワーク保持治具及びワーク搬送装置
JP5833355B2 (ja) * 2011-06-30 2015-12-16 アルメックスＰｅ株式会社 表面処理装置

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200034964A (ko) 2017-07-25 2020-04-01 우에무라 고교 가부시키가이샤 워크 유지 지그(jig) 및 전기 도금 장치
KR20200079490A (ko) * 2017-10-27 2020-07-03 우에무라 고교 가부시키가이샤 워크 유지 지그(Jig) 및 로딩 / 언로딩 장치
EP3702494A4 (en) * 2017-10-27 2021-07-21 C. Uyemura & Co., Ltd. PART HOLDING TEMPLATE AND LOADING / UNLOADING DEVICE
US11427923B2 (en) 2017-10-27 2022-08-30 C. Uyemura & Co., Ltd. Workpiece holding jig and loading and unloading apparatus
KR102540023B1 (ko) 2017-10-27 2023-06-02 우에무라 고교 가부시키가이샤 워크 유지 지그(Jig) 및 로딩 / 언로딩 장치
KR20210114957A (ko) 2019-01-23 2021-09-24 우에무라 고교 가부시키가이샤 워크 유지 지그 및 전기 도금 장치
KR20210114956A (ko) 2019-01-23 2021-09-24 우에무라 고교 가부시키가이샤 워크 유지 지그 및 전기 도금 장치
KR20210118084A (ko) 2019-01-23 2021-09-29 우에무라 고교 가부시키가이샤 워크 유지 지그 및 전기 도금 장치
KR20210123334A (ko) 2019-01-31 2021-10-13 가부시키가이샤 아루멕쿠스 테크놀로지스 워크 유지 지그 및 표면처리 장치
KR20210123335A (ko) 2019-01-31 2021-10-13 가부시키가이샤 아루멕쿠스 테크놀로지스 워크 유지 지그 및 표면처리 장치
KR20210123332A (ko) 2019-01-31 2021-10-13 가부시키가이샤 아루멕쿠스 테크놀로지스 워크 유지 지그 및 표면처리 장치
KR20210123336A (ko) 2019-01-31 2021-10-13 가부시키가이샤 아루멕쿠스 테크놀로지스 워크 유지 지그 및 표면처리 장치

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